Johan W. Berenschot

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  • 3639 Citations
  • 32 h-Index
19942019
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Fingerprint Dive into the research topics where Johan W. Berenschot is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

  • 7 Similar Profiles
Silicon Chemical Compounds
Lithography Engineering & Materials Science
lithography Physics & Astronomy
Fabrication Engineering & Materials Science
etching Physics & Astronomy
Etching Chemical Compounds
wafers Physics & Astronomy
fabrication Physics & Astronomy

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Research Output 1994 2019

4 Downloads (Pure)

Postdeposition UV-Ozone Treatment: An Enabling Technique to Enhance the Direct Adhesion of Gold Thin Films to Oxidized Silicon

Le-The, H., Tiggelaar, R. M., Berenschot, E., Van Den Berg, A., Tas, N. & Eijkel, J. C. T., 1 Jan 2019, In : ACS nano. 13, p. 6782-6789 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Ozone
Silicon
Gold
ozone
adhesion
1 Citation (Scopus)

Wafer-scale fabrication of high-quality tunable gold nanogap arrays for surface-enhanced Raman scattering

Le-The, H., Lozeman, J. J. A., Lafuente, M., Muñoz, P., Bomer, J. G., Duy-Tong, H., Berenschot, E., Van Den Berg, A., Tas, N. R., Odijk, M. & Eijkel, J. C. T., 7 Jul 2019, In : Nanoscale. 11, 25, p. 12152-12160 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

Gold
Raman scattering
Fabrication
Silicon
Wet etching
2 Citations (Scopus)
3 Downloads (Pure)

3D-fabrication of tunable and high-density arrays of crystalline silicon nanostructures

Wilbers, J. G. E., Berenschot, J. W., Tiggelaar, R. M., Dogan, T., Sugimura, K., Van Der Wiel, W. G., Gardeniers, J. G. E. & Tas, N. R., 15 Feb 2018, In : Journal of micromechanics and microengineering. 28, 4, 044003.

Research output: Contribution to journalArticleAcademicpeer-review

Silicon
Lithography
Nanostructures
Crystalline materials
Fabrication
6 Citations (Scopus)
11 Downloads (Pure)
Open Access
File
4 Citations (Scopus)
10 Downloads (Pure)

Morphology of single picosecond pulse subsurface laser-induced modifications of sapphire and subsequent selective etching

Capuano, L., Pohl, R., Tiggelaar, R. M., Berenschot, J. W., Gardeniers, J. G. E. & Römer, G. R. B. E., 29 Oct 2018, In : Optics express. 26, 22, p. 29283-29295 13 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
picosecond pulses
sapphire
etching
lasers
qualitative analysis

Activities 1995 2002

  • 5 Oral presentation

Fabrication of functional structures on thin silicon nitride membranes

P. Ekkels (Speaker), R.W. Tjerkstra (Speaker), Gijsbertus J.M. Krijnen (Speaker), Johan W. Berenschot (Speaker), J.P. Brugger (Speaker), Michael Curt Elwenspoek (Speaker)
16 Sep 2002

Activity: Talk or presentationOral presentation

Micromachining and devices for microTAS

Johan W. Berenschot (Invited speaker)
7 Dec 1999

Activity: Talk or presentationOral presentation

Micromachining (new technologies)

Johan W. Berenschot (Invited speaker)
6 Dec 1999

Activity: Talk or presentationOral presentation

Sacrificial wafer bonding: an addition to the micromachining techniques

V.L. Spiering (Keynote speaker), Johan W. Berenschot (Keynote speaker), Michael Curt Elwenspoek (Keynote speaker), J.H.J. Fluitman (Keynote speaker)
24 May 1995

Activity: Talk or presentationOral presentation

An electrostatic axial gap wobble motor

R. Legtenberg (Speaker), J.W. Berenschot (Speaker), T.S.J. Lammerink (Speaker), M.C. Elwenspoek (Speaker)
29 Jun 1995

Activity: Talk or presentationOral presentation