Igor A. Makhotkin

  • 137 Citations
  • 7 h-Index
20102019
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Research Output 2010 2019

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Other contribution
2011

Determination of the density of ultrathin films using X-ray standing waves

Makhotkin, I. A., 2011, Veldhoven, Netherlands

Research output: Other contributionOther research output

standing waves
grazing incidence
x rays
reflectance
markers

Multilayers for the lithography generation beyond EUVL

Makhotkin, I. A., Zoethout, E., Louis, E., Yakunin, A. M. & Bijkerk, F., 2011, Veldhoven

Research output: Other contributionOther research output

lithography
reflectance
interlayers
wavelengths
ions

Nitrogen Passivation in La/B4C Layered Structures

Makhotkin, I. A., Zoethout, E., Louis, E. & Bijkerk, F., 2011, Bulgaria

Research output: Other contributionOther research output

passivity
nitrogen
nitrides
mirrors
binding energy

Wavelength selection for multilayer coatings for the lithography generation beyond EUVL

Makhotkin, I. A., Zoethout, E., Louis, E., Muellender, S. & Bijkerk, F., 2011, Miami, Florida (US)

Research output: Other contributionOther research output