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Research Output 2016 2019

2019
23 Downloads (Pure)
Open Access
File
12 Downloads (Pure)

A short post-processing method for high aspect ratio trenches after Bosch etching

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 23 Sep 2019. 1 p.

Research output: Contribution to conferenceAbstractAcademic

Open Access
File
Aspect ratio
Etching
Cleaning
Processing
Vapors

A simple and robust fabrication method for creating 3D tapered polydimethylsiloxane channels

Rho, H. S., Veltkamp, H-W., Baptista, D., le Gac, S. & Habibović, P., 27 Oct 2019, 23rd International Conference on Miniaturized Systems for Chemistry and Life Sciences. p. 1156-1157 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

funnels
fabrication
lab-on-a-chip devices
veins
replicas
7 Downloads (Pure)

Fabrication method for microfluidic channels with circular cross section for micro-Coriolis mass flow sensor

Yu, Q., Veltkamp, H-W., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 2 Oct 2019, p. 103-105. 3 p.

Research output: Contribution to conferencePaperAcademic

Open Access
File
Microfluidics
Readout systems
Fabrication
Sensors
Substrates
4 Downloads (Pure)

Highly-doped bulk silicon microheaters and electrodes embedded between free-hanging microfluidic channels by surface channel technology

Zhao, Y., Veltkamp, H-W., Schut, T. V. P., Groenesteijn, J., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 2 Oct 2019, p. 116-119. 4 p.

Research output: Contribution to conferencePaperAcademic

Open Access
File
electrodes
silicon
microchannels
fabrication
microfluidic devices
7 Downloads (Pure)

Highly-doped in-plane Si electrodes embedded between free-hanging microfluidic channels

Zhao, Y., Veltkamp, H-W., Schut, T. V. P., Groenesteijn, J., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 23 Sep 2019.

Research output: Contribution to conferenceAbstractAcademic

Open Access
File
Microfluidics
Electrodes
Tuning
Sensors

High power Si sidewall heaters for fluidic application fabricated by trench-assisted surface channel technology

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., Jan 2019, 2019 IEEE 32nd Conference on Micro Electro Mechanical Systems (MEMS). IEEE, Vol. 32. p. 648-651 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

fluidics
heaters
heating
silicon
thermal expansion

High Power Si Sidewall Heaters for Fluidic Applications Fabricated by Trench-Assisted Surface Channel Technology

Veltkamp, H. W., Zhao, Y., De Boer, M. J., Sanders, R. G. P., Wiegerink, R. J. & Lotters, J. C., 17 Oct 2019, 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019. IEEE, p. 648-651 4 p. 8870667

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

fluidics
Fluidics
heaters
Silicon
Heating
16 Downloads (Pure)

Towards 3D printed microfluidic devices in α-alumina

Veltkamp, H-W., Zhao, Y., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., 2 Oct 2019, p. 156-159. 4 p.

Research output: Contribution to conferencePaperAcademic

Open Access
File
Microfluidics
Alumina
Printing
High temperature applications
Materials properties
13 Downloads (Pure)

Towards a fully integrated and disposable DNA amplification chip

Akegawa Monteiro, F., Veltkamp, H-W., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., 2 Oct 2019, p. 128-131. 4 p.

Research output: Contribution to conferencePaperAcademic

Open Access
File
Agriculture
Amplification
Animals
DNA
Adhesion

Towards a miniaturized Wobbe index meter, an essential piece of equipment in the future?

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 9 Oct 2019, p. 30-31. 2 p.

Research output: Contribution to conferenceAbstractProfessional

2018
15 Downloads (Pure)

Scalable 3D Nanoparticle Trap for Electron Microscopy Analysis

Sun, X., Berenschot, E. J. W., Veltkamp, H-W., Gardeniers, H. J. G. E. & Tas, N. R., 28 Nov 2018, In : Small. 14, 48, 1803283.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
2017
86 Downloads (Pure)

Design principles and fabrication method for a miniaturized fuel gas combustion reactor

Zhao, Y., Veltkamp, H-W., de Boer, M. J., Zeng, Y., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 14 Oct 2017, Conference Proceedings: The 3rd Conference on MicroFluidic Handling Systems. Enschede, Vol. 3. p. 37-40

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
Gas fuels
Combustors
Fabrication
MEMS
Mechanical stability
78 Downloads (Pure)

Fabrication of large-volume rectangular channels using trench-sidewall technology and a SOI substrate

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 14 Oct 2017, Conference Proceedings: The 3rd Conference on MicroFluidic Handling Systems. Enschede, Vol. 3. p. 114-117

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
Microfluidics
Fabrication
Silicon
Substrates
Electronics industry
57 Downloads (Pure)

Fabrication process for a large volume silicon nitride micro-combustor

Zhao, Y., Veltkamp, H-W., de Boer, M. J., Zeng, Y., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 19 Sep 2017, p. 450.

Research output: Contribution to conferenceAbstractOther research output

Open Access
File
combustion chambers
silicon nitrides
flames
fabrication
chambers
83 Downloads (Pure)

Selective SiO2 etching in three dimensional structures using parylene-C as mask

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 19 Sep 2017, p. 380.

Research output: Contribution to conferenceAbstractOther research output

Open Access
File
Masks
Etching
Oxides
Packaging materials
Reactive ion etching
2016
1 Citation (Scopus)
4 Downloads (Pure)

Nano-pyramid arrays for nano-particle trapping

Sun, X., Veltkamp, H-W., Berenschot, J. W., Gardeniers, J. G. E. & Tas, N. R., 24 Jan 2016, Nano-pyramid arrays for nano-particle trapping. Category numberCFP16MEM-ART; Code 119597, p. 185-188

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

pyramids
trapping
lithography
trapped particles
miniaturization