Research Output per year
Fingerprint Fingerprint is based on mining the text of the person's scientific documents to create an index of weighted terms, which defines the key subjects of each individual researcher.
- 5 Similar Profiles
Silicon
Chemical Compounds
etching
Physics & Astronomy
Fabrication
Engineering & Materials Science
Lithography
Engineering & Materials Science
lithography
Physics & Astronomy
Etching
Engineering & Materials Science
silicon
Physics & Astronomy
wafers
Physics & Astronomy
Network
Recent external collaboration on country level. Dive into details by clicking on the dots.
Research Output 1994 2018
3D-fabrication of tunable and high-density arrays of crystalline silicon nanostructures
Wilbers, J. G. E., Berenschot, J. W., Tiggelaar, R. M., Dogan, T., Sugimura, K., Van Der Wiel, W. G., Gardeniers, J. G. E. & Tas, N. R., 15 Feb 2018, In : Journal of micromechanics and microengineering. 28, 4, 044003.Research output: Contribution to journal › Article › Academic › peer-review
Silicon
Lithography
Nanostructures
Crystalline materials
Fabrication
Morphology of single picosecond pulse subsurface laser-induced modifications of sapphire and subsequent selective etching
Capuano, L., Pohl, R., Tiggelaar, R. M., Berenschot, J. W., Gardeniers, J. G. E. & Römer, G. R. B. E., 29 Oct 2018, In : Optics express. 26, 22, p. 29283-29295 13 p.Research output: Contribution to journal › Article › Academic › peer-review
Open Access
File
picosecond pulses
sapphire
etching
lasers
qualitative analysis
Scalable 3D Nanoparticle Trap for Electron Microscopy Analysis
Sun, X., Berenschot, E. J. W., Veltkamp, H-W., Gardeniers, H. J. G. E. & Tas, N. R., 28 Nov 2018, In : Small. 14, 48, 1803283.Research output: Contribution to journal › Article › Academic › peer-review
Open Access
File
Sidewall patterning - A new wafer-scale method for accurate patterning of vertical silicon structures
Westerik, P. J., Vijselaar, W. J. C., Berenschot, J. W., Tas, N. R., Huskens, J. & Gardeniers, J. G. E., 1 Jan 2018, In : Journal of micromechanics and microengineering. 28, 1, 015008.Research output: Contribution to journal › Article › Academic › peer-review
Photolithography
Silicon
Ion beams
Masks
Etching
Spatial decoupling of light absorption and catalytic activity of Ni–Mo-loaded high-aspect-ratio silicon microwire photocathodes
Vijselaar, W., Westerik, P., Veerbeek, J., Tiggelaar, R. M., Berenschot, E., Tas, N. R., Gardeniers, H. & Huskens, J., Mar 2018, In : Nature energy. 3, 3, p. 185-192 8 p.Research output: Contribution to journal › Article › Academic › peer-review
Photocathodes
Molybdenum
Silicon
Nickel
Light absorption
Activities 1995 2002
- 4 Oral presentation
Fabrication of functional structures on thin silicon nitride membranes
P. Ekkels (Speaker), R.W. Tjerkstra (Speaker), Gijsbertus J.M. Krijnen (Speaker), Johan W. Berenschot (Speaker), J.P. Brugger (Speaker), Michael Curt Elwenspoek (Speaker)16 Sep 2002
Activity: Talk or presentation › Oral presentation
Micromachining (new technologies)
Johan W. Berenschot (Invited speaker)6 Dec 1999
Activity: Talk or presentation › Oral presentation
Micromachining and devices for microTAS
Johan W. Berenschot (Invited speaker)7 Dec 1999
Activity: Talk or presentation › Oral presentation
Sacrificial wafer bonding: an addition to the micromachining techniques
V.L. Spiering (Keynote speaker), Johan W. Berenschot (Keynote speaker), Michael Curt Elwenspoek (Keynote speaker), J.H.J. Fluitman (Keynote speaker)24 May 1995
Activity: Talk or presentation › Oral presentation