Ertuğ Şimşek – Research output — University of Twente Research Information

Research activity per year

2 Poster

2 results

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2023

Active Wafer Table Based on Piezoelectric Thin Films
Şimşek, E., Vries, S. E., Jansen, B., Steur, M., Bijkerk, F., Bayraktar, M. & Ackermann, M., 2023.
Research output: Contribution to conference › Poster › Academic
Bottom Electrode Optimization for Piezoelectric Thin Film Based Active Wafer Tables
Şimşek, E., Jansen, B., Bayraktar, M. & Ackermann, M., 2023.
Research output: Contribution to conference › Poster › Academic