• 8576 Citations
  • 49 h-Index
1984 …2020

Research output per year

If you made any changes in Pure these will be visible here soon.

Research Output

Filter
Conference contribution
2006

Pressure and supercritical CO2 conditions improve the esterification reaction of phtalic anhydride with methanol in glass microreactors

Benito-Lopez, F., Tiggelaar, R. M., Egberink, R. J. M., Gardeniers, J. G. E., Verboom, W., van den Berg, A. & Reinhoudt, D., 5 Nov 2006, Proceedings of microTAS 2006 Conference. Kitamori, T., Fujita, H. & Hasebe, S. (eds.). Japan Academic Association Inc, p. 564-566 3 p. (Micro Total Analysis Systems; vol. 2006-1, no. 06CH37725).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Propane conversion in a surface-discharge microplasma reactor

Agiral, A., Trionfetti, C., Seshan, K., Lefferts, L. & Gardeniers, J. G. E., 6 Sep 2006, IMRET 9 - 9th International Conference on Microreaction Technology. Frankfurt am Main: Dechema, p. 383-384 2 p. (IMRET; vol. 9, no. 06CH37725).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Shifting the performance barriers of HPLC using micro-fabricated chromatographic columns

Desmet, G., de Malsche, W., Eghbali, H., Vangelooven, J., Clicq, D. & Gardeniers, J. G. E., 14 Nov 2006, NanoTech - The 10th Annual European Conference on Micro & Nanoscale Technologies for the Biosciences. Montreux: Scitec, p. - 2 p. (Nanotech; vol. 10, no. 06CH37725).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Transient charging of the electric double layer in field effect-flow control electro-osmotic flow

van der Wouden, E. J., Gardeniers, J. G. E. & van den Berg, A., 5 Nov 2006, Proceedings of microTAS 2006 Conference. Kitamori, T., Fujita, H. & Hasebe, S. (eds.). Tokyo, Japan: Japan Academic Association Inc, p. 83-85 3 p. (Micro Total Analysis Systems; vol. 2006-1, no. 06CH37725).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Ultrarapid droplet mixer for digital microfluidics utilizing self-propelled water droplets

Nichols, K. P. F. & Gardeniers, J. G. E., 5 Nov 2006, Proceedings of microTAS 2006 Conference. Kitamori, T., Fujita, H. & Hasebe, S. (eds.). Tokyo, Japan: Japan Academic Association Inc, p. 582-584 3 p. (Mciro Total Analysis Systems; vol. 2006-1, no. 06CH37725).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2005

Extending the functionalities of shear-driven chromatography nano-channels using high aspect ratio etching

de Malsche, W., Clicq, D., Eghbali, H., Vervoort, N., Gardeniers, J. G. E., van den Berg, A. & Desmet, G., 5 Oct 2005, MicroTAS 2005 - 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences. Jensen, K. F., Han, J., Harrisson, D. J. & Voldman, J. (eds.). USA: Transducer Research Foundation, Inc., p. 106-108 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
11 Downloads (Pure)

Improving liquid chromatography efficiency: channels structured with micro-pillars

De Pra, M., Kok, W. T., Gardeniers, J. G. E., Desmet, G. & Schoenmakers, P. J., 9 Oct 2005, MicroTAS 2005 Conference - 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences. Jensen, K. F., Han, J., Harrison, D. J. & Voldman, J. (eds.). San Diego, CA, USA: Transducer Research Foundation, p. 838-840 3 p. (Micro total analysis systems 2005; vol. 2).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
1 Citation (Scopus)
24 Downloads (Pure)

Monitoring of yeast cell concentration using a micromachined impedance sensor

Krommenhoek, E. E., Gardeniers, J. G. E., Bomer, J. G., van den Berg, A., Li, X., Ottens, M., van der Wielen, L. A. M., van Dedem, G. W. K., van Leeuwen, M., van Gulik, W. M. & Heijnen, J. J., 5 Jun 2005, The 13th International Conference on Solid-StateSensors, Actuators and Microsystems, (Transducers 2005). USA: IEEE, p. 283-286 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
64 Downloads (Pure)

Planar Nanoneedles on-chip for intracellular measurements

Emmelkamp, J., Gardeniers, J. G. E., Andersson, H. & van den Berg, A., 9 Oct 2005, Proceedings of microTAS 2005 Conference. Jensen, K. F., Han, J., Harrison, D. J. & Voldman, J. (eds.). Boston, Massachusetts: Transducers Research Foundation, Inc., p. 400-402 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
18 Downloads (Pure)

Planar Nanoneedles on-chip for intracellular measurements

Emmelkamp, J., Gardeniers, J. G. E., Andersson, H. & van den Berg, A., 2005, MicroTAS 2005 Conference -9th International Conference on Miniaturized Systems for Chemistry and Life Sciences. San Diego, CA, USA: Transducer Research Foundation, p. 400-402 3 p. (Micro total analysis systems 2005).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
10 Downloads (Pure)
2004

Cell permeabilisation and transport focused around oscillating microbubbles

Marmottant, P. G. M., Hilgenfeldt, S., Versluis, M., Gardeniers, J. G. E., van den Berg, A. & Lohse, D., 15 Aug 2004, Mechanics of the 21st century: 21st International Congress of Theoretical and Applied Mechanics. Gutkowski, W. & Kowalewski, T. A. (eds.). Warsaw, Poland: Springer, p. -

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
18 Downloads (Pure)

Design of miniaturized fermentors for high throughput optimization of industrial fermentations

Gardeniers, J. G. E., Krommenhoek, E. E., van den Berg, A., Li, X., Ottens, M. M., van der Wielen, L. A. M., van Dedem, G. W. K., van Leeuwen, M. G., van Gulik, W. M. & Heijnen, J. J., 8 Sep 2004, Book of abstracts 5th European Symposium on Biochemical Engineering Sciences. Stuttgart, Germany, p. 74-74 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Fabrication and mechanical testing of glass chips for high pressure synthetic or analytical chemistry

Oosterbroek, R. E., Hermes, D. C., Kakuta, M., Benito-Lopez, F., Verboom, W., Gardeniers, J. G. E. & van den Berg, A., 11 Oct 2004, Proceedings of the Third International Symposium on Semiconductor Wafer Bonding: Physics and Applications. Hunt, C. E. (ed.). Pennington, NJ: The Electrochemical Society Inc.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Fabrication of microfluidic networks with integrated electrodes, using CMP and glass-to-SiO2 thermal wafer bonding

Hermes, D. C., Heuser, T., van der Wouden, E. J., Gardeniers, J. G. E. & van den Berg, A., 11 Oct 2004, Workshop on wafer bonding for MEMS technologies. Halle, Germany, p. 63-64 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Field-effect control of electro-osmotic flow in microfluidic networks

van der Wouden, E. J., Heuser, T., Hermes, D. C., Gardeniers, J. G. E. & van den Berg, A., 13 Jun 2004, Abstract book International Electrokinetics Conference. Pittsburgh, p. 37-37 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Micro- and Nanofluidic Devices for Environmental and Biomedical Applications

Gardeniers, J. G. E., van den Berg, A. & Rosenberg, E., 18 Sep 2004, Proceedings of the 6th Euroconference on Environmental Analytical Chemistry. (guesteditor) Rosenberg, E. (ed.). Erperheide, Belgie, p. 809-819 11 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

40 Citations (Scopus)
2003

A hydrogen separation module based on wafer-scale micromachined palladium-silver alloy membranes

Tong, D. H., Gielens, F. C., Hoang Thi Hanh, H. T. H., Berenschot, J. W., de Boer, M. J., Gardeniers, J. G. E., Jansen, H. V., Nijdam, W., van Rijn, C. J. M. & Elwenspoek, M. C., Jun 2003, 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003. USA: IEEE, p. 1742-1745 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
4 Citations (Scopus)
54 Downloads (Pure)

Micromachined Palladium - Silver Alloy Membranes for Hydrogen Separation

Tong, D. H., Gielens, F. C., Hoang Thi Hanh, H. T. H., Berenschot, J. W., de Boer, M. J., Gardeniers, J. G. E., Jansen, H. V., Nijdam, W., van Rijn, C. J. M. & Elwenspoek, M. C., 8 Jun 2003, SESENS 2002. Utrecht: STW, p. 688-691 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
12 Downloads (Pure)

Microneedle Array Interface to CE on Chip

Lüttge, R., Gardeniers, J. G. E., Vrouwe, E. X. & van den Berg, A., 5 Oct 2003, Proceedings microTAS 2003. Northrup, M. A., Jensen, K. F. & Harrison, D. J. (eds.). Ohio: Transducers Research Foundation, Inc., p. 511-514 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
19 Downloads (Pure)

Thin, strong and defect free microfabricated palladium composite membranes for hydrogen separation

Tong, D. H., Gielens, F. C., Hoang Thi Hanh, H. T. H., Gardeniers, J. G. E., Jansen, H. V., Nijdam, W., van Rijn, C. J. M. & Elwenspoek, M. C., 7 Sep 2003, Proceedings of international conference on microreaction technology (IMRET 7). Lausanne, p. 343-345

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2002

165 k microcooler operating with a sorption compressor and a micromachined cold stage

Burger, J. F., Holland, H. J., Seppenwoolde, J. H., Berenschot, J. W., ter Brake, H. J. M., Gardeniers, J. G. E., Elwenspoek, M. C. & Rogalla, H., 2002, Cryocoolers 11. Ross, R. G. J. (ed.). New York: Kluwer Academic/Plenum Publishers, p. 551-560 10 p. (978-0-306-46567-3).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Downloads (Pure)

Fabrication and characterization of MEMS based wafer-scale palladium-silver alloy membranes for hydrogen separation and hydrogenation/dehydrogenation reactions

Tong, D. H., Gielens, F. C., Berenschot, J. W., de Boer, M. J., Gardeniers, J. G. E., Nijdam, W., van Rijn, C. J. M. & Elwenspoek, M. C., 20 Jan 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems. IEEE, p. 268-271 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
4 Citations (Scopus)
66 Downloads (Pure)

Integrated Micro- and Nanofluidics: Silicon Revisited: (Keynote Paper)

Gardeniers, H. J. G. E. & van den Berg, A., 2002, ASME 2002 Joint U.S.-European Fluids Engineering Division Conference: Montreal, Quebec, Canada, July 14–18, 2002. American Society of Mechanical Engineers (ASME), p. 1199-1204

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)

Micromachined palladium silver alloy membranes for hydrogen separation

Tong, D. H., Gielens, F. C., Berenschot, J. W., de Boer, M. J., Gardeniers, J. G. E., Jansen, H. V., Nijdam, W., van Rijn, C. J. M. & Elwenspoek, M. C., 27 Nov 2002, Proceedings of SESENS 2002. Veldhoven, p. 688-691

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Silicon micromachined hollow microneedles for transdermal liquid transfer

Gardeniers, J. G. E., Berenschot, J. W., de Boer, M. J., Yeshurun, Y., Hefetz, M., van 't Oever, R. & van den Berg, A., 20 Jan 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems. p. -

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

32 Downloads (Pure)
2001

169 Kelvin cryogenic microcooler employing a condenser, evaporator, flow restriction and counterflow heat exchangers

Burger, J. F., Holland, H. J., Berenschot, J. W., Seppenwolde, J-H., ter Brake, H. J. M., Gardeniers, J. G. E. & Elwenspoek, M. C., 21 Jan 2001, Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). Piscataway: IEEE Computer Society, p. 418-421 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
21 Citations (Scopus)
56 Downloads (Pure)

A light absorption cell for microTAS with KOH/IPA etched 45 degrees mirrors in silicon

Tiggelaar, R. M., Veenstra, T. T., Sanders, R. G. P., Gardeniers, J. G. E., Elwenspoek, M. C. & van den Berg, A., 14 May 2001, Proceedings of Sensor Technology 2001 Conference. Elwenspoek, M. (ed.). Dordrecht: Kluwer, p. 137-142 (MESA monographs).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

A simple selfpriming bubble-tolerant peristaltic micropump

Veenstra, T. T., Berenschot, J. W., Sanders, R. G. P., Gardeniers, J. G. E. & van den Berg, A., 14 May 2001, Proceedings of Sensor Technology 2001 Conference. Elwenspoek, M. C. & Elwenspoek, M. (eds.). Dordrecht: Kluwer, p. 125-129 (MESA monographs).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Design and fabrication of a hydrodynamic chromatography chip

Blom, M. T., Chmela, E., Gardeniers, J. G. E., Tijssen, R. P., Elwenspoek, M. C. & van den Berg, A., 10 Jun 2001, Proceedings of Transducers 2001 Conference. p. 794-797

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

HDC-chip: an integrated micromachined separation system for polymers and particles

Chmela, E., Gardeniers, J. G. E., Tijssen, R. P. & Blom, M. T., 21 Oct 2001, Proceedings of Micro Total Analysis System (MicroTAS). Ramsey, J. M. & van den Berg, A. (eds.). Dordrecht: Kluwer Academic Publishers, p. 646-648 (MESA monographs).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Micromachined Si-well scintillator pixel sensors for thermal neutron detection

Allier, C. P., Hollander, R. W., van Eijk, C. W. E., de Boer, M. J., Gardeniers, J. G. E., Sarro, P. M. & Czirr, J. B., 14 May 2001, Sensor Technology 2001: proceedings of the Sensor Technology Conference 2001. Elwenspoek, M. C. (ed.). Dordrecht, The Netherlands: Kluwer, p. 191-196

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Micromachined Si-well scintillator pixel sensors for thermal neutron detection

Allier, C. P., Bom, V. R., Hollander, R. W., van Eijk, C. W. E., de Boer, M. J., Gardeniers, J. G. E., Sarro, P. M. & Czirr, J. B., 28 Jun 2001, Abstract book International Workshop on Position-Sensitive Neutron Detectors - Status and Perspectives. Berlin, Germany: Hahn-Meitner-Institut, p. 65-

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Monolithic versus modular integration of a micro-fia system for ammonium determination

Veenstra, T. T., Tiggelaar, R. M., Sanders, R. G. P., Berenschot, J. W., Gardeniers, J. G. E., Wissink, J., Mateman, R., Elwenspoek, M. C. & van den Berg, A., 21 Oct 2001, Proceedings of Micro Total Analysis Systems Conference (MicroTAS). Ramsey, J. M. & van den Berg, A. (eds.). Dordrecht: Kluwer Academic Publishers, p. 664-666 (MESA monographs).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2000

A light absorption cell for microTAS with KOH/IPA etched 450 mirrors in silicon

Tiggelaar, R. M., Veenstra, T. T., Sanders, R. G. P., Gardeniers, J. G. E., Elwenspoek, M. C. & van den Berg, A., 1 Oct 2000, Proceedings of MicroMechanics Europe (MME) 2000. Uppsala, Sweden, p. - 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

A micro viscosity detector for a planar hydrodynamic chromatography (HDC) system

van der Heyden, F. H. J., Blom, M. T., Gardeniers, J. G. E., Chmela, E., Elwenspoek, M. C., van den Berg, A. & Tijssen, R. P., 14 May 2000, Proceedings of MicroTAS 2000 conference. Enschede, p. 595-598

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

A simple selfpriming bubble tolerant peristaltic micropump

Veenstra, T. T., Berenschot, J. W., Sanders, R. G. P., Gardeniers, J. G. E., Elwenspoek, M. C. & van den Berg, A., 27 Aug 2000, Proceedings Eurosensors 2000 Conference. Kopenhagen, Denemarken, p. 371-372

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Fabrication and application of silicon-based microchannels

Gardeniers, J. G. E., Tjerkstra, R. W. & van den Berg, A., 1 May 2000, IMRET 3: Proceedings of the International Conference on microreaction technology. Frankfurt, Germany: Springer, p. 36-44

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Failure mechanisms of pressurized microchannels, model and experiments

Blom, M. T., Tas, N. R., Pandraud, G., Chmela, E., Gardeniers, J. G. E., Elwenspoek, M. C., van den Berg, A. & Tijssen, R. P., 23 Jan 2000, Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on. Piscataway: IEEE Computer Society, p. 199-204 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
43 Downloads (Pure)

Formation and stabilization of pyramidal etch hillocks on silicon {100} in anisotropic etchants: experiments and Monte Carlo simulation

Nijdam, A. J., van Veenendaal, E., Cuppen, H., van Suchtelen, J., Reed, M. L., Gardeniers, J. G. E., van Enckevort, W. J. P., Vlieg, E. & Elwenspoek, M. C., 1 Oct 2000, Proceedings of MicroMechanics Europe (MME) 2000. Uppsala, Sweden, p. - 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

High pressure, solvent-resistant microfluidic connections by local anodic bonding of Kovar to Pyrex

Blom, M. T., Chmela, E., Gardeniers, J. G. E., Berenschot, J. W., Elwenspoek, M. C., van den Berg, A. & Tijssen, R. P., 1 Oct 2000, Proceedings of MicroMechanics Europe (MME) 2000. Uppsala, Sweden, p. - 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Silicon based microfabrication of micro fluidic systems

Gardeniers, J. G. E. & van den Berg, A., 20 Jan 2000, Proceedings of the 3rd symposium on Microsystems in Practice. Utrecht, p. - 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

ZrNi thin films for fast reversible hydrogen pressure actuation

Gardeniers, J. G. E., Burger, J. F., van Egmond, H. J., Holland, H. J., ter Brake, H. J. M. & Elwenspoek, M. C., 19 Jun 2000, Proceedings of Actuator 2000 Conference. Bremen, Germany, p. 208-211

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1999

High pressure check valve for application in a miniature cryogenic sorption cooler

Burger, J. F., van der Wekken, M. C., Berenschot, J. W., Holland, H. J., ter Brake, H. J. M., Rogalla, H., Gardeniers, J. G. E. & Elwenspoek, M. C., 17 Jan 1999, Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). Piscataway: IEEE Computer Society, p. 183-188 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
10 Citations (Scopus)
168 Downloads (Pure)

Simulation of anisotropic wet-chemical etching using a physical model

van Suchtelen, J., Sato, K., van Veenendaal, E., Nijdam, A. J., Gardeniers, J. G. E., van Enckevort, W. J. P. & Elwenspoek, M. C., 17 Jan 1999, Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). Piscataway: IEEE Computer Society, p. 332-337 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
6 Citations (Scopus)
88 Downloads (Pure)

The Surface adhesion parameter: A measure for wafer bondability

Gui, C., Elwenspoek, M. C., Tas, N. R. & Gardeniers, J. G. E., 17 Jan 1999, Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). Piscataway: IEEE, p. 290-295 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
2 Citations (Scopus)
287 Downloads (Pure)

The use of selective anodic bonding to create near-zero dead volume membranes

Veenstra, T. T., Berenschot, J. W., Gardeniers, J. G. E., Sanders, R. G. P., Elwenspoek, M. C. & van den Berg, A., 17 Oct 1999, Proceedings of the 1999 joint international meeting. Hawaii, p. 998-

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1998

An Actuation Principle: The Electrolysis of Water

Neagu, C., Jansen, H., Gardeniers, J. G. E. & Elwenspoek, M., 1998, Sensor technology in the Netherlands - state of the art: proceedings of the Dutch Sensor Conference, 2-3 March, 1998, University of Twente, the Netherlands. van den Berg, A. & Bergveld, P. (eds.). Dordrecht: Kluwer Academic Publishers, p. 255-261 (MESA monographs; vol. 2).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Electrochemical Fabrication of Multi Walled Micro Channels

Tjerkstra, R. W., Gardeniers, J. G. E., Elwenspoek, M. C. & van den Berg, A., 25 Mar 1998, Micro Total Analysis Systems ’98: Proceedings of the uTAS ’98 Workshop, held in Banff, Canada, 13–16 October 1998. Harrison, D. J. & van den Berg, A. (eds.). Dordrecht: Kluwer Academic Publishers, p. 133-136

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Nanomechanical optical devices fabricated with aligned wafer bonding

Gui, C., Veldhuis, G. J., Koster, T. M., Lambeck, P., Berenschot, J. W., Gardeniers, J. G. E. & Elwenspoek, M. C., 25 Jan 1998, The Eleventh Annual International Workshop on Micro Electro Mechanical Systems, MEMS 98 Proceedings. Piscataway: IEEE Computer Society, p. 482-487 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
6 Citations (Scopus)
59 Downloads (Pure)

Present and future role of CMP in wafer bonding

Gui, C., Elwenspoek, M. C., Gardeniers, J. G. E. & Lambeck, P., 31 Aug 1998, Proceedings of the fourth International Symposium on Semiconductor wafer bonding: science, technology and applications. Paris, France, p. 114-126

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review