Activities per year
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Low Energy Ion Interactions with Transition Metal Films: ballistic and Diffusive Transport Processes
Parikshit Phadke (Speaker), Marko Sturm (Contributor), Robbert W.E. van de Kruijs (Contributor), Fred Bijkerk (Contributor) & Marcel David Ackermann (Contributor)
11 Jul 2022Activity: Talk or presentation › Oral presentation
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Similarity in Ru damage induced by photons with different energy: From visible light to hard X-rays
Igor Milov (Speaker), Vladimir Lipp (Contributor), D. Ilnitsky (Contributor), Nikita Medvedev (Contributor), K. Migdal (Contributor), V. Zhakhovsky (Contributor), V. Khokhlov (Contributor), Yu. Petrov (Contributor), N. Inogamov (Contributor), S. Semin (Contributor), A. Kimel (Contributor), B. Ziaja (Contributor), Viacheslav Medvedev (Contributor), Igor A. Makhotkin (Contributor), Eric Louis (Contributor) & Fred Bijkerk (Contributor)
21 Jan 2020 → 22 Jan 2020Activity: Talk or presentation › Oral presentation
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Adaptive piezoelectric actuators for XUV wavelengths and scaling of hysteresis
Philip Lucke (Speaker), Muharrem Bayraktar (Contributor), Mohammadreza Nematollahi (Contributor), Evert Houwman (Contributor), Yorick Alexander Birkhölzer (Contributor), Andrey Yakshin (Contributor), Guus Rijnders (Contributor) & Fred Bijkerk (Contributor)
22 Jan 2020Activity: Talk or presentation › Oral presentation
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Damage processes in ruthenium thin films induced by femtosecond laser pulses for a wide range of incident photon energy
Igor Milov (Contributor), Igor A. Makhotkin (Speaker), Nikita Medvedev (Contributor), vladimir lipp (Contributor), B. Ziaja (Contributor), V. Khokhlov (Contributor), V. Zhakhovsky (Contributor), Yu. Petrov (Contributor), V. Shepelev (Contributor), D. Ilnitsky (Contributor), K. Migdal (Contributor), N. Inogamov (Contributor), Eric Louis (Contributor) & F. Bijkerk (Contributor)
21 Oct 2019Activity: Talk or presentation › Oral presentation
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Damage processes in ruthenium thin films induced by femtosecond laser pulses with varying incident photon energy
Igor Milov (Contributor), Igor A. Makhotkin (Speaker), Nikita Medvedev (Contributor), vladimir lipp (Contributor), B. Ziaja (Contributor), V. Khokhlov (Contributor), V. Zhakhovsky (Contributor), Yu. Petrov (Contributor), V. Shepelev (Contributor), D. Ilnitsky (Contributor), K. Migdal (Contributor), N. Inogamov (Contributor), Eric Louis (Contributor) & F. Bijkerk (Contributor)
27 May 2019Activity: Talk or presentation › Oral presentation
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Structural analysis of ion polished W/Si soft X-ray multilayer reflectors
Roman Medvedev (Contributor), Konstantin Nikolaev (Contributor), Andrey Zameshin (Contributor), Dennis IJpes (Contributor), Igor A. Makhotkin (Contributor), Sergey N. Yakunin (Contributor), Andrey Yakshin (Speaker) & Fred Bijkerk (Contributor)
21 Oct 2019 → 23 Oct 2019Activity: Talk or presentation › Oral presentation
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Lithography machine in-line broadband spectrum metrology and feedback control system
Fei Liu (Speaker), Dries Smeets (Contributor), Sjoerd Huang (Contributor), Andrei Yakunin (Contributor), Peter Havermans (Contributor), Rene Oesterholt (Contributor), Muharrem Bayraktar (Contributor) & Fred Bijkerk (Contributor)
10 Jun 2019 → 13 Jun 2019Activity: Talk or presentation › Oral presentation
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Single-shot ablation of Ru thin films induced by fs EUV Free-Electron Laser
Igor Milov (Speaker), Igor A. Makhotkin (Contributor), Ryszard Sobierajski (Contributor), Nikita Medvedev (Contributor), Vladimir Lipp (Speaker), N. Inogamov (Contributor), V. Zhakhovsky (Contributor), V. Khokhlov (Contributor), Viacheslav Medvedev (Contributor), Eric Louis (Contributor) & Fred Bijkerk (Contributor)
19 Jun 2018Activity: Talk or presentation › Oral presentation
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Advancing thin film X-ray reflectivity data analysis
Igor A. Makhotkin (Speaker), Sergey N. Yakunin (Contributor), J.F. Woitok (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor) & F. Bijkerk (Contributor)
12 Dec 2018Activity: Talk or presentation › Oral presentation
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Stress development of thin films monitored in-situ by cantilever laser deflection and low energy ion scattering
Robbert Wilhelmus Elisabeth van de Kruijs (Speaker), Johan Reinink (Contributor) & F. Bijkerk (Contributor)
11 Dec 2018Activity: Talk or presentation › Oral presentation
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Adaptive multilayer mirrors based on piezoelectric actuators for XUV lithography
Mohammadreza Nematollahi (Speaker), Philip Lucke (Contributor), Muharrem Bayraktar (Contributor), Kerstin Hild (Contributor), Toralf Gruner (Contributor), Andrey Yakshin (Contributor), A.J.H.M. Rijnders (Contributor), Eric Louis (Contributor) & F. Bijkerk (Contributor)
12 Dec 2018Activity: Talk or presentation › Oral presentation
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Matrix effects involving quasiresonant neutralization from valence band in Low Energy Ion Scattering
Andrey Zameshin (Contributor), Andrey Yakshin (Contributor), J.M. Sturm (Contributor), Cristiane Regina Stilhano Vilas Boas (Contributor) & F. Bijkerk (Contributor)
1 Jul 2018 → 6 Jul 2018Activity: Talk or presentation › Oral presentation
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Unraveling extreme ultraviolet (EUV) light source spectra
Muharrem Bayraktar (Speaker), Caspar Bruineman (Contributor), Boris Vratzov (Contributor), Hubertus M.J. Bastiaens (Contributor) & F. Bijkerk (Contributor)
24 Sep 2018Activity: Talk or presentation › Oral presentation
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Nanometer scale oxidation and oxygen diffusion at low temperature: Static and Isotope Exchange Depth Profile
Cristiane Regina Stilhano Vilas Boas (Speaker), J.M. Sturm (Contributor) & F. Bijkerk (Contributor)
31 May 2018Activity: Talk or presentation › Oral presentation
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Correlated lateral density fluctuations in the Si layers of a W/Si multilayer revealed by GISAXS
Konstantin Nikolaev (Contributor), Sergey N. Yakunin (Contributor), Igor A. Makhotkin (Speaker), Joris de la Rie (Contributor), Roman Medvedev (Contributor), A.V. Rogachev (Contributor), C.P. Hendrikx (Contributor), M. Gateshki (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Andrey Yakshin (Contributor) & F. Bijkerk (Contributor)
8 Nov 2018Activity: Talk or presentation › Oral presentation
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Atomic oxygen diffusion in ultrathin transition metal oxide films at room temperature
Cristiane Regina Stilhano Vilas Boas (Speaker), J.M. Sturm (Contributor) & F. Bijkerk (Contributor)
7 Nov 2018 → 9 Nov 2018Activity: Talk or presentation › Oral presentation
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Piezoelectric actuators for adaptive multilayer mirrors in XUV lithography systems
Mohammadreza Nematollahi (Speaker), Philip Lucke (Contributor), Muharrem Bayraktar (Contributor), Kerstin Hild (Contributor), Toralf Gruner (Contributor), Andrey Yakshin (Contributor), A.J.H.M. Rijnders (Contributor), Eric Louis (Contributor) & F. Bijkerk (Contributor)
7 Nov 2018Activity: Talk or presentation › Oral presentation
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Simulations of Damage of Ru Thin Films Induced by Single-Shot fs EUV FEL Pulses
Igor Milov (Speaker), Igor A. Makhotkin (Contributor), Ryszard Sobierajski (Contributor), Nikita Medvedev (Contributor), vladimir lipp (Contributor), N. Inogamov (Contributor), V. Zhakhovsky (Contributor), Viacheslav Medvedev (Contributor), Eric Louis (Contributor) & F. Bijkerk (Contributor)
27 Mar 2018Activity: Talk or presentation › Oral presentation
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Photon-induced damage processes in Ruthenium thin films developed for Free Electron Laser Optics
Igor Milov (Contributor), Igor A. Makhotkin (Contributor), Ryszard Sobierajski (Contributor), Nikita Medvedev (Contributor), vladimir lipp (Contributor), B. Ziaja (Contributor), V. Khokhlov (Contributor), V. Zhakhovsky (Contributor), Yu. Petrov (Contributor), V. Shepelev (Contributor), D. Ilnitsky (Contributor), K. Migdal (Contributor), N. Inogamov (Contributor), V.V. Medvedev (Contributor), Eric Louis (Speaker) & F. Bijkerk (Contributor)
9 Nov 2018Activity: Talk or presentation › Oral presentation
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Model independent approach for the analysis of GIXR data from thin films
Igor Alexandrovich Makhotkin (Speaker), Sergey N. Yakunin (Contributor), J.F. Woitok (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), E.J. Reuvekamp (Contributor) & Frederik Bijkerk (Contributor)
13 Dec 2017Activity: Talk or presentation › Oral presentation
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Ruthenium growth on B, C and B4C: combining surface and in-depth information from LEIS
Andrey Zameshin (Speaker), Andrey Yakshin (Contributor), J.M. Sturm (Contributor) & Frederik Bijkerk (Contributor)
11 May 2017Activity: Talk or presentation › Oral presentation
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Ruthenium growth on B, C and B4C studied by LEIS
Andrey Zameshin (Speaker), Andrey Yakshin (Contributor), J.M. Sturm (Contributor) & Frederik Bijkerk (Contributor)
8 Aug 2017Activity: Talk or presentation › Oral presentation
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Ruthenium growth on B, C and B4C studied by LEIS
Andrey Zameshin (Speaker), Andrey E. Yakshin (Contributor), Marko Sturm (Contributor) & Fred Bijkerk (Contributor)
23 May 2017Activity: Talk or presentation › Oral presentation
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Broadband spectroscopy of EUV light sources using a transmission grating spectrometer
Muharrem Bayraktar (Speaker), Francesco Torretti (Contributor), Ruben Schupp (Contributor), Oscar Versolato (Contributor), Fei Liu (Contributor), Caspar Bruineman (Contributor), Boris Vratzov (Contributor), Hubertus M.J. Bastiaens (Contributor) & F. Bijkerk (Contributor)
6 Nov 2017 → 8 Nov 2017Activity: Talk or presentation › Oral presentation
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In vacuo low-energy ions scattering studies of ZrO2 growth by magnetron sputtering
Marko Sturm (Speaker), Roger Coloma Ribera (Contributor), Robbert van de Kruijs (Contributor), Andrey Yakshin (Contributor) & Fred Bijkerk (Contributor)
30 Oct 2017 → 3 Nov 2017Activity: Talk or presentation › Oral presentation
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X-ray Standing Wave Measurements at the Free-Electron Laser FLASH
G. Mercurio (Contributor), Igor Alexandrovich Makhotkin (Contributor), Igor Milov (Contributor), Y-Y. Kim (Contributor), I. Zaluzhnyy (Contributor), S. Dziarzhytski (Speaker), L. Wenthaus (Contributor), Frederik Bijkerk (Contributor), Ivan Vartaniants (Speaker) & W. Wurth (Contributor)
15 Sep 2017 → 17 Sep 2017Activity: Talk or presentation › Oral presentation
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Model independent approach for the analysis of GIXR data from thin films
I.A. Makhotkin (Contributor), S.N. Yakunin (Speaker), J.F. Woitok (Contributor), R.W.E. van de Kruijs (Contributor), E. Reuvekamp (Contributor) & F. Bijkerk (Contributor)
23 May 2017Activity: Talk or presentation › Oral presentation
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Capabilities of model free X-ray standing wave analysis of periodic multilayer structures
I.A. Makhotkin (Speaker), S.N. Yakunin (Contributor), C.P. Hendrikx (Contributor), A. Chandrasekaran (Contributor), Andrey Zameshin (Contributor), A. Zarkadas (Contributor), M. Gateshki (Contributor), R.W.E. van de Kruijs (Contributor), E. Reuvekamp (Contributor) & F. Bijkerk (Contributor)
22 May 2017Activity: Talk or presentation › Oral presentation
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Single-shot damage of Ru thin film induced by XUV FEL fs pulses
I. Milov (Speaker), I.A. Makhotkin (Contributor), R.W.E. van de Kruijs (Contributor), R. Keim (Contributor), H.A.G.M. van Wolferen (Contributor), E. Louis (Contributor) & F. Bijkerk (Contributor)
25 Sep 2017Activity: Talk or presentation › Oral presentation
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Tailoring the spectral properties of extreme UV multilayer optics
V.V. Medvedev (Speaker), Andrey Yakshin (Contributor) & F. Bijkerk (Contributor)
17 Jan 2017Activity: Talk or presentation › Oral presentation
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Status of multilayer reflective optics
Eric Louis (Speaker), H. Enkisch (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Andrey Yakshin (Contributor), J.M. Sturm (Contributor), Igor A. Makhotkin (Contributor), Christopher James Lee (Contributor), Stephan Müllender (Contributor) & F. Bijkerk (Contributor)
28 Feb 2017Activity: Talk or presentation › Oral presentation
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EUVL optics for Free Electron Laser sources: damage threshold studies and the use of adjusted wavelengths
Eric Louis (Speaker), Andrey Zameshin (Contributor), Andrey Yakshin (Contributor), Igor Alexandrovich Makhotkin (Contributor) & Frederik Bijkerk (Contributor)
7 Nov 2017Activity: Talk or presentation › Oral presentation
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High efficiency multilayer coated blazed grating for tender X-rays
A. Sokolov (Speaker), F. Senf (Speaker), Frederik Bijkerk (Speaker), F. Eggenstein (Speaker), G. Gwalt (Speaker), Qiushi Huang (Speaker), Robbert Wilhelmus Elisabeth van de Kruijs (Speaker), O. Kutz (Speaker), S. Lemke (Speaker), Eric Louis (Speaker), M. Mertin (Speaker), I. Packe (Speaker), I. Rudolph (Speaker), F. Schafers (Speaker), F. Siewert (Speaker), Jacobus Marinus Sturm (Speaker), C. Waberski (Speaker), Z. Wang (Speaker), J. Wolf (Speaker), T. Zeschke (Speaker) & A. Erko (Speaker)
10 Nov 2016Activity: Talk or presentation › Oral presentation
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Basic principles of single-order soft x-ray multilayer diffraction gratings
I.V. Kozhevnikov (Speaker), X. Yang (Speaker), R. van der Meer (Speaker), Qingxu Huang (Speaker), Klaus J. Boller (Speaker), Hubertus M.J. Bastiaens (Speaker), Frederik Bijkerk (Speaker) & Zhouhong Wang (Speaker)
15 Oct 2016Activity: Talk or presentation › Oral presentation
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XUV Spectrometer for broadband spectral measurements
Muharrem Bayraktar (Speaker), C. Bruineman (Speaker), B. Vratzov (Speaker), Hubertus M.J. Bastiaens (Speaker) & Frederik Bijkerk (Speaker)
4 May 2016Activity: Talk or presentation › Oral presentation
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Insitu Stress Measurement of Thin Film and Multilayer Deposition
Johan Reinink (Speaker), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor) & Frederik Bijkerk (Contributor)
3 Oct 2016Activity: Talk or presentation › Oral presentation
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Adaptive optics at the angstrom scale: from discrete to continuous surface manipulation
Benjamin Wylie- Van Eerd (Speaker), B. Krijnen (Speaker), Frederik Bijkerk (Speaker), Augustinus J.H.M. Rijnders (Speaker) & Eric Louis (Speaker)
11 Aug 2015Activity: Talk or presentation › Oral presentation
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Narrow-band Zr-coated Ni/Si multilayer Borrmann filter for 13.5 nm monitoring
J.L.P. Barreaux (Speaker), I.V. Kozhevnikov (Speaker), Hubertus M.J. Bastiaens (Speaker), Robbert Wilhelmus Elisabeth van de Kruijs (Speaker), Frederik Bijkerk (Speaker) & Klaus J. Boller (Speaker)
13 Oct 2015Activity: Talk or presentation › Oral presentation
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Collector mirror design to separate the stray 10.6 μm CO2 laser light from the EUV light at the intermediate focus,
Muharrem Bayraktar (Speaker), F.A. van Goor (Speaker), Klaus J. Boller (Speaker) & Frederik Bijkerk (Speaker)
6 Oct 2013Activity: Talk or presentation › Oral presentation
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IR refocusing: collector mirror design
Muharrem Bayraktar (Speaker), F.A. van Goor (Speaker), Eric Louis (Speaker), Klaus J. Boller (Speaker) & Frederik Bijkerk (Speaker)
7 Oct 2013Activity: Talk or presentation › Oral presentation
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Smart Multilayer Interactive Optics for Lithography at Extreme UV Wavelenghts
F.A. van Goor (Speaker) & Frederik Bijkerk (Speaker)
30 Oct 2013Activity: Talk or presentation › Oral presentation
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Multiple pulse damage in Mo/Si multilayer optics irradiated by intense short-wavelength FELs
R. Sobierajski (Speaker), R.A. Loch (Speaker), Eric Louis (Speaker), D. Klinger (Speaker), P. Dluzewski (Speaker), M. Klepka (Speaker), Frederik Bijkerk (Speaker), T. Burian (Speaker), J. Chalupsky (Speaker), N. Coppola (Speaker), S. Dastjani Farahani (Speaker), G. Galasso (Speaker), V. Hajkova (Speaker), M. Harmand (Speaker), J. Krzywinski (Speaker), L. Juha (Speaker), M. Jurek (Speaker), S. Möller (Speaker), M. Nagasono (Speaker), C. Ozkan (Speaker), J.B. Pelka (Speaker), K. Saskl (Speaker), J. Schultz (Speaker), P. Sovak (Speaker), S. Toleikis (Speaker), K. Tiedtke (Speaker), L. Vysin (Speaker), A. Wawro (Speaker) & J. Gaudin (Speaker)
16 Apr 2013Activity: Talk or presentation › Oral presentation
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Multilayer coatings for the lithography generation beyond EUVL
Igor Alexandrovich Makhotkin (Speaker), E. Zoethout (Speaker), Eric Louis (Speaker), A.M. Yakunin (Speaker), V. Banine (Speaker), S. Muellender (Speaker) & Frederik Bijkerk (Speaker)
30 Sep 2012Activity: Talk or presentation › Oral presentation
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Wavelength selection for multilayer coatings for the lithography generation beyond EUVL
Igor Alexandrovich Makhotkin (Speaker), E. Zoethout (Speaker), Eric Louis (Speaker), S.N. Yakunin (Speaker), S. Muellender (Speaker) & Frederik Bijkerk (Speaker)
12 Feb 2012Activity: Talk or presentation › Oral presentation
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Ellipsometry with an undetermined polarization state
Fenz Liu (Speaker), Christopher James Lee (Speaker), Juequan Chen (Speaker), Eric Louis (Speaker), Petrus J.M. van der Slot (Speaker), Klaus J. Boller (Speaker) & Frederik Bijkerk (Speaker)
16 Apr 2012Activity: Talk or presentation › Oral presentation
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Etching of W/Si multilayer mirrors for the fabrication of Lamellar Multilayer Gratings
R. van der Meer (Speaker), B. Krishnan (Speaker), I.V. Kozhevnikov (Speaker), Meint J. de Boer (Speaker), B. Vratzov (Speaker), Hubertus M.J. Bastiaens (Speaker), Jurriaan Huskens (Speaker), Wilfred Gerard van der Wiel (Speaker), P.E. Hegeman (Speaker), G.C.S. Brons (Speaker), Klaus J. Boller (Speaker) & Frederik Bijkerk (Speaker)
17 Sep 2012Activity: Talk or presentation › Oral presentation
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De XUV Optics Focusgroep, een nieuw initiatief voor R&D organisatie en kennistransfer
Frederik Bijkerk (Speaker)
10 Oct 2012Activity: Talk or presentation › Oral presentation
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Novel approach to simultaneous analysis of grazing incidence X-ray reflectivity and X-ray standing wave data
S.N. Yakunin (Speaker), I.A. Makhotkin (Speaker), M. Chuev (Speaker), A.Y. Seregin (Speaker), E.M. Pashaev (Speaker), E. Louis (Speaker), R.W.E. van de Kruijs (Speaker), F. Bijkerk (Speaker) & M.V. Kovalchuk (Speaker)
18 Jun 2012Activity: Talk or presentation › Oral presentation
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Multilayer coatings for the lithography generation beyond EUVL
Igor Alexandrovich Makhotkin (Speaker), E. Zoethout (Speaker), Eric Louis (Speaker), A.M. Yakunin (Speaker), V. Banine (Speaker), S. Muellender (Speaker) & Frederik Bijkerk (Speaker)
30 Sep 2012Activity: Talk or presentation › Oral presentation
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Advantages of UV-NanoImprint Lithography and dual-source dry etching for novel applications
R. van der Meer (Speaker), B. Krishnan (Speaker), I.V. Kozhevnikov (Speaker), M.J. de Boer (Speaker), B. Vratzov (Speaker), H.M.J. Bastiaens (Speaker), J. Huskens (Speaker), G.P.M. Roelofs (Speaker), P.V. Santos (Speaker), W.G. van der Wiel (Speaker), P.E. Hegeman (Speaker), C. Brons (Speaker), K.-J. Boller (Speaker) & Frederik Bijkerk (Speaker)
10 Dec 2012Activity: Talk or presentation › Oral presentation