Igor A. Makhotkin

  • 146 Citations
  • 7 h-Index
20102020

Research output per year

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Activities

  • 27 Oral presentation
  • 6 Invited talk

Optical properties of multilayers for operational wavelengths between 6.6 and 13.5 nm’

Andrey Yakshin (Speaker), Andrey Zameshin (Contributor), Dmitry Kuznetsov (Contributor), Igor Milov (Contributor), Igor A. Makhotkin (Contributor), Eric Louis (Contributor), Fred Bijkerk (Contributor)
4 Nov 20196 Nov 2019

Activity: Talk or presentationInvited talk

Damage processes in ruthenium thin films induced by femtosecond laser pulses for a wide range of incident photon energy

Igor Milov (Contributor), Igor A. Makhotkin (Speaker), Nikita Medvedev (Contributor), vladimir lipp (Contributor), B. Ziaja (Contributor), V. Khokhlov (Contributor), V. Zhakhovsky (Contributor), Yu. Petrov (Contributor), V. Shepelev (Contributor), D. Ilnitsky (Contributor), K. Migdal (Contributor), N. Inogamov (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)
21 Oct 2019

Activity: Talk or presentationOral presentation

Damage processes in ruthenium thin films induced by femtosecond laser pulses with varying incident photon energy

Igor Milov (Contributor), Igor A. Makhotkin (Speaker), Nikita Medvedev (Contributor), vladimir lipp (Contributor), B. Ziaja (Contributor), V. Khokhlov (Contributor), V. Zhakhovsky (Contributor), Yu. Petrov (Contributor), V. Shepelev (Contributor), D. Ilnitsky (Contributor), K. Migdal (Contributor), N. Inogamov (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)
27 May 2019

Activity: Talk or presentationOral presentation

Structural analysis of ion polished W/Si soft X-ray multilayer reflectors

Roman Medvedev (Contributor), Konstantin Nikolaev (Contributor), Andrey Zameshin (Contributor), Dennis IJpes (Contributor), Igor A. Makhotkin (Contributor), Sergey N. Yakunin (Contributor), Andrey Yakshin (Speaker), Fred Bijkerk (Contributor)
21 Oct 201923 Oct 2019

Activity: Talk or presentationOral presentation

Single-shot ablation of Ru thin films induced by fs EUV Free-Electron Laser

Igor Milov (Speaker), Igor A. Makhotkin (Contributor), Ryszard Sobierajski (Contributor), Nikita Medvedev (Contributor), Vladimir Lipp (Speaker), N. Inogamov (Contributor), V. Zhakhovsky (Contributor), V. Khokhlov (Contributor), Viacheslav Medvedev (Contributor), Eric Louis (Contributor), Fred Bijkerk (Contributor)
19 Jun 2018

Activity: Talk or presentationOral presentation

Damage processes in thin Ru films induced by single and multiple ultra-short XUV pulses

Igor A. Makhotkin (Speaker), Igor Milov (Contributor), Ryszard Sobierajski (Contributor), Jaromir Chalupský (Contributor), Kai Tiedtke (Contributor), Nikita Medvedev (Contributor), vladimir lipp (Contributor), B. Ziaja (Contributor), Frank Scholze (Contributor), V. Zhakhovsky (Contributor), N. Inogamov (Contributor), Hartmut Enkisch (Contributor), Gosse de Vries (Contributor), Frank Scholze (Contributor), Frank Siewert (Contributor), J.M. Sturm (Contributor), Konstantin Nikolaev (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Eric Louis (Contributor), Iwanna Jacyna (Contributor), Marek Jurek (Contributor), Dorota Klinger (Contributor), Laurent Nittler (Contributor), Yevgen Syryanyy (Contributor), Libor Juha (Contributor), Věra Hájková (Contributor), Vojtěch Vozda (Contributor), Tomáš Burian (Contributor), Karel Saksl (Contributor), Bart Faatz (Contributor), Barbara Keitel (Contributor), Elke Plönjes (Contributor), Siegfried Schreiber (Contributor), Sven Toleikis (Contributor), R.A. Loch (Contributor), Martin Hermann (Contributor), Sebastian Strobel (Contributor), Han Kwang Nienhuys (Contributor), Rilpho Dunker (Contributor), Grzegorz Gwalt (Contributor), Tobias Mey (Contributor), Mark A. Smithers (Contributor), Hendricus A.G.M. van Wolferen (Contributor), Enrico G. Keim (Contributor), F. Bijkerk (Contributor)
23 Jan 2018

Activity: Talk or presentationInvited talk

Correlated lateral density fluctuations in the Si layers of a W/Si multilayer revealed by GISAXS

Konstantin Nikolaev (Contributor), Sergey N. Yakunin (Contributor), Igor A. Makhotkin (Speaker), Joris de la Rie (Contributor), Roman Medvedev (Contributor), A.V. Rogachev (Contributor), C.P. Hendrikx (Contributor), M. Gateshki (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Andrey Yakshin (Contributor), F. Bijkerk (Contributor)
8 Nov 2018

Activity: Talk or presentationOral presentation

Damage processes in ruthenium thin films induced by XUV and x-ray free electron lasers

Igor Milov (Speaker), Igor A. Makhotkin (Contributor), Jaromir Chalupský (Contributor), Kai Tiedtke (Contributor), Frank Scholze (Contributor), F. Sievert (Contributor), Nikita Medvedev (Contributor), vladimir lipp (Contributor), V. Zhakhovsky (Contributor), N. Inogamov (Contributor), Hartmut Enkisch (Contributor), Gosse de Vries (Contributor), Ryszard Sobierajski (Contributor)
22 Nov 2018

Activity: Talk or presentationInvited talk

Photon-induced damage processes in Ruthenium thin films developed for Free Electron Laser Optics

Igor Milov (Contributor), Igor A. Makhotkin (Contributor), Ryszard Sobierajski (Contributor), Nikita Medvedev (Contributor), vladimir lipp (Contributor), B. Ziaja (Contributor), V. Khokhlov (Contributor), V. Zhakhovsky (Contributor), Yu. Petrov (Contributor), V. Shepelev (Contributor), D. Ilnitsky (Contributor), K. Migdal (Contributor), N. Inogamov (Contributor), V.V. Medvedev (Contributor), Eric Louis (Speaker), F. Bijkerk (Contributor)
9 Nov 2018

Activity: Talk or presentationOral presentation

Advancing thin film X-ray reflectivity data analysis

Igor A. Makhotkin (Speaker), Sergey N. Yakunin (Contributor), J.F. Woitok (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), F. Bijkerk (Contributor)
12 Dec 2018

Activity: Talk or presentationOral presentation

Irradiation of EUV-mirrors with multiple FEL pulses below the single shot damage threshold

Igor A. Makhotkin (Speaker), Hartmut Enkisch (Contributor), Ryszard Sobierajski (Contributor), Jaromir Chalupský (Contributor), Kai Tiedtke (Contributor), Gosse de Vries (Contributor), Michael Störmer (Contributor), Frank Scholze (Contributor), Frank Siewert (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Igor Milov (Contributor), Eric Louis (Contributor), I. Yatsyna (Contributor), Marek Jurek (Contributor), Libor Juha (Contributor), Věra Hájková (Contributor), Vojtěch Vozda (Contributor), Tomáš Burian (Contributor), Karel Saksl (Contributor), Bart Faatz (Contributor), Barbara Keitel (Contributor), E. Ploenjes (Contributor), Siegfried Schreiber (Contributor), Sven Toleikis (Contributor), R.A. Loch (Contributor), Martin Hermann (Contributor), Sebastian Strobel (Contributor), Han Kwang Nienhuys (Contributor)
6 Feb 2018

Activity: Talk or presentationOral presentation

Irradiation of EUV-mirrors with multiple FEL pulses below the single shot damage threshold

Igor A. Makhotkin (Speaker), Hartmut Enkisch (Contributor), Ryszard Sobierajski (Contributor), Jaromir Chalupský (Contributor), Kai Tiedtke (Contributor), Gosse de Vries (Contributor), Michael Störmer (Contributor), Frank Scholze (Contributor), Frank Siewert (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Igor Milov (Contributor), Eric Louis (Contributor), I. Yatsyna (Contributor), Marek Jurek (Contributor), Libor Juha (Contributor), Věra Hájková (Contributor), Vojtěch Vozda (Contributor), Tomáš Burian (Contributor), Karel Saksl (Contributor), Bart Faatz (Contributor), Barbara Keitel (Contributor), E. Ploenjes (Contributor), Siegfried Schreiber (Contributor), Sven Toleikis (Contributor), R.A. Loch (Contributor), Martin Hermann (Contributor), Sebastian Strobel (Contributor), Han Kwang Nienhuys (Contributor)
26 Mar 2018

Activity: Talk or presentationOral presentation

Simulations of Damage of Ru Thin Films Induced by Single-Shot fs EUV FEL Pulses

Igor Milov (Speaker), Igor A. Makhotkin (Contributor), Ryszard Sobierajski (Contributor), Nikita Medvedev (Contributor), vladimir lipp (Contributor), N. Inogamov (Contributor), V. Zhakhovsky (Contributor), Viacheslav Medvedev (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)
27 Mar 2018

Activity: Talk or presentationOral presentation

X-ray Standing Wave Measurements at the Free-Electron Laser FLASH

G. Mercurio (Contributor), Igor Alexandrovich Makhotkin (Contributor), Igor Milov (Contributor), Y-Y. Kim (Contributor), I. Zaluzhnyy (Contributor), S. Dziarzhytski (Speaker), L. Wenthaus (Contributor), Frederik Bijkerk (Contributor), Ivan Vartaniants (Speaker), W. Wurth (Contributor)
15 Sep 201717 Sep 2017

Activity: Talk or presentationOral presentation

Model independent approach for the analysis of GIXR data from thin films

Igor Alexandrovich Makhotkin (Speaker), Sergey N. Yakunin (Contributor), J.F. Woitok (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), E.J. Reuvekamp (Contributor), Frederik Bijkerk (Contributor)
13 Dec 2017

Activity: Talk or presentationOral presentation

Capabilities of model free X-ray standing wave analysis of periodic multilayer structures

I.A. Makhotkin (Speaker), S.N. Yakunin (Contributor), C.P. Hendrikx (Contributor), A. Chandrasekaran (Contributor), Andrey Zameshin (Contributor), A. Zarkadas (Contributor), M. Gateshki (Contributor), R.W.E. van de Kruijs (Contributor), E. Reuvekamp (Contributor), F. Bijkerk (Contributor)
22 May 2017

Activity: Talk or presentationOral presentation

Multilayer reflective optics for EUV Lithography

Eric Louis (Invited speaker), H. Enkisch (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Andrey Yakshin (Contributor), J.M. Sturm (Contributor), Igor Alexandrovich Makhotkin (Contributor), Stephan Müllender (Contributor), Frederik Bijkerk (Contributor)
12 Dec 2017

Activity: Talk or presentationInvited talk

EUVL optics for Free Electron Laser sources: damage threshold studies and the use of adjusted wavelengths

Eric Louis (Speaker), Andrey Zameshin (Contributor), Andrey Yakshin (Contributor), Igor Alexandrovich Makhotkin (Contributor), Frederik Bijkerk (Contributor)
7 Nov 2017

Activity: Talk or presentationOral presentation

Single-shot damage of Ru thin film induced by XUV FEL fs pulses

Igor Milov (Speaker), Igor Alexandrovich Makhotkin (Contributor), R. Sobierajski (Contributor), H. Enkisch (Contributor), Jaromir Chalupsky (Contributor), K. Tiedtke (Contributor), Gosse de Vries (Contributor), M. Störmer (Contributor), Frank Scholze (Contributor), F. Siewert (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), R. Keim (Contributor), H.A.G.M. van Wolferen (Contributor), Eric Louis (Contributor), I. Yatsyna (Contributor), M. Jurek (Contributor), L. Juha (Contributor), V. Hájková (Contributor), V. Vozda (Contributor), T. Burian (Contributor), K. Saksl (Contributor), B. Faatz (Contributor), B. Keitel (Contributor), E. Ploenjes (Contributor), S. Schreiber (Contributor), S. Toleikis (Contributor), R. Loch (Contributor), M. Hermann (Contributor), S. Strobel (Contributor), H. Nienhuys (Contributor), G. Gwalt (Contributor), Tobias Mey (Contributor), Klaus Man (Contributor)
24 Apr 2017

Activity: Talk or presentationInvited talk

Irradiation of EUV-mirrors with multiple FEL pulses below the single shot damage threshold

Igor Alexandrovich Makhotkin (Invited speaker), H. Enkisch (Contributor), R. Sobierajski (Contributor), Jaromir Chalupsky (Contributor), K. Tiedtke (Contributor), Gosse de Vries (Contributor), M. Störmer (Contributor), F. Scholze (Contributor), F. Siewert (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Igor Milov (Contributor), Eric Louis (Contributor), I. Yatsyna (Contributor), M. Jurek (Contributor), L. Juha (Contributor), V. Hájková (Contributor), V. Vozda (Contributor), T. Burian (Contributor), K. Saksl (Contributor), B. Faatz (Contributor), B. Keitel (Contributor), E. Ploenjes (Contributor), S. Schreiber (Contributor), S. Toleikis (Contributor), R.A. Loch (Contributor), M. Hermann (Contributor), S. Strobel (Contributor), H. Nienhuys (Contributor)
24 Apr 201727 Apr 2017

Activity: Talk or presentationInvited talk

Model independent approach for the analysis of GIXR data from thin films

I.A. Makhotkin (Contributor), S.N. Yakunin (Speaker), J.F. Woitok (Contributor), R.W.E. van de Kruijs (Contributor), E. Reuvekamp (Contributor), F. Bijkerk (Contributor)
23 May 2017

Activity: Talk or presentationOral presentation

Single-shot damage of Ru thin film induced by XUV FEL fs pulses

Igor Milov (Speaker), Igor Alexandrovich Makhotkin (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), R. Keim (Contributor), H.A.G.M. van Wolferen (Contributor), Eric Louis (Contributor), Frederik Bijkerk (Contributor)
25 Sep 2017

Activity: Talk or presentationOral presentation

Status of multilayer reflective optics

Eric Louis (Speaker), H. Enkisch (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Andrey Yakshin (Contributor), J.M. Sturm (Contributor), Igor A. Makhotkin (Contributor), Christopher James Lee (Contributor), Stephan Müllender (Contributor), F. Bijkerk (Contributor)
28 Feb 2017

Activity: Talk or presentationOral presentation

Novel approach to simultaneous analysis of grazing incidence X-ray reflectivity and X-ray standing wave data

S.N. Yakunin (Speaker), I.A. Makhotkin (Speaker), M. Chuev (Speaker), A.Y. Seregin (Speaker), E.M. Pashaev (Speaker), E. Louis (Speaker), R.W.E. van de Kruijs (Speaker), F. Bijkerk (Speaker), M.V. Kovalchuk (Speaker)
18 Jun 2012

Activity: Talk or presentationOral presentation

Wavelength selection for multilayer coatings for the lithography generation beyond EUVL

Igor Alexandrovich Makhotkin (Speaker), E. Zoethout (Speaker), Eric Louis (Speaker), A.M. Yakunin (Speaker), S. Muellender (Speaker), Frederik Bijkerk (Speaker)
12 Feb 2012

Activity: Talk or presentationOral presentation

Multilayer coatings for the lithography generation beyond EUVL

Igor Alexandrovich Makhotkin (Speaker), Eric Louis (Speaker), E. Zoethout (Speaker), Frederik Bijkerk (Speaker)
10 Dec 2012

Activity: Talk or presentationOral presentation

Multilayer coatings for the lithography generation beyond EUVL

Igor Alexandrovich Makhotkin (Speaker), E. Zoethout (Speaker), Eric Louis (Speaker), A.M. Yakunin (Speaker), V.Y. Banine (Speaker), S. Muellender (Speaker), Frederik Bijkerk (Speaker)
30 Sep 2012

Activity: Talk or presentationOral presentation

Multilayer coatings for the lithography generation beyond EUVL

Igor Alexandrovich Makhotkin (Speaker), E. Zoethout (Speaker), Eric Louis (Speaker), A.M. Yakunin (Speaker), V. Banine (Speaker), S. Muellender (Speaker), Frederik Bijkerk (Speaker)
30 Sep 2012

Activity: Talk or presentationOral presentation

Wavelength selection for multilayer coatings for the lithography generation beyond EUVL

Igor Alexandrovich Makhotkin (Speaker), E. Zoethout (Speaker), Eric Louis (Speaker), S.N. Yakunin (Speaker), S. Muellender (Speaker), Frederik Bijkerk (Speaker)
12 Feb 2012

Activity: Talk or presentationOral presentation

Multilayer coatings for the lithography generation beyond EUVL

Igor Alexandrovich Makhotkin (Speaker), E. Zoethout (Speaker), Eric Louis (Speaker), A.M. Yakunin (Speaker), V. Banine (Speaker), S. Muellender (Speaker), Frederik Bijkerk (Speaker)
30 Sep 2012

Activity: Talk or presentationOral presentation

Wavelength selection for multilayer coatings for the lithography generation beyond EUVL

Igor Alexandrovich Makhotkin (Speaker), E. Zoethout (Speaker), Eric Louis (Speaker), S.N. Yakunin (Speaker), S. Muellender (Speaker), Frederik Bijkerk (Speaker)
17 Oct 2011

Activity: Talk or presentationOral presentation

Nitrogen Passivation in La/B4C Layered Structures

Igor Alexandrovich Makhotkin (Speaker), E. Zoethout (Speaker), Eric Louis (Speaker), Frederik Bijkerk (Speaker)
19 Sep 2011

Activity: Talk or presentationOral presentation

Structural influence of N-ions treatment on the La-B4C systems

Igor Alexandrovich Makhotkin (Speaker), E. Zoethout (Speaker), Eric Louis (Speaker), Robbert Wilhelmus Elisabeth van de Kruijs (Speaker), Andrey Yakshin (Speaker), T. Tsarfati (Speaker), A.Y. Seregin (Speaker), S.N. Yakunin (Speaker), Frederik Bijkerk (Speaker)
7 Dec 2010

Activity: Talk or presentationOral presentation