Research Output per year
Fingerprint Dive into the research topics where Fred Bijkerk is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
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mirrors
Physics & Astronomy
reflectance
Physics & Astronomy
wavelengths
Physics & Astronomy
Multilayers
Engineering & Materials Science
optics
Physics & Astronomy
lithography
Physics & Astronomy
thin films
Physics & Astronomy
x rays
Physics & Astronomy
Network
Recent external collaboration on country level. Dive into details by clicking on the dots.
Research Output 1994 2019
Alternative EUV absorptive materials and novel architectures for EUV reticle in nm node technology scanner
Edrisi, A., 4 Mar 2019, Enschede: University of Twente. 80 p.Research output: Thesis › Pd Eng Thesis › Academic
Open Access
File
scanners
silver
reticles
absorbers
nickel
Angular and spectral bandwidth of Extreme UV multilayers near spacer material absorption edges
Zameshin, A., Yakshin, A., Chandrasekaran, A. & Bijkerk, F., 1 Jan 2019, In : Journal of nanoscience and nanotechnology. 19, 1, p. 602-608 7 p.Research output: Contribution to journal › Article › Academic › peer-review
Open Access
File
material absorption
Electric Power Supplies
Optical Devices
Synchrotrons
spacers
Atomic H diffusion and C etching in multilayer graphene monitored using a y based optical sensor
Mund, B. K., Soroka, O., Sturm, J. M., Van Den Beld, W. T. E., Lee, C. J. & Bijkerk, F., 29 Jul 2019, In : Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics. 37, 5, 6 p., 051801.Research output: Contribution to journal › Article › Academic › peer-review
Open Access
Graphite
Optical sensors
optical measuring instruments
Graphene
Etching
Extreme UV secondary electron yield measurements of Ru, Sn, and Hf oxide thin films
Sturm, J. M., Liu, F., Darlatt, E., Kolbe, M., Aarnink, A. A. I., Lee, C. J. & Bijkerk, F., 1 Jul 2019, In : Journal of Micro/ Nanolithography, MEMS, and MOEMS. 18, 3, 033501.Research output: Contribution to journal › Article › Academic › peer-review
Open Access
File
Oxide films
Thin films
oxides
Electrons
thin films
Grazing-Incidence La/B-Based Multilayer Mirrors for 6.x nm Wavelength
Kuznetsov, D., Yakshin, A., Sturm, J. M. & Bijkerk, F., 1 Jan 2019, In : Journal of nanoscience and nanotechnology. 19, 1, p. 585-592 8 p.Research output: Contribution to journal › Article › Academic › peer-review
grazing incidence
Multilayers
Mirrors
mirrors
Wavelength
Activities 2003 2018
Piezoelectric actuators for adaptive multilayer mirrors in XUV lithography systems
Mohammadreza Nematollahi (Speaker), Philip Lucke (Contributor), Muharrem Bayraktar (Contributor), Kerstin Hild (Contributor), Toralf Gruner (Contributor), Andrey Yakshin (Contributor), A.J.H.M. Rijnders (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)7 Nov 2018
Activity: Talk or presentation › Oral presentation
Metal-on-metal interface formation laws of nanoscale thin films
Anirudhan Chandrasekaran (Speaker), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), J.M. Sturm (Contributor), F. Bijkerk (Contributor)7 Nov 2018
Activity: Talk or presentation › Invited talk
Advancing thin film X-ray reflectivity data analysis
Igor A. Makhotkin (Speaker), Sergey N. Yakunin (Contributor), J.F. Woitok (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), F. Bijkerk (Contributor)12 Dec 2018
Activity: Talk or presentation › Oral presentation
Stress development of thin films monitored in-situ by cantilever laser deflection and low energy ion scattering
Robbert Wilhelmus Elisabeth van de Kruijs (Speaker), Johan Reinink (Contributor), F. Bijkerk (Contributor)11 Dec 2018
Activity: Talk or presentation › Oral presentation
Adaptive multilayer mirrors based on piezoelectric actuators for XUV lithography
Mohammadreza Nematollahi (Speaker), Philip Lucke (Contributor), Muharrem Bayraktar (Contributor), Kerstin Hild (Contributor), Toralf Gruner (Contributor), Andrey Yakshin (Contributor), A.J.H.M. Rijnders (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)12 Dec 2018
Activity: Talk or presentation › Oral presentation