• 8470 Citations
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1984 …2020
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Research Output 1984 2020

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1992

Characterization of TEOS CVD oxide layers

Gardeniers, J. G. E., 1992, Universiteit Twente, Enschede: Universiteit Twente, kenmerk: 070.4876, d.d. 17.09.1992. 13 p.

Research output: Book/ReportReportProfessional