Johan W. Berenschot

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  • 3858 Citations
  • 33 h-Index
1994 …2020

Research output per year

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Research Output

High-performance ceramic EOF pump realized by massively parallel sacrificial silicon nano-pillar moulding

Kooijman, L. J., Pordeli, Y., van der Wel, B. Y., Berenschot, J. W., Eijkel, J. C. T. & Tas, N. R., 31 Oct 2020, 23rd International Conference on Miniaturized Systems for Chemistry and Life Sicences: uTAS 2019. Chemical and Biological Microssytems Society, p. 1188-1189

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

  • 4 Downloads (Pure)

    Wafer-scale 3D shaping of high aspect ratio structures by multistep plasma etching and corner lithography

    Ni, S., Berenschot, E. J. W., Westerik, P. J., de Boer, M. J., Wolf, R., Le-The, H., Gardeniers, H. J. G. E. & Tas, N. R., 23 Mar 2020, In : Microsystems and Nanoengineering. 6, 1, 25.

    Research output: Contribution to journalArticleAcademicpeer-review

    Open Access
    File
  • 5 Downloads (Pure)

    Postdeposition UV-Ozone Treatment: An Enabling Technique to Enhance the Direct Adhesion of Gold Thin Films to Oxidized Silicon

    Le-The, H., Tiggelaar, R. M., Berenschot, E., Van Den Berg, A., Tas, N. & Eijkel, J. C. T., 12 Jun 2019, In : ACS nano. 13, p. 6782-6789 8 p.

    Research output: Contribution to journalArticleAcademicpeer-review

    Open Access
    File
  • 2 Citations (Scopus)
    46 Downloads (Pure)

    Selective area growth and stencil lithography for in situ fabricated quantum devices

    Schüffelgen, P., Rosenbach, D., Li, C., Schmitt, T. W., Schleenvoigt, M., Jalil, A. R., Schmitt, S., Kölzer, J., Wang, M., Bennemann, B., Parlak, U., Kibkalo, L., Trellenkamp, S., Grap, T., Meertens, D., Luysberg, M., Mussler, G., Berenschot, E., Tas, N., Golubov, A. A. & 3 others, Brinkman, A., Schäpers, T. & Grützmacher, D., 29 Jul 2019, In : Nature nanotechnology. 14, 9, p. 825-831 7 p.

    Research output: Contribution to journalArticleAcademicpeer-review

  • 11 Citations (Scopus)

    Wafer-scale fabrication of high-quality tunable gold nanogap arrays for surface-enhanced Raman scattering

    Le-The, H., Lozeman, J. J. A., Lafuente, M., Muñoz, P., Bomer, J. G., Duy-Tong, H., Berenschot, E., Van Den Berg, A., Tas, N. R., Odijk, M. & Eijkel, J. C. T., 7 Jul 2019, In : Nanoscale. 11, 25, p. 12152-12160 9 p.

    Research output: Contribution to journalArticleAcademicpeer-review

    Open Access
    File
  • 4 Citations (Scopus)
    16 Downloads (Pure)

    Activities

    • 9 Oral presentation

    Micromachined fountain pen - a tool for atomic force microscope based surface modification

    S. Deladi (Speaker), G.J.M. Krijnen (Speaker), N.R. Tas (Speaker), J.W. Berenschot (Speaker), M.J. de Boer (Speaker), M.C. Elwenspoek (Speaker)
    13 Oct 2004

    Activity: Talk or presentationOral presentation

    Wet anisotropic etching for fluidic 1D nanochannels

    J. Haneveld (Speaker), Henricus V. Jansen (Speaker), Johan W. Berenschot (Speaker), Niels Roelof Tas (Speaker), Michael Curt Elwenspoek (Speaker)
    2003

    Activity: Talk or presentationOral presentation

    Fabrication of functional structures on thin silicon nitride membranes

    P. Ekkels (Speaker), R.W. Tjerkstra (Speaker), Gijsbertus J.M. Krijnen (Speaker), Johan W. Berenschot (Speaker), J.P. Brugger (Speaker), Michael Curt Elwenspoek (Speaker)
    16 Sep 2002

    Activity: Talk or presentationOral presentation

    Micromachining and devices for microTAS

    Johan W. Berenschot (Invited speaker)
    7 Dec 1999

    Activity: Talk or presentationOral presentation

    Micromachining (new technologies)

    Johan W. Berenschot (Invited speaker)
    6 Dec 1999

    Activity: Talk or presentationOral presentation