• 799 Citations
  • 16 h-Index
20062020
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Research Output 2006 2020

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Other contribution
2011

Fiber-based ellipsometry for in situ monitoring

Liu, F., Lee, C. J., Chen, J., Louis, E. & Bijkerk, F., 2011, Baltimore, US

Research output: Other contributionOther research output

preserving
line of sight
ellipsometry
fibers
polarization

Negating HIO-induced metal and carbide EUV surface contamination

Sturm, J. M., Gleeson, M., van de Kruijs, R. W. E., Lee, C. J., Kleyn, A. W. & Bijkerk, F., 2011

Research output: Other contributionOther research output

photolithography
ultraviolet radiation
carbides
contamination
projection
tuning
mirrors
reflectance
wavelengths
incidence