Igor A. Makhotkin

  • 139 Citations
  • 7 h-Index
20102019
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Research Output 2010 2019

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Conference contribution
2013
3 Citations (Scopus)

Optimization of LaN/B multilayer mirrors for 6.x nm wavelength

Makhotkin, I. A., van de Kruijs, R. W. E., Zoethout, E., Louis, E. & Bijkerk, F., 25 Aug 2013, Advances in X-Ray/EUV Optics and Components VIII. Khounsary, A., Goto, S. & Morawe, C. (eds.). SPIE, p. 1-5 5 p. (Proceedings of SPIE; vol. 8848).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

mirrors
reflectance
optimization
wavelengths
magnetron sputtering
2012
2 Citations (Scopus)

Wavelength selection for multilayer coatings for the lithography generation beyond EUVL

Makhotkin, I. A., Zoethout, E., Louis, E., Yakunin, S. N., Muellender, S. & Bijkerk, F., 13 Mar 2012, Extreme Ultraviolet (EUV) Lithography III. Naulleau, P. P. & Wood II, O. R. (eds.). Bellingham, WA: SPIE, 5 p. 832213. (Proceedings of SPIE; vol. 8322).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

lithography
coatings
mirrors
reflectance
wavelengths