1989 …2020

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2009

Silicon and Glass Micromachining

Carlen, E., Bomer, J. G., van Nieuwkasteele, J. W. & van den Berg, A., Aug 2009, Fabrication and Microfluidics. Herold, K. E. & Rasooly, A. (eds.). Norfolk, UK: Caister Academic Press, p. xiv + 410 37 p. (Lab-on-a-Chip Technology for biomedical and biological applications; vol. 1, no. 1).

Research output: Chapter in Book/Report/Conference proceedingChapterAcademicpeer-review

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