• 8897 Citations
  • 49 h-Index
1984 …2020

Research output per year

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Research Output

2001

Failure mechanisms of pressurized microchannels, model, and experiments

Blom, M. T., Tas, N. R., Pandraud, G., Gardeniers, J. G. E., Chmela, E., Berenschot, J. W., Elwenspoek, M. C., Tijssen, R. & van den Berg, A., Mar 2001, In : Journal of microelectromechanical systems. 10, 1, p. 158-164 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
19 Citations (Scopus)
83 Downloads (Pure)

Formation and stabilization of pyramidal etch hillocks on silicon {100} in anisotropic etchants: Experiments and Monte Carlo simulation

Nijdam, A. J., van Veenendaal, E., Cuppen, H. M., van Suchtelen, J., Reed, M. L., Gardeniers, J. G. E., van Enckevort, W. J. P., Vlieg, E. & Elwenspoek, M. C., 1 Apr 2001, In : Journal of Applied Physics. 89, 89, p. 4113-4123 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

48 Citations (Scopus)

HDC-chip: an integrated micromachined separation system for polymers and particles

Chmela, E., Gardeniers, J. G. E., Tijssen, R. P. & Blom, M. T., 21 Oct 2001, Proceedings of Micro Total Analysis System (MicroTAS). Ramsey, J. M. & van den Berg, A. (eds.). Dordrecht: Kluwer Academic Publishers, p. 646-648 (MESA monographs).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Influence of the angle between etched (near) Si{111} surfaces and the substrate orientation on the underetch rate during anisotropic wet-chemical etching of silicon

Nijdam, A. J., Gardeniers, J. G. E., Berenschot, J. W., van Veenendaal, E., van Suchtelen, J. & Elwenspoek, M., Sep 2001, In : Journal of micromechanics and microengineering. 11, 5, p. 499-503 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

13 Citations (Scopus)

Local anodic bonding of Kovar to Pyrex aimed at high-pressure, solvent-resistant microfluidic connections

Blom, M. T., Chmela, E., Gardeniers, J. G. E., Berenschot, J. W., Elwenspoek, M. C., Tijssen, R. & van den Berg, A., Jul 2001, In : Journal of micromechanics and microengineering. 11, 4, p. 382-385 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

24 Citations (Scopus)

Micromachined Si-well scintillator pixel sensors for thermal neutron detection

Allier, C. P., Bom, V. R., Hollander, R. W., van Eijk, C. W. E., de Boer, M. J., Gardeniers, J. G. E., Sarro, P. M. & Czirr, J. B., 28 Jun 2001, Abstract book International Workshop on Position-Sensitive Neutron Detectors - Status and Perspectives. Berlin, Germany: Hahn-Meitner-Institut, p. 65-

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Micromachined Si-well scintillator pixel sensors for thermal neutron detection

Allier, C. P., Hollander, R. W., van Eijk, C. W. E., de Boer, M. J., Gardeniers, J. G. E., Sarro, P. M. & Czirr, J. B., 14 May 2001, Sensor Technology 2001: proceedings of the Sensor Technology Conference 2001. Elwenspoek, M. C. (ed.). Dordrecht, The Netherlands: Kluwer, p. 191-196

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Monolithic versus modular integration of a micro-fia system for ammonium determination

Veenstra, T. T., Tiggelaar, R. M., Sanders, R. G. P., Berenschot, J. W., Gardeniers, J. G. E., Wissink, J., Mateman, R., Elwenspoek, M. C. & van den Berg, A., 21 Oct 2001, Proceedings of Micro Total Analysis Systems Conference (MicroTAS). Ramsey, J. M. & van den Berg, A. (eds.). Dordrecht: Kluwer Academic Publishers, p. 664-666 (MESA monographs).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Multi-walled microchannels: free standig porous silicon membranes for use in MicroTAS

Tjerkstra, R. W., Gardeniers, J. G. E., Kelly, J. J. & van den Berg, A., 2001, In : Journal of microelectromechanical systems. 9, 4, p. 495-501

Research output: Contribution to journalArticleAcademicpeer-review

Use of selective anodic bonding to create micropump chambers with virtually no dead volume

Veenstra, T. T., Berenschot, J. W., Gardeniers, J. G. E., Sanders, R. G. P., Elwenspoek, M. C. & van den Berg, A., 2001, In : Journal of the Electrochemical Society. 148, 2, p. G68-G72

Research output: Contribution to journalArticleAcademicpeer-review

32 Citations (Scopus)
2000

165 K microcooler demonstrator with sorption compressor and micromachined cold stage

Burger, J. F., ter Brake, H. J. M., Holland, H. J., Seppenwoolde, J. H., Berenschot, J. W., Gardeniers, J. G. E., Elwenspoek, M. C. & Rogalla, H., 12 Oct 2000, University of Twente, The Netherlands

Research output: Other contributionOther research output

29Si-nuclear magnetic resonance on the etching products of silicon in potassium hydroxide solutions

Nijdam, A. J., van Veenendaal, E., Gardeniers, J. G. E., Kentgens, A. P. M., Nachtegaal, G. H. & Elwenspoek, M. C., Jun 2000, In : Journal of the Electrochemical Society. 147, 147 (6), p. 2195-2198 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

9 Citations (Scopus)

A light absorption cell for microTAS with KOH/IPA etched 450 mirrors in silicon

Tiggelaar, R. M., Veenstra, T. T., Sanders, R. G. P., Gardeniers, J. G. E., Elwenspoek, M. C. & van den Berg, A., 1 Oct 2000, Proceedings of MicroMechanics Europe (MME) 2000. Uppsala, Sweden, p. - 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

A micro viscosity detector for a planar hydrodynamic chromatography (HDC) system

van der Heyden, F. H. J., Blom, M. T., Gardeniers, J. G. E., Chmela, E., Elwenspoek, M. C., van den Berg, A. & Tijssen, R. P., 14 May 2000, Proceedings of MicroTAS 2000 conference. Enschede, p. 595-598

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

A simple selfpriming bubble tolerant peristaltic micropump

Veenstra, T. T., Berenschot, J. W., Sanders, R. G. P., Gardeniers, J. G. E., Elwenspoek, M. C. & van den Berg, A., 27 Aug 2000, Proceedings Eurosensors 2000 Conference. Kopenhagen, Denemarken, p. 371-372

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Etching pits and dislocations in Si{111}

Nijdam, A. J., Gardeniers, J. G. E., Gui, C. & Elwenspoek, M. C., Nov 2000, In : Sensors and actuators. A: Physical. 86, 3, p. 238-247 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

17 Citations (Scopus)

Fabrication and application of silicon-based microchannels

Gardeniers, J. G. E., Tjerkstra, R. W. & van den Berg, A., 1 May 2000, IMRET 3: Proceedings of the International Conference on microreaction technology. Frankfurt, Germany: Springer, p. 36-44

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Failure mechanisms of pressurized microchannels, model and experiments

Blom, M. T., Tas, N. R., Pandraud, G., Chmela, E., Gardeniers, J. G. E., Elwenspoek, M. C., van den Berg, A. & Tijssen, R. P., 23 Jan 2000, Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on. Piscataway: IEEE Computer Society, p. 199-204 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
49 Downloads (Pure)

Formation and stabilisation of pyramidal etching hillocks on silicon {100} in anisotropic etchants: experimental observations and Monte Carlo simulation

Nijdam, A. J., van Veenendaal, E., Cuppen, H., van Suchtelen, J., Reed, M. L., Gardeniers, J. G. E., van Enckevort, W. J. P., Vlieg, E. & Elwenspoek, M. C., 15 May 2000, Toulouse, France

Research output: Other contributionOther research output

Formation and stabilitation of pyramidal etching hillocks: experimental observations, Monte Carlo simulation and theory

Nijdam, A. J., van Veenendaal, E., Cuppen, H., van Suchtelen, J., Reed, M. L., Gardeniers, J. G. E., van Enckevort, W. J. P., Vlieg, E. & Elwenspoek, M. C., 12 Oct 2000, Enschede

Research output: Other contributionOther research output

Formation and stabilization of pyramidal etch hillocks on silicon {100} in anisotropic etchants: experiments and Monte Carlo simulation

Nijdam, A. J., van Veenendaal, E., Cuppen, H., van Suchtelen, J., Reed, M. L., Gardeniers, J. G. E., van Enckevort, W. J. P., Vlieg, E. & Elwenspoek, M. C., 1 Oct 2000, Proceedings of MicroMechanics Europe (MME) 2000. Uppsala, Sweden, p. - 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

High pressure, solvent-resistant microfluidic connections by local anodic bonding of Kovar to Pyrex

Blom, M. T., Chmela, E., Gardeniers, J. G. E., Berenschot, J. W., Elwenspoek, M. C., van den Berg, A. & Tijssen, R. P., 28 Nov 2000, Montreux, Switserland

Research output: Other contributionOther research output

High pressure, solvent-resistant microfluidic connections by local anodic bonding of Kovar to Pyrex

Blom, M. T., Chmela, E., Gardeniers, J. G. E., Berenschot, J. W., Elwenspoek, M. C., van den Berg, A. & Tijssen, R. P., 1 Oct 2000, Proceedings of MicroMechanics Europe (MME) 2000. Uppsala, Sweden, p. - 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

High-pressure, solvent-resistant microfluidic connections by local anodic bonding of kovar to pyrex

Blom, M. T., Chmela, E., Gardeniers, J. G. E., Berenschot, J. W., Tijssen, R. P., Elwenspoek, M. C. & van den Berg, A., 12 Oct 2000, Enschede

Research output: Other contributionOther research output

Hydrodynamic chromatography in micromachined separation channels

Gardeniers, J. G. E., 29 Mar 2000, Zeist

Research output: Other contributionOther research output

Inrichting geschikt voor het meten van de viscociteit van een fluidum

Tijssen, R. P., Chmela, E., van der Heyden, F. H. J., Blom, M. T., Gardeniers, J. G. E. & van den Berg, A., 12 May 2000, (In preparation) Priority date 12 May 2000

Research output: Patent

MAFIAS in modules

Veenstra, T. T., Tiggelaar, R. M., Mateman, R., Sanders, R. G. P., Wissink, J., Prak, A., Gardeniers, H. & Elwenspoek, M., 20 Jun 2000. 3 p.

Research output: Contribution to conferencePaper

Micro Chemical Systems

van den Berg, A., Gardeniers, J. G. E., Schasfoort, R. B. M., Oosterbroek, R. E., Tas, N. R., Schlautmann, S., Goedbloed, M. H., Veenstra, T. T. & Sanders, R. G. P., 12 Oct 2000, Enschede

Research output: Other contributionOther research output

Micromachining of buried micro channels in silicon

de Boer, M. J., Tjerkstra, W., Berenschot, J. W. E., Jansen, H. V., Burger, G. J., Gardeniers, J. G. E. H., Elwenspoek, M. & van den Berg, A., Mar 2000, In : Journal of microelectromechanical systems. 9, 9, p. 94-103 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
155 Citations (Scopus)
28 Downloads (Pure)

Microneedle structure and production method therefore

de Boer, M. J., Berenschot, J. W., Gardeniers, J. G. E. & Hefetz, M., 2 Oct 2000, (In preparation) Priority date 2 Oct 2000

Research output: Patent

Multi-walled microchannels: free-standing porous silicon membranes for use in μTAS

Tjerkstra, R. W., Gardeniers, J. G. E., Kelly, J. J. & van den Berg, A., Dec 2000, In : Journal of microelectromechanical systems. 9, 4, p. 495-501 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

40 Citations (Scopus)
17 Downloads (Pure)

Silicon based microfabrication of micro fluidic systems

Gardeniers, J. G. E. & van den Berg, A., 20 Jan 2000, Proceedings of the 3rd symposium on Microsystems in Practice. Utrecht, p. - 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Simulation of anisotropic wet chemical etching using a physical model

van Veenendaal, E., Nijdam, A. J., van Suchtelen, J., Sato, K., Gardeniers, J. G. E., van Enckevort, W. J. P. & Elwenspoek, M. C., Sep 2000, In : Sensors and actuators. A: Physical. 84, 3, p. 324-329 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

16 Citations (Scopus)

Technologies and devices for micro chemical systems

Gardeniers, H., Schasfoort, R. & van den Berg, A., 2000, In : MST news. 2000, 4, p. 10-13

Research output: Contribution to journalArticleAcademic

Open Access
File
7 Downloads (Pure)

The construction of orientation-dependent crystal growth and etch rate functions II: Application to wet chemical etching of silicon in potassium hydroxide

van Veenendaal, E., van Suchtelen, J., van Enckevort, W. J. P., Sato, K., Nijdam, A. J., Gardeniers, J. G. E. & Elwenspoek, M. C., 15 Jun 2000, In : Journal of Applied Physics. 87, 12, p. 8732-8740 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

17 Citations (Scopus)

The electrolysis of water: An actuation principle for MEMS with a big opportunity

Rusu, C. R., Neagu, C., Jansen, H. V., Gardeniers, J. G. E. & Elwenspoek, M. C., Jun 2000, In : Mechatronics. 10, 4, p. 571-581 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

54 Citations (Scopus)

ZrNi thin films for fast reversible hydrogen pressure actuation

Gardeniers, J. G. E., Burger, J. F., van Egmond, H. J., Holland, H. J., ter Brake, H. J. M. & Elwenspoek, M. C., 19 Jun 2000, Proceedings of Actuator 2000 Conference. Bremen, Germany, p. 208-211

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1999

Chemical mechanical polishing LPCVD silicon rich nitride

Gui, C., Sanchez, S., Gardeniers, J. G. E. & Elwenspoek, M. C., 21 Oct 1999, Honolulu, Hawai

Research output: Other contributionOther research output

Components for a Microcooler

Burger, J. F., Holland, H. J., ter Brake, H. J. M., Rogalla, H., Berenschot, J. W., Gardeniers, J. G. E., Elwenspoek, M. C. & van Egmond, H. J., 14 Oct 1999, University of Twente, Enschede

Research output: Other contributionOther research output

Components of a microminiature sorption cooler

ter Brake, H. J. M., Burger, J. F., Holland, H. J., Gardeniers, J. G. E., Elwenspoek, M. C., Rogalla, H. & van Egmond, H. J., 14 Jul 1999, Montreal, Canada

Research output: Other contributionOther research output

Etching of silicon in alkaline solutions: A critical look at the {111} minimum

Nijdam, A. J., van Suchtelen, J., Berenschot, J. W., Gardeniers, J. G. E. & Elwenspoek, M., 2 Mar 1999, In : Journal of crystal growth. 198-199, 1, p. 430-434 5 p.

Research output: Contribution to journalConference articleAcademicpeer-review

11 Citations (Scopus)
241 Downloads (Pure)

Fabrication of nanomechanical optical devices with aligned wafer bonding

Gui, C., Veldhuis, G. J., Koster, T. M., Lambeck, P., Berenschot, J. W., Gardeniers, J. G. E. & Elwenspoek, M. C., Feb 1999, In : Microsystem technologies. 5, 5, p. 138-143 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

5 Citations (Scopus)

High pressure check valve for application in a miniature cryogenic sorption cooler

Burger, J. F., van der Wekken, M. C., Berenschot, J. W., Holland, H. J., ter Brake, H. J. M., Rogalla, H., Gardeniers, J. G. E. & Elwenspoek, M. C., 17 Jan 1999, Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). Piscataway: IEEE Computer Society, p. 183-188 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
10 Citations (Scopus)
180 Downloads (Pure)

Hydrodynamic chromatography in micromachined separation channels

Blom, M. T., Chmela, E., Gardeniers, J. G. E., van den Berg, A. & Tijssen, R. P., 14 Oct 1999, Enschede

Research output: Other contributionOther research output

Hydrodynamic chromatography of polymers in an integrated micromachined separation system

Chmela, E., Blom, M. T., Gardeniers, J. G. E., van den Berg, A. & Tijssen, R. P., 4 Jul 1999, Bratislava, Slovakia

Research output: Other contributionOther research output

MAFIAS - the making of ...

Veenstra, T. T., Sanders, R. G. P., Gardeniers, J. G. E., Elwenspoek, M. C. & van den Berg, A., 14 Oct 1999, Enschede

Research output: Other contributionOther research output

MOCVD grown Pb(ZrTi)O3 thin films for applications in micromechanics and integrated optical - initial results -

Moret, M. P., Rossinger, S. A., van der Linden, H. J., Haverkamp, E., van Sark, W. G. J. H. M., Larsen, P. K., Gardeniers, J. G. E., Hoekman, M., Sanders, R. G. P. & Lambeck, P. V., 12 Jul 1999.

Research output: Contribution to conferencePoster

MOCVD grown Pb(ZrTi)O3 thin films for applications in micromechanics and integrated optics: initial results

Haverkamp, E., van Sark, W., Larsen, P., Gardeniers, J. G. E., Hoekman, M., Sanders, R. G. P., Lambeck, P. & van der Linden, H. J., 26 May 1999, Nijmegen

Research output: Other contributionOther research output

Simulation of anisotropic wet-chemical etching using a physical model

van Suchtelen, J., Sato, K., van Veenendaal, E., Nijdam, A. J., Gardeniers, J. G. E., van Enckevort, W. J. P. & Elwenspoek, M. C., 17 Jan 1999, Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). Piscataway: IEEE Computer Society, p. 332-337 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
6 Citations (Scopus)
98 Downloads (Pure)

The effect of surface roughness on direct wafer bonding

Gui, C., Elwenspoek, M. C., Tas, N. R. & Gardeniers, J. G. E., 15 May 1999, In : Journal of Applied Physics. 85, 10, p. 7448-7454 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
109 Citations (Scopus)
145 Downloads (Pure)