Research Output per year
Fingerprint Dive into the research topics where Johan W. Berenschot is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
- 7 Similar Profiles
Silicon
Chemical Compounds
Lithography
Engineering & Materials Science
lithography
Physics & Astronomy
Fabrication
Engineering & Materials Science
etching
Physics & Astronomy
Etching
Chemical Compounds
wafers
Physics & Astronomy
fabrication
Physics & Astronomy
Network
Recent external collaboration on country level. Dive into details by clicking on the dots.
Research Output 1994 2019
Postdeposition UV-Ozone Treatment: An Enabling Technique to Enhance the Direct Adhesion of Gold Thin Films to Oxidized Silicon
Le-The, H., Tiggelaar, R. M., Berenschot, E., Van Den Berg, A., Tas, N. & Eijkel, J. C. T., 1 Jan 2019, In : ACS nano. 13, p. 6782-6789 8 p.Research output: Contribution to journal › Article › Academic › peer-review
Open Access
File
Ozone
Silicon
Gold
ozone
adhesion
1
Citation
(Scopus)
Wafer-scale fabrication of high-quality tunable gold nanogap arrays for surface-enhanced Raman scattering
Le-The, H., Lozeman, J. J. A., Lafuente, M., Muñoz, P., Bomer, J. G., Duy-Tong, H., Berenschot, E., Van Den Berg, A., Tas, N. R., Odijk, M. & Eijkel, J. C. T., 7 Jul 2019, In : Nanoscale. 11, 25, p. 12152-12160 9 p.Research output: Contribution to journal › Article › Academic › peer-review
Gold
Raman scattering
Fabrication
Silicon
Wet etching
2
Citations
(Scopus)
3
Downloads
(Pure)
3D-fabrication of tunable and high-density arrays of crystalline silicon nanostructures
Wilbers, J. G. E., Berenschot, J. W., Tiggelaar, R. M., Dogan, T., Sugimura, K., Van Der Wiel, W. G., Gardeniers, J. G. E. & Tas, N. R., 15 Feb 2018, In : Journal of micromechanics and microengineering. 28, 4, 044003.Research output: Contribution to journal › Article › Academic › peer-review
Silicon
Lithography
Nanostructures
Crystalline materials
Fabrication
6
Citations
(Scopus)
11
Downloads
(Pure)
Large-scale fabrication of highly ordered sub-20 nm noble metal nanoparticles on silica substrates without metallic adhesion layers
Le-The, H., Berenschot, E., Tiggelaar, R. M., Tas, N. R., van den Berg, A. & Eijkel, J. C. T., 23 Apr 2018, In : Microsystems & nanoengineering. 4, 4.Research output: Contribution to journal › Article › Academic › peer-review
Open Access
File
4
Citations
(Scopus)
10
Downloads
(Pure)
Morphology of single picosecond pulse subsurface laser-induced modifications of sapphire and subsequent selective etching
Capuano, L., Pohl, R., Tiggelaar, R. M., Berenschot, J. W., Gardeniers, J. G. E. & Römer, G. R. B. E., 29 Oct 2018, In : Optics express. 26, 22, p. 29283-29295 13 p.Research output: Contribution to journal › Article › Academic › peer-review
Open Access
File
picosecond pulses
sapphire
etching
lasers
qualitative analysis
Activities 1995 2002
- 5 Oral presentation
Fabrication of functional structures on thin silicon nitride membranes
P. Ekkels (Speaker), R.W. Tjerkstra (Speaker), Gijsbertus J.M. Krijnen (Speaker), Johan W. Berenschot (Speaker), J.P. Brugger (Speaker), Michael Curt Elwenspoek (Speaker)16 Sep 2002
Activity: Talk or presentation › Oral presentation
Micromachining and devices for microTAS
Johan W. Berenschot (Invited speaker)7 Dec 1999
Activity: Talk or presentation › Oral presentation
Micromachining (new technologies)
Johan W. Berenschot (Invited speaker)6 Dec 1999
Activity: Talk or presentation › Oral presentation
Sacrificial wafer bonding: an addition to the micromachining techniques
V.L. Spiering (Keynote speaker), Johan W. Berenschot (Keynote speaker), Michael Curt Elwenspoek (Keynote speaker), J.H.J. Fluitman (Keynote speaker)24 May 1995
Activity: Talk or presentation › Oral presentation
An electrostatic axial gap wobble motor
R. Legtenberg (Speaker), J.W. Berenschot (Speaker), T.S.J. Lammerink (Speaker), M.C. Elwenspoek (Speaker)29 Jun 1995
Activity: Talk or presentation › Oral presentation