Eddy L. de Weerd

Research output

Research output per year 1990 1990 1993 2010 2012 2014 2015 2017 2017

• 7 Article
• 2 Conference contribution
• 2 Poster

Research output per year

Research output per year

Search results

• 1993

  Dual Phase Actuator

  Lammerink, T. S. J. & de Weerd, E. L., 17 Jun 1993, p. -.

  Research output: Contribution to conference › Poster › Other research output

• 1990

  In situ phosphorus-doped polysilicon for excitation and detection in micromechanical resonators

  Elwenspoek, M., Bouwstra, S., de Weerd, E. L. & Popma, T. J. A., 1 Oct 1990.

  Research output: Contribution to conference › Poster › Other research output

  7 Citations (Scopus)