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Research Output 2016 2019

  • 4 Conference contribution
  • 2 Abstract
  • 2 Article
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Conference contribution
2019

High power Si sidewall heaters for fluidic application fabricated by trench-assisted surface channel technology

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., Jan 2019, 2019 IEEE 32nd Conference on Micro Electro Mechanical Systems (MEMS). IEEE, Vol. 32. p. 648-651 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

fluidics
heaters
heating
silicon
thermal expansion
2017
77 Downloads (Pure)

Design principles and fabrication method for a miniaturized fuel gas combustion reactor

Zhao, Y., Veltkamp, H-W., de Boer, M. J., Zeng, Y., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 14 Oct 2017, Conference Proceedings: The 3rd Conference on MicroFluidic Handling Systems. Enschede, Vol. 3. p. 37-40

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
Gas fuels
Combustors
Fabrication
MEMS
Mechanical stability
69 Downloads (Pure)

Fabrication of large-volume rectangular channels using trench-sidewall technology and a SOI substrate

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 14 Oct 2017, Conference Proceedings: The 3rd Conference on MicroFluidic Handling Systems. Enschede, Vol. 3. p. 114-117

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
Microfluidics
Fabrication
Silicon
Substrates
Electronics industry
2016
1 Citation (Scopus)
4 Downloads (Pure)

Nano-pyramid arrays for nano-particle trapping

Sun, X., Veltkamp, H-W., Berenschot, J. W., Gardeniers, J. G. E. & Tas, N. R., 24 Jan 2016, Nano-pyramid arrays for nano-particle trapping. Category numberCFP16MEM-ART; Code 119597, p. 185-188

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

pyramids
trapping
lithography
trapped particles
miniaturization