1992 …2020

Research output per year

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Research Output

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Paper

Correlation between hot carrier stress, oxide breakdown and gate leakage current for monitoring plasma processing induced damage on gate oxide

Ackaert, J., Wang, Z., de Backer, E. & Salm, C., 10 Dec 2002, p. 45-48. 4 p.

Research output: Contribution to conferencePaper

File
8 Citations (Scopus)
41 Downloads (Pure)

Fast temperature cycling stress-induced and electromigration-induced interlayer dielectric cracking failure in multilevel interconnection

Nguyen, V. H., Nguyen, H., Salm, C., Vroemen, J., Voets, J., Krabbenborg, B. H., Bisschop, J., Mouthaan, A. J. & Kuper, F. G., 27 Nov 2002, p. 69-74. 6 p.

Research output: Contribution to conferencePaper

Fast thermal cycling stress and degredation in multilayer interconnects

Nguyen, V. H., Salm, C., Vroemen, J., Voets, J., Krabbenborg, B., Bisschop, J., Mouthaan, A. J. & Kuper, F. G., 2001, p. 136-140. 5 p.

Research output: Contribution to conferencePaper

Full chip model of CMOS Integrated Circuits under Charged Device Model stress

Sowariraj, M. S. B., Salm, C., Smedes, T., Mouthaan, A. J. & Kuper, F. G., 2004, p. 801-807.

Research output: Contribution to conferencePaper

File
379 Downloads (Pure)

Impact of layout and technology variation on the CDM performance of ggNMOSTs and SCRs

Sowariraj, M. S. B., Kuper, F. G., Salm, C., Mouthaan, A. J. & Smedes, T., 27 Nov 2002, p. 104-107. 4 p.

Research output: Contribution to conferencePaper

"Plasma charging damage induced by a power ramp down step in the end of plasma enhanced chemical vapour deposition (PECVD) process

Wang, Z., Ackaert, J., Salm, C., Kuper, F. G., Bessemans, K. & de Backer, E., 25 Nov 2003, p. 766-770. 5 p.

Research output: Contribution to conferencePaper

Temperature acceleration of thin gate-oxide degradation

Salm, C., Houtsma, V. E., Kuper, F. G. & Woerlee, P. H., 2001, p. 174-177. 4 p.

Research output: Contribution to conferencePaper

Temperature effect on protection diode for plasma-process induced charging damage

Wang, Z., Scarpa, A., Smits, S. M., Kuper, F. G. & Salm, C., 27 Nov 2002, p. 127-130. 4 p.

Research output: Contribution to conferencePaper