• 8587 Citations
  • 49 h-Index
1984 …2020

Research output per year

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Research Output

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Conference contribution
1998

The electrolysis of water: an actuation principle for MEMS with a big opportunity

Neagu, C., Jansen, H., Gardeniers, H. & Elwenspoek, M., 17 Jun 1998, Actuator 98: 6th International Conference on New Actuators with accompanying exhibition, conference proceedings, 17-19 June, 1998, Bremen, Germany. Borgmann, H. (ed.). Bremen, Germany: Messe Bremen GmbH, p. 118-121

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Velocity sources as an explanation for experimentally observed variations in Si{111} etch rates

Nijdam, A. J., Berenschot, J. W., van Suchtelen, J., Gardeniers, J. G. E. & Elwenspoek, M. C., 3 Jun 1998, Proceedings of the Micromechanics Europe 1998 Conference (MME). Ulvik, Norway, p. 74-77

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1997

Etching technology for microchannels

Tjerkstra, R. W., de Boer, M. J., Berenschot, J. W., Gardeniers, J. G. E., van den Berg, A. & Elwenspoek, M. C., 26 Jan 1997, Proceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS. Piscataway: IEEE Computer Society, p. 147-152 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
39 Citations (Scopus)
590 Downloads (Pure)

Experiments on a Charcoal/Nitrogen sorption compressor and model considerations

Huinink, S., Burger, J. F., Holland, H. J., van der Sar, E. G., Gardeniers, J. G. E., ter Brake, H. J. M. & Rogalla, H., 15 Nov 1997, Proceedings of the 9th International Cryocooler Conference. Waterville Valley, New Hampshire, p. 597-606 10 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

High aspect ratio single crystalline silicon microstructures fabricated with multi layer substrates

Gui, C., Jansen, H. V., Berenschot, J. W., Gardeniers, J. G. E. & Elwenspoek, M. C., 16 Jun 1997, Proceedings of Transducers 1997. Chicago, USA: IEEE, p. 633-636

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)
33 Downloads (Pure)
1996

An electrochemically actuated microvalve

Neagu, C., Rusu, C. R., Gardeniers, J. G. E., Elwenspoek, M. C. & Fluitman, J. H. J., 26 Jun 1996, ACTUATOR 96: 5th International Conference on New Actuators : conference proceedings. Borgmann, H. (ed.). Bremen, Germany: AXON Technology Consult, p. 41-44

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Characterisation of a planar microcoil for implantable microsystems

Rusu, C. R., Smith, A., Gardeniers, J. G. E., Elwenspoek, M. C. & Fluitman, J. H. J., 8 Sep 1996, Proceedings of Eurosensors X, 10th European Conference on Solid-State Transducers. Leuven, Belgium, p. 343-346

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Design, fabrication and characterisation of a planar microcoil inductor for power supply in and data exchange with implantable microsystems

Smith, A., Rusu, C. R., Neagu, C., Gardeniers, J. G. E., Elwenspoek, M. C. & Fluitman, J. H. J., 20 Mar 1996, Proceedings 1996 National Sensor Conference. Delft, the Netherlands: Platform "Sensor Technology, p. 35-38

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
15 Downloads (Pure)

Electrochemical microvalve

Rusu, C. R., Neagu, C., Gardeniers, J. G. E., Elwenspoek, M. C. & Fluitman, J. H. J., 20 Mar 1996, Proceedings 1996 National Sensor Conference. Delft, the Netherlands: Platform "Sensor Technology, p. 21-24

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
14 Downloads (Pure)

Porous silicon bulk micromachining for thermally isolated mambrane formation

Ducso, C., Vazsonyi, E., Adam, M., Barsony, I., Barsony, I., Gardeniers, J. G. E. & van den Berg, A., 8 Sep 1996, Proceedings of Eursensors X. Leuven, p. 227-230

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Silicon fusion bonding of rough surface with polishing technique

Gui, C., Albers, H., Gardeniers, J. G. E., Elwenspoek, M. C. & Lambeck, P., 17 Sep 1996, Proceedings of micro system technologies '96. Reichl, H. & Heuberger, A. (eds.). Potsdam: VDE Verlag, p. 205-210

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Silicon fusion bonding with chemical mechanical polishing

Gui, C., Albers, H., Gardeniers, J. G. E., Elwenspoek, M. C. & Lambeck, P., 20 Mar 1996, Proceedings 1996 National Sensor Conference. Wolffenbuttel, M. R. (ed.). Delft, p. 93-97

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Thermally assisted ion beam etching of polytetrafluoroethylene a new technique for high aspect ratio etching of MEMS

Berenschot, E., Jansen, H., Burger, G-J., Gardeniers, H. & Elwenspoek, M., 11 Feb 1996, Proceedings of the 1996 9th Annual International Workshop on Micro Electro Mechanical Systems. Piscataway, NJ: IEEE Computer Society, p. 277-284 8 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
4 Citations (Scopus)
67 Downloads (Pure)
1995

A survey on the reactive ion etching of silicon in microtechnology

Jansen, H., Gardeniers, H. & Fluitman, J., 3 Sep 1995, Sixth Workshop on Micromachining Micromechanics and Microsystems, MME 1995. Copenhagen, Denmark: MicroMechanics Europe, p. 1-13 13 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
201 Downloads (Pure)

Electrochemical micro actuator

Hamberg, M. W., Neagu, C., Gardeniers, J. G. E., IJntema, D. J. & Elwenspoek, M., 29 Jan 1995, Proceedings IEEE Micro Electro Mechanical Systems, MEMS '95. Piscataway, NJ: IEEE Computer Society, p. 106-110 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
12 Citations (Scopus)
66 Downloads (Pure)
1994

Effects on laser wavelength and fluence on the growth of ZnO thin films by pulsed laser deposition

Craciun, V., Amirhaghi, S., Craciun, D., Elders, J., Gardeniers, J. G. E. & Boyd, I. W., 24 Mar 1994, Proceedings of European Materials Research Society. Strassbourg, France, p. -

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Sol-gel PZT films on Pt-coated substrates

Gardeniers, J. G. E., Smith, A. & Cobianu, C., 5 Sep 1994, Micro Mechanics Europe Workshop. Pisa, Italy, p. 133-136

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Texture variation in Sol-Gel PZT films on platinum-coated substrates

Gardeniers, J. G. E. & Cobianu, C., 11 Oct 1994, 17th annual semiconductor conference. Romania, p. 333-336 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Texture variations in sol-gel derived pzt films on substrates with platinum metallization

Gardeniers, J. G. E., Elwenspoek, M. C. & Cobianu, C., 10 Nov 1994, Materials Research Society Symposium, vol. 343. Barmak, K. (ed.). San Fransisco: Materials Research Society, p. 451-456 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
7 Citations (Scopus)
48 Downloads (Pure)

Zinc oxyde waveguides for sensor applications

Bekman, H. H. P. T., Benoist, K., van Bezooijen, J. A. G., Joppe, J. L., Heideman, R., Lambeck, P. V. & Gardeniers, J. G. E., 17 Feb 1994, Proceedings of Sensor Technology 1994. Lambeck, P. (ed.). Enschede: Universiteit Twente, p. 305-309 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1991

Dopant Selective HF Anodic Etching of Silicon

Branebjerg, J., Eijkel, C. J. M., Gardeniers, J. G. E. & van de Pol, F. C. M., 30 Jan 1991, Proceedings MEMS '91. Nara, Japan, p. 221-226 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

14 Citations (Scopus)
1984

IN SITU MEASUREMENT OF THE STEP KINETICS ON THE (010) FACE OF POTASSIUM HYDROGEN PHTHALATE

Jetten, L. A. M. J., Gardeniers, J. G. E. & Bennema, P., 1 Dec 1984, Industrial Crystallization: Proceedings of the Symposium. Elsevier, p. 345-346 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)