Research output per year
Research output per year
Personal profile
ChipTech Expert keywords
- Photonic ICs
- Sensors- and Actuators
- Lab on a Chip and Microreactors
- MEMS
- Fabrication and Production
- Process Design and Characterization
- Device Testing
- Material Science
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Dive into the research topics where Henk-Willem Veltkamp is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
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Collaborations and top research areas from the last five years
Recent external collaboration on country/territory level. Dive into details by clicking on the dots or
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High Power Si Sidewall Heaters for Fluidic Applications Fabricated by Trench-Assisted Surface Channel Technology
Veltkamp, H. W., Zhao, Y., De Boer, M. J., Sanders, R. G. P., Wiegerink, R. J. & Lotters, J. C., 17 Oct 2019, 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019. IEEE, p. 648-651 4 p. 8870667Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
Open AccessFile3 Link opens in a new tab Citations (Scopus)150 Downloads (Pure) -
Method for Keyhole-Free High-Aspect-Ratio Trench Refill by LPCVD
Veltkamp, H.-W., Janssens, Y. L., de Boer, M. J., Zhao, Y., Wiegerink, R. J., Tas, N. R. & Lötters, J. C., 4 Nov 2022, In: Micromachines. 13, 11, 1908.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile7 Link opens in a new tab Citations (Scopus)747 Downloads (Pure) -
Self-Aligned Sidewall Heaters Applied in a Microfluidic Thermal Flow Sensor
Bonnema, M. J. S., Džemaili, N., Veltkamp, H.-W., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 2026, 2026 IEEE 39th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE Advancing Technology for Humanity, p. 139-142 4 p. 11419397Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
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A Silicon-Based Combined Hot-Element and Calorimetric Anemometer
Hackett, T. L., Veltkamp, H.-W., Sanders, R. G. P., van den Berg, T. E., Alveringh, D. & Schmitz, J., 1 Jul 2025, In: IEEE sensors journal. 25, 13, p. 23645-23652 8 p.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile49 Downloads (Pure) -
A Method for Comparing Dry Etch Equipment
Avram, A., Veltkamp, H. W., Elias, M., Ronchin, S., De Boer, C., Hovik, J. & De Boer, M., 2024, 2024 16th International Symposium on Electronics and Telecommunications, ISETC 2024 - Conference Proceedings. IEEEResearch output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
Open AccessFile260 Downloads (Pure)
Prizes
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10 year memberschip medal of the Belgische Geschiedkundige Kring van Eretekenen- en Medailleverzamelaars (MEDEC)
Veltkamp, H.-W. (Recipient), 15 Nov 2025
Prize: Other distinction
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10 year memberschip pin Deutschen Gesellschaft für Ordenskunde E.V.
Veltkamp, H.-W. (Recipient), 28 Sept 2019
Prize: Other distinction
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10 year membership pin Studiekring Ridderorden en Onderscheidingen
Veltkamp, H.-W. (Recipient), 8 Dec 2018
Prize: Other distinction
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1st prize poster presentation MFHS2019, Enschede
Akegawa Monteiro, F. (Recipient), Veltkamp, H.-W. (Recipient), Sanders, R. G. P. (Recipient), Wiegerink, R. J. (Recipient) & Lötters, J. C. (Recipient), 4 Oct 2019
Prize
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1st prize Pub Quiz SAFE/PRORISC Conference 2025
Veltkamp, H.-W. (Recipient), 8 Jul 2025
Prize: Other distinction
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53rd Micro- and Nano-Engineering Conference
Veltkamp, H.-W. (Chair)
20 Sept 2027 → 24 Sept 2027Activity: Participating in or organising an event › Organising a conference, workshop, ...
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2nd EuroNanoLab Dry Etch Expert School
Veltkamp, H.-W. (Organiser)
26 May 2026 → 29 May 2026Activity: Participating in or organising an event › Organising a conference, workshop, ...
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1st EuroNanoLab Dry Etch Expert School
Veltkamp, H.-W. (Organiser)
9 Apr 2024 → 12 Apr 2024Activity: Participating in or organising an event › Organising a conference, workshop, ...
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NEVAC: Vacuümtechniek
Veltkamp, H.-W. (Participant)
15 Dec 2022 → 17 May 2023Activity: Participating in or organising an event › Participating in a conference, workshop, ...
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3rd Conference on MicroFluidic Handling Systems, MFHS 2017
Lötters, J. C. (Chair), Urban, G. (Chair), Wiegerink, R. J. (Organiser), Janse, S. (Organiser), Alveringh, D. (Organiser), Sanders, R. G. P. (Organiser), Veltkamp, H.-W. (Organiser), Groenesteijn, J. (Organiser), Zhao, Y. (Organiser) & Zeng, Y. (Organiser)
4 Oct 2017 → 6 Oct 2017Activity: Participating in or organising an event › Organising a conference, workshop, ...
Press/Media
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Direct Delivery of Reagents from a Pipette Tip to a PDMS Microfluidic Device
Rho, H. S., Yang, Y., Veltkamp, H.-W. & Gardeniers, J. G. E.
9/10/15 → 15/10/15
2 Media contributions
Press/Media: Expert Comment