Johan W. Berenschot

ing.

  • 3720 Citations
  • 32 h-Index
19942019
If you made any changes in Pure these will be visible here soon.

Fingerprint Dive into the research topics where Johan W. Berenschot is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

  • 6 Similar Profiles
Silicon Chemical Compounds
Lithography Engineering & Materials Science
lithography Physics & Astronomy
Fabrication Engineering & Materials Science
etching Physics & Astronomy
fabrication Physics & Astronomy
Etching Chemical Compounds
wafers Physics & Astronomy

Network Recent external collaboration on country level. Dive into details by clicking on the dots.

Research Output 1994 2019

19 Downloads (Pure)

Postdeposition UV-Ozone Treatment: An Enabling Technique to Enhance the Direct Adhesion of Gold Thin Films to Oxidized Silicon

Le-The, H., Tiggelaar, R. M., Berenschot, E., Van Den Berg, A., Tas, N. & Eijkel, J. C. T., 12 Jun 2019, In : ACS nano. 13, p. 6782-6789 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Ozone
Silicon
Gold
ozone
adhesion
1 Citation (Scopus)

Selective area growth and stencil lithography for in situ fabricated quantum devices

Schüffelgen, P., Rosenbach, D., Li, C., Schmitt, T. W., Schleenvoigt, M., Jalil, A. R., Schmitt, S., Kölzer, J., Wang, M., Bennemann, B., Parlak, U., Kibkalo, L., Trellenkamp, S., Grap, T., Meertens, D., Luysberg, M., Mussler, G., Berenschot, E., Tas, N., Golubov, A. A. & 3 othersBrinkman, A., Schäpers, T. & Grützmacher, D., 29 Jul 2019, In : Nature nanotechnology. 14, 9, p. 825-831 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Quantum computers
quantum computation
Lithography
lithography
insulators
1 Citation (Scopus)
2 Downloads (Pure)

Wafer-scale fabrication of high-quality tunable gold nanogap arrays for surface-enhanced Raman scattering

Le-The, H., Lozeman, J. J. A., Lafuente, M., Muñoz, P., Bomer, J. G., Duy-Tong, H., Berenschot, E., Van Den Berg, A., Tas, N. R., Odijk, M. & Eijkel, J. C. T., 7 Jul 2019, In : Nanoscale. 11, 25, p. 12152-12160 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Gold
Raman scattering
Fabrication
Silicon
Wet etching
4 Citations (Scopus)
4 Downloads (Pure)

3D-fabrication of tunable and high-density arrays of crystalline silicon nanostructures

Wilbers, J. G. E., Berenschot, J. W., Tiggelaar, R. M., Dogan, T., Sugimura, K., Van Der Wiel, W. G., Gardeniers, J. G. E. & Tas, N. R., 15 Feb 2018, In : Journal of micromechanics and microengineering. 28, 4, 044003.

Research output: Contribution to journalArticleAcademicpeer-review

Silicon
Lithography
Nanostructures
Crystalline materials
Fabrication
6 Citations (Scopus)
26 Downloads (Pure)
Open Access
File

Activities 1995 2003

  • 6 Oral presentation

Wet anisotropic etching for fluidic 1D nanochannels

J. Haneveld (Speaker), Henricus V. Jansen (Speaker), Johan W. Berenschot (Speaker), Niels Roelof Tas (Speaker), Michael Curt Elwenspoek (Speaker)
2003

Activity: Talk or presentationOral presentation

Fabrication of functional structures on thin silicon nitride membranes

P. Ekkels (Speaker), R.W. Tjerkstra (Speaker), Gijsbertus J.M. Krijnen (Speaker), Johan W. Berenschot (Speaker), J.P. Brugger (Speaker), Michael Curt Elwenspoek (Speaker)
16 Sep 2002

Activity: Talk or presentationOral presentation

Micromachining (new technologies)

Johan W. Berenschot (Invited speaker)
6 Dec 1999

Activity: Talk or presentationOral presentation

Micromachining and devices for microTAS

Johan W. Berenschot (Invited speaker)
7 Dec 1999

Activity: Talk or presentationOral presentation

Sacrificial wafer bonding: an addition to the micromachining techniques

V.L. Spiering (Keynote speaker), Johan W. Berenschot (Keynote speaker), Michael Curt Elwenspoek (Keynote speaker), J.H.J. Fluitman (Keynote speaker)
24 May 1995

Activity: Talk or presentationOral presentation