Research output per year
Research output per year
- 17 results
Search results
-
2024
A Method for Comparing Dry Etch Equipment
Avram, A., Veltkamp, H. W., Elias, M., Ronchin, S., De Boer, C., Hovik, J. & De Boer, M., 2024, 2024 16th International Symposium on Electronics and Telecommunications, ISETC 2024 - Conference Proceedings. IEEEResearch output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
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Inline and Real-Time Microfluidic Relative Permittivity Sensor Using Highly Doped Silicon Sidewall Electrodes
Bonnema, M. J. S., Veltkamp, H.-W., Alveringh, D., Wiegerink, R. J. & Lötters, J. C., 22 Feb 2024, 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS). Austin (TX), USA, p. 805-808 4 p.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
Open AccessFile51 Downloads (Pure) -
Microfabrication Technology for Isolated Silicon Sidewall Electrodes and Heaters
Bonnema, M. J. S., Veltkamp, H.-W., Wiegerink, R. J. & Lötters, J. C., 21 Feb 2024, The 5th Conference on MicroFluidic Handling Systems. Munich, Germany, p. 53-56Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic
Open AccessFile103 Downloads (Pure) -
Next-Generation ATR-IR Devices for Monitoring Chemical Processes
Srivastava, K., Ramaswami, B., Veltkamp, H.-W., Boyle, N., Flaman, G., Bomer, J. G., van den Berg, A., van der Stam, W., Burgess, I. & Odijk, M., 9 Jul 2024, Next-Generation ATR-IR Devices for Monitoring Chemical Processes.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
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2022
A miniature microclimate thermal flow sensor for horticultural applications
Alveringh, D., Bijsterveld, D. G., Berg, T. E. V. D., Veltkamp, H.-W., Batenburg, K. M., Sanders, R. G. P., Lötters, J. C. & Wiegerink, R. J., 8 Dec 2022, 2022 IEEE Sensors. IEEE, 4 p. 9967348Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
Open AccessFile2 Citations (Scopus)157 Downloads (Pure) -
Miniature robust high-bandwidth force sensor with mechanically amplified piezoresistive readout
Alveringh, D., van der Ven, D. L., Veltkamp, H.-W., Batenburg, K. M., Sanders, R. G. P., Fernandez Rivas, D. & Wiegerink, R. J., 11 Feb 2022, 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS). Tokyo, Japan: IEEE, p. 684-687 4 p.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
Open AccessFile1 Citation (Scopus)282 Downloads (Pure) -
2019
A simple and robust fabrication method for creating 3D tapered polydimethylsiloxane channels
Rho, H. S., Veltkamp, H.-W., Baptista, D., le Gac, S. & Habibovic, P., 27 Oct 2019, 23rd International Conference on Miniaturized Systems for Chemistry and Life Sciences. p. 1156-1157 2 p.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
4 Downloads (Pure) -
Device simulation of heavily doped silicon electrical resistivity at extremely high temperatures
Zhao, Y., Hueting, R., Veltkamp, H.-W., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., 4 Jul 2019, Proceedings of the 22nd Semiconductor Advances for Future Electronics (SAFE) workshop 2019. University of Twente, p. 108-109 2 p.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic
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High power Si sidewall heaters for fluidic application fabricated by trench-assisted surface channel technology
Veltkamp, H.-W., Zhao, Y., de Boer, M. J., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., Jan 2019, 2019 IEEE 32nd Conference on Micro Electro Mechanical Systems (MEMS). IEEE, Vol. 32. p. 648-651 4 p.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
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High Power Si Sidewall Heaters for Fluidic Applications Fabricated by Trench-Assisted Surface Channel Technology
Veltkamp, H. W., Zhao, Y., De Boer, M. J., Sanders, R. G. P., Wiegerink, R. J. & Lotters, J. C., 17 Oct 2019, 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019. IEEE, p. 648-651 4 p. 8870667Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
Open AccessFile3 Citations (Scopus)93 Downloads (Pure) -
Towards 3D printed microfluidic structures in alumina
Veltkamp, H.-W., Zhao, Y., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., 4 Jul 2019, Proceedings of the 22nd Semiconductor Advances for Future Electronics (SAFE) workshop. Delft, p. 120-121 2 p.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic
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Towards a disposable polymer-based micro-bioreactor
Akegawa Monteiro, F., Veltkamp, H.-W., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., 4 Jul 2019, Proceedings of the 22nd Semiconductor Advances for Future Electronics (SAFE) workshop. Delft, p. 78-79 2 p.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic
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2018
Design principles and fabrication method for a miniaturized fuel gas combustion reactor
Zhao, Y., Veltkamp, H.-W., de Boer, M. J., Zeng, Y., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 7 Jun 2018, Proceedings of the 21st Semiconductor Advances for Future Electronics (SAFE) workshop. Enschede: University of Twente, p. 10 1 p.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic
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Trench-assisted surface channel technology (TASCT) as platform for high-temperature physical parameter sensing
Veltkamp, H.-W., Zhao, Y., de Boer, M. J., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 7 Jun 2018, Proceedings of the 21st Semiconductor Advances for Future Electronics (SAFE) workshop. Enschede: University of Twente, p. 9 1 p.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic
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2017
Design principles and fabrication method for a miniaturized fuel gas combustion reactor
Zhao, Y., Veltkamp, H.-W., de Boer, M. J., Zeng, Y., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 14 Oct 2017, The 3rd Conference on MicroFluidic Handling Systems: Conference Proceedings. Alveringh, D. (ed.). Enschede: University of Twente, p. 37-40Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic
Open AccessFile288 Downloads (Pure) -
Fabrication of large-volume rectangular channels using trench-sidewall technology and a SOI substrate
Veltkamp, H.-W., Zhao, Y., de Boer, M. J., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 14 Oct 2017, The 3rd Conference on MicroFluidic Handling Systems: Conference Proceedings . Alveringh, D. (ed.). Enschede: University of Twente, p. 114-117Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic
Open AccessFile212 Downloads (Pure) -
2016
Nano-pyramid arrays for nano-particle trapping
Sun, X., Veltkamp, H.-W., Berenschot, J. W., Gardeniers, J. G. E. & Tas, N. R., 24 Jan 2016, Nano-pyramid arrays for nano-particle trapping. Category numberCFP16MEM-ART; Code 119597, p. 185-188Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
1 Citation (Scopus)37 Downloads (Pure)