• 8462 Citations
  • 48 h-Index
1984 …2020
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Research Output 1984 2020

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Conference article
2006
19 Citations (Scopus)

Fabrication and mechanical testing of glass chips for high-pressure synthetic or analytical chemistry

Oosterbroek, R. E., Hermes, D. C., Kakuta, M., Benito-Lopez, F., Gardeniers, J. G. E., Verboom, W., van den Berg, A. & Reinhoudt, D. N., Mar 2006, In : Microsystem technologies. 12, 5, p. 450-454 5 p.

Research output: Contribution to journalConference articleAcademicpeer-review

analytical chemistry
Mechanical testing
chips
chemistry
Fabrication
1999
11 Citations (Scopus)
196 Downloads (Pure)

Etching of silicon in alkaline solutions: A critical look at the {111} minimum

Nijdam, A. J., van Suchtelen, J., Berenschot, J. W., Gardeniers, J. G. E. & Elwenspoek, M., 2 Mar 1999, In : Journal of crystal growth. 198-199, 1, p. 430-434 5 p.

Research output: Contribution to journalConference articleAcademicpeer-review

Silicon
Masks
Etching
etching
masks