Research Output per year
Fingerprint Dive into the research topics where Fred Bijkerk is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
- 9 Similar Profiles
mirrors
Physics & Astronomy
reflectance
Physics & Astronomy
wavelengths
Physics & Astronomy
Multilayers
Engineering & Materials Science
optics
Physics & Astronomy
lithography
Physics & Astronomy
thin films
Physics & Astronomy
x rays
Physics & Astronomy
Network
Recent external collaboration on country level. Dive into details by clicking on the dots.
Research Output 1994 2020
Alternative EUV absorptive materials and novel architectures for EUV reticle in nm node technology scanner
Edrisi, A., 4 Mar 2019, Enschede: University of Twente. 80 p.Research output: Thesis › Pd Eng Thesis › Academic
Open Access
File
scanners
silver
reticles
absorbers
nickel
Angular and spectral bandwidth of Extreme UV multilayers near spacer material absorption edges
Zameshin, A., Yakshin, A., Chandrasekaran, A. & Bijkerk, F., 1 Jan 2019, In : Journal of nanoscience and nanotechnology. 19, 1, p. 602-608 7 p.Research output: Contribution to journal › Article › Academic › peer-review
Open Access
File
material absorption
Electric Power Supplies
Optical Devices
Synchrotrons
spacers
Atomic H diffusion and C etching in multilayer graphene monitored using a y based optical sensor
Mund, B. K., Soroka, O., Sturm, J. M., Van Den Beld, W. T. E., Lee, C. J. & Bijkerk, F., 1 Sep 2019, In : Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics. 37, 5, 6 p., 051801.Research output: Contribution to journal › Article › Academic › peer-review
Open Access
Graphite
Optical sensors
optical measuring instruments
Graphene
Etching
Etching processes of transferred and non-transferred multi-layer graphene in the presence of extreme UV, H2O and H2
Mund, B. K., Sturm, J. M., van den Beld, W. T. E., Lee, C. J. & Bijkerk, F., 29 Oct 2019, In : Applied surface science. 504, 144485.Research output: Contribution to journal › Article › Academic › peer-review
Graphite
Graphene
Etching
graphene
etching
Extreme UV secondary electron yield measurements of Ru, Sn, and Hf oxide thin films
Sturm, J. M., Liu, F., Darlatt, E., Kolbe, M., Aarnink, A. A. I., Lee, C. J. & Bijkerk, F., 1 Jul 2019, In : Journal of Micro/ Nanolithography, MEMS, and MOEMS. 18, 3, 033501.Research output: Contribution to journal › Article › Academic › peer-review
Open Access
File
Oxide films
Thin films
oxides
Electrons
thin films
Activities 2003 2018
Adaptive multilayer mirrors based on piezoelectric actuators for XUV lithography
Mohammadreza Nematollahi (Speaker), Philip Lucke (Contributor), Muharrem Bayraktar (Contributor), Kerstin Hild (Contributor), Toralf Gruner (Contributor), Andrey Yakshin (Contributor), A.J.H.M. Rijnders (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)12 Dec 2018
Activity: Talk or presentation › Oral presentation
Simulations of Damage of Ru Thin Films Induced by Single-Shot fs EUV FEL Pulses
Igor Milov (Speaker), Igor A. Makhotkin (Contributor), Ryszard Sobierajski (Contributor), Nikita Medvedev (Contributor), vladimir lipp (Contributor), N. Inogamov (Contributor), V. Zhakhovsky (Contributor), Viacheslav Medvedev (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)27 Mar 2018
Activity: Talk or presentation › Oral presentation
Nanometer scale oxidation and oxygen diffusion at low temperature: Static and Isotope Exchange Depth Profile
Cristiane Regina Stilhano Vilas Boas (Speaker), J.M. Sturm (Contributor), F. Bijkerk (Contributor)31 May 2018
Activity: Talk or presentation › Oral presentation
Stress development of thin films monitored in-situ by cantilever laser deflection and low energy ion scattering
Robbert Wilhelmus Elisabeth van de Kruijs (Speaker), Johan Reinink (Contributor), F. Bijkerk (Contributor)11 Dec 2018
Activity: Talk or presentation › Oral presentation
Correlated lateral density fluctuations in the Si layers of a W/Si multilayer revealed by GISAXS
Konstantin Nikolaev (Contributor), Sergey N. Yakunin (Contributor), Igor A. Makhotkin (Speaker), Joris de la Rie (Contributor), Roman Medvedev (Contributor), A.V. Rogachev (Contributor), C.P. Hendrikx (Contributor), M. Gateshki (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Andrey Yakshin (Contributor), F. Bijkerk (Contributor)8 Nov 2018
Activity: Talk or presentation › Oral presentation