Research Output per year
Research Output 2010 2019
2011
Determination of the density of ultrathin films using X-ray standing waves
Makhotkin, I. A., 2011, Veldhoven, NetherlandsResearch output: Other contribution › Other research output
standing waves
grazing incidence
x rays
reflectance
markers
Multilayers for the lithography generation beyond EUVL
Makhotkin, I. A., Zoethout, E., Louis, E., Yakunin, A. M. & Bijkerk, F., 2011, VeldhovenResearch output: Other contribution › Other research output
lithography
reflectance
interlayers
wavelengths
ions
Nitrogen Passivation in La/B4C Layered Structures
Makhotkin, I. A., Zoethout, E., Louis, E. & Bijkerk, F., 2011, BulgariaResearch output: Other contribution › Other research output
passivity
nitrogen
nitrides
mirrors
binding energy
Wavelength selection for multilayer coatings for the lithography generation beyond EUVL
Makhotkin, I. A., Zoethout, E., Louis, E., Muellender, S. & Bijkerk, F., 2011, Miami, Florida (US)Research output: Other contribution › Other research output