Igor A. Makhotkin

  • 139 Citations
  • 7 h-Index
20102019
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Research Output 2010 2019

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PhD Thesis - Research UT, graduation UT
2019

Multi-dimensional analysis of nano-scale periodic structures using EUV and X-RAY characterization: theoretical concepts and applications

Nikolaev, K., 4 Jul 2019, Enschede: University of Twente. 130 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

dimensional analysis
x rays
theses
reflectance
grazing incidence