Erwin J.W. Berenschot

Activities

Activities per year 1993 1995 1999 2019

• 11 Oral presentation

Activities per year

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• Wafer scale fabrication and modification of silicon nano-pillar arrays for nanoelectronics, nanofluidics and beyond

  Yasser Pordeli (Contributor), Bernhard Yonathan van der Wel (Contributor), Lucas Johannes Kooijman (Contributor), Dirk Jonker (Contributor), Johan W. Berenschot (Contributor), Bjorn Tonnie Hendrik Borgelink (Contributor), Hai Le The (Contributor), Meint J. de Boer (Contributor), Jan C.T. Eijkel (Contributor), Ray Hueting (Contributor), Roald M. Tiggelaar (Contributor), J.G.E. Gardeniers (Contributor) & Niels R. Tas (Speaker)

  6 Nov 2019

  Activity: Talk or presentation › Oral presentation

• Micromachined fountain pen - a tool for atomic force microscope based surface modification

  S. Deladi (Speaker), G.J.M. Krijnen (Speaker), N.R. Tas (Speaker), J.W. Berenschot (Speaker), M.J. de Boer (Speaker) & M.C. Elwenspoek (Speaker)

  13 Oct 2004

  Activity: Talk or presentation › Oral presentation

• Wet anisotropic etching for fluidic 1D nanochannels

  J. Haneveld (Speaker), Henricus V. Jansen (Speaker), Johan W. Berenschot (Speaker), Niels Roelof Tas (Speaker) & Michael Curt Elwenspoek (Speaker)

  2003

  Activity: Talk or presentation › Oral presentation

• Fabrication of functional structures on thin silicon nitride membranes

  P. Ekkels (Speaker), R.W. Tjerkstra (Speaker), Gijsbertus J.M. Krijnen (Speaker), Johan W. Berenschot (Speaker), J.P. Brugger (Speaker) & Michael Curt Elwenspoek (Speaker)

  16 Sep 2002

  Activity: Talk or presentation › Oral presentation

• Micromachining (new technologies)

  Johan W. Berenschot (Invited speaker)

  6 Dec 1999

  Activity: Talk or presentation › Oral presentation

• Micromachining and devices for microTAS

  Johan W. Berenschot (Invited speaker)

  7 Dec 1999

  Activity: Talk or presentation › Oral presentation

• Sacrificial wafer bonding: an addition to the micromachining techniques

  V.L. Spiering (Keynote speaker), Johan W. Berenschot (Keynote speaker), Michael Curt Elwenspoek (Keynote speaker) & J.H.J. Fluitman (Keynote speaker)

  24 May 1995

  Activity: Talk or presentation › Oral presentation

• An electrostatic axial gap wobble motor

  R. Legtenberg (Speaker), J.W. Berenschot (Speaker), T.S.J. Lammerink (Speaker) & M.C. Elwenspoek (Speaker)

  29 Jun 1995

  Activity: Talk or presentation › Oral presentation

• Towards position control of electrostatic comb drives

  R. Legtenberg (Speaker), Johan W. Berenschot (Speaker), Michael Curt Elwenspoek (Speaker) & J.H.J. Fluitman (Speaker)

  13 Oct 1995

  Activity: Talk or presentation › Oral presentation

• Anodisch bonding of glass

  Johan W. Berenschot (Speaker)

  9 Mar 1995

  Activity: Talk or presentation › Oral presentation

• New applications of R.F.-sputtered glass films as protection and bonding layers in silicon micromachining

  Johan W. Berenschot (Speaker), Johannes G.E. Gardeniers (Speaker), Theodorus S.J. Lammerink (Speaker) & Michael Curt Elwenspoek (Speaker)

  26 Sep 1993

  Activity: Talk or presentation › Oral presentation