1992 …2020

Research output per year

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Article
2019

Recovery after hot-carrier injection: Slow versus fast traps

de Jong, M. J., Salm, C. & Schmitz, J., 23 Sep 2019, In : Microelectronics reliability. 100-101, 5 p., 113318.

Research output: Contribution to journalArticleAcademicpeer-review

2 Downloads (Pure)
2018

Towards understanding recovery of hot-carrier induced degradation

de Jong, M. J., Salm, C. & Schmitz, J., 30 Sep 2018, In : Microelectronics reliability. 88-90, p. 147-151 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
1 Citation (Scopus)
75 Downloads (Pure)
2017

Observations on the recovery of hot carrier degradation of hydrogen/deuterium passivated nMOSFETs

de Jong, M. J., Salm, C. & Schmitz, J., Sep 2017, In : Microelectronics reliability. 76-77, p. 136-140 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)
2 Downloads (Pure)

Process induced poling and plasma induced damage of thin films PZT

Wang, J., Houwman, E. P., Salm, C., Nguyen, D. M., Vergeer, K. & Schmitz, J., 17 Jan 2017, In : Microelectronic engineering. 177, p. 13-18 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)
2 Downloads (Pure)
2016

On the small-signal capacitance of RF MEMS switches at very low frequencies

Wang, J., Bielen, J., Salm, C., Krijnen, G. & Schmitz, J., 24 Aug 2016, In : Journal of the Electron Devices Society. 4, 6, p. 459-465 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
4 Citations (Scopus)
91 Downloads (Pure)
2013

Deep reactive ion etching of in situ boron doped LPCVD Ge0.7Si0.3 using SF6 and O2 plasma

Kazmi, S. N. R., Salm, C. & Schmitz, J., Oct 2013, In : Microelectronic engineering. 110, p. 311-314 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

The gridpix detector: History and perspective

van der Graaf, H., Aarnink, A. A. I., Aarts, A., van Bakel, N., Berbee, E., Berkien, A., van Beuzekom, M., Bosma, M., Campbell, M., Chefdeville, M. A., Colas, P., Colijn, A. P., Fomaini, A., Fransen, M., Giganon, A., Giomataris, I., Gotink, W., de Groot, N., Hartjes, F., van der Heijden, B. & 18 others, Hessey, N., Jansweijer, P., Konig, A., Koppert, W., Llopart, X., de Nooij, L., van der Putten, S., Rövekamp, J., Salm, C., San Segundo Bello, D., Schmitz, J., Smits, S. M., Timmermans, J., Verkooijen, H., Visschers, J., Visser, J., Wijnen, T. & Wyrsch, N., 24 Apr 2013, In : Modern physics letters. A. 28, 28-13, p. 13400211-13400217 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)
2012

Low-Stress Highly-Conductive In-Situ Boron Doped Ge0.7Si0.3 Films by LPCVD

Kazmi, S. N. R., Kovalgin, A. Y., Aarnink, A. A. I., Salm, C. & Schmitz, J., 29 Aug 2012, In : ECS journal of solid state science and technology. 1, 5, p. P222-P226 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)
2011

Low Stress In Situ Boron Doped Poly SiGe Layers for MEMS Modular Integration with CMOS

Kazmi, S. N. R., Aarnink, A. A. I., Kovalgin, A. Y., Salm, C. & Schmitz, J., 1 May 2011, In : ECS transactions. 35, 30, p. 45-52 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)

Spark protection layers for CMOS pixel anode chips in MPGDs

Bilevych, Y., Bilevych, Y., Blanco Carballo, V. M., Chefdeville, M. A., Colas, P., Delagnes, E., Fransen, M., van der Graaff, H., Koppert, W. J. C., Melai, J., Salm, C., Schmitz, J., Timmermans, J., Timmermans, J. & Wyrsch, N., 11 Feb 2011, In : Nuclear instruments & methods in physics research. Section A : Accelerators, spectrometers, detectors and associated equipment. 629, 1, p. 66-73 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

20 Citations (Scopus)
2010

An integrated micromegas UV-photon detector

Melai, J., Lyashenko, A., Breskin, A., van der Graaf, H., Timmermans, J., Timmermans, J., Visschers, J., Salm, C. & Schmitz, J., 8 Jul 2010, In : Nuclear instruments & methods in physics research. Section A : Accelerators, spectrometers, detectors and associated equipment. 633, p. 194-197 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)

A UV sensitive integrated micromegas with timepix readout

Melai, J., Breskin, A., Cortesi, M., Bilevych, Y., Bilevych, Y., Fransen, M., van der Graaf, H., Visschers, J., Blanco Carballo, V. M., Salm, C. & Schmitz, J., 6 Jul 2010, In : Nuclear instruments & methods in physics research. Section A : Accelerators, spectrometers, detectors and associated equipment. 628, p. 133-137 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

5 Citations (Scopus)

Effect of current crowding on electromigration lifetime investigated by simulation and experiment

Nguyen, V. H. & Salm, C., 11 May 2010, In : Computational materials science. 49, 4-Suppl.1, p. S235-S238 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

5 Citations (Scopus)

Fabrication and characterization of the charge-plasma diode

Rajasekharan, B., Hueting, R. J. E., Salm, C., van Hemert, T., Wolters, R. A. M. & Schmitz, J., 1 Jun 2010, In : IEEE electron device letters. 31, 6, p. 528-530 3 p., 10.1109/LED.2010.2045731.

Research output: Contribution to journalArticleAcademicpeer-review

File
129 Citations (Scopus)
189 Downloads (Pure)

Suspended membranes, cantilevers and beams using SU-8 foils

Melai, J., Blanco Carballo, V. M., Salm, C. & Schmitz, J., 26 Feb 2010, In : Microelectronic engineering. 87, 5-8, p. 1274-1277 4 p., 10.1016/j.mee.2009.10.035.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)
2009

GEMGrid: a wafer post-processed GEM-like radiation detector

Blanco Carballo, V. M., Bilevych, Y., Bilevych, Y., Chefdeville, M. A., Fransen, M., van der Graaf, H., Salm, C., Schmitz, J., Timmermans, J. & Timmermans, J., 18 Jun 2009, In : Nuclear instruments & methods in physics research. Section A : Accelerators, spectrometers, detectors and associated equipment. 608, 1, p. 86-91 6 p., 10.1016/j.nima.2009.06.023.

Research output: Contribution to journalArticleAcademicpeer-review

6 Citations (Scopus)

Moisture resistance of SU-8 and KMPR as structural material

Blanco Carballo, V. M., Melai, J., Salm, C. & Schmitz, J., 2009, In : Microelectronic engineering. 86, 4-6, p. 765-768 4 p., 10.1016/j.mee.2008.12.076.

Research output: Contribution to journalArticleAcademicpeer-review

20 Citations (Scopus)

Qualitative and quantitative characterization of outgassing from SU-8

Melai, J., Salm, C., Wolters, R. A. M. & Schmitz, J., 1 Mar 2009, In : Microelectronic engineering. 86, 4-6, p. 761-764 4 p., 10.1016/j.mee.2008.11.008.

Research output: Contribution to journalArticleAcademicpeer-review

10 Citations (Scopus)

The electrical conduction and dielectric strength of SU-8

Melai, J., Salm, C., Smits, S. M., Visschers, J. & Schmitz, J., 25 May 2009, In : Journal of micromechanics and microengineering. 19, 6, p. 065012-065018 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

30 Citations (Scopus)

Twingrid: a wafer post-processed multistage micro patterned gaseous detector

Bilevych, Y., Bilevych, Y., Blanco Carballo, V. M., Chefdeville, M. A., Fransen, M., van der Graaf, H., Salm, C., Schmitz, J., Timmermans, J. & Timmermans, J., 11 Nov 2009, In : Nuclear instruments & methods in physics research. Section A : Accelerators, spectrometers, detectors and associated equipment. 610, 3, p. 644-648 5 p., 10.1016/j.nima.2009.09.054.

Research output: Contribution to journalArticleAcademicpeer-review

10 Citations (Scopus)
2008

A Radiation Imaging Detector Made by Postprocessing a Standard CMOS Chip

Blanco Carballo, V. M., Chefdeville, M. A., Fransen, M., van der Graaf, H., Melai, J., Salm, C., Schmitz, J., Timmermans, J. & Timmermans, J., 20 May 2008, In : IEEE electron device letters. 29, DTR08-9/6, p. 585-588 4 p., 10.1109/LED.2008.925649.

Research output: Contribution to journalArticleAcademicpeer-review

File
24 Citations (Scopus)
183 Downloads (Pure)

Preparation of metal-SAM-dendrimer-SAM-metal junctions by supramolecular metal transfer printing

Nijhuis, C. A., ter Maat, J., Bisri, S. Z., Weusthof, M. H. H., Salm, C., Schmitz, J., Ravoo, B. J., Huskens, J. & Reinhoudt, D., 8 Jan 2008, In : New journal of chemistry. 32, p. 652-661 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

10 Citations (Scopus)

Pulse height fluctuations of integrated micromegas detectors

Chefdeville, M. A., van der Graaf, H., Hartjes, F., Timmermans, J., Timmermans, J., Visschers, J., Blanco Carballo, V. M., Salm, C., Schmitz, J., Smits, S. M., Colas, P. & Giomataris, I., 21 Mar 2008, In : Nuclear instruments & methods in physics research. Section A : Accelerators, spectrometers, detectors and associated equipment. 591, 4952/1, p. 147-150 4 p., 10.1016/j.nima.2008.03.045.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)

Reliability aspects of a radiation detector fabricated by post-processing a standard CMOS chip

Salm, C., Blanco Carballo, V. M., Melai, J. & Schmitz, J., 10 Aug 2008, In : Microelectronics reliability. 48, WoTUG-31/8-9, p. 1139-1143 4 p., 10.1016/j.microrel.2008.06.038.

Research output: Contribution to journalArticleAcademicpeer-review

8 Citations (Scopus)

The charge plasma P-N diode

Hueting, R. J. E., Rajasekharan, B., Salm, C. & Schmitz, J., 1 Dec 2008, In : IEEE electron device letters. 29, 412/12, p. 1367-1369 3 p., 10.1109/LED.2008.2006864.

Research output: Contribution to journalArticleAcademicpeer-review

File
154 Citations (Scopus)
271 Downloads (Pure)
2007

Charge amplitude distribution of the Gossip gaseous pixel detector

Blanco Carballo, V. M., Chefdeville, M. A., Colas, P., Giomataris, Y., van der Graaf, H., Gromov, V., Hartjes, F., Kluit, R., Koffeman, E., Salm, C., Schmitz, J., Smits, S. M., Timmermans, J., Timmermans, J. & Visschers, J. L., 11 Dec 2007, In : Nuclear instruments & methods in physics research. Section A : Accelerators, spectrometers, detectors and associated equipment. Volume 583, 1/issue 1, p. 42-48 7 p., 10.1016/j.nima.2007.08.199.

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)

Low-frequency noise phenomena in switched MOSFETs

van der Wel, A. P., Klumperink, E. A. M., Kolhatkar, J. S., Hoekstra, E., Snoeij, M. F., Salm, C., Wallinga, H. & Nauta, B., 2007, In : IEEE journal of solid-state circuits. 42, 3, p. 540-550 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
49 Citations (Scopus)
108 Downloads (Pure)

On the geometrical design of integrated micromegas detectors

Blanco Carballo, V. M., Salm, C., Smits, S. M., Schmitz, J., Chefdeville, M. A., van der Graaf, H., Timmermans, J., Timmermans, J. & Visschers, J. L., 17 Jun 2007, In : Nuclear instruments & methods in physics research. Section A : Accelerators, spectrometers, detectors and associated equipment. 576, 2/1, p. 1-4 4 p., 10.1016/j.nima.2007.01.108.

Research output: Contribution to journalArticleAcademicpeer-review

11 Citations (Scopus)
2006

Reduced temperature dependence of hot carrier degradation in deuterated nMOSFETs

Salm, C., Hof, A. J., Kuper, F. G. & Schmitz, J., Nov 2006, In : Microelectronics reliability. 46, 2/9-11, p. 1617-1622 6 p., 10.1016/j.microrel.2006.08.004.

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)
2005

A 3-D circuit model to evaluate CDM performance of Ics

Sowariraj, M. S. B., de Jong, P. C., Salm, C., Mouthaan, A. J. & Kuper, F. G., 1 Nov 2005, In : Microelectronics reliability. 45, 9-11, p. 1425-1429 5 p., 10.1016/j.microrel.2005.07.066.

Research output: Contribution to journalArticleAcademicpeer-review

An electron-multiplying ''Micromegas'' grid made in silicon wafer post-processing technology

Chefdeville, M. A., Colas, P., Giomataris, Y., van der Graaf, H., Heijne, E. H. M., van der Putten, S., Salm, C., Schmitz, J., Smits, S., Timmermans, J., Timmermans, J. & Visschers, J. L., 3 Dec 2005, In : Nuclear instruments & methods in physics research. Section A : Accelerators, spectrometers, detectors and associated equipment. 556, 2, p. 490-494 5 p., 10.1016/j.nima.2005.11.065.

Research output: Contribution to journalArticleAcademicpeer-review

71 Citations (Scopus)

Impact of hot-carrier degradation on the Low-Frequency Noise in MOSFETs under steady-state and periodic Large-Signal Excitation

Kolhatkar, J., Hoekstra, E., Hof, A., Salm, C., Schmitz, J. & Wallinga, H., 1 Oct 2005, In : IEEE electron device letters. 26, 10, p. 764-766 3 p.

Research output: Contribution to journalArticleAcademicpeer-review

5 Citations (Scopus)
2004

Fast thermal cycling-enhanced electromigration in power metallization

Nguyen, V. H., Salm, C., Krabbenborg, B. H., Krabbenborg, B. H., Bisschop, J., Mouthaan, A. J. & Kuper, F. G., Jun 2004, In : IEEE transactions on device and materials reliability. 4, 2, p. 246-255 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
9 Citations (Scopus)
217 Downloads (Pure)

Plasma-charging damage of floating MIM capacitors

Wang, Z., Ackaert, J., Salm, C., Kuper, F. G., Tack, M., de Backer, E., Coppens, P., De Schepper, L. & Vlachakis, B., 1 Jun 2004, In : IEEE transactions on electron devices. 51, 6, p. 1017-1024 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
17 Citations (Scopus)
289 Downloads (Pure)

Plasma charging damage reduction in IC processing by a self-balancing interconnect

Wang, Z., Ackaert, J., Salm, C., Kuper, F. G. & De Backer, E., 4 Oct 2004, In : Microelectronics reliability. 44, 9-11, p. 1503-1507 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
356 Downloads (Pure)
2003

Role of package parasitics and substrate resistance on the Charged Device Model (CDM) failure levels - An explantion and die protection strategy

Sowariraj, M. S. B., Smedes, T., Salm, C., Mouthaan, A. J. & Kuper, F. G., 1 Sep 2003, In : Microelectronics reliability. 43, 9-11, p. 1569-1575 7 p., 10.1016/S0026-2714(03)00276-2.

Research output: Contribution to journalArticleAcademicpeer-review

9 Citations (Scopus)

Structural and optical characterization of porous anodic aluminium oxide

Galca, A. C., Kooij, E. S., Wormeester, H., Salm, C., Leca, V., Rector, J. H. & Poelsema, B., 1 Oct 2003, In : Journal of Applied Physics. 94, 7, p. 4296-4305 10 p., 10.1063/1.1604951.

Research output: Contribution to journalArticleAcademicpeer-review

52 Citations (Scopus)
2002

Fast temperature cycling and electromigration induced thin film cracking multilevel interconnection: experiments and modeling

Nguyen, V. H., Nguyen, H., Salm, C., Vroemen, J., Voets, J., Krabbenborg, B. H., Bisschop, J., Mouthaan, A. J. & Kuper, F. G., 9 Nov 2002, In : Microelectronics reliability. 42, 9-11, p. 1415-1420 6 p., 10.1016/S0026-2714(02)00161-0.

Research output: Contribution to journalArticleAcademicpeer-review

21 Citations (Scopus)

Fast temperature cycling and electromigration induced thin film cracking multilevel interconnection: experiments and modelling

Nguyen, V. H., Salm, C., Vroemen, J., Voets, J., Krabbenborg, B. H., Bisschop, J., Mouthaan, A. J. & Kuper, F. G., 2002, In : Microelectronics reliability. 42, p. 1415-1420 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

Simulation and experimental characterization of reservoir and via layout effects on electromigration lifetime

Nguyen, V. H., Salm, C., Wenzel, R., Mouthaan, A. J. & Kuper, F. G., 2002, In : Microelectronics reliability. p. -

Research output: Contribution to journalArticleAcademicpeer-review

Simulation and experimental characterization of reservoir and via layout effects on electromigration lifetime

Nguyen, V. H., Nguyen, H., Salm, C., Wenzel, R., Mouthaan, A. J. & Kuper, F. G., 9 Nov 2002, In : Microelectronics reliability. 42, 9-11, p. 1421-1425 5 p., 10.1016/S0026-2714(02)00162-2.

Research output: Contribution to journalArticleAcademicpeer-review

File
50 Downloads (Pure)

The influence of technology variation on ggNMOST and SCRs against CDM ESD stress

Sowariraj, M. S. B., Smedes, T., Salm, C., Mouthaan, A. J. & Kuper, F. G., 2002, In : Microelectronics reliability. 42, p. 1287-1292 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

The influence of technology variation on ggNMOSTs and SCRs against CDM ESD stress

Sowariraj, M. S. B., Salm, C., Mouthaan, A. J., Smedes, T. & Kuper, F. G., 9 Nov 2002, In : Microelectronics reliability. 42, 9-11, p. 1287-1292 5 p., 10.1016/S0026-2714(02)00136-1.

Research output: Contribution to journalArticleAcademicpeer-review

2001

On low-frequency noise of polycrystalline GexSi1-x for sub-micron CMOS technologies

Chen, X. Y., Johansen, J. A., Salm, C., van Rheenen, A. D. & van Rheenen, A. D., 1 Nov 2001, In : Solid-state electronics. 45, 45, p. 1967-1971 5 p., 10.1016/S0038-1101(01)00242-8.

Research output: Contribution to journalArticleAcademicpeer-review

9 Citations (Scopus)
2000

Dealing with hot-carrier aging in nMOS and DMOS, models, simulations and characterizations

Mouthaan, A. J., Salm, C., Lunenborg, M. M., Lunenborg, M. M., de Wolf, M., de Wolf, M. A. R. C. & Kuper, F. G., 2000, In : Microelectronics reliability. 2000, 6, p. 909-917 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

17 Citations (Scopus)

High-Performance Deep SubMicron CMOS Technologies with Polycrystalline-SiGe Gates

Ponomarev, Y. V., Stolk, P. A., Salm, C., Schmitz, J. & Woerlee, P. H., 2000, In : IEEE transactions on electron devices. 2000, 4, p. 848-855 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
35 Citations (Scopus)
66 Downloads (Pure)
1999

1/f noise in polycrystalline SiGe analyzed in terms of mobility fluctuations

Chen, X. Y., Salm, C., Hooge, F. N. & Woerlee, P. H., 1999, In : Solid-state electronics. 1999, 43, p. 1715-1724 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

14 Citations (Scopus)

Doping dependence of low-frequency noise in polycrystalline SiGe film resistors

Chen, X. Y. & Salm, C., 1999, In : Applied physics letters. 1999, 75, p. 516-518 3 p.

Research output: Contribution to journalArticleAcademicpeer-review

8 Citations (Scopus)

SILC in MOS Capacitors with Poly-Si and Poly-Si0.7Ge0.3 Gate Material

Houtsma, V. E., Holleman, J., Salm, C. & Woerlee, P. H., 1999, In : Microelectronic engineering. 1999, 48, p. 415-418 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)

Stress-Induced Leakage Current in p+ Poly MOS Capacitors with Poly-Si and Poly-Si0.7Ge0.3 Gate Material

Houtsma, V. E., Holleman, J., Salm, C., Widdershoven, F. P., Widdershoven, F. P. & Woerlee, P. H., 1999, In : IEEE electron device letters. 1999, 20, p. 314-316 3 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
6 Citations (Scopus)
47 Downloads (Pure)