19902015
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Research Output 1990 2015

  • 6 Article
  • 2 Conference contribution
  • 2 Poster
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Poster
1993

Dual Phase Actuator

Lammerink, T. S. J. & de Weerd, E. L., 17 Jun 1993, p. -.

Research output: Contribution to conferencePosterOther research output

1990
7 Citations (Scopus)

In situ phosphorus-doped polysilicon for excitation and detection in micromechanical resonators

Elwenspoek, M., Bouwstra, S., de Weerd, E. L. & Popma, T. J. A., 1 Oct 1990.

Research output: Contribution to conferencePosterOther research output