Johan W. Berenschot

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Technician, Mesoscale Chemical Systems

3740 Citations
32 h-Index

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5 Similar Profiles

Silicon Chemical Compounds

Lithography Engineering & Materials Science

lithography Physics & Astronomy

Fabrication Engineering & Materials Science

etching Physics & Astronomy

fabrication Physics & Astronomy

Etching Chemical Compounds

wafers Physics & Astronomy

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Research Output 1994 2019

3740 Citations
32 h-Index
129 Conference contribution
115 Article
23 Poster
23 Other contribution
21 More

24 Downloads (Pure)

Postdeposition UV-Ozone Treatment: An Enabling Technique to Enhance the Direct Adhesion of Gold Thin Films to Oxidized Silicon

Le-The, H., Tiggelaar, R. M., Berenschot, E., Van Den Berg, A., Tas, N. & Eijkel, J. C. T., 12 Jun 2019, In : ACS nano. 13, p. 6782-6789 8 p.

Research output: Contribution to journal › Article › Academic › peer-review

Open Access

File

Ozone

Silicon

Gold

ozone

adhesion

1 Citation (Scopus)

Selective area growth and stencil lithography for in situ fabricated quantum devices

Schüffelgen, P., Rosenbach, D., Li, C., Schmitt, T. W., Schleenvoigt, M., Jalil, A. R., Schmitt, S., Kölzer, J., Wang, M., Bennemann, B., Parlak, U., Kibkalo, L., Trellenkamp, S., Grap, T., Meertens, D., Luysberg, M., Mussler, G., Berenschot, E., Tas, N., Golubov, A. A. & 3 others, Brinkman, A., Schäpers, T. & Grützmacher, D., 29 Jul 2019, In : Nature nanotechnology. 14, 9, p. 825-831 7 p.

Research output: Contribution to journal › Article › Academic › peer-review

Quantum computers

quantum computation

Lithography

lithography

insulators

1 Citation (Scopus)

3 Downloads (Pure)

Wafer-scale fabrication of high-quality tunable gold nanogap arrays for surface-enhanced Raman scattering

Le-The, H., Lozeman, J. J. A., Lafuente, M., Muñoz, P., Bomer, J. G., Duy-Tong, H., Berenschot, E., Van Den Berg, A., Tas, N. R., Odijk, M. & Eijkel, J. C. T., 7 Jul 2019, In : Nanoscale. 11, 25, p. 12152-12160 9 p.

Research output: Contribution to journal › Article › Academic › peer-review

Open Access

File

Gold

Raman scattering

Fabrication

Silicon

Wet etching

5 Citations (Scopus)

4 Downloads (Pure)

3D-fabrication of tunable and high-density arrays of crystalline silicon nanostructures

Wilbers, J. G. E., Berenschot, J. W., Tiggelaar, R. M., Dogan, T., Sugimura, K., Van Der Wiel, W. G., Gardeniers, J. G. E. & Tas, N. R., 15 Feb 2018, In : Journal of micromechanics and microengineering. 28, 4, 044003.

Research output: Contribution to journal › Article › Academic › peer-review

Silicon

Lithography

Nanostructures

Crystalline materials

Fabrication

7 Citations (Scopus)

35 Downloads (Pure)

Large-scale fabrication of highly ordered sub-20 nm noble metal nanoparticles on silica substrates without metallic adhesion layers

Le-The, H., Berenschot, E., Tiggelaar, R. M., Tas, N. R., van den Berg, A. & Eijkel, J. C. T., 23 Apr 2018, In : Microsystems & nanoengineering. 4, 4.

Research output: Contribution to journal › Article › Academic › peer-review

Open Access

File

Activities 1995 2003

6 Oral presentation

Wet anisotropic etching for fluidic 1D nanochannels

J. Haneveld (Speaker), Henricus V. Jansen (Speaker), Johan W. Berenschot (Speaker), Niels Roelof Tas (Speaker), Michael Curt Elwenspoek (Speaker)

2003