• 8897 Citations
  • 49 h-Index
1984 …2020

Research output per year

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Research Output

1999

The Surface adhesion parameter: A measure for wafer bondability

Gui, C., Elwenspoek, M. C., Tas, N. R. & Gardeniers, J. G. E., 17 Jan 1999, Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). Piscataway: IEEE, p. 290-295 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
2 Citations (Scopus)
328 Downloads (Pure)

The use of selective anodic bonding to create near-zero dead volume membranes

Veenstra, T. T., Berenschot, J. W., Gardeniers, J. G. E., Sanders, R. G. P., Elwenspoek, M. C. & van den Berg, A., 17 Oct 1999, Proceedings of the 1999 joint international meeting. Hawaii, p. 998-

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Velocity sources as an explanation for experimentally observed variations in Si{111} etch rates

Nijdam, A. J., Berenschot, J. W., van Suchtelen, J., Gardeniers, J. G. E. & Elwenspoek, M. C., Jun 1999, In : Journal of micromechanics and microengineering. 9, 9, p. 135-138 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

16 Citations (Scopus)
1998

An Actuation Principle: The Electrolysis of Water

Neagu, C., Jansen, H., Gardeniers, J. G. E. & Elwenspoek, M., 1998, Sensor technology in the Netherlands - state of the art: proceedings of the Dutch Sensor Conference, 2-3 March, 1998, University of Twente, the Netherlands. van den Berg, A. & Bergveld, P. (eds.). Dordrecht: Kluwer Academic Publishers, p. 255-261 (MESA monographs; vol. 2).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Development of a miniature sorption cooler

Burger, J. F., Holland, H. J., van der Wekken, M., Gardeniers, J. G. E., Elwenspoek, M. C., ter Brake, H. J. M. & Rogalla, H., 23 Jun 1998, Enschede

Research output: Other contributionOther research output

Direct measurement of piezoelectric properties of Sol-Gel PZT films

Gardeniers, J. G. E., Verholen, A. G. B. J., Verholen, A. G. B. J., Tas, N. R. & Elwenspoek, M. C., 1998, In : Journal of the Korean Physical Society. 32, 32, p. S1573-S1577 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
22 Citations (Scopus)
45 Downloads (Pure)

Electrochemical Fabrication of Multi Walled Micro Channels

Tjerkstra, R. W., Gardeniers, J. G. E., Elwenspoek, M. C. & van den Berg, A., 25 Mar 1998, Micro Total Analysis Systems ’98: Proceedings of the uTAS ’98 Workshop, held in Banff, Canada, 13–16 October 1998. Harrison, D. J. & van den Berg, A. (eds.). Dordrecht: Kluwer Academic Publishers, p. 133-136

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Etching of silicon in alkaline solutions: a critical look at the {111} minimum

Nijdam, A. J., van Suchtelen, J., Berenschot, J. W., Gardeniers, J. G. E. & Elwenspoek, M., 28 Jul 1998.

Research output: Contribution to conferencePoster

Fabrication of multi-layer substrates for high aspect ratio single crystalline microstructures

Gui, C., de Boer, M. J., Gardeniers, J. G. E., Jansen, H. V., Berenschot, J. W. & Elwenspoek, M. C., 1 Oct 1998, In : Sensors and actuators. A: Physical. 70, 1-2, p. 61-66 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
12 Citations (Scopus)
49 Downloads (Pure)

Mechano-optical waveguide on-off intensity modulator

Veldhuis, G. J., Gui, C., Nauta, T., Nauta, T., Koster, T. M., Berenschot, J. W., Lambeck, P., Gardeniers, J. G. E. & Elwenspoek, M. C., 1 Oct 1998, In : Optics letters. 23, 19, p. 1532-1534 3 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
7 Citations (Scopus)
12 Downloads (Pure)

Multi-walled micro channels

Tjerkstra, R. W., Gardeniers, J. G. E., van den Berg, A. & Elwenspoek, M. C., 23 Jun 1998, Enschede

Research output: Other contributionOther research output

Nanomechanical optical devices fabricated with aligned wafer bonding

Gui, C., Veldhuis, G. J., Koster, T. M., Lambeck, P., Berenschot, J. W., Gardeniers, J. G. E. & Elwenspoek, M. C., 25 Jan 1998, The Eleventh Annual International Workshop on Micro Electro Mechanical Systems, MEMS 98 Proceedings. Piscataway: IEEE Computer Society, p. 482-487 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
6 Citations (Scopus)
65 Downloads (Pure)

Nanomechanical optical devices fabricated with aligned wafer bonding

Gui, C., Veldhuis, G. J., Koster, T. M., Lambeck, P., Berenschot, J. W., Gardeniers, J. G. E. & Elwenspoek, M. C., 23 Jun 1998, Enschede

Research output: Other contributionOther research output

Network functions for representation of crystal growth and etch rates

van Suchtelen, J., van Veenendaal, E., Nijdam, A. J., Gardeniers, J. G. E., van Enckevort, W. J. P. & Elwenspoek, M. C., 18 May 1998, Holten

Research output: Other contributionOther research output

Network funtions for representaiton of crystal growth and etch rates

van Suchtelen, J., van Veenendaal, E., Nijdam, A. J., Gardeniers, J. G. E., van Enckevort, W. J. P. & Elwenspoek, M. C., 23 Jun 1998, Enschede

Research output: Other contributionOther research output

Network parameter fitting of orientation dependent etching of silicon

van Veenendaal, E., van Suchtelen, J., Sato, K., Nijdam, A. J., Gardeniers, J. G. E., van Enckevort, W. J. P. & Elwenspoek, M. C., 23 Jun 1998, Enschede

Research output: Other contributionOther research output

PbZrxTi(1-x)O3 films for MEMS

Gardeniers, J. G. E., 30 Sep 1998, Amsterdam

Research output: Other contributionOther research output

Preferred orientation and piezoelectricity in sputtered ZnO films

Gardeniers, J. G. E., Rittersma, Z. M. & Burger, G. J., 1998, In : Journal of Applied Physics. 83, 12, p. 7844-7854

Research output: Contribution to journalArticleAcademicpeer-review

179 Citations (Scopus)

Present and future role of chemical mechanical polishing in wafer bonding

Gui, C., Elwenspoek, M. C., Gardeniers, J. G. E. & Lambeck, P., Jun 1998, In : Journal of the Electrochemical Society. 145, 6, p. 2198-2204 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
16 Citations (Scopus)
491 Downloads (Pure)

Present and future role of CMP in wafer bonding

Gui, C., Elwenspoek, M. C., Gardeniers, J. G. E. & Lambeck, P., 31 Aug 1998, Proceedings of the fourth International Symposium on Semiconductor wafer bonding: science, technology and applications. Paris, France, p. 114-126

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

The combination of PZT piezoelectric layers and surface-micromachining in order to fabricate a linear micro-actuator

Tas, N. R., Gardeniers, J. G. E., Elwenspoek, M. C., ter Brake, H. J. M. & Blom, M. T., 23 Jun 1998, Enschede

Research output: Other contributionOther research output

The electrolysis of water: an actuation principle for MEMS with a big opportunity

Neagu, C., Jansen, H., Gardeniers, H. & Elwenspoek, M., 17 Jun 1998, Actuator 98: 6th International Conference on New Actuators with accompanying exhibition, conference proceedings, 17-19 June, 1998, Bremen, Germany. Borgmann, H. (ed.). Bremen, Germany: Messe Bremen GmbH, p. 118-121

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Towards a medical microactuator using electrochemical principle

Rusu, C. R., Gardeniers, J. G. E., Elwenspoek, M. C., Kelly, P. & Jansen, H. V., 23 Jun 1998, Enschede

Research output: Other contributionOther research output

Velocity sources as an explanation for experimentally observed variations in Si{111} etch rates

Nijdam, A. J., Berenschot, J. W., van Suchtelen, J., Gardeniers, J. G. E. & Elwenspoek, M. C., 23 Jun 1998, Enschede

Research output: Other contributionOther research output

Velocity sources as an explanation for experimentally observed variations in Si{111} etch rates

Nijdam, A. J., Berenschot, J. W., van Suchtelen, J., Gardeniers, J. G. E. & Elwenspoek, M. C., 3 Jun 1998, Proceedings of the Micromechanics Europe 1998 Conference (MME). Ulvik, Norway, p. 74-77

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1997

An electrochemical active valve

Rusu, C. R., Gardeniers, J. G. E., Elwenspoek, M. C. & Kelly, J. J., 1997, In : Electrochimica acta. 42, 20, p. 3367-3373 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
41 Citations (Scopus)
119 Downloads (Pure)

A novel micromechanical flow controller

van Toor, M. W., Lammerink, T. S. J., Gardeniers, J. G. E., Elwenspoek, M. C. & Monsma, D. J., Sep 1997, In : Journal of micromechanics and microengineering. 7, p. 165-169 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
3 Citations (Scopus)
48 Downloads (Pure)

Characterization of a planar microcoil for implantable microsystems

Neagu, C. R., Jansen, H. V., Smith, A., Gardeniers, J. G. E. & Elwenspoek, M. C., Jul 1997, In : Sensors and actuators. A: Physical. 62, 1-3, p. 599-611 13 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
82 Citations (Scopus)
262 Downloads (Pure)

Direct measurement of piezoelectric properties of sol-gel pzt films

Gardeniers, J. G. E., 25 Aug 1997, Seoul, Korea

Research output: Other contributionOther research output

Etching technology for chromatography microchannels

Tjerkstra, R. W., de Boer, M. J., Berenschot, J. W., Gardeniers, J. G. E., van den Berg, A. & Elwenspoek, M. C., 1997, In : Electrochimica acta. 42, 20, p. 3399-3406 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
34 Citations (Scopus)
56 Downloads (Pure)

Etching technology for microchannels

Tjerkstra, R. W., de Boer, M. J., Berenschot, J. W., Gardeniers, J. G. E., van den Berg, A. & Elwenspoek, M. C., 11 Jun 1997, Dish hotel Enschede

Research output: Other contributionOther research output

Etching technology for microchannels

Tjerkstra, R. W., de Boer, M. J., Berenschot, J. W., Gardeniers, J. G. E., van den Berg, A. & Elwenspoek, M. C., 26 Jan 1997, Proceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS. Piscataway: IEEE Computer Society, p. 147-152 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
39 Citations (Scopus)
637 Downloads (Pure)

Experiments on a Charcoal/Nitrogen sorption compressor and model considerations

Huinink, S., Burger, J. F., Holland, H. J., van der Sar, E. G., Gardeniers, J. G. E., ter Brake, H. J. M. & Rogalla, H., 15 Nov 1997, Proceedings of the 9th International Cryocooler Conference. Waterville Valley, New Hampshire, p. 597-606 10 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Fusion bonding of rough surfaces with polishing technique for silicon micromachining

Gui, C., Albers, H., Gardeniers, J. G. E., Elwenspoek, M. C. & Lambeck, P., 16 May 1997, In : Microsystem technologies. 1997, 3, p. 122-128 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
27 Citations (Scopus)
347 Downloads (Pure)

High aspect ratio single crystalline silicon microstructures fabricated with multi layer substrates

Gui, C., Jansen, H. V., Berenschot, J. W., Gardeniers, J. G. E. & Elwenspoek, M. C., 16 Jun 1997, Proceedings of Transducers 1997. Chicago, USA: IEEE, p. 633-636

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)
37 Downloads (Pure)

Identification of temperature profile and heat transfer on a dielectric membrane for gas sensors by COSMOS program simulation

Dumitrescu, M., Cobianu, C., Lungu, D., Dascalu, D., Pascu, A., van den Berg, A., Gardeniers, J. G. E., Kolev, S., Ducso, C. & Barsony, I., 7 Oct 1997, p. 145-148. 4 p.

Research output: Contribution to conferencePaper

File
72 Downloads (Pure)

Porous silicon bulk micromachining for thermally isolated membrane formation

Ducso, C., Vazsonyi, E., Adam, M., Szabo, I., Barsony, I., Barsony, I., Gardeniers, J. G. E. & van den Berg, A., May 1997, In : Sensors and actuators. A: Physical. 60, 60, p. 235-239 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
61 Citations (Scopus)
84 Downloads (Pure)
1996

An electrochemically actuated microvalve

Neagu, C. R., Gardeniers, J. G. E., Elwenspoek, M. C. & Fluitman, J. H. J., 26 Jun 1996, ACTUATOR 96: conference proceedings: 5th International Conference on New Actuators, 26-28 June, 1996, Bremen, Germany. Borgmann, H. (ed.). Bremen, Germany: AXON Technology Consult, p. 41-44

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

An electrochemically actuated microvalve

Neagu, C., Gardeniers, J. G. E., Elwenspoek, M. C. & Kelly, J. J., 5 Jun 1996, Dish Hotel, Enschede

Research output: Other contributionOther research output

An electrochemical microactuator: Principle and first results

Neagu, C. R., Gardeniers, J. G. E., Elwenspoek, M. & Kelly, J. J., Mar 1996, In : Journal of microelectromechanical systems. 5, 1, p. 2-9 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
97 Citations (Scopus)
111 Downloads (Pure)

A survey on the reactive ion etching of silicon in microtechnology

Jansen, H., Gardeniers, H., de Boer, M., Elwenspoek, M. & Fluitman, J., Mar 1996, In : Journal of micromechanics and microengineering. 6, 1, p. 14-28 15 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
282 Citations (Scopus)
759 Downloads (Pure)

Characterisation of a planar microcoil for implantable microsystems

Rusu, C. R., Smith, A., Gardeniers, J. G. E., Elwenspoek, M. C. & Fluitman, J. H. J., 8 Sep 1996, Proceedings of Eurosensors X, 10th European Conference on Solid-State Transducers. Leuven, Belgium, p. 343-346

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Design, fabrication and characterisation of a planar microcoil inductor for power supply in and data exchange with implantable microsystems

Smith, A., Rusu, C. R., Neagu, C., Gardeniers, J. G. E., Elwenspoek, M. C. & Fluitman, J. H. J., 20 Mar 1996, Proceedings 1996 National Sensor Conference. Delft, the Netherlands: Platform "Sensor Technology, p. 35-38

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
15 Downloads (Pure)

Electrochemical microvalve

Rusu, C. R., Neagu, C., Gardeniers, J. G. E., Elwenspoek, M. C. & Fluitman, J. H. J., 20 Mar 1996, Proceedings 1996 National Sensor Conference. Delft, the Netherlands: Platform "Sensor Technology, p. 21-24

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
14 Downloads (Pure)

Experiments on a charcoal/nitrogen sorption compressor and model considerations

Huinink, S., Burger, J. F., Holland, H. J., van der Sar, E. G., Gardeniers, J. G. E., ter Brake, H. J. M. & Rogalla, H., 25 Jun 1996, Waterville Valley, N.H., USA

Research output: Other contributionOther research output

Isotropically etched channels for gas chromatography

Tjerkstra, R. W., Gardeniers, J. G. E., van den Berg, A. & Elwenspoek, M. C., 1996, In : Analytical methods and instrumentation. p. 247-249

Research output: Contribution to journalArticleAcademic

LPCVD silicon-rich silicon nitride films for applications in micromechanics, studied with statistical experimental design

Gardeniers, J. G. E., Tilmans, H. A. C. & Visser, C. C. G., Sep 1996, In : Journal of vacuum science and technology A: vacuum, surfaces, and films. 14, 14, p. 2879-2892 14 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
106 Citations (Scopus)
171 Downloads (Pure)

Microstructure of pulsed-laser deposited PZT on polished and annealed MGO substrates

King, S. L., Coccia, L. G., Gardeniers, J. G. E. & Boyd, I. W., 1996, In : Materials Research Society symposia proceedings. 433, p. 157-162

Research output: Contribution to journalArticleAcademicpeer-review

Microstructure of pulsed-laser deposited PZT on polished and annealed MGO substrates

King, S. L., Coccia, L. G., Gardeniers, J. G. E. & Boyd, I. W., 7 Apr 1996, p. 157-162. 6 p.

Research output: Contribution to conferencePaper

File
41 Downloads (Pure)