Research output per year
Research output per year
Search results
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2019
A short post-processing method for high aspect ratio trenches after Bosch etching
Veltkamp, H.-W., Zhao, Y., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 23 Sept 2019. 1 p.Research output: Contribution to conference › Abstract › Academic
Open AccessFile145 Downloads (Pure) -
Highly-doped in-plane Si electrodes embedded between free-hanging microfluidic channels
Zhao, Y., Veltkamp, H.-W., Schut, T. V. P., Groenesteijn, J., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 23 Sept 2019.Research output: Contribution to conference › Abstract › Academic
Open AccessFile62 Downloads (Pure) -
Towards a miniaturized Wobbe index meter, an essential piece of equipment in the future?
Veltkamp, H.-W., Zhao, Y., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 9 Oct 2019, p. 30-31. 2 p.Research output: Contribution to conference › Abstract › Professional
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2017
Fabrication process for a large volume silicon nitride micro-combustor
Zhao, Y., Veltkamp, H.-W., de Boer, M. J., Zeng, Y., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 19 Sept 2017, p. 450.Research output: Contribution to conference › Abstract › Other research output
Open AccessFile165 Downloads (Pure) -
Selective SiO2 etching in three dimensional structures using parylene-C as mask
Veltkamp, H.-W., Zhao, Y., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 19 Sept 2017, p. 380.Research output: Contribution to conference › Abstract › Other research output
Open AccessFile323 Downloads (Pure)