• 8587 Citations
  • 49 h-Index
1984 …2020

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1984

IN SITU MEASUREMENT OF THE STEP KINETICS ON THE (010) FACE OF POTASSIUM HYDROGEN PHTHALATE

Jetten, L. A. M. J., Gardeniers, J. G. E. & Bennema, P., 1 Dec 1984, Industrial Crystallization: Proceedings of the Symposium. Elsevier, p. 345-346 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)
1991

Dopant Selective HF Anodic Etching of Silicon

Branebjerg, J., Eijkel, C. J. M., Gardeniers, J. G. E. & van de Pol, F. C. M., 30 Jan 1991, Proceedings MEMS '91. Nara, Japan, p. 221-226 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

14 Citations (Scopus)
1994

Effects on laser wavelength and fluence on the growth of ZnO thin films by pulsed laser deposition

Craciun, V., Amirhaghi, S., Craciun, D., Elders, J., Gardeniers, J. G. E. & Boyd, I. W., 24 Mar 1994, Proceedings of European Materials Research Society. Strassbourg, France, p. -

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Sol-gel PZT films on Pt-coated substrates

Gardeniers, J. G. E., Smith, A. & Cobianu, C., 5 Sep 1994, Micro Mechanics Europe Workshop. Pisa, Italy, p. 133-136

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Texture variation in Sol-Gel PZT films on platinum-coated substrates

Gardeniers, J. G. E. & Cobianu, C., 11 Oct 1994, 17th annual semiconductor conference. Romania, p. 333-336 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Texture variations in sol-gel derived pzt films on substrates with platinum metallization

Gardeniers, J. G. E., Elwenspoek, M. C. & Cobianu, C., 10 Nov 1994, Materials Research Society Symposium, vol. 343. Barmak, K. (ed.). San Fransisco: Materials Research Society, p. 451-456 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
7 Citations (Scopus)
48 Downloads (Pure)

Zinc oxyde waveguides for sensor applications

Bekman, H. H. P. T., Benoist, K., van Bezooijen, J. A. G., Joppe, J. L., Heideman, R., Lambeck, P. V. & Gardeniers, J. G. E., 17 Feb 1994, Proceedings of Sensor Technology 1994. Lambeck, P. (ed.). Enschede: Universiteit Twente, p. 305-309 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1995

A survey on the reactive ion etching of silicon in microtechnology

Jansen, H., Gardeniers, H. & Fluitman, J., 3 Sep 1995, Sixth Workshop on Micromachining Micromechanics and Microsystems, MME 1995. Copenhagen, Denmark: MicroMechanics Europe, p. 1-13 13 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
203 Downloads (Pure)

Electrochemical micro actuator

Hamberg, M. W., Neagu, C., Gardeniers, J. G. E., IJntema, D. J. & Elwenspoek, M., 29 Jan 1995, Proceedings IEEE Micro Electro Mechanical Systems, MEMS '95. Piscataway, NJ: IEEE Computer Society, p. 106-110 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
12 Citations (Scopus)
66 Downloads (Pure)
1996

An electrochemically actuated microvalve

Neagu, C., Rusu, C. R., Gardeniers, J. G. E., Elwenspoek, M. C. & Fluitman, J. H. J., 26 Jun 1996, ACTUATOR 96: 5th International Conference on New Actuators : conference proceedings. Borgmann, H. (ed.). Bremen, Germany: AXON Technology Consult, p. 41-44

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Characterisation of a planar microcoil for implantable microsystems

Rusu, C. R., Smith, A., Gardeniers, J. G. E., Elwenspoek, M. C. & Fluitman, J. H. J., 8 Sep 1996, Proceedings of Eurosensors X, 10th European Conference on Solid-State Transducers. Leuven, Belgium, p. 343-346

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Design, fabrication and characterisation of a planar microcoil inductor for power supply in and data exchange with implantable microsystems

Smith, A., Rusu, C. R., Neagu, C., Gardeniers, J. G. E., Elwenspoek, M. C. & Fluitman, J. H. J., 20 Mar 1996, Proceedings 1996 National Sensor Conference. Delft, the Netherlands: Platform "Sensor Technology, p. 35-38

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
15 Downloads (Pure)

Electrochemical microvalve

Rusu, C. R., Neagu, C., Gardeniers, J. G. E., Elwenspoek, M. C. & Fluitman, J. H. J., 20 Mar 1996, Proceedings 1996 National Sensor Conference. Delft, the Netherlands: Platform "Sensor Technology, p. 21-24

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
14 Downloads (Pure)

Porous silicon bulk micromachining for thermally isolated mambrane formation

Ducso, C., Vazsonyi, E., Adam, M., Barsony, I., Barsony, I., Gardeniers, J. G. E. & van den Berg, A., 8 Sep 1996, Proceedings of Eursensors X. Leuven, p. 227-230

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Silicon fusion bonding of rough surface with polishing technique

Gui, C., Albers, H., Gardeniers, J. G. E., Elwenspoek, M. C. & Lambeck, P., 17 Sep 1996, Proceedings of micro system technologies '96. Reichl, H. & Heuberger, A. (eds.). Potsdam: VDE Verlag, p. 205-210

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Silicon fusion bonding with chemical mechanical polishing

Gui, C., Albers, H., Gardeniers, J. G. E., Elwenspoek, M. C. & Lambeck, P., 20 Mar 1996, Proceedings 1996 National Sensor Conference. Wolffenbuttel, M. R. (ed.). Delft, p. 93-97

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Thermally assisted ion beam etching of polytetrafluoroethylene a new technique for high aspect ratio etching of MEMS

Berenschot, E., Jansen, H., Burger, G-J., Gardeniers, H. & Elwenspoek, M., 11 Feb 1996, Proceedings of the 1996 9th Annual International Workshop on Micro Electro Mechanical Systems. Piscataway, NJ: IEEE Computer Society, p. 277-284 8 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
4 Citations (Scopus)
67 Downloads (Pure)
1997

Etching technology for microchannels

Tjerkstra, R. W., de Boer, M. J., Berenschot, J. W., Gardeniers, J. G. E., van den Berg, A. & Elwenspoek, M. C., 26 Jan 1997, Proceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS. Piscataway: IEEE Computer Society, p. 147-152 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
39 Citations (Scopus)
590 Downloads (Pure)

Experiments on a Charcoal/Nitrogen sorption compressor and model considerations

Huinink, S., Burger, J. F., Holland, H. J., van der Sar, E. G., Gardeniers, J. G. E., ter Brake, H. J. M. & Rogalla, H., 15 Nov 1997, Proceedings of the 9th International Cryocooler Conference. Waterville Valley, New Hampshire, p. 597-606 10 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

High aspect ratio single crystalline silicon microstructures fabricated with multi layer substrates

Gui, C., Jansen, H. V., Berenschot, J. W., Gardeniers, J. G. E. & Elwenspoek, M. C., 16 Jun 1997, Proceedings of Transducers 1997. Chicago, USA: IEEE, p. 633-636

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)
33 Downloads (Pure)
1998

An Actuation Principle: The Electrolysis of Water

Neagu, C., Jansen, H., Gardeniers, J. G. E. & Elwenspoek, M., 1998, Sensor technology in the Netherlands - state of the art: proceedings of the Dutch Sensor Conference, 2-3 March, 1998, University of Twente, the Netherlands. van den Berg, A. & Bergveld, P. (eds.). Dordrecht: Kluwer Academic Publishers, p. 255-261 (MESA monographs; vol. 2).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Electrochemical Fabrication of Multi Walled Micro Channels

Tjerkstra, R. W., Gardeniers, J. G. E., Elwenspoek, M. C. & van den Berg, A., 25 Mar 1998, Micro Total Analysis Systems ’98: Proceedings of the uTAS ’98 Workshop, held in Banff, Canada, 13–16 October 1998. Harrison, D. J. & van den Berg, A. (eds.). Dordrecht: Kluwer Academic Publishers, p. 133-136

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Nanomechanical optical devices fabricated with aligned wafer bonding

Gui, C., Veldhuis, G. J., Koster, T. M., Lambeck, P., Berenschot, J. W., Gardeniers, J. G. E. & Elwenspoek, M. C., 25 Jan 1998, The Eleventh Annual International Workshop on Micro Electro Mechanical Systems, MEMS 98 Proceedings. Piscataway: IEEE Computer Society, p. 482-487 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
6 Citations (Scopus)
59 Downloads (Pure)

Present and future role of CMP in wafer bonding

Gui, C., Elwenspoek, M. C., Gardeniers, J. G. E. & Lambeck, P., 31 Aug 1998, Proceedings of the fourth International Symposium on Semiconductor wafer bonding: science, technology and applications. Paris, France, p. 114-126

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

The electrolysis of water: an actuation principle for MEMS with a big opportunity

Neagu, C., Jansen, H., Gardeniers, H. & Elwenspoek, M., 17 Jun 1998, Actuator 98: 6th International Conference on New Actuators with accompanying exhibition, conference proceedings, 17-19 June, 1998, Bremen, Germany. Borgmann, H. (ed.). Bremen, Germany: Messe Bremen GmbH, p. 118-121

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Velocity sources as an explanation for experimentally observed variations in Si{111} etch rates

Nijdam, A. J., Berenschot, J. W., van Suchtelen, J., Gardeniers, J. G. E. & Elwenspoek, M. C., 3 Jun 1998, Proceedings of the Micromechanics Europe 1998 Conference (MME). Ulvik, Norway, p. 74-77

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1999

High pressure check valve for application in a miniature cryogenic sorption cooler

Burger, J. F., van der Wekken, M. C., Berenschot, J. W., Holland, H. J., ter Brake, H. J. M., Rogalla, H., Gardeniers, J. G. E. & Elwenspoek, M. C., 17 Jan 1999, Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). Piscataway: IEEE Computer Society, p. 183-188 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
10 Citations (Scopus)
169 Downloads (Pure)

Simulation of anisotropic wet-chemical etching using a physical model

van Suchtelen, J., Sato, K., van Veenendaal, E., Nijdam, A. J., Gardeniers, J. G. E., van Enckevort, W. J. P. & Elwenspoek, M. C., 17 Jan 1999, Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). Piscataway: IEEE Computer Society, p. 332-337 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
6 Citations (Scopus)
88 Downloads (Pure)

The Surface adhesion parameter: A measure for wafer bondability

Gui, C., Elwenspoek, M. C., Tas, N. R. & Gardeniers, J. G. E., 17 Jan 1999, Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). Piscataway: IEEE, p. 290-295 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
2 Citations (Scopus)
288 Downloads (Pure)

The use of selective anodic bonding to create near-zero dead volume membranes

Veenstra, T. T., Berenschot, J. W., Gardeniers, J. G. E., Sanders, R. G. P., Elwenspoek, M. C. & van den Berg, A., 17 Oct 1999, Proceedings of the 1999 joint international meeting. Hawaii, p. 998-

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2000

A light absorption cell for microTAS with KOH/IPA etched 450 mirrors in silicon

Tiggelaar, R. M., Veenstra, T. T., Sanders, R. G. P., Gardeniers, J. G. E., Elwenspoek, M. C. & van den Berg, A., 1 Oct 2000, Proceedings of MicroMechanics Europe (MME) 2000. Uppsala, Sweden, p. - 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

A micro viscosity detector for a planar hydrodynamic chromatography (HDC) system

van der Heyden, F. H. J., Blom, M. T., Gardeniers, J. G. E., Chmela, E., Elwenspoek, M. C., van den Berg, A. & Tijssen, R. P., 14 May 2000, Proceedings of MicroTAS 2000 conference. Enschede, p. 595-598

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

A simple selfpriming bubble tolerant peristaltic micropump

Veenstra, T. T., Berenschot, J. W., Sanders, R. G. P., Gardeniers, J. G. E., Elwenspoek, M. C. & van den Berg, A., 27 Aug 2000, Proceedings Eurosensors 2000 Conference. Kopenhagen, Denemarken, p. 371-372

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Fabrication and application of silicon-based microchannels

Gardeniers, J. G. E., Tjerkstra, R. W. & van den Berg, A., 1 May 2000, IMRET 3: Proceedings of the International Conference on microreaction technology. Frankfurt, Germany: Springer, p. 36-44

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Failure mechanisms of pressurized microchannels, model and experiments

Blom, M. T., Tas, N. R., Pandraud, G., Chmela, E., Gardeniers, J. G. E., Elwenspoek, M. C., van den Berg, A. & Tijssen, R. P., 23 Jan 2000, Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on. Piscataway: IEEE Computer Society, p. 199-204 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
44 Downloads (Pure)

Formation and stabilization of pyramidal etch hillocks on silicon {100} in anisotropic etchants: experiments and Monte Carlo simulation

Nijdam, A. J., van Veenendaal, E., Cuppen, H., van Suchtelen, J., Reed, M. L., Gardeniers, J. G. E., van Enckevort, W. J. P., Vlieg, E. & Elwenspoek, M. C., 1 Oct 2000, Proceedings of MicroMechanics Europe (MME) 2000. Uppsala, Sweden, p. - 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

High pressure, solvent-resistant microfluidic connections by local anodic bonding of Kovar to Pyrex

Blom, M. T., Chmela, E., Gardeniers, J. G. E., Berenschot, J. W., Elwenspoek, M. C., van den Berg, A. & Tijssen, R. P., 1 Oct 2000, Proceedings of MicroMechanics Europe (MME) 2000. Uppsala, Sweden, p. - 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Silicon based microfabrication of micro fluidic systems

Gardeniers, J. G. E. & van den Berg, A., 20 Jan 2000, Proceedings of the 3rd symposium on Microsystems in Practice. Utrecht, p. - 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

ZrNi thin films for fast reversible hydrogen pressure actuation

Gardeniers, J. G. E., Burger, J. F., van Egmond, H. J., Holland, H. J., ter Brake, H. J. M. & Elwenspoek, M. C., 19 Jun 2000, Proceedings of Actuator 2000 Conference. Bremen, Germany, p. 208-211

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2001

169 Kelvin cryogenic microcooler employing a condenser, evaporator, flow restriction and counterflow heat exchangers

Burger, J. F., Holland, H. J., Berenschot, J. W., Seppenwolde, J-H., ter Brake, H. J. M., Gardeniers, J. G. E. & Elwenspoek, M. C., 21 Jan 2001, Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). Piscataway: IEEE Computer Society, p. 418-421 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
21 Citations (Scopus)
56 Downloads (Pure)

A light absorption cell for microTAS with KOH/IPA etched 45 degrees mirrors in silicon

Tiggelaar, R. M., Veenstra, T. T., Sanders, R. G. P., Gardeniers, J. G. E., Elwenspoek, M. C. & van den Berg, A., 14 May 2001, Proceedings of Sensor Technology 2001 Conference. Elwenspoek, M. (ed.). Dordrecht: Kluwer, p. 137-142 (MESA monographs).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

A simple selfpriming bubble-tolerant peristaltic micropump

Veenstra, T. T., Berenschot, J. W., Sanders, R. G. P., Gardeniers, J. G. E. & van den Berg, A., 14 May 2001, Proceedings of Sensor Technology 2001 Conference. Elwenspoek, M. C. & Elwenspoek, M. (eds.). Dordrecht: Kluwer, p. 125-129 (MESA monographs).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Design and fabrication of a hydrodynamic chromatography chip

Blom, M. T., Chmela, E., Gardeniers, J. G. E., Tijssen, R. P., Elwenspoek, M. C. & van den Berg, A., 10 Jun 2001, Proceedings of Transducers 2001 Conference. p. 794-797

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

HDC-chip: an integrated micromachined separation system for polymers and particles

Chmela, E., Gardeniers, J. G. E., Tijssen, R. P. & Blom, M. T., 21 Oct 2001, Proceedings of Micro Total Analysis System (MicroTAS). Ramsey, J. M. & van den Berg, A. (eds.). Dordrecht: Kluwer Academic Publishers, p. 646-648 (MESA monographs).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Micromachined Si-well scintillator pixel sensors for thermal neutron detection

Allier, C. P., Hollander, R. W., van Eijk, C. W. E., de Boer, M. J., Gardeniers, J. G. E., Sarro, P. M. & Czirr, J. B., 14 May 2001, Sensor Technology 2001: proceedings of the Sensor Technology Conference 2001. Elwenspoek, M. C. (ed.). Dordrecht, The Netherlands: Kluwer, p. 191-196

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Micromachined Si-well scintillator pixel sensors for thermal neutron detection

Allier, C. P., Bom, V. R., Hollander, R. W., van Eijk, C. W. E., de Boer, M. J., Gardeniers, J. G. E., Sarro, P. M. & Czirr, J. B., 28 Jun 2001, Abstract book International Workshop on Position-Sensitive Neutron Detectors - Status and Perspectives. Berlin, Germany: Hahn-Meitner-Institut, p. 65-

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Monolithic versus modular integration of a micro-fia system for ammonium determination

Veenstra, T. T., Tiggelaar, R. M., Sanders, R. G. P., Berenschot, J. W., Gardeniers, J. G. E., Wissink, J., Mateman, R., Elwenspoek, M. C. & van den Berg, A., 21 Oct 2001, Proceedings of Micro Total Analysis Systems Conference (MicroTAS). Ramsey, J. M. & van den Berg, A. (eds.). Dordrecht: Kluwer Academic Publishers, p. 664-666 (MESA monographs).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2002

165 k microcooler operating with a sorption compressor and a micromachined cold stage

Burger, J. F., Holland, H. J., Seppenwoolde, J. H., Berenschot, J. W., ter Brake, H. J. M., Gardeniers, J. G. E., Elwenspoek, M. C. & Rogalla, H., 2002, Cryocoolers 11. Ross, R. G. J. (ed.). New York: Kluwer Academic/Plenum Publishers, p. 551-560 10 p. (978-0-306-46567-3).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Downloads (Pure)

Fabrication and characterization of MEMS based wafer-scale palladium-silver alloy membranes for hydrogen separation and hydrogenation/dehydrogenation reactions

Tong, D. H., Gielens, F. C., Berenschot, J. W., de Boer, M. J., Gardeniers, J. G. E., Nijdam, W., van Rijn, C. J. M. & Elwenspoek, M. C., 20 Jan 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems. IEEE, p. 268-271 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
4 Citations (Scopus)
66 Downloads (Pure)

Integrated Micro- and Nanofluidics: Silicon Revisited: (Keynote Paper)

Gardeniers, H. J. G. E. & van den Berg, A., 2002, ASME 2002 Joint U.S.-European Fluids Engineering Division Conference: Montreal, Quebec, Canada, July 14–18, 2002. American Society of Mechanical Engineers (ASME), p. 1199-1204

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)