Fred Bijkerk

prof.dr.

  • 1299 Citations
  • 17 h-Index
19942019
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  • 7 Similar Profiles
mirrors Physics & Astronomy
reflectance Physics & Astronomy
wavelengths Physics & Astronomy
Multilayers Engineering & Materials Science
optics Physics & Astronomy
lithography Physics & Astronomy
thin films Physics & Astronomy
x rays Physics & Astronomy

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Research Output 1994 2019

Alternative EUV absorptive materials and novel architectures for EUV reticle in nm node technology scanner

Edrisi, A., 4 Mar 2019, Enschede: University of Twente. 80 p.

Research output: ThesisPd Eng ThesisAcademic

Open Access
File
scanners
silver
reticles
absorbers
nickel

Angular and spectral bandwidth of Extreme UV multilayers near spacer material absorption edges

Zameshin, A., Yakshin, A., Chandrasekaran, A. & Bijkerk, F., 1 Jan 2019, In : Journal of nanoscience and nanotechnology. 19, 1, p. 602-608 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Electric Power Supplies
Optical Devices
Synchrotrons
Light

Grazing-Incidence La/B-Based Multilayer Mirrors for 6.x nm Wavelength

Kuznetsov, D., Yakshin, A., Sturm, J. M. & Bijkerk, F., 1 Jan 2019, In : Journal of nanoscience and nanotechnology. 19, 1, p. 585-592 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Incidence
Periodicity
Air
Radiation

Advancing X-ray standing wave data analysis

Makhotkin, I. A., Yakunin, S. N., Hendrikx, C. P., Chandrasekaran, A., van de Kruijs, R. W. E. & Bijkerk, F., 7 Nov 2018.

Research output: Contribution to conferencePosterAcademic

File
standing waves
x rays
mirrors
reflectance
fluorescence
1 Citation (Scopus)

Aromatic structure degradation of single layer graphene on an amorphous silicon substrate in the presence of water, hydrogen and Extreme Ultraviolet light

Mund, B. K., Sturm, J. M., Lee, C. J. & Bijkerk, F., 1 Jan 2018, In : Applied surface science. 427, Part B, p. 1033-1040 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Graphite
Amorphous silicon
Graphene
Hydrogen
Degradation

Activities 2003 2018

  • 70 Oral presentation
  • 4 Invited talk

Stress development of thin films monitored in-situ by cantilever laser deflection and low energy ion scattering

Robbert Wilhelmus Elisabeth van de Kruijs (Speaker), Johan Reinink (Contributor), F. Bijkerk (Contributor)
11 Dec 2018

Activity: Talk or presentationOral presentation

Simulations of Damage of Ru Thin Films Induced by Single-Shot fs EUV FEL Pulses

Igor Milov (Speaker), Igor A. Makhotkin (Contributor), Ryszard Sobierajski (Contributor), Nikita Medvedev (Contributor), vladimir lipp (Contributor), N. Inogamov (Contributor), V. Zhakhovsky (Contributor), Viacheslav Medvedev (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)
27 Mar 2018

Activity: Talk or presentationOral presentation

Unraveling extreme ultraviolet (EUV) light source spectra

Muharrem Bayraktar (Speaker), Caspar Bruineman (Contributor), Boris Vratzov (Contributor), Hubertus M.J. Bastiaens (Contributor), F. Bijkerk (Contributor)
24 Sep 2018

Activity: Talk or presentationOral presentation

Damage processes in thin Ru films induced by single and multiple ultra-short XUV pulses

Igor A. Makhotkin (Speaker), Igor Milov (Contributor), Ryszard Sobierajski (Contributor), Jaromir Chalupský (Contributor), Kai Tiedtke (Contributor), Nikita Medvedev (Contributor), vladimir lipp (Contributor), B. Ziaja (Contributor), Frank Scholze (Contributor), V. Zhakhovsky (Contributor), N. Inogamov (Contributor), Hartmut Enkisch (Contributor), Gosse de Vries (Contributor), Frank Scholze (Contributor), Frank Siewert (Contributor), J.M. Sturm (Contributor), Konstantin Nikolaev (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Eric Louis (Contributor), Iwanna Jacyna (Contributor), Marek Jurek (Contributor), Dorota Klinger (Contributor), Laurent Nittler (Contributor), Yevgen Syryanyy (Contributor), Libor Juha (Contributor), Věra Hájková (Contributor), Vojtěch Vozda (Contributor), Tomáš Burian (Contributor), Karel Saksl (Contributor), Bart Faatz (Contributor), Barbara Keitel (Contributor), Elke Plönjes (Contributor), Siegfried Schreiber (Contributor), Sven Toleikis (Contributor), R.A. Loch (Contributor), Martin Hermann (Contributor), Sebastian Strobel (Contributor), Han Kwang Nienhuys (Contributor), Rilpho Dunker (Contributor), Grzegorz Gwalt (Contributor), Tobias Mey (Contributor), Mark A. Smithers (Contributor), Hendricus A.G.M. van Wolferen (Contributor), Enrico G. Keim (Contributor), F. Bijkerk (Contributor)
23 Jan 2018

Activity: Talk or presentationInvited talk

Photon-induced damage processes in Ruthenium thin films developed for Free Electron Laser Optics

Igor Milov (Contributor), Igor A. Makhotkin (Contributor), Ryszard Sobierajski (Contributor), Nikita Medvedev (Contributor), vladimir lipp (Contributor), B. Ziaja (Contributor), V. Khokhlov (Contributor), V. Zhakhovsky (Contributor), Yu. Petrov (Contributor), V. Shepelev (Contributor), D. Ilnitsky (Contributor), K. Migdal (Contributor), N. Inogamov (Contributor), V.V. Medvedev (Contributor), Eric Louis (Speaker), F. Bijkerk (Contributor)
9 Nov 2018

Activity: Talk or presentationOral presentation