Johan W. Berenschot

ing.

Technician, Mesoscale Chemical Systems

3555 Citations
32 h-Index

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Silicon Chemical Compounds

Lithography Engineering & Materials Science

lithography Physics & Astronomy

etching Physics & Astronomy

Fabrication Engineering & Materials Science

Etching Chemical Compounds

wafers Physics & Astronomy

fabrication Physics & Astronomy

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Research Output 1994 2018

3555 Citations
32 h-Index
130 Conference contribution
112 Article
23 Poster
23 Other contribution
21 More

1 Citation (Scopus)

3 Downloads (Pure)

3D-fabrication of tunable and high-density arrays of crystalline silicon nanostructures

Wilbers, J. G. E., Berenschot, J. W., Tiggelaar, R. M., Dogan, T., Sugimura, K., Van Der Wiel, W. G., Gardeniers, J. G. E. & Tas, N. R., 15 Feb 2018, In : Journal of micromechanics and microengineering. 28, 4, 044003.

Research output: Contribution to journal › Article › Academic › peer-review

Silicon

Lithography

Nanostructures

Crystalline materials

Fabrication

2 Downloads (Pure)

Large-scale fabrication of highly ordered sub-20 nm noble metal nanoparticles on silica substrates without metallic adhesion layers

Le-The, H., Berenschot, E., Tiggelaar, R. M., Tas, N. R., van den Berg, A. & Eijkel, J. C. T., 23 Apr 2018, In : Microsystems & nanoengineering. 4, 4.

Research output: Contribution to journal › Article › Academic › peer-review

Open Access

File

1 Citation (Scopus)

6 Downloads (Pure)

Morphology of single picosecond pulse subsurface laser-induced modifications of sapphire and subsequent selective etching

Capuano, L., Pohl, R., Tiggelaar, R. M., Berenschot, J. W., Gardeniers, J. G. E. & Römer, G. R. B. E., 29 Oct 2018, In : Optics express. 26, 22, p. 29283-29295 13 p.

Research output: Contribution to journal › Article › Academic › peer-review

Open Access

File

picosecond pulses

sapphire

etching

lasers

qualitative analysis

2 Downloads (Pure)

Scalable 3D Nanoparticle Trap for Electron Microscopy Analysis

Sun, X., Berenschot, E. J. W., Veltkamp, H-W., Gardeniers, H. J. G. E. & Tas, N. R., 28 Nov 2018, In : Small. 14, 48, 1803283.

Research output: Contribution to journal › Article › Academic › peer-review

Open Access

File

2 Citations (Scopus)

2 Downloads (Pure)

Sidewall patterning - A new wafer-scale method for accurate patterning of vertical silicon structures

Westerik, P. J., Vijselaar, W. J. C., Berenschot, J. W., Tas, N. R., Huskens, J. & Gardeniers, J. G. E., 1 Jan 2018, In : Journal of micromechanics and microengineering. 28, 1, 015008.

Research output: Contribution to journal › Article › Academic › peer-review

Photolithography

Silicon

Ion beams

Masks

Etching

Activities 1995 2002

5 Oral presentation