Fred Bijkerk

Activities

Activities per year 2003 2011 2012 2017 2018 2023

• 79 Oral presentation
• 7 Invited talk

Activities per year

Search results

• Low Energy Ion Interactions with Transition Metal Films: ballistic and Diffusive Transport Processes

  Phadke, P. (Speaker), Sturm, M. (Contributor), van de Kruijs, R. W. E. (Contributor), Bijkerk, F. (Contributor) & Ackermann, M. D. (Contributor)

  11 Jul 2022

  Activity: Talk or presentation › Oral presentation

• Adaptive piezoelectric actuators for XUV wavelengths and scaling of hysteresis

  Lucke, P. (Speaker), Bayraktar, M. (Contributor), Nematollahi, M. (Contributor), Houwman, E. (Contributor), Birkhölzer, Y. A. (Contributor), Yakshin, A. (Contributor), Rijnders, G. (Contributor) & Bijkerk, F. (Contributor)

  22 Jan 2020

  Activity: Talk or presentation › Oral presentation

• Similarity in Ru damage induced by photons with different energy: From visible light to hard X-rays

  Milov, I. (Speaker), Lipp, V. (Contributor), Ilnitsky, D. (Contributor), Medvedev, N. (Contributor), Migdal, K. (Contributor), Zhakhovsky, V. (Contributor), Khokhlov, V. (Contributor), Petrov, Y. (Contributor), Inogamov, N. (Contributor), Semin, S. (Contributor), Kimel, A. (Contributor), Ziaja, B. (Contributor), Medvedev, V. (Contributor), Makhotkin, I. A. (Contributor), Louis, E. (Contributor) & Bijkerk, F. (Contributor)

  21 Jan 2020 → 22 Jan 2020

  Activity: Talk or presentation › Oral presentation

• Lithography machine in-line broadband spectrum metrology and feedback control system

  Liu, F. (Speaker), Smeets, D. (Contributor), Huang, S. (Contributor), Yakunin, A. (Contributor), Havermans, P. (Contributor), Oesterholt, R. (Contributor), Bayraktar, M. (Contributor) & Bijkerk, F. (Contributor)

  10 Jun 2019 → 13 Jun 2019

  Activity: Talk or presentation › Oral presentation

• Damage processes in ruthenium thin films induced by femtosecond laser pulses for a wide range of incident photon energy

  Milov, I. (Contributor), Makhotkin, I. A. (Speaker), Medvedev, N. (Contributor), lipp, V. (Contributor), Ziaja, B. (Contributor), Khokhlov, V. (Contributor), Zhakhovsky, V. (Contributor), Petrov, Y. (Contributor), Shepelev, V. (Contributor), Ilnitsky, D. (Contributor), Migdal, K. (Contributor), Inogamov, N. (Contributor), Louis, E. (Contributor) & Bijkerk, F. (Contributor)

  21 Oct 2019

  Activity: Talk or presentation › Oral presentation

• Structural analysis of ion polished W/Si soft X-ray multilayer reflectors

  Medvedev, R. (Contributor), Nikolaev, K. (Contributor), Zameshin, A. (Contributor), IJpes, D. (Contributor), Makhotkin, I. A. (Contributor), Yakunin, S. N. (Contributor), Yakshin, A. (Speaker) & Bijkerk, F. (Contributor)

  21 Oct 2019 → 23 Oct 2019

  Activity: Talk or presentation › Oral presentation

• Damage processes in ruthenium thin films induced by femtosecond laser pulses with varying incident photon energy

  Milov, I. (Contributor), Makhotkin, I. A. (Speaker), Medvedev, N. (Contributor), lipp, V. (Contributor), Ziaja, B. (Contributor), Khokhlov, V. (Contributor), Zhakhovsky, V. (Contributor), Petrov, Y. (Contributor), Shepelev, V. (Contributor), Ilnitsky, D. (Contributor), Migdal, K. (Contributor), Inogamov, N. (Contributor), Louis, E. (Contributor) & Bijkerk, F. (Contributor)

  27 May 2019

  Activity: Talk or presentation › Oral presentation

• Single-shot ablation of Ru thin films induced by fs EUV Free-Electron Laser

  Milov, I. (Speaker), Makhotkin, I. A. (Contributor), Sobierajski, R. (Contributor), Medvedev, N. (Contributor), Lipp, V. (Speaker), Inogamov, N. (Contributor), Zhakhovsky, V. (Contributor), Khokhlov, V. (Contributor), Medvedev, V. (Contributor), Louis, E. (Contributor) & Bijkerk, F. (Contributor)

  19 Jun 2018

  Activity: Talk or presentation › Oral presentation

• Simulations of Damage of Ru Thin Films Induced by Single-Shot fs EUV FEL Pulses

  Milov, I. (Speaker), Makhotkin, I. A. (Contributor), Sobierajski, R. (Contributor), Medvedev, N. (Contributor), lipp, V. (Contributor), Inogamov, N. (Contributor), Zhakhovsky, V. (Contributor), Medvedev, V. (Contributor), Louis, E. (Contributor) & Bijkerk, F. (Contributor)

  27 Mar 2018

  Activity: Talk or presentation › Oral presentation

• Photon-induced damage processes in Ruthenium thin films developed for Free Electron Laser Optics

  Milov, I. (Contributor), Makhotkin, I. A. (Contributor), Sobierajski, R. (Contributor), Medvedev, N. (Contributor), lipp, V. (Contributor), Ziaja, B. (Contributor), Khokhlov, V. (Contributor), Zhakhovsky, V. (Contributor), Petrov, Y. (Contributor), Shepelev, V. (Contributor), Ilnitsky, D. (Contributor), Migdal, K. (Contributor), Inogamov, N. (Contributor), Medvedev , V. V. (Contributor), Louis, E. (Speaker) & Bijkerk, F. (Contributor)

  9 Nov 2018

  Activity: Talk or presentation › Oral presentation

• Unraveling extreme ultraviolet (EUV) light source spectra

  Bayraktar, M. (Speaker), Bruineman, C. (Contributor), Vratzov, B. (Contributor), Bastiaens, H. M. J. (Contributor) & Bijkerk, F. (Contributor)

  24 Sept 2018

  Activity: Talk or presentation › Oral presentation

• Nanometer scale oxidation and oxygen diffusion at low temperature: Static and Isotope Exchange Depth Profile

  Stilhano Vilas Boas, C. R. (Speaker), Sturm, J. M. (Contributor) & Bijkerk, F. (Contributor)

  31 May 2018

  Activity: Talk or presentation › Oral presentation

• Advancing thin film X-ray reflectivity data analysis

  Makhotkin, I. A. (Speaker), Yakunin, S. N. (Contributor), Woitok, J. F. (Contributor), van de Kruijs, R. W. E. (Contributor) & Bijkerk, F. (Contributor)

  12 Dec 2018

  Activity: Talk or presentation › Oral presentation

• Piezoelectric actuators for adaptive multilayer mirrors in XUV lithography systems

  Nematollahi, M. (Speaker), Lucke, P. (Contributor), Bayraktar, M. (Contributor), Hild, K. (Contributor), Gruner, T. (Contributor), Yakshin, A. (Contributor), Rijnders, A. J. H. M. (Contributor), Louis, E. (Contributor) & Bijkerk, F. (Contributor)

  7 Nov 2018

  Activity: Talk or presentation › Oral presentation

• Atomic oxygen diffusion in ultrathin transition metal oxide films at room temperature

  Stilhano Vilas Boas, C. R. (Speaker), Sturm, J. M. (Contributor) & Bijkerk, F. (Contributor)

  7 Nov 2018 → 9 Nov 2018

  Activity: Talk or presentation › Oral presentation

• Correlated lateral density fluctuations in the Si layers of a W/Si multilayer revealed by GISAXS

  Nikolaev, K. (Contributor), Yakunin, S. N. (Contributor), Makhotkin, I. A. (Speaker), de la Rie, J. (Contributor), Medvedev, R. (Contributor), Rogachev, A. V. (Contributor), Hendrikx, C. P. (Contributor), Gateshki, M. (Contributor), van de Kruijs, R. W. E. (Contributor), Yakshin, A. (Contributor) & Bijkerk, F. (Contributor)

  8 Nov 2018

  Activity: Talk or presentation › Oral presentation

• Matrix effects involving quasiresonant neutralization from valence band in Low Energy Ion Scattering

  Zameshin, A. (Contributor), Yakshin, A. (Contributor), Sturm, J. M. (Contributor), Stilhano Vilas Boas, C. R. (Contributor) & Bijkerk, F. (Contributor)

  1 Jul 2018 → 6 Jul 2018

  Activity: Talk or presentation › Oral presentation

• Adaptive multilayer mirrors based on piezoelectric actuators for XUV lithography

  Nematollahi, M. (Speaker), Lucke, P. (Contributor), Bayraktar, M. (Contributor), Hild, K. (Contributor), Gruner, T. (Contributor), Yakshin, A. (Contributor), Rijnders, A. J. H. M. (Contributor), Louis, E. (Contributor) & Bijkerk, F. (Contributor)

  12 Dec 2018

  Activity: Talk or presentation › Oral presentation

• Stress development of thin films monitored in-situ by cantilever laser deflection and low energy ion scattering

  van de Kruijs, R. W. E. (Speaker), Reinink, J. (Contributor) & Bijkerk, F. (Contributor)

  11 Dec 2018

  Activity: Talk or presentation › Oral presentation

• Model independent approach for the analysis of GIXR data from thin films

  Makhotkin, I. A. (Contributor), Yakunin, S. N. (Speaker), Woitok, J. F. (Contributor), van de Kruijs, R. W. E. (Contributor), Reuvekamp, E. (Contributor) & Bijkerk, F. (Contributor)

  23 May 2017

  Activity: Talk or presentation › Oral presentation

• Ruthenium growth on B, C and B4C studied by LEIS

  Zameshin, A. (Speaker), Yakshin, A. E. (Contributor), Sturm, M. (Contributor) & Bijkerk, F. (Contributor)

  23 May 2017

  Activity: Talk or presentation › Oral presentation

• Model independent approach for the analysis of GIXR data from thin films

  Makhotkin, I. A. (Speaker), Yakunin, S. N. (Contributor), Woitok, J. F. (Contributor), van de Kruijs, R. W. E. (Contributor), Reuvekamp, E. J. (Contributor) & Bijkerk, F. (Contributor)

  13 Dec 2017

  Activity: Talk or presentation › Oral presentation

• In vacuo low-energy ions scattering studies of ZrO2 growth by magnetron sputtering

  Sturm, M. (Speaker), Coloma Ribera, R. (Contributor), van de Kruijs, R. (Contributor), Yakshin, A. (Contributor) & Bijkerk, F. (Contributor)

  30 Oct 2017 → 3 Nov 2017

  Activity: Talk or presentation › Oral presentation

• EUVL optics for Free Electron Laser sources: damage threshold studies and the use of adjusted wavelengths

  Louis, E. (Speaker), Zameshin, A. (Contributor), Yakshin, A. (Contributor), Makhotkin, I. A. (Contributor) & Bijkerk, F. (Contributor)

  7 Nov 2017

  Activity: Talk or presentation › Oral presentation

• Status of multilayer reflective optics

  Louis, E. (Speaker), Enkisch, H. (Contributor), van de Kruijs, R. W. E. (Contributor), Yakshin, A. (Contributor), Sturm, J. M. (Contributor), Makhotkin, I. A. (Contributor), Lee, C. J. (Contributor), Müllender, S. (Contributor) & Bijkerk, F. (Contributor)

  28 Feb 2017

  Activity: Talk or presentation › Oral presentation

• Tailoring the spectral properties of extreme UV multilayer optics

  Medvedev , V. V. (Speaker), Yakshin, A. (Contributor) & Bijkerk, F. (Contributor)

  17 Jan 2017

  Activity: Talk or presentation › Oral presentation

• Broadband spectroscopy of EUV light sources using a transmission grating spectrometer

  Bayraktar, M. (Speaker), Torretti, F. (Contributor), Schupp, R. (Contributor), Versolato, O. (Contributor), Liu, F. (Contributor), Bruineman, C. (Contributor), Vratzov, B. (Contributor), Bastiaens, H. M. J. (Contributor) & Bijkerk, F. (Contributor)

  6 Nov 2017 → 8 Nov 2017

  Activity: Talk or presentation › Oral presentation

• Ruthenium growth on B, C and B4C studied by LEIS

  Zameshin, A. (Speaker), Yakshin, A. (Contributor), Sturm, J. M. (Contributor) & Bijkerk, F. (Contributor)

  8 Aug 2017

  Activity: Talk or presentation › Oral presentation

• Capabilities of model free X-ray standing wave analysis of periodic multilayer structures

  Makhotkin, I. A. (Speaker), Yakunin, S. N. (Contributor), Hendrikx, C. P. (Contributor), Chandrasekaran, A. (Contributor), Zameshin, A. (Contributor), Zarkadas, A. (Contributor), Gateshki, M. (Contributor), van de Kruijs, R. W. E. (Contributor), Reuvekamp, E. (Contributor) & Bijkerk, F. (Contributor)

  22 May 2017

  Activity: Talk or presentation › Oral presentation

• Single-shot damage of Ru thin film induced by XUV FEL fs pulses

  Milov, I. (Speaker), Makhotkin, I. A. (Contributor), van de Kruijs, R. W. E. (Contributor), Keim, R. (Contributor), van Wolferen, H. A. G. M. (Contributor), Louis, E. (Contributor) & Bijkerk, F. (Contributor)

  25 Sept 2017

  Activity: Talk or presentation › Oral presentation

• Ruthenium growth on B, C and B4C: combining surface and in-depth information from LEIS

  Zameshin, A. (Speaker), Yakshin, A. (Contributor), Sturm, J. M. (Contributor) & Bijkerk, F. (Contributor)

  11 May 2017

  Activity: Talk or presentation › Oral presentation

• X-ray Standing Wave Measurements at the Free-Electron Laser FLASH

  Mercurio, G. (Contributor), Makhotkin, I. A. (Contributor), Milov, I. (Contributor), Kim, Y.-Y. (Contributor), Zaluzhnyy, I. (Contributor), Dziarzhytski, S. (Speaker), Wenthaus, L. (Contributor), Bijkerk, F. (Contributor), Vartaniants, I. (Speaker) & Wurth, W. (Contributor)

  15 Sept 2017 → 17 Sept 2017

  Activity: Talk or presentation › Oral presentation

• High efficiency multilayer coated blazed grating for tender X-rays

  Sokolov, A. (Speaker), Senf, F. (Speaker), Bijkerk, F. (Speaker), Eggenstein, F. (Speaker), Gwalt, G. (Speaker), Huang, Q. (Speaker), van de Kruijs, R. W. E. (Speaker), Kutz, O. (Speaker), Lemke, S. (Speaker), Louis, E. (Speaker), Mertin, M. (Speaker), Packe, I. (Speaker), Rudolph, I. (Speaker), Schafers, F. (Speaker), Siewert, F. (Speaker), Sturm, J. M. (Speaker), Waberski, C. (Speaker), Wang, Z. (Speaker), Wolf, J. (Speaker), Zeschke, T. (Speaker) & Erko, A. (Speaker)

  10 Nov 2016

  Activity: Talk or presentation › Oral presentation

• Basic principles of single-order soft x-ray multilayer diffraction gratings

  Kozhevnikov, I. V. (Speaker), Yang, X. (Speaker), van der Meer, R. (Speaker), Huang, Q. (Speaker), Boller, K. J. (Speaker), Bastiaens, H. M. J. (Speaker), Bijkerk, F. (Speaker) & Wang, Z. (Speaker)

  15 Oct 2016

  Activity: Talk or presentation › Oral presentation

• XUV Spectrometer for broadband spectral measurements

  Bayraktar, M. (Speaker), Bruineman, C. (Speaker), Vratzov, B. (Speaker), Bastiaens, H. M. J. (Speaker) & Bijkerk, F. (Speaker)

  4 May 2016

  Activity: Talk or presentation › Oral presentation

• Insitu Stress Measurement of Thin Film and Multilayer Deposition

  Reinink, J. (Speaker), van de Kruijs, R. W. E. (Contributor) & Bijkerk, F. (Contributor)

  3 Oct 2016

  Activity: Talk or presentation › Oral presentation

• Adaptive optics at the angstrom scale: from discrete to continuous surface manipulation

  Wylie- Van Eerd, B. (Speaker), Krijnen, B. (Speaker), Bijkerk, F. (Speaker), Rijnders, A. J. H. M. (Speaker) & Louis, E. (Speaker)

  11 Aug 2015

  Activity: Talk or presentation › Oral presentation

• Narrow-band Zr-coated Ni/Si multilayer Borrmann filter for 13.5 nm monitoring

  Barreaux, J. L. P. (Speaker), Kozhevnikov, I. V. (Speaker), Bastiaens, H. M. J. (Speaker), van de Kruijs, R. W. E. (Speaker), Bijkerk, F. (Speaker) & Boller, K. J. (Speaker)

  13 Oct 2015

  Activity: Talk or presentation › Oral presentation

• Smart Multilayer Interactive Optics for Lithography at Extreme UV Wavelenghts

  van Goor, F. A. (Speaker) & Bijkerk, F. (Speaker)

  30 Oct 2013

  Activity: Talk or presentation › Oral presentation

• IR refocusing: collector mirror design

  Bayraktar, M. (Speaker), van Goor, F. A. (Speaker), Louis, E. (Speaker), Boller, K. J. (Speaker) & Bijkerk, F. (Speaker)

  7 Oct 2013

  Activity: Talk or presentation › Oral presentation

• Multiple pulse damage in Mo/Si multilayer optics irradiated by intense short-wavelength FELs

  Sobierajski, R. (Speaker), Loch, R. A. (Speaker), Louis, E. (Speaker), Klinger, D. (Speaker), Dluzewski, P. (Speaker), Klepka, M. (Speaker), Bijkerk, F. (Speaker), Burian, T. (Speaker), Chalupsky, J. (Speaker), Coppola, N. (Speaker), Dastjani Farahani, S. (Speaker), Galasso, G. (Speaker), Hajkova, V. (Speaker), Harmand, M. (Speaker), Krzywinski, J. (Speaker), Juha, L. (Speaker), Jurek, M. (Speaker), Möller, S. (Speaker), Nagasono, M. (Speaker), Ozkan, C. (Speaker), Pelka, J. B. (Speaker), Saskl, K. (Speaker), Schultz, J. (Speaker), Sovak, P. (Speaker), Toleikis, S. (Speaker), Tiedtke, K. (Speaker), Vysin, L. (Speaker), Wawro, A. (Speaker) & Gaudin, J. (Speaker)

  16 Apr 2013

  Activity: Talk or presentation › Oral presentation

• Collector mirror design to separate the stray 10.6 μm CO2 laser light from the EUV light at the intermediate focus,

  Bayraktar, M. (Speaker), van Goor, F. A. (Speaker), Boller, K. J. (Speaker) & Bijkerk, F. (Speaker)

  6 Oct 2013

  Activity: Talk or presentation › Oral presentation

• Wavelength selection for multilayer coatings for the lithography generation beyond EUVL

  Makhotkin, I. A. (Speaker), Zoethout, E. (Speaker), Louis, E. (Speaker), Yakunin, A. M. (Speaker), Muellender, S. (Speaker) & Bijkerk, F. (Speaker)

  12 Feb 2012

  Activity: Talk or presentation › Oral presentation

• Fast, Accurate, and Sensitive Carbon Contamination Sensing Using Ellipsometry

  Lee, C. J. (Speaker), Liu, F. (Speaker), Louis, E. (Speaker) & Bijkerk, F. (Speaker)

  16 Jul 2012

  Activity: Talk or presentation › Oral presentation

• Multilayer coatings for the lithography generation beyond EUVL

  Makhotkin, I. A. (Speaker), Zoethout, E. (Speaker), Louis, E. (Speaker), Yakunin, A. M. (Speaker), Banine, V. Y. (Speaker), Muellender, S. (Speaker) & Bijkerk, F. (Speaker)

  30 Sept 2012

  Activity: Talk or presentation › Oral presentation

• Ellipsometry with an undetermined polarization state

  Liu, F. (Speaker), Lee, C. J. (Speaker), Chen, J. (Speaker), Louis, E. (Speaker), van der Slot, P. J. M. (Speaker), Boller, K. J. (Speaker) & Bijkerk, F. (Speaker)

  16 Apr 2012

  Activity: Talk or presentation › Oral presentation

• Multilayer coatings for the lithography generation beyond EUVL

  Makhotkin, I. A. (Speaker), Louis, E. (Speaker), Zoethout, E. (Speaker) & Bijkerk, F. (Speaker)

  10 Dec 2012

  Activity: Talk or presentation › Oral presentation

• Etching of W/Si multilayer mirrors for the fabrication of Lamellar Multilayer Gratings

  van der Meer, R. (Speaker), Krishnan, B. (Speaker), Kozhevnikov, I. V. (Speaker), de Boer, M. J. (Speaker), Vratzov, B. (Speaker), Bastiaens, H. M. J. (Speaker), Huskens, J. (Speaker), van der Wiel, W. G. (Speaker), Hegeman, P. E. (Speaker), Brons, G. C. S. (Speaker), Boller, K. J. (Speaker) & Bijkerk, F. (Speaker)

  17 Sept 2012

  Activity: Talk or presentation › Oral presentation

• Multilayer coatings for the lithography generation beyond EUVL

  Makhotkin, I. A. (Speaker), Zoethout, E. (Speaker), Louis, E. (Speaker), Yakunin, A. M. (Speaker), Banine, V. (Speaker), Muellender, S. (Speaker) & Bijkerk, F. (Speaker)

  30 Sept 2012

  Activity: Talk or presentation › Oral presentation

• Wavelength selection for multilayer coatings for the lithography generation beyond EUVL

  Makhotkin, I. A. (Speaker), Zoethout, E. (Speaker), Louis, E. (Speaker), Yakunin, S. N. (Speaker), Muellender, S. (Speaker) & Bijkerk, F. (Speaker)

  12 Feb 2012

  Activity: Talk or presentation › Oral presentation