Johan W. Berenschot

ing.

  • 3555 Citations
  • 32 h-Index
19942018
If you made any changes in Pure these will be visible here soon.

Fingerprint Fingerprint is based on mining the text of the person's scientific documents to create an index of weighted terms, which defines the key subjects of each individual researcher.

  • 4 Similar Profiles
Silicon Chemical Compounds
Lithography Engineering & Materials Science
lithography Physics & Astronomy
etching Physics & Astronomy
Fabrication Engineering & Materials Science
Etching Chemical Compounds
wafers Physics & Astronomy
fabrication Physics & Astronomy

Network Recent external collaboration on country level. Dive into details by clicking on the dots.

Research Output 1994 2018

1 Citation (Scopus)
3 Downloads (Pure)

3D-fabrication of tunable and high-density arrays of crystalline silicon nanostructures

Wilbers, J. G. E., Berenschot, J. W., Tiggelaar, R. M., Dogan, T., Sugimura, K., Van Der Wiel, W. G., Gardeniers, J. G. E. & Tas, N. R., 15 Feb 2018, In : Journal of micromechanics and microengineering. 28, 4, 044003.

Research output: Contribution to journalArticleAcademicpeer-review

Silicon
Lithography
Nanostructures
Crystalline materials
Fabrication
2 Downloads (Pure)
Open Access
File
1 Citation (Scopus)
6 Downloads (Pure)

Morphology of single picosecond pulse subsurface laser-induced modifications of sapphire and subsequent selective etching

Capuano, L., Pohl, R., Tiggelaar, R. M., Berenschot, J. W., Gardeniers, J. G. E. & Römer, G. R. B. E., 29 Oct 2018, In : Optics express. 26, 22, p. 29283-29295 13 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
picosecond pulses
sapphire
etching
lasers
qualitative analysis
2 Downloads (Pure)

Scalable 3D Nanoparticle Trap for Electron Microscopy Analysis

Sun, X., Berenschot, E. J. W., Veltkamp, H-W., Gardeniers, H. J. G. E. & Tas, N. R., 28 Nov 2018, In : Small. 14, 48, 1803283.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
2 Citations (Scopus)
2 Downloads (Pure)

Sidewall patterning - A new wafer-scale method for accurate patterning of vertical silicon structures

Westerik, P. J., Vijselaar, W. J. C., Berenschot, J. W., Tas, N. R., Huskens, J. & Gardeniers, J. G. E., 1 Jan 2018, In : Journal of micromechanics and microengineering. 28, 1, 015008.

Research output: Contribution to journalArticleAcademicpeer-review

Photolithography
Silicon
Ion beams
Masks
Etching

Activities 1995 2002

  • 5 Oral presentation

Fabrication of functional structures on thin silicon nitride membranes

P. Ekkels (Speaker), R.W. Tjerkstra (Speaker), Gijsbertus J.M. Krijnen (Speaker), Johan W. Berenschot (Speaker), J.P. Brugger (Speaker), Michael Curt Elwenspoek (Speaker)
16 Sep 2002

Activity: Talk or presentationOral presentation

Micromachining (new technologies)

Johan W. Berenschot (Invited speaker)
6 Dec 1999

Activity: Talk or presentationOral presentation

Micromachining and devices for microTAS

Johan W. Berenschot (Invited speaker)
7 Dec 1999

Activity: Talk or presentationOral presentation

Sacrificial wafer bonding: an addition to the micromachining techniques

V.L. Spiering (Keynote speaker), Johan W. Berenschot (Keynote speaker), Michael Curt Elwenspoek (Keynote speaker), J.H.J. Fluitman (Keynote speaker)
24 May 1995

Activity: Talk or presentationOral presentation

An electrostatic axial gap wobble motor

R. Legtenberg (Speaker), J.W. Berenschot (Speaker), T.S.J. Lammerink (Speaker), M.C. Elwenspoek (Speaker)
29 Jun 1995

Activity: Talk or presentationOral presentation