• 8820 Citations
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1984 …2020

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Simulation of anisotropic wet-chemical etching using a physical model

van Suchtelen, J., Sato, K., van Veenendaal, E., Nijdam, A. J., Gardeniers, J. G. E., van Enckevort, W. J. P. & Elwenspoek, M. C., 17 Jan 1999, Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). Piscataway: IEEE Computer Society, p. 332-337 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
6 Citations (Scopus)
95 Downloads (Pure)

Simultaneous impedance and fluorescence detection of proteins in a cyclo olefin polymer chip containing a column with an ordered pillar array with integrated gold microelectrodes

Illa, X., Rodriguez-Trujillo, R., Ordeig, O., De Malsche, W., Homs-Corbera, A., Gardeniers, H., Desmet, G., Kutter, J. P., Samitier, J. & Romano-Rodríguez, A., 1 Dec 2010, 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010. Verpoorte, S., Andersson-Svahn, H., Emnéus, J. & Pamme, N. (eds.). The Chemical and Biological Microsystems Society, Vol. 2. p. 1280-1282 3 p. (International Conference on Miniaterized Systems for Chemistry and Life Sciences : [proceedings]; vol. 2010).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
13 Downloads (Pure)

Sol-gel PZT films on Pt-coated substrates

Gardeniers, J. G. E., Smith, A. & Cobianu, C., 5 Sep 1994, Micro Mechanics Europe Workshop. Pisa, Italy, p. 133-136

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Sonochemical microreactor with microbubbles created on micromachined surfaces

Fernandez Rivas, D., Zijlstra, A. G., Prosperetti, A., Lohse, D. & Gardeniers, J. G. E., 1 Dec 2010, 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010. Verpoorte, S., Andersson-Svahn, H., Emnéus, J. & Pamme, N. (eds.). The Chemical and Biological Microsystems Society, Vol. 3. p. 2123-2125 3 p. (International Conference on Miniaterized Systems for Chemistry and Life Sciences : [proceedings]; vol. 2010).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
7 Downloads (Pure)

Synthesis of carbon nanofibers as support layer for metal catalysts in a microreactor for three-phase reactions

Thakur, D. B., Tiggelaar, R. M., Seshan, K., Lefferts, L. & Gardeniers, J. G. E., 2008, 10th International Conference on Microreaction Technology, IMRET 2008 - Topical Conference at the 2008 AIChE Spring National Meeting. American Institute of Chemical Engineers, p. 24-25 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Synthesis of carbon nanofibers on silicon substrates using sol-gel prepared porous alumina layer

Thakur, D. B., Seshan, K., Tiggelaar, R. M., Gardeniers, J. G. E. & Lefferts, L., 2008, 10th International Conference on Microreaction Technology, IMRET 2008 - Topical Conference at the 2008 AIChE Spring National Meeting. American Institute of Chemical Engineers, p. 127-128 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Texture variation in Sol-Gel PZT films on platinum-coated substrates

Gardeniers, J. G. E. & Cobianu, C., 11 Oct 1994, 17th annual semiconductor conference. Romania, p. 333-336 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Texture variations in sol-gel derived pzt films on substrates with platinum metallization

Gardeniers, J. G. E., Elwenspoek, M. C. & Cobianu, C., 10 Nov 1994, Materials Research Society Symposium, vol. 343. Barmak, K. (ed.). San Fransisco: Materials Research Society, p. 451-456 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
7 Citations (Scopus)
52 Downloads (Pure)

The electrolysis of water: an actuation principle for MEMS with a big opportunity

Neagu, C., Jansen, H., Gardeniers, H. & Elwenspoek, M., 17 Jun 1998, Actuator 98: 6th International Conference on New Actuators with accompanying exhibition, conference proceedings, 17-19 June, 1998, Bremen, Germany. Borgmann, H. (ed.). Bremen, Germany: Messe Bremen GmbH, p. 118-121

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Thermally assisted ion beam etching of polytetrafluoroethylene a new technique for high aspect ratio etching of MEMS

Berenschot, E., Jansen, H., Burger, G-J., Gardeniers, H. & Elwenspoek, M., 11 Feb 1996, Proceedings of the 1996 9th Annual International Workshop on Micro Electro Mechanical Systems. Piscataway, NJ: IEEE Computer Society, p. 277-284 8 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
4 Citations (Scopus)
72 Downloads (Pure)

The Surface adhesion parameter: A measure for wafer bondability

Gui, C., Elwenspoek, M. C., Tas, N. R. & Gardeniers, J. G. E., 17 Jan 1999, Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). Piscataway: IEEE, p. 290-295 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
2 Citations (Scopus)
318 Downloads (Pure)

The use of selective anodic bonding to create near-zero dead volume membranes

Veenstra, T. T., Berenschot, J. W., Gardeniers, J. G. E., Sanders, R. G. P., Elwenspoek, M. C. & van den Berg, A., 17 Oct 1999, Proceedings of the 1999 joint international meeting. Hawaii, p. 998-

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Thin, strong and defect free microfabricated palladium composite membranes for hydrogen separation

Tong, D. H., Gielens, F. C., Hoang Thi Hanh, H. T. H., Gardeniers, J. G. E., Jansen, H. V., Nijdam, W., van Rijn, C. J. M. & Elwenspoek, M. C., 7 Sep 2003, Proceedings of international conference on microreaction technology (IMRET 7). Lausanne, p. 343-345

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Three-phase mass transfer in pillared micro channels

De Loos, S. R. A., Van Der Schaaf, J., De Croon, M. H. J. M., Nijhuis, T. A., Tiggelaar, R. M., Gardeniers, J. G. E. & Schouten, J. C., 26 Nov 2008, 2008 AIChE Spring National Meeting, Conference Proceedings.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Transient charging of the electric double layer in field effect-flow control electro-osmotic flow

van der Wouden, E. J., Gardeniers, J. G. E. & van den Berg, A., 5 Nov 2006, Proceedings of microTAS 2006 Conference. Kitamori, T., Fujita, H. & Hasebe, S. (eds.). Tokyo, Japan: Japan Academic Association Inc, p. 83-85 3 p. (Micro Total Analysis Systems; vol. 2006-1, no. 06CH37725).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Ultrarapid droplet mixer for digital microfluidics utilizing self-propelled water droplets

Nichols, K. P. F. & Gardeniers, J. G. E., 5 Nov 2006, Proceedings of microTAS 2006 Conference. Kitamori, T., Fujita, H. & Hasebe, S. (eds.). Tokyo, Japan: Japan Academic Association Inc, p. 582-584 3 p. (Mciro Total Analysis Systems; vol. 2006-1, no. 06CH37725).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Use of micro and nanofabricated ordered pillar arrays for pressure-driven reversed phase liquid chromatography separations

de Malsche, W., Eghbali, H., Clicq, D., Vangelooven, J., Tezcan, D., Moor, P., Verdoold, V., Gardeniers, J. G. E. & Desmet, G., 7 Oct 2007, Proceedings of µTAS 2007 Conference. Paris: MicroTAS, p. 248-250

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Velocity sources as an explanation for experimentally observed variations in Si{111} etch rates

Nijdam, A. J., Berenschot, J. W., van Suchtelen, J., Gardeniers, J. G. E. & Elwenspoek, M. C., 3 Jun 1998, Proceedings of the Micromechanics Europe 1998 Conference (MME). Ulvik, Norway, p. 74-77

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Wafer-scale nanostructure formation inside vertical nano-pores

Berenschot, J. W., Sun, X., The, H. L., Tiggelaar, R. M., de Boer, M. J., Eijkel, J. C. T., Gardeniers, J. G. E., Tas, N. R. & Sarajlic, E., Apr 2017, IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2017). Piscataway, NJ: IEEE, 4 p. (IEEE International Conference on Nano/Micro Engineered and Molecular Systems).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
2 Citations (Scopus)
115 Downloads (Pure)

Wafer-Scale Self-Aligned Fabrication of Nanometric Curved Tunneling Junctions

Pordeli, Y., Borgelink, B. T. H., Van Der Wel, B. Y., Berenschot, E. J. W., Dogan, T., De Boer, M. J., Bruinink, C. M., Zandvliet, H. J. W., Gardeniers, H. J. G. E. & Tas, N. R., Jun 2019, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Piscataway, NJ: IEEE, p. 2376-2379 4 p. 8808559

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Zinc oxyde waveguides for sensor applications

Bekman, H. H. P. T., Benoist, K., van Bezooijen, J. A. G., Joppe, J. L., Heideman, R., Lambeck, P. V. & Gardeniers, J. G. E., 17 Feb 1994, Proceedings of Sensor Technology 1994. Lambeck, P. (ed.). Enschede: Universiteit Twente, p. 305-309 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

ZrNi thin films for fast reversible hydrogen pressure actuation

Gardeniers, J. G. E., Burger, J. F., van Egmond, H. J., Holland, H. J., ter Brake, H. J. M. & Elwenspoek, M. C., 19 Jun 2000, Proceedings of Actuator 2000 Conference. Bremen, Germany, p. 208-211

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review