Johan W. Berenschot

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  • 3401 Citations
  • 31 h-Index
19942018
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  • 3 Similar Profiles
Silicon Chemical Compounds
Fabrication Engineering & Materials Science
Lithography Engineering & Materials Science
lithography Physics & Astronomy
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Etching Engineering & Materials Science
silicon Physics & Astronomy
wafers Physics & Astronomy

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Research Output 1994 2018

1 Citations

3D-fabrication of tunable and high-density arrays of crystalline silicon nanostructures

Wilbers, J. G. E., Berenschot, J. W., Tiggelaar, R. M., Dogan, T., Sugimura, K., Van Der Wiel, W. G., Gardeniers, J. G. E. & Tas, N. R., 15 Feb 2018, In : Journal of micromechanics and microengineering. 28, 4, 044003.

Research output: Contribution to journalArticleAcademicpeer-review

Silicon
Lithography
Nanostructures
Crystalline materials
Fabrication
1 Citations

Sidewall patterning - A new wafer-scale method for accurate patterning of vertical silicon structures

Westerik, P. J., Vijselaar, W. J. C., Berenschot, J. W., Tas, N. R., Huskens, J. & Gardeniers, J. G. E., 1 Jan 2018, In : Journal of micromechanics and microengineering. 28, 1, 015008.

Research output: Contribution to journalArticleAcademicpeer-review

Photolithography
Silicon
Ion beams
Masks
Etching
6 Citations

Spatial decoupling of light absorption and catalytic activity of Ni–Mo-loaded high-aspect-ratio silicon microwire photocathodes

Vijselaar, W., Westerik, P., Veerbeek, J., Tiggelaar, R. M., Berenschot, E., Tas, N. R., Gardeniers, H. & Huskens, J., Mar 2018, In : Nature energy. 3, 3, p. 185-192 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Photocathodes
Molybdenum
Silicon
Nickel
Light absorption

Three-dimensional fractal geometry for gas permeation in microchannels

Malankowska, M., Schlautmann, S., Berenschot, E. J. W., Tiggelaar, R. M., Pina, M. P., Mallada, R., Tas, N. R. & Gardeniers, H., 27 Jan 2018, In : Micromachines. 9, 2, 45.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Microchannels
Permeation
Fractals
Geometry
Gases
6 Citations

Shrinkage Control of Photoresist for Large-Area Fabrication of Sub-30 nm Periodic Nanocolumns

Le The, H., Berenschot, J. W., Tiggelaar, R. M., Tas, N. R., van den Berg, A. & Eijkel, J. C. T., Mar 2017, In : Advanced Materials Technologies. 2, 3, 1600238.

Research output: Contribution to journalArticleAcademicpeer-review

Photoresists
Etching
Fabrication
Coatings
Plasmas

Activities 1995 2002

  • 4 Oral presentation

Fabrication of functional structures on thin silicon nitride membranes

P. Ekkels (Speaker), R.W. Tjerkstra (Speaker), Gijsbertus J.M. Krijnen (Speaker), Johan W. Berenschot (Speaker), J.P. Brugger (Speaker), Michael Curt Elwenspoek (Speaker)
16 Sep 2002

Activity: Talk or presentationOral presentation

Micromachining and devices for microTAS

Johan W. Berenschot (Invited speaker)
7 Dec 1999

Activity: Talk or presentationOral presentation

Micromachining (new technologies)

Johan W. Berenschot (Invited speaker)
6 Dec 1999

Activity: Talk or presentationOral presentation

Sacrificial wafer bonding: an addition to the micromachining techniques

V.L. Spiering (Keynote speaker), Johan W. Berenschot (Keynote speaker), Michael Curt Elwenspoek (Keynote speaker), J.H.J. Fluitman (Keynote speaker)
24 May 1995

Activity: Talk or presentationOral presentation