Igor A. Makhotkin

  • 137 Citations
  • 7 h-Index
20102019
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Research Output 2010 2019

2019
1 Citation (Scopus)
17 Downloads (Pure)

Grazing-incidence small-angle X-ray scattering study of correlated lateral density fluctuations in W/Si multilayers

Nikolaev, K. V., Yakunin, S. N., Makhotkin, I. A., de la Rie, J., Medvedev, R. V., Rogachev, A. V., Trunckin, I. N., Vasiliev, A. L., Hendrikx, C. P., Gateshki, M., van de Kruijs, R. W. E. & Bijkerk, F., Mar 2019, In : Acta Crystallographica Section A: Foundations and Advances. 75, p. 342-351 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
X ray scattering
grazing incidence
Scanning Transmission Electron Microscopy
Multilayers
X-Rays

Hydrogenation dynamics of Ru capped y thin films

Soroka, O., Sturm, J. M., Van De Kruijs, R. W. E., Makhotkin, I. A., Nikolaev, K., Yakunin, S. N., Lee, C. J. & Bijkerk, F., 8 Oct 2019, In : Journal of applied physics. 126, 14, 145301.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
hydrogenation
thin films
ellipsometry
hydrogen
surface plasmon resonance

Low-energy ion polishing of Si in W/Si soft X-ray multilayer structures

Medvedev, R. V., Nikolaev, K. V., Zameshin, A. A., Ijpes, D., Makhotkin, I. A., Yakunin, S. N., Yakshin, A. E. & Bijkerk, F., 25 Jul 2019, In : Journal of applied physics. 126, 4, 045302.

Research output: Contribution to journalArticleAcademicpeer-review

polishing
laminates
reflectance
roughness
ions

Multi-dimensional analysis of nano-scale periodic structures using EUV and X-RAY characterization: theoretical concepts and applications

Nikolaev, K., 4 Jul 2019, Enschede: University of Twente. 130 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

dimensional analysis
x rays
theses
reflectance
grazing incidence

Optical and structural characterization of orthorhombic LaLuO3 using extreme ultraviolet reflectometry

Tryus, M., Nikolaev, K. V., Makhotkin, I. A., Schubert, J., Kibkalo, L., Danylyuk, S., Giglia, A., Nicolosi, P. & Juschkin, L., 30 Jun 2019, In : Thin solid films. 680, p. 94-101 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Optical constants
error analysis
Pulsed laser deposition
Stoichiometry
Error analysis
15 Downloads (Pure)

Surface structure determination by x-ray standing waves at a free-electron laser

Mercurio, G., Makhotkin, I. A., Milov, I., Kim, Y., Zaluzhnyy, I., Dziarzhytski, S., Wenthaus, L., Vartanyants, I. & Wurth, W., 28 Mar 2019, In : New journal of physics. 21, 3, 13 p., 033031.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
standing waves
free electron lasers
x rays
dynamic structural analysis
temporal resolution
2018
17 Downloads (Pure)

Advancing X-ray standing wave data analysis

Makhotkin, I. A., Yakunin, S. N., Hendrikx, C. P., Chandrasekaran, A., van de Kruijs, R. W. E. & Bijkerk, F., 7 Nov 2018.

Research output: Contribution to conferencePosterAcademic

File
standing waves
x rays
mirrors
reflectance
fluorescence
2 Citations (Scopus)
46 Downloads (Pure)

Damage accumulation in thin ruthenium films induced by repetitive exposure to femtosecond XUV pulses below the single-shot ablation threshold

Makhotkin, I. A., Milov, I., Chalupský, J., Tiedtke, K., Enkisch, H., de Vries, G., Scholze, F., Siewert, F., Sturm, J. M., Nikolaev, K. V., van de Kruijs, R. W. E., Smithers, M. A., Van Wolferen, H. A. G. M., Keim, E. G., Louis, E., Jacyna, I., Jurek, M., Klinger, D., Pelka, J. B., Juha, L. & 15 othersHájková, V., Vozda, V., Sburian, T., Saksl, K., Faatz, B., Keitel, B., Plönjes, E., Schreiber, S., Toleikis, S., Loch, R., Hermann, M., Strobel, S., Donker, R., Mey, T. & Sobierajski, R., 1 Nov 2018, In : Journal of the Optical Society of America B: Optical Physics. 35, 11, p. 2799-2805 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
free electron lasers
ruthenium
ablation
shot
damage
9 Citations (Scopus)
31 Downloads (Pure)

Experimental study of EUV mirror radiation damage resistance under long-term free-electron laser exposures below the single-shot damage threshold

Makhotkin, I. A., Sobierajski, R., Chalupsky, J., Tiedtke, K., de Vries, G., Störmer, M., Scholze, F., Siewert, F., van de Kruijs, R. W. E., Milov, I., Louis, E., Jacyna, I., Jurek, M., Klinger, D., Nittler, L., Syryanyy, Y., Juha, L., Hájková, V., Vozda, V., Burian, T. & 13 othersSaksl, K., Faatz, B., Keitel, B., Plonjes, E., Schreiber, S., Toleikis, S., Loch, R., Hermann, M., Strobel, S., Nienhuys, H. K., Gwalt, G., Mey, T. & Enkisch, H., Jan 2018, In : Journal of synchrotron radiation. 25, 1, p. 77-84 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Free electron lasers
Radiation damage
yield point
radiation damage
free electron lasers
5 Citations (Scopus)
21 Downloads (Pure)

Mechanism of single-shot damage of Ru thin films irradiated by femtosecond extreme UV free-electron laser

Milov, I., Makhotkin, I. A., Sobierajski, R., Medvedev, N., lipp, V., Chalupsky, J., Sturm, J. M., Tiedtke, K., de Vries, G., Störmer, M., Siewert, F., van de Kruijs, R., Louis, E., Jacyna, I., Jurek, M., Juha, L., Hájková, V., Vozda, V., Burian, T., Saksl, K. & 13 othersFaatz, B., Keitel, B., Plönjes, E., Schreiber, S., Toleikis, S., Loch, R., Hermann, M., Strobel, S., Nienhuys, H. K., Gwalt, G., Mey, T., Enkisch, H. & Bijkerk, F., 23 Jul 2018, In : Optics express. 26, 15, p. 19665-19685 21 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
ultraviolet lasers
free electron lasers
shot
damage
thin films
1 Citation (Scopus)
39 Downloads (Pure)

Modeling of XUV-induced damage in Ru films: The role of model parameters

Milov, I., Lipp, V., Medvedev, N., Makhotkin, I. A., Louis, E. & Bijkerk, F., 28 Sep 2018, In : Journal of the Optical Society of America B: Optical Physics. 35, 10, p. B43-B53 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
damage
photoabsorption
hot electrons
ruthenium
electrons

Modelling of damage in Ru thin films induced by femtosecond XUV laser pulses

Milov, I., Makhotkin, I. A., Sobierajski, R., Medvedev, N., lipp, V., Ziaja, B., Khokhlov, V., Zhakhovsky, V., Petrov, Y., Shepelev, V., Ilnisky, D., Migdal, K., Inogamov, N., Medvedev, V. V., Louis, E. & Bijkerk, F., 17 Sep 2018.

Research output: Contribution to conferencePosterAcademic

x ray lasers
spallation
free electron lasers
ballistic ranges
damage
32 Downloads (Pure)

Specular reflection intensity modulated by grazing-incidence diffraction in a wide angular range

Nikolaev, K. V., Makhotkin, I. A., Yakunin, S. N., Van De Kruijs, R. W. E., Chuev, M. A. & Bijkerk, F., 1 Sep 2018, In : Acta Crystallographica Section A: Foundations and Advances. 74, 5, p. 545-552 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
specular reflection
grazing incidence
X-Ray Diffraction
Theoretical Models
Diffraction
1 Citation (Scopus)

Study of ultrathin Pt/Co/Pt trilayers modified by nanosecond XUV pulses from laser-driven plasma source

Jacyna, I., Klinger, D., Pełka, J. B., Minikayev, R., Dłużewski, P., Dynowska, E., Jakubowski, M., Klepka, M. T., Zymierska, D., Bartnik, A., Kurant, Z., Wolska, A., Wawro, A., Sveklo, I., Plaisier, J. R., Eichert, D., Brigidi, F., Makhotkin, I., Maziewski, A. & Sobierajski, R., 30 Sep 2018, In : Journal of alloys and compounds. 763, p. 899-908 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Plasma sources
Laser pulses
X rays
Magnetization
Lasers
2017

Advanced crystal surface characterization with asymmetrical X-ray diffraction

Nikolaev, K., Yakunin, S. N., Makhotkin, I. A., van de Kruijs, R. W. E. & Bijkerk, F., 17 Jan 2017.

Research output: Contribution to conferencePosterOther research output

17 Downloads (Pure)

Crystal surface characterization

Nikolaev, K., Makhotkin, I., Yakunin, S., van de Kruijs, R. & Bijkerk, F., 22 May 2017.

Research output: Contribution to conferencePosterOther research output

Open Access
File
crystal surfaces
grazing incidence
x rays
insulators
injection

Nonequilibrium electron-phonon dynamics in ruthenium thin films exposed to ultra-short laser pulses

Milov, I., Makhotkin, I. A., Semin, S., Lee, C. J., Louis, E., Kimel, A. & Bijkerk, F., 17 Jan 2017.

Research output: Contribution to conferencePosterOther research output

X-ray standing wave experiments at FLASH

Mercurio, G., Makhotkin, I. A. (ed.), Milov, I. (ed.), Kim, Y. (ed.), Zaluzhnyy, I. (ed.), Dziarzhytski, S. (ed.), Wenthaus, L. (ed.), Vartanyants, I. (ed.) & Wurth, W. (ed.), 26 Jan 2017.

Research output: Contribution to conferencePosterOther research output

2016

In-house X-ray Standing Wave study of LaN/B multilayer mirrors

Hendrikx, C. P., Makhotkin, I. A., Yakunin, S. N., van de Kruijs, R. W. E. & Bijkerk, F., 10 Nov 2016, p. -.

Research output: Contribution to conferencePosterOther research output

In-situ study of the YH2-YH3+x transition during hydrogenation by GI-DAFS and HAXPEX

Makhotkin, I. A., Soroka, O., Yakunin, S. N., Nikolaev, K., Hendrikx, S. P. & Lee, C. J., 2016, Grenoble: Universiteit Twente, XUV Optics. 3 p.

Research output: Book/ReportReportProfessional

8 Citations (Scopus)
46 Downloads (Pure)
File
Multilayers
Optical constants
X-Rays
X rays
Incidence
4 Citations (Scopus)
45 Downloads (Pure)

Role of heat accumulation in the multi-shot damage of silicon irradiated with femtosecond XUV pulses at a 1 Mhz repetition rate

Sobierajski, R., Jacyna, I., Dluzewski, P., Klepka, M., Klinger, D., Pelka, J. B., Burian, T., Hajkova, V., Juha, L., Saksl, K., Vozda, V., Makhotkin, I. A., Louis, E., Faatz, B., Tiedtke, K., Toleikis, S., Enkisch, H., Hermann, M., Strobel, S., Loch, R. A. & 1 othersChalupsky, J., 29 Jun 2016, In : Optics express. 24, 14, p. 15468-15477 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
shot
repetition
damage
heat
thresholds

Single-shot damage of Ru thin film induced by FEL fs pulses

Milov, I., Makhotkin, I. A., Enkisch, H., Sobierajski, R., Chalupsky, J., Tiedtke, K., de Vries, G., Scholze, F., Siewert, F., Störmer, M., van de Kruijs, R. W. E., Keim, R., van Wolferen, H. A. G. M., Yatsyna, I., Jurek, M., Juha, L., Hajkova, V., Vozda, V., Burian, T., Saksl, K. & 11 othersFaatz, B., Keitel, B., Ploenjes, E., Schreiber, S., Toleikis, S., Loch, R., Hermann, M., Strobel, S., Nienhuys, H., Louis, E. & Bijkerk, F., 10 Nov 2016, p. -.

Research output: Contribution to conferencePosterOther research output

Single-shot damage of Ru thin film induced by FEL fs pulses

Milov, I., Makhotkin, I. A., Enkisch, H., Sobierajski, R., Chalupsky, J., Tiedtke, K., de Vries, G., Scholze, F., Siewert, F., Störmer, M., van de Kruijs, R. W. E., Keim, E. G., van Wolferen, H. A. G. M., Yatsyna, I., Jurek, M., Juha, L., Hajkova, V., Vozda, V., Burian, T., Saksl, K. & 11 othersFaatz, B., Keitel, B., Ploenjes, E., Schreiber, S., Toleikis, S., Loch, R. A., Hermann, M., Strobel, S., Nienhuys, H., Louis, E. & Bijkerk, F., 10 Nov 2016, p. -.

Research output: Contribution to conferencePosterOther research output

Study of crystal surface with asymmetrical X-Ray diffraction

Nikolaev, K., Makhotkin, I. A., Yakunin, S. N., van de Kruijs, R. W. E. & Bijkerk, F., 10 Jul 2016, p. -.

Research output: Contribution to conferencePosterOther research output

2015
Reflectivity
grazing incidence
Annealing
laminates
Multilayer

Electron density profile determination for multilayers

Zameshin, A., Makhotkin, I. A., Yakunin, S. N., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 20 Jan 2015, p. -.

Research output: Contribution to conferencePosterOther research output

GISAXS analysis of “delayed nitridation” 6.x nm multilayers

Kuznetsov, D., Yakshin, A., Makhotkin, I. A., Bijkerk, F., Mukharamova, N., Yakunin, S. N. & Subbotin, I. A., 1 Oct 2015, p. -.

Research output: Contribution to conferencePosterOther research output

X-Rays
Research
2014

Advanced metrology for multilayer mirrors

Makhotkin, I. A., van de Kruijs, R. W. E., Yakunin, S. N., Zoethout, E., Louis, E., Yakshin, A. & Bijkerk, F., 21 Jan 2014, p. -.

Research output: Contribution to conferencePosterOther research output

Assumption-independent approach for GIXRR data analysis for periodic structures

Zameshin, A., Makhotkin, I. A., Yakunin, S. N., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 25 Sep 2014, p. -.

Research output: Contribution to conferencePosterOther research output

18 Citations (Scopus)
172 Downloads (Pure)

Combined EUV reflectance and X-ray reflectivity data analysis of periodic multilayer structures

Yakunin, S. N., Makhotkin, I. A., Nikolaev, K. V., van de Kruijs, R. W. E., Chuev, M. A. & Bijkerk, F., 2014, In : Optics express. 22, 17, p. 20076-20086 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
laminates
reflectance
grazing incidence
x rays
sensitivity
7 Citations (Scopus)

Diffusion-induced structural changes in La/B-based multilayers for 6.7-nm radiation

Nyabero, S. L., van de Kruijs, R. W. E., Yakshin, A., Makhotkin, I. A., Bosgra, J. & Bijkerk, F., 2014, In : Journal of micro/nanolithography, MEMS, and MOEMS. 13, 1, p. 013014-013014-5 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

Multilayers
thermal stability
reflectance
Radiation
annealing
3 Citations (Scopus)

Model independent X-ray standing wave analysis of periodic multilayer structures

Yakunin, S. N., Makhotkin, I. A., van de Kruijs, R. W. E., Chuev, M. A., Pashaev, E. M., Zoethout, E., Louis, E., Seregin, S. Y., Subbotin, I. A., Novikov, D., Bijkerk, F. & Kovalchuk, M. V., 2014, In : Journal of applied physics. 115, 13, p. - 134303.

Research output: Contribution to journalArticleAcademicpeer-review

standing waves
laminates
fluorescence
x rays
profiles

XUV Optics: from deposition to application

Makhotkin, I. A., Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A., Kuznetsov, D. & Bijkerk, F., 1 Jan 2014, p. -.

Research output: Contribution to conferencePosterOther research output

2013
5 Citations (Scopus)

Determination of preferential molecular orientation in porphyrin-fullerene dyad zndhd6ee monolayers by the x-ray standing-wave method and x-ray reflectometry

Seregin, A. Y., D'yakova, Y. A., Yakunin, S. N., Makhotkin, I. A., Alekseev, A. S., Klechkovskaya, V. V., Tereschenko, E. Y., Tkachenko, N. V., Lemmetyinen, H., Feigin, L. A. & Kovalchuk, M. V., 1 Jan 2013, In : Crystallography reports. 58, 6, p. 934-938 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Fullerenes
Molecular orientation
Porphyrins
standing waves
porphyrins

Multilayer development for the generation beyond EUV: 6.x nm

Makhotkin, I. A., Zoethout, E., Nyabero, S. L., Medvedev, V., van de Kruijs, R. W. E., Louis, E., Yakunin, A. M., Banine, V., Muellender, S. & Bijkerk, F., 20 Jun 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Multilayer development for the generation beyond EUVL: 6.x nm

Makhotkin, I. A., Zoethout, E., Nyabero, S. L., Medvedev, V., van de Kruijs, R. W. E., Yakshin, A., Louis, E., Yakunin, A. M., Banine, V., Muellender, S. & Bijkerk, F., 20 Jun 2013, p. -.

Research output: Contribution to conferencePosterOther research output

3 Citations (Scopus)

Optimization of LaN/B multilayer mirrors for 6.x nm wavelength

Makhotkin, I. A., van de Kruijs, R. W. E., Zoethout, E., Louis, E. & Bijkerk, F., 25 Aug 2013, Advances in X-Ray/EUV Optics and Components VIII. Khounsary, A., Goto, S. & Morawe, C. (eds.). SPIE, p. 1-5 5 p. (Proceedings of SPIE; vol. 8848).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

mirrors
reflectance
optimization
wavelengths
magnetron sputtering
28 Citations (Scopus)
35 Downloads (Pure)

Short period La/B and LaN/B multilayer mirrors for ~6.8 nm wavelength

Makhotkin, I. A., Zoethout, E., van de Kruijs, R., Yakunin, S. N., Louis, E., Yakunin, A. M., Banine, V., Müllender, S. & Bijkerk, F., 2 Dec 2013, In : Optics express. 21, 24, p. 29894-29904 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
mirrors
reflectance
wavelengths
grazing incidence
laminates
26 Downloads (Pure)

Structural and reflective characteristics of multilayers for 6.x nm wavelength

Makhotkin, I. A., 31 Oct 2013, Enschede: Universiteit Twente. 104 p.

Research output: ThesisPhD Thesis - Research external, graduation UTAcademic

Open Access
File
theses
mirrors
photolithography
wavelengths
optics
2012
4 Citations (Scopus)
1 Downloads (Pure)

Influence of noble gas ion polishing species on extreme ultraviolet mirrors

van den Boogaard, T., Zoethout, E., Makhotkin, I. A., Louis, E. & Bijkerk, F., 2012, In : Journal of applied physics. 112, 12, p. - 4 p., 123502.

Research output: Contribution to journalArticleAcademicpeer-review

polishing
rare gases
mirrors
roughness
ions

Modelling of shot damage tresholds of multilayer optics for short-wavelength FELs

Loch, R. A., Sobierajski, R., Louis, E., Bosgra, J., van de Kruijs, R. W. E., Makhotkin, I. A., Zoethout, E. & Bijkerk, F., 25 Jan 2012, p. -.

Research output: Contribution to conferencePosterOther research output

Multilayer development for the generation beyond EUV: 6.x nm

Makhotkin, I. A., Zoethout, E., van de Kruijs, R. W. E., Louis, E., Yakunin, A. M., Muellender, S. & Bijkerk, F., 21 Jun 2012, p. -.

Research output: Contribution to conferencePosterOther research output

Multilayer optics for 6.7 nm wavelength

Makhotkin, I. A., Zoethout, E., Louis, E. & Bijkerk, F., 10 Dec 2012, p. -.

Research output: Contribution to conferencePosterOther research output

2 Downloads (Pure)

Multilayers for 6.8 nm Wavelength

Makhotkin, I. A., Zoethout, E., Louis, E., Yakunin, A. M., Banine, V., Muellender, S. & Bijkerk, F., 8 Oct 2012, p. 74-74.

Research output: Contribution to conferencePosterOther research output

Open Access
File
mirrors
wavelengths
reflectance
lithography
laminates

Multilayers for the lithography generation beyond EUVL

Makhotkin, I. A., Zoethout, E., Louis, E., Yakunin, N. & Bijkerk, F., 29 Sep 2012, p. -.

Research output: Contribution to conferencePosterOther research output

Nitrogen interface passivation of La/B layeren structures

Makhotkin, I. A., Zoethout, E., Louis, E. & Bijkerk, F., 17 Jan 2012, p. -.

Research output: Contribution to conferencePosterOther research output

3 Downloads (Pure)

Reconstruction of the structure of La/B4C and LaN/B4C multilayer mirrors using X-ray Standing Waves

Makhotkin, I. A., Yakunin, S. N., Chuev, M., Zoethout, E., Louis, E., Novikov, D., Seregin, A. Y., Pashayev, I. M. & Bijkerk, F., 18 Jun 2012.

Research output: Contribution to conferencePosterOther research output

Open Access
File
13 Downloads (Pure)

Simultaneous analysis of Grazing Incidence X-Ray reflectivity and X-ray standing waves from periodic multilayer systems

Yakunin, S. N., Makhotkin, I. A., Chuyev, M. A., Seregin, A. Y., Pashayev, E. M., Louis, E., van de Kruijs, R. W. E., Bijkerk, F. & Kovalchuk, M. V., 15 Sep 2012, p. 115-115.

Research output: Contribution to conferenceAbstractOther research output

File
grazing incidence
standing waves
reflectance
x rays
fluorescence
23 Citations (Scopus)
5 Downloads (Pure)

Spectral properties of La/B - Based multilayer mirrors near the boron K absorption edge

Makhotkin, I. A., Zoethout, E., Louis, E., Yakunin, A. M., Müllender, S. & Bijkerk, F., 21 May 2012, In : Optics express. 20, 11, p. 11778-11786 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
boron
mirrors
reflectance
wavelengths
lanthanum compounds