Igor A. Makhotkin

  • 148 Citations
  • 7 h-Index
20102020

Research output per year

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Research Output

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Conference contribution
2019

Determining the transmission of thin foil filters for soft X-ray free-electron laser radiation: an ablation imprint approach

Burian, T., Hájková, V., Saksl, K., Vozda, V., Makhotkin, I. A., Louis, E., Schreiber, S., Tiedtke, K., Toleikis, S., Keitel, B., Plönjes, E., Ruiz-Lopez, M. I., Kuhlmann, M., Wodzinski, A., Enkisch, H., Hermann, M., Strobel, S., Loch, R. A., Sobierajski, R., Jacyna, I. & 9 others, Klinger, D., Jurek, M., Pełka, J. B., de Vries, G., Störmer, M., Scholze, F., Siewert, F., Mey, T. & Chalupský, J., 14 May 2019, Optics Damage and Materials Processing by EUV/X-ray Radiation VII. (SPIE conference proceedings; vol. 11035).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2013

Optimization of LaN/B multilayer mirrors for 6.x nm wavelength

Makhotkin, I. A., van de Kruijs, R. W. E., Zoethout, E., Louis, E. & Bijkerk, F., 25 Aug 2013, Advances in X-Ray/EUV Optics and Components VIII. Khounsary, A., Goto, S. & Morawe, C. (eds.). SPIE, p. 1-5 5 p. (Proceedings of SPIE; vol. 8848).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

3 Citations (Scopus)
2012

Wavelength selection for multilayer coatings for the lithography generation beyond EUVL

Makhotkin, I. A., Zoethout, E., Louis, E., Yakunin, S. N., Muellender, S. & Bijkerk, F., 13 Mar 2012, Extreme Ultraviolet (EUV) Lithography III. Naulleau, P. P. & Wood II, O. R. (eds.). Bellingham, WA: SPIE, 5 p. 832213. (Proceedings of SPIE; vol. 8322).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)