Fred Bijkerk

prof.dr.

  • 1559 Citations
  • 21 h-Index
19942019
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  • 10 Similar Profiles
mirrors Physics & Astronomy
reflectance Physics & Astronomy
wavelengths Physics & Astronomy
Multilayers Engineering & Materials Science
optics Physics & Astronomy
lithography Physics & Astronomy
thin films Physics & Astronomy
x rays Physics & Astronomy

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Research Output 1994 2019

Alternative EUV absorptive materials and novel architectures for EUV reticle in nm node technology scanner

Edrisi, A., 4 Mar 2019, Enschede: University of Twente. 80 p.

Research output: ThesisPd Eng ThesisAcademic

Open Access
File
scanners
silver
reticles
absorbers
nickel
77 Downloads (Pure)

Angular and spectral bandwidth of Extreme UV multilayers near spacer material absorption edges

Zameshin, A., Yakshin, A., Chandrasekaran, A. & Bijkerk, F., 1 Jan 2019, In : Journal of nanoscience and nanotechnology. 19, 1, p. 602-608 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
material absorption
Electric Power Supplies
Optical Devices
Synchrotrons
spacers

Atomic H diffusion and C etching in multilayer graphene monitored using a y based optical sensor

Mund, B. K., Soroka, O., Sturm, J. M., Van Den Beld, W. T. E., Lee, C. J. & Bijkerk, F., 29 Jul 2019, In : Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics. 37, 5, 6 p., 051801.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
Graphite
Optical sensors
optical measuring instruments
Graphene
Etching
3 Downloads (Pure)

Extreme UV secondary electron yield measurements of Ru, Sn, and Hf oxide thin films

Sturm, J. M., Liu, F., Darlatt, E., Kolbe, M., Aarnink, A. A. I., Lee, C. J. & Bijkerk, F., 1 Jul 2019, In : Journal of Micro/ Nanolithography, MEMS, and MOEMS. 18, 3, 033501.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Oxide films
Thin films
oxides
Electrons
thin films
2 Downloads (Pure)

Grazing-Incidence La/B-Based Multilayer Mirrors for 6.x nm Wavelength

Kuznetsov, D., Yakshin, A., Sturm, J. M. & Bijkerk, F., 1 Jan 2019, In : Journal of nanoscience and nanotechnology. 19, 1, p. 585-592 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

grazing incidence
Multilayers
Mirrors
mirrors
Wavelength

Activities 2003 2018

  • 70 Oral presentation
  • 4 Invited talk

Piezoelectric actuators for adaptive multilayer mirrors in XUV lithography systems

Mohammadreza Nematollahi (Speaker), Philip Lucke (Contributor), Muharrem Bayraktar (Contributor), Kerstin Hild (Contributor), Toralf Gruner (Contributor), Andrey Yakshin (Contributor), A.J.H.M. Rijnders (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)
7 Nov 2018

Activity: Talk or presentationOral presentation

Metal-on-metal interface formation laws of nanoscale thin films

Anirudhan Chandrasekaran (Speaker), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), J.M. Sturm (Contributor), F. Bijkerk (Contributor)
7 Nov 2018

Activity: Talk or presentationInvited talk

Advancing thin film X-ray reflectivity data analysis

Igor A. Makhotkin (Speaker), Sergey N. Yakunin (Contributor), J.F. Woitok (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), F. Bijkerk (Contributor)
12 Dec 2018

Activity: Talk or presentationOral presentation

Stress development of thin films monitored in-situ by cantilever laser deflection and low energy ion scattering

Robbert Wilhelmus Elisabeth van de Kruijs (Speaker), Johan Reinink (Contributor), F. Bijkerk (Contributor)
11 Dec 2018

Activity: Talk or presentationOral presentation

Adaptive multilayer mirrors based on piezoelectric actuators for XUV lithography

Mohammadreza Nematollahi (Speaker), Philip Lucke (Contributor), Muharrem Bayraktar (Contributor), Kerstin Hild (Contributor), Toralf Gruner (Contributor), Andrey Yakshin (Contributor), A.J.H.M. Rijnders (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)
12 Dec 2018

Activity: Talk or presentationOral presentation