• 795 Citations
  • 16 h-Index
20062020
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Research Output 2006 2020

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Article
2019
Open Access
Graphite
Optical sensors
optical measuring instruments
Graphene
Etching
1 Downloads (Pure)

Etching processes of transferred and non-transferred multi-layer graphene in the presence of extreme UV, H2O and H2

Mund, B. K., Sturm, J. M., van den Beld, W. T. E., Lee, C. J. & Bijkerk, F., 29 Oct 2019, In : Applied surface science. 504, 144485.

Research output: Contribution to journalArticleAcademicpeer-review

Graphite
Graphene
Etching
graphene
etching
26 Downloads (Pure)

Extreme UV secondary electron yield measurements of Ru, Sn, and Hf oxide thin films

Sturm, J. M., Liu, F., Darlatt, E., Kolbe, M., Aarnink, A. A. I., Lee, C. J. & Bijkerk, F., 1 Jul 2019, In : Journal of Micro/ Nanolithography, MEMS, and MOEMS. 18, 3, 033501.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Oxide films
Thin films
oxides
Electrons
thin films

Hydrogenation dynamics of Ru capped y thin films

Soroka, O., Sturm, J. M., Van De Kruijs, R. W. E., Makhotkin, I. A., Nikolaev, K., Yakunin, S. N., Lee, C. J. & Bijkerk, F., 8 Oct 2019, In : Journal of applied physics. 126, 14, 145301.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
hydrogenation
thin films
ellipsometry
hydrogen
surface plasmon resonance
2018
2 Citations (Scopus)
10 Downloads (Pure)

Aromatic structure degradation of single layer graphene on an amorphous silicon substrate in the presence of water, hydrogen and Extreme Ultraviolet light

Mund, B. K., Sturm, J. M., Lee, C. J. & Bijkerk, F., 1 Jan 2018, In : Applied surface science. 427, Part B, p. 1033-1040 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Graphite
Amorphous silicon
Graphene
Hydrogen
Degradation
2 Citations (Scopus)
11 Downloads (Pure)

Control of YH3 formation and stability via hydrogen surface adsorption and desorption

Soroka, O., Sturm, J. M., van de Kruijs, R. W. E., Lee, C. J. & Bijkerk, F., 15 Oct 2018, In : Applied surface science. 455, p. 70-74 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Hydrogen
Desorption
Adsorption
Yttrium
Thin films
1 Citation (Scopus)
12 Downloads (Pure)

Formation of H2O on a CO2 dosed Ru(0 0 0 1) surface under Extreme Ultraviolet Light and H2

Mund, B. K., Sturm, J. M., Lee, C. J. & Bijkerk, F., 31 Oct 2018, In : Applied surface science. 456, p. 538-544 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Amorphous carbon
Temperature programmed desorption
Absorption spectroscopy
Reaction products
Carbon Dioxide
2 Citations (Scopus)
11 Downloads (Pure)

Influence of internal stress and layer thickness on the formation of hydrogen induced thin film blisters in Mo/Si multilayers

van den Bos, R. A. J. M., Reinink, J., Lopaev, D. V., Lee, C. J., Benschop, J. P. H. & Bijkerk, F., 22 Feb 2018, In : Journal of physics D: applied physics. 51, 11, 11 p., 115302.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
blisters
residual stress
Hydrogen
Residual stresses
Multilayers
92 Downloads (Pure)

Plasma-assisted oxide removal from ruthenium-coated EUV optics

Dolgov, A., Lee, C. J., Bijkerk, F., Abrikosov, A., Krivtsun, V. M., Lopaev, D., Yakushev, O. & van Kampen, M., 18 Apr 2018, In : Journal of applied physics. 123, 15, 9 p., 153301.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
ruthenium
hydrogen plasma
optics
cold plasmas
oxides
2017
7 Citations (Scopus)
47 Downloads (Pure)

Adsorption and Dissociation of CO2 on Ru (0001)

Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., 30 Mar 2017, In : Journal of physical chemistry. p. 6729-6735 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Carbon Monoxide
Temperature programmed desorption
Infrared spectroscopy
desorption
infrared spectroscopy
9 Citations (Scopus)
2 Downloads (Pure)

Blister formation in Mo/Si multilayered structures induced by hydrogen ions

Van Den Bos, R. A. J. M., Lee, C. J., Benschop, J. P. H. & Bijkerk, F., 9 Jun 2017, In : Journal of physics D: applied physics. 50, 26, 265302.

Research output: Contribution to journalArticleAcademicpeer-review

blisters
hydrogen ions
Protons
Ions
Fluxes
4 Citations (Scopus)
32 Downloads (Pure)

Characterization of self-assembled monolayers on a ruthenium surface

Shaheen, A., Sturm, J. M., Ricciardi, R., Huskens, J., Lee, C. J. & Bijkerk, F., 6 Jun 2017, In : Langmuir. 33, 25, p. 6419-6429 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Ruthenium
Self assembled monolayers
ruthenium
Monolayers
sulfur
2 Citations (Scopus)
1 Downloads (Pure)

Coexistence of ice clusters and liquid-like water clusters on the Ru(0001) surface

Liu, F., Sturm, J. M., Lee, C. J. & Bijkerk, F., 2017, In : Physical chemistry chemical physics. 19, 12, p. 8288-8299 12 p.

Research output: Contribution to journalArticleAcademicpeer-review

Ice
ice
Water
Liquids
liquids
2 Citations (Scopus)
101 Downloads (Pure)

Metal diffusion properties of ultra-thin high-k Sc2O3 films

Pachecka, M., Lee, C. J., Sturm, J. M. & Bijkerk, F., 1 Oct 2017, In : AIP advances. 7, 10, 21 p., 105324.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
metals
tin
etching
ruthenium
adhesion
1 Citation (Scopus)
130 Downloads (Pure)

Tin etching from metallic and oxidized scandium thin films

Pachecka, M., Lee, C. J., Sturm, J. M. & Bijkerk, F., Aug 2017, In : AIP advances. 7, 8, 8 p., 085107.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
scandium
tin
etching
oxides
thin films
43 Citations (Scopus)
105 Downloads (Pure)

Two-octave spanning supercontinuum generation in stoichiometric silicon nitride waveguides pumped at telecom wavelengths

Garcia Porcel, M. A., Schepers, F., Epping, J. P., Hellwig, T., Hoekman, M., Heideman, R., van der Slot, P. J. M., Lee, C. J., Schmidt, R., Bratschitsch, R., Fallnich, C. & Boller, K. J., 19 Jan 2017, In : Optics express. 25, 2, p. 1542-1554

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
octaves
silicon nitrides
waveguides
telecommunication
output
2016
9 Citations (Scopus)
55 Downloads (Pure)

A model for pressurized hydrogen induced thin film blisters

van den Bos, R. A. J. M., Reshetniak, V., Lee, C. J., Benschop, J. P. H. & Bijkerk, F., 2016, In : Journal of applied physics. 120, 23, p. 235304- 8 p., 235304.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
blisters
hydrogen
thin films
caps
internal pressure
7 Citations (Scopus)
42 Downloads (Pure)

Electronegativity-dependent tin etching from thin films

Pachecka, M., Sturm, J. M., van de Kruijs, R. W. E., Lee, C. J. & Bijkerk, F., 29 Jul 2016, In : AIP advances. 6, 7, 9 p., 075222.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
tin
etching
thin films
hydrogen
availability
16 Citations (Scopus)

Exploring the electron density in plasma induced by EUV radiation: I. Experimental study in hydrogen

Horst, R. M., Beckers, J., Osorio, E. A., Astakhov, D., Goedheer, W. J., Lee, C. J., Ivanov, V. V., Krivtsum, V. M., Koshelev, K. N. & Lopaev, D. V., 2016, In : Journal of physics D: applied physics. 49, 14, p. - 8 p., 145203.

Research output: Contribution to journalArticleAcademicpeer-review

Carrier concentration
Hydrogen
Plasmas
Radiation
hydrogen
15 Citations (Scopus)

Exploring the electron density in plasma induced by EUV radiation: II. Numerical studies in argon and hydrogen

Astakhov, D., Goedheer, W. J., Lee, C. J., Ivanov, V. V., Krivtsun, V. M., Koshelev, K. N., Lopaev, D. V., Horst, R. M., Beckers, J., Osorio, E. A. & Bijkerk, F., 2016, In : Journal of physics D: applied physics. 49, 29, p. - 9 p., 295204.

Research output: Contribution to journalArticleAcademicpeer-review

Argon
Carrier concentration
Hydrogen
argon
Plasmas
9 Citations (Scopus)

Extreme UV induced dissociation of amorphous solid water and crystalline water bilayers on Ru(0001)

Liu, F., Sturm, J. M., Lee, C. J. & Bijkerk, F., 2016, In : Surface science. 646, p. 101-107 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

dissociation
water
desorption
cross sections
water loss
2015
8 Citations (Scopus)

Characterization of carbon contamination under ion and hot atom bombardment in a tin-plasma extreme ultraviolet light source

Dolgov, A., Lopaev, D., Lee, C. J., Zoethout, E., Medvedev, V., Yakushev, O. & Bijkerk, F., 23 Jun 2015, In : Applied surface science. 353, p. 708-713 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

Tin
Light sources
Contamination
Plasmas
Atoms
14 Citations (Scopus)

Extreme ultraviolet (EUV) source and ultra-high vacuum chamber for studying EUV-induced processes

Dolgov, A., Yakushev, O., Abrikosov, A., Snegirev, E., Krivtsun, V. M., Lee, C. J. & Bijkerk, F., 29 Apr 2015, In : Plasma sources science and technology. 24, 3, p. - 7 p., 035003.

Research output: Contribution to journalArticleAcademicpeer-review

vacuum chambers
ultrahigh vacuum
plasma radiation
plasma diagnostics
radiation sources
44 Citations (Scopus)
20 Downloads (Pure)

High confinement, high yield Si3N4 waveguides for nonlinear optical applications

Epping, J. P., Hoekman, M., Mateman, R., Leinse, A., Heideman, R. G., van Rees, A., van der Slot, P. J. M., Lee, C. J. & Boller, K-J., 26 Jan 2015, In : Optics express. 23, 2, p. 642-648

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
waveguides
fabrication
silicon nitrides
cracks
etching
64 Citations (Scopus)
59 Downloads (Pure)

On-chip visible-to-infrared supercontinuum generation with more than 495 THz spectral bandwidth

Epping, J. P., Hellwig, T., Hoekman, M., Mateman, R., Leinse, A., Heideman, R. G., van Rees, A., van der Slot, P. J. M., Lee, C. J., Fallnich, C. & Boller, K-J., 2015, In : Optics express. 23, 15, p. 19596-19604 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
chips
bandwidth
optical waveguides
broadband
77 Downloads (Pure)

Photoluminescence-based detection of particle contamination on extreme ultraviolet reticles

Gao, A., Rizo, P. J., Scaccabarozzi, L., Lee, C. J., Banine, V. & Bijkerk, F., 2015, In : Review of scientific instruments. 86, 6, 8 p., 063109.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
reticles
Photoluminescence
contamination
Contamination
photoluminescence
5 Citations (Scopus)

Plasma probe characteristics in low density hydrogen pulsed plasmas

Astakhov, D., Goedheer, W. J., Lee, C. J., Ivanov, V. V., Krivtsun, V. M., Zotovich, A. I., Zyryanov, S. M., Lopaev, D. & Bijkerk, F., 15 Sep 2015, In : Plasma sources science and technology. 24, 5, p. 1-10 10 p., 055018.

Research output: Contribution to journalArticleAcademicpeer-review

plasma probes
probes
hydrogen
plasma density
chambers
2014
14 Citations (Scopus)
52 Downloads (Pure)

Comparison of H2 and He carbon cleaning mechanisms in extreme ultraviolet induced and surface wave discharge plasmas

Dolgov, A., Lopaev, D., Rachimova, T., Kovalev, A., Vasilyeva, A., Lee, C. J., Krivtsun, V. M., Yakushev, O. & Bijkerk, F., 2014, In : Journal of physics D: applied physics. 47, 6, p. - 9 p., 065205.

Research output: Contribution to journalArticleAcademicpeer-review

File
Surface waves
plasma jets
cleaning
surface waves
Cleaning
8 Citations (Scopus)

Defect formation in single layer graphene under extreme ultraviolet irradiation

Gao, A., Zoethout, E., Sturm, J. M., Lee, C. J. & Bijkerk, F., 2014, In : Applied surface science. 317, p. 745-751 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Graphene
Irradiation
Defects
Photons
Photoelectrons
2 Citations (Scopus)

Graphene defect formation by extreme ultraviolet generated photoelectrons

Gao, A., Lee, C. J. & Bijkerk, F., 6 Aug 2014, In : Journal of applied physics. 116, 5, p. - 054312.

Research output: Contribution to journalArticleAcademicpeer-review

graphene
photoelectrons
defects
irradiation
Raman spectra
3 Citations (Scopus)

Q-factor measurements through injection locking of a semiconductor-glass hybrid laser with unknown intracavity losses

Fan, Y., Oldenbeuving, R., Khan, M. R. H., Roeloffzen, C. G. H., Klein, E. J., Lee, C. J., Offerhaus, H. L. & Boller, K. J., 1 Apr 2014, In : Optics letters. 39, 7, p. 1748-1751 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

injection locking
Q factors
cavities
glass
lasers
2013
48 Citations (Scopus)

25 kHz narrow spectral bandwidth of a wavelength tunable diode laser with a short waveguide-based external cavity

Oldenbeuving, R., Klein, E. J., Offerhaus, H. L., Lee, C. J., Song, H. & Boller, K. J., 10 Dec 2013, In : Laser physics letters. 10, 1, p. 015804-1-015804-8 8 p., 015804.

Research output: Contribution to journalArticleAcademicpeer-review

Semiconductor lasers
Waveguides
semiconductor lasers
waveguides
bandwidth
4 Citations (Scopus)

A gain-coefficient switched Alexandrite laser

Lee, C. J., van der Slot, P. J. M. & Boller, K. J., 11 Sep 2013, In : Journal of physics D: applied physics. 46, 1, p. - 4 p., 015103.

Research output: Contribution to journalArticleAcademicpeer-review

alexandrite
Laser pulses
Lasers
coefficients
Electrooptical effects
10 Citations (Scopus)

Extreme Ultraviolet (EUV) induced defects on few-layer graphene

Gao, A., Rizo, P. J., Zoethout, E., Scaccabarozzi, L., Lee, C. J., Banine, V. & Bijkerk, F., 2013, In : Journal of applied physics. 114, 4, p. - 5 p., 044313.

Research output: Contribution to journalArticleAcademicpeer-review

graphene
extreme ultraviolet radiation
dosage
carbon
defects
3 Citations (Scopus)
8 Downloads (Pure)

High precision wavelength estimation method for integrated optics

Oldenbeuving, R. M., Song, H., Schitter, G., Verhaegen, M., Klein, E. J., Lee, C. J., Offerhaus, H. L. & Boller, K. J., 15 Jul 2013, In : Optics express. 21, 14, p. 17042-17052

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
integrated optics
wavelengths
photodiodes
resonators
tuning
10 Citations (Scopus)
7 Downloads (Pure)

Integrated CARS source based on seeded four-wave mixing in silicon nitride

Epping, J. P., Kues, M., van der Slot, P. J. M., Lee, C. J., Fallnich, C. & Boller, K-J., 2013, In : Optics express. 21, 26, p. 32123-32129

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
silicon nitrides
four-wave mixing
Raman spectra
wavelengths
pumps
16 Citations (Scopus)

Reactions of ethanol on Ru(0001)

Sturm, J. M., Lee, C. J. & Bijkerk, F., 1 Jun 2013, In : Surface science. 612, p. 42-47 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

Ethanol
ethyl alcohol
Carbon Monoxide
Hydrogen
Dehydrogenation
19 Citations (Scopus)
54 Downloads (Pure)

Stimulated-emission pumping enabling sub-diffraction-limited spatial resolution in coherent anti-Stokes Raman scattering microscopy

Cleff, C., Groß, P., Fallnich, C., Offerhaus, H. L., Herek, J. L., Kruse, K., Beeker, W. P., Lee, C. J. & Boller, K-J., 2013, In : Physical review A: Atomic, molecular, and optical physics. 87, 3, 9 p., 033830.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
stimulated emission
pumping
spatial resolution
Raman spectra
microscopy
48 Downloads (Pure)

UHV-opstelling voor het bestuderen van de contaminatie van EUV-spiegels

Sturm, J. M., Liu, F., Grecea, M. L., Gleeson, M. A., Lee, C. J. & Bijkerk, F., 2013, In : NEVAC blad. 51, 1, p. 12-15 4 p.

Research output: Contribution to journalArticleAcademic

File
2012
4 Citations (Scopus)

Active multilayer mirrors for reflectance tuning at extreme ultraviolet (EUV) wavelengths

Bayraktar, M., Wessels, W. A., Lee, C. J., van Goor, F. A., Koster, G., Rijnders, A. J. H. M. & Bijkerk, F., 19 Nov 2012, In : Journal of physics D: applied physics. 45, 49, p. 494001-1-494001-5 5 p., 494001.

Research output: Contribution to journalArticleAcademicpeer-review

Multilayers
Tuning
tuning
mirrors
reflectance
3 Citations (Scopus)
17 Downloads (Pure)

Ellipsometry with randomly varying polarization states

Liu, F., Lee, C. J., Chen, J., Louis, E., van der Slot, P. J. M., Boller, K. J. & Bijkerk, F., 16 Jan 2012, In : Optics express. 20, 2, p. 870-878 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
ellipsometry
polarization
light beams
orbits
fibers
24 Citations (Scopus)
41 Downloads (Pure)

Ground-state depletion for subdiffraction-limited spatial resolution in coherent anti-Stokes Raman scattering microscopy

Cleff, C., Groß, P., Fallnich, C., Offerhaus, H. L., Herek, J. L., Kruse, K., Beeker, W. P., Lee, C. J. & Boller, K-J., 16 Aug 2012, In : Physical review A: Atomic, molecular, and optical physics. 86, 2, 11 p., 023825.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
depletion
spatial resolution
Raman spectra
microscopy
ground state
1 Citation (Scopus)

The noise-limited-resolution for stimulated emission depletion microscopy of diffusing particles

Lee, C. J. & Boller, K. J., 2 Aug 2012, In : Virtual journal for biomedical optics. 7, 8, p. 1-6 6 p., 12793.

Research output: Contribution to journalArticleAcademic

stimulated emission
depletion
microscopy
far fields
saturation
10 Downloads (Pure)

The noise-limited-resolution for stimulated emission depletion microscopy of diffusing particles

Lee, C. J. & Boller, K. J., 2012, In : Optics express. 20, 12, p. 12793-12798 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
stimulated emission
depletion
microscopy
far fields
saturation
2011
21 Citations (Scopus)

A theoretical investigation of super-resolution CARS imaging via coherent and incoherent saturation of transitions

Beeker, W. P., Lee, C. J., Boller, K. J., Groß, P., Cleff, C., Fallnich, C., Offerhaus, H. L. & Herek, J. L., 2011, In : Journal of raman spectroscopy. 42, 10, p. 1854-1858 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Raman scattering
Imaging techniques
Ground state
Diffraction
Image resolution
8 Citations (Scopus)

Carbon induced extreme ultraviolet (EUV) reflectance loss characterized using visible-light ellipsometry

Chen, J., Louis, E., Wormeester, H., Harmsen, R., van de Kruijs, R. W. E., Lee, C. J., van Schaik, W. & Bijkerk, F., 2011, In : Measurement science and technology. 22, 10, p. - 8 p., 105705.

Research output: Contribution to journalArticleAcademicpeer-review

Ellipsometry
Carbon
Optical constants
Multilayers
Extreme ultraviolet lithography
7 Citations (Scopus)
5 Downloads (Pure)

Incoherently pumped continuous wave optical parametric oscillator broadened by non-collinear phasematching

Storteboom, J., Lee, C. J., Nieuwenhuis, A. F., Lindsay, I. D. & Boller, K-J., 2011, In : Optics express. 19, 22, p. 21786-21792 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
parametric amplifiers
continuous radiation
bandwidth
spontaneous emission
pumps
12 Downloads (Pure)

SEGA mode locking

Oldenbeuving, R., Lee, C. J., Offerhaus, H. L. & Boller, K. J., 2011, In : Focus : periodiek der S.V. Arago. 41, 4, p. 19-21 3 p.

Research output: Contribution to journalArticleAcademic

File
2010
12 Citations (Scopus)

Frequency control of a 1163 nm singly resonant OPO based on MgO:PPLN

Gross, P., Lindsay, I. D., Lee, C. J., Nittmann, M., Bauer, T., Bartschke, J., Warring, U., Fischer, A., Kellenbauer, A. & Boller, K. J., 2010, In : Optics letters. 35, 6, p. 820-822 3 p.

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)
60 Downloads (Pure)

Modeling of mode-locking in a laser with spatially separate gain media

Oldenbeuving, R., Lee, C. J., van Voorst, P. D., Offerhaus, H. L. & Boller, K. J., 2010, In : arXiv.org. 1008.4, 12 p.

Research output: Contribution to journalArticleAcademic

File
locking
laser mode locking
nonlinear feedback
lasers
bandwidth