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Research Output 2016 2019

  • 4 Conference contribution
  • 2 Abstract
  • 2 Article
2019
20 Downloads (Pure)
Open Access
File

High power Si sidewall heaters for fluidic application fabricated by trench-assisted surface channel technology

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., Jan 2019, 2019 IEEE 32nd Conference on Micro Electro Mechanical Systems (MEMS). IEEE, Vol. 32. p. 648-651 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

fluidics
heaters
heating
silicon
thermal expansion
2018
9 Downloads (Pure)

Scalable 3D Nanoparticle Trap for Electron Microscopy Analysis

Sun, X., Berenschot, E. J. W., Veltkamp, H-W., Gardeniers, H. J. G. E. & Tas, N. R., 28 Nov 2018, In : Small. 14, 48, 1803283.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
2017
77 Downloads (Pure)

Design principles and fabrication method for a miniaturized fuel gas combustion reactor

Zhao, Y., Veltkamp, H-W., de Boer, M. J., Zeng, Y., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 14 Oct 2017, Conference Proceedings: The 3rd Conference on MicroFluidic Handling Systems. Enschede, Vol. 3. p. 37-40

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
Gas fuels
Combustors
Fabrication
MEMS
Mechanical stability
69 Downloads (Pure)

Fabrication of large-volume rectangular channels using trench-sidewall technology and a SOI substrate

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 14 Oct 2017, Conference Proceedings: The 3rd Conference on MicroFluidic Handling Systems. Enschede, Vol. 3. p. 114-117

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
Microfluidics
Fabrication
Silicon
Substrates
Electronics industry
51 Downloads (Pure)

Fabrication process for a large volume silicon nitride micro-combustor

Zhao, Y., Veltkamp, H-W., de Boer, M. J., Zeng, Y., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 19 Sep 2017, p. 450.

Research output: Contribution to conferenceAbstractOther research output

Open Access
File
combustion chambers
silicon nitrides
flames
fabrication
chambers
70 Downloads (Pure)

Selective SiO2 etching in three dimensional structures using parylene-C as mask

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 19 Sep 2017, p. 380.

Research output: Contribution to conferenceAbstractOther research output

Open Access
File
Masks
Etching
Oxides
Packaging materials
Reactive ion etching
2016
1 Citation (Scopus)
4 Downloads (Pure)

Nano-pyramid arrays for nano-particle trapping

Sun, X., Veltkamp, H-W., Berenschot, J. W., Gardeniers, J. G. E. & Tas, N. R., 24 Jan 2016, Nano-pyramid arrays for nano-particle trapping. Category numberCFP16MEM-ART; Code 119597, p. 185-188

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

pyramids
trapping
lithography
trapped particles
miniaturization