Joost Conrad Lötters

prof.dr.ir.

1994 …2020

Research output per year

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Research Output

2020

Magnetic field strength improvement for Lorentz actuation of a μ-Coriolis mass flow sensor

Schut, T. V. P., Klein, Y. P., Wiegerink, R. J. & Lotters, J. C., 1 Mar 2020, In : Microelectronic engineering. 224, 111236.

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)

μ-Coriolis mass flow sensor with resistive readout

Schut, T., Wiegerink, R. & Lötters, J., 11 Feb 2020, In : Micromachines. 11, 2, 184.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
2 Downloads (Pure)
2019

A short post-processing method for high aspect ratio trenches after Bosch etching

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 23 Sep 2019. 1 p.

Research output: Contribution to conferenceAbstract

Open Access
File
22 Downloads (Pure)

Fabrication method for microfluidic channels with circular cross section for micro-Coriolis mass flow sensor

Yu, Q., Veltkamp, H-W., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 2 Oct 2019, p. 103-105. 3 p.

Research output: Contribution to conferencePaper

Open Access
File
23 Downloads (Pure)

Highly-doped bulk silicon microheaters and electrodes embedded between free-hanging microfluidic channels by surface channel technology

Zhao, Y., Veltkamp, H-W., Schut, T. V. P., Groenesteijn, J., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 2 Oct 2019, p. 116-119. 4 p.

Research output: Contribution to conferencePaper

Open Access
File
9 Downloads (Pure)

Highly-doped in-plane Si electrodes embedded between free-hanging microfluidic channels

Zhao, Y., Veltkamp, H-W., Schut, T. V. P., Groenesteijn, J., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 23 Sep 2019.

Research output: Contribution to conferenceAbstract

Open Access
File
13 Downloads (Pure)

High power Si sidewall heaters for fluidic application fabricated by trench-assisted surface channel technology

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., Jan 2019, 2019 IEEE 32nd Conference on Micro Electro Mechanical Systems (MEMS). IEEE, Vol. 32. p. 648-651 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

High Power Si Sidewall Heaters for Fluidic Applications Fabricated by Trench-Assisted Surface Channel Technology

Veltkamp, H. W., Zhao, Y., De Boer, M. J., Sanders, R. G. P., Wiegerink, R. J. & Lotters, J. C., 17 Oct 2019, 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019. IEEE, p. 648-651 4 p. 8870667

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Towards 3D printed microfluidic devices in α-alumina

Veltkamp, H-W., Zhao, Y., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., 2 Oct 2019, p. 156-159. 4 p.

Research output: Contribution to conferencePaper

Open Access
File
37 Downloads (Pure)

Towards a fully integrated and disposable DNA amplification chip

Akegawa Monteiro, F., Veltkamp, H-W., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., 2 Oct 2019, p. 128-131. 4 p.

Research output: Contribution to conferencePaper

Open Access
File
27 Downloads (Pure)

Towards a miniaturized Wobbe index meter, an essential piece of equipment in the future?

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 9 Oct 2019, p. 30-31. 2 p.

Research output: Contribution to conferenceAbstract

2018

Experimental analysis of thermomechanical noise in micro Coriolis mass flow sensors

Alveringh, D., Wiegerink, R. J., Groenesteijn, J., Sanders, R. G. P. & Lötters, J. C., 1 Mar 2018, In : Sensors and actuators. A: Physical. 271, p. 212-216 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)
4 Downloads (Pure)

Inline relative permittivity sensing using silicon electrodes realized in surface channel technology

Alveringh, D., Wiegerink, R. J. & Lotters, J. C., 24 Apr 2018, 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018: the 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, Northern Ireland, 21-25 January 2018. Piscataway, NJ: IEEE, p. 840-843 4 p. (International Conference on Micro Electro Mechanical Systems (MEMS); vol. 2018-January).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators

Zeng, Y., Groenesteijn, J., Alveringh, D., Steenwelle, R. J. A., Ma, K., Wiegerink, R. J. & Lötters, J. C., 21 Jan 2018.

Research output: Contribution to conferencePaper

File
1 Citation (Scopus)
132 Downloads (Pure)
2017

A versatile technology platform for microfluidic handling systems, part I: fabrication and functionalization

Groenesteijn, J., de Boer, M. J., Lötters, J. C. & Wiegerink, R. J., 1 Jul 2017, In : Microfluidics and nanofluidics. 21, 7, 127.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
9 Citations (Scopus)
99 Downloads (Pure)

A versatile technology platform for microfluidic handling systems, part II: channel design and technology

Groenesteijn, J., de Boer, M. J., Lötters, J. C. & Wiegerink, R. J., 1 Jul 2017, In : Microfluidics and nanofluidics. 21, 7, 126.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
4 Citations (Scopus)
63 Downloads (Pure)

Coriolis mass flow and density sensor actuation using a phase-locked loop

Alveringh, D., Schut, T., Wiegerink, R. J. & Lötters, J. C., 4 Oct 2017, Proceedings of the 3rd Conference on MicroFluidic Handling Systems, MFHS 2017. p. 102-105 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
111 Downloads (Pure)

Design principles and fabrication method for a miniaturized fuel gas combustion reactor

Zhao, Y., Veltkamp, H-W., de Boer, M. J., Zeng, Y., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 14 Oct 2017, Conference Proceedings: The 3rd Conference on MicroFluidic Handling Systems. Enschede, Vol. 3. p. 37-40

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
96 Downloads (Pure)

Extending the accredited low flow liquid calibration range

Platenkamp, T. & Lötters, J. C., 4 Oct 2017, p. 49-52. 4 p.

Research output: Contribution to conferencePaper

Open Access
File
49 Downloads (Pure)

Fabrication of large-volume rectangular channels using trench-sidewall technology and a SOI substrate

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 14 Oct 2017, Conference Proceedings: The 3rd Conference on MicroFluidic Handling Systems. Enschede, Vol. 3. p. 114-117

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
87 Downloads (Pure)

Fabrication process for a large volume silicon nitride micro-combustor

Zhao, Y., Veltkamp, H-W., de Boer, M. J., Zeng, Y., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 19 Sep 2017, p. 450.

Research output: Contribution to conferenceAbstract

Open Access
File
60 Downloads (Pure)

Integrated pressure sensing using capacitive Coriolis mass flow sensors

Alveringh, D., Wiegerink, R. J. & Lötters, J. C., 2 Jun 2017, In : Journal of microelectromechanical systems. 26, 3, p. 653-661 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

5 Citations (Scopus)

Micro Coriolis Gas Density Sensor

Sparreboom, W., Ratering, G., Kruijswijk, W., van der Wouden, E. J., Groenesteijn, J. & Lötters, J. C., 4 Oct 2017, p. 24-27. 4 p.

Research output: Contribution to conferencePaper

Open Access
File
48 Downloads (Pure)

Micro Coriolis mass flow sensor driven by external piezo ceramic

Zeng, Y., Groenesteijn, J., Alveringh, D., Wiegerink, R. J. & Lötters, J. C., 4 Oct 2017, p. 45-48.

Research output: Contribution to conferencePaper

Open Access
File
88 Downloads (Pure)

Micro Coriolis mass flow sensor with integrated resistive pressure sensors

Groenesteijn, J., Alveringh, D., Schut, T., Wiegerink, R. J., Sparreboom, W. & Lötters, J. C., 4 Oct 2017, p. 16-19. 4 p.

Research output: Contribution to conferencePaper

Open Access

Phase relation recovery for scanning laser Doppler vibrometry

Alveringh, D., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., 12 Jan 2017, In : Measurement science and technology. 28, 2, p. 025208 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)

Resistive pressure sensors integrated with a Coriolis mass flow sensor

Alveringh, D., Schut, T., Wiegerink, R. J., Sparreboom, W. & Lötters, J. C., 18 Jun 2017, TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. IEEE, p. 1167-1170 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

3 Citations (Scopus)

Selective SiO2 etching in three dimensional structures using parylene-C as mask

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 19 Sep 2017, p. 380.

Research output: Contribution to conferenceAbstract

Open Access
File
85 Downloads (Pure)

SU-8 micro Coriolis mass flow sensor

Monge, R., Groenesteijn, J., Alveringh, D., Wiegerink, R. J., Lötters, J. C. & Fernandez, L. J., 31 Mar 2017, In : Sensors and actuators. B: Chemical. 241, p. 744-749 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)

Universal modular fluidic and electronic interfacing platform for microfluidic devices

Alveringh, D., Sanders, R. G. P., Groenesteijn, J., Lammerink, T. S. J., Wiegerink, R. J. & Lötters, J. C., 4 Oct 2017, Proceedings of the 3rd Conference on MicroFluidic Handling Systems, MFHS 2017. p. 106-109 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
133 Downloads (Pure)
2016

Coriolis mass-flow meter with integrated multi-DOF active vibration isolation

van de Ridder, B., Hakvoort, W., Brouwer, D. M., van Dijk, J., Lötters, J. C., Lotters, J. C. & de Boer, A., 2016, In : Mechatronics. 36, p. 167-179

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)

Fluid flow device, comprising a valve unit, as well as method of manufacturing the same

Lötters, J. C., Groen, M., Wiegerink, R. J., Brouwer, D. M., Brookhuis, R. A. & Meutstege, E., 9 May 2016, (Submitted) Patent No. WO2016182437

Research output: Patent

File
17 Downloads (Pure)

Improved capacitive detection method for Coriolis mass flow sensors enabling range/sensitivity tuning

Alveringh, D., Tsoukalas, D. (ed.), Wiegerink, R. J. (ed.), Groenesteijn, J., Staufer, U. (ed.) & Lötters, J. C., 15 Jun 2016, In : Microelectronic engineering. 159, p. 1-5 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
4 Citations (Scopus)
81 Downloads (Pure)

Single-chip mass flow controller with integrated Coriolis flow sensor and proportional control valve

Groenesteijn, J., Alveringh, D., Groen, M., Wiegerink, R. J. & Lötters, J. C., 24 Jan 2016, 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016. USA: IEEE ROBOTICS AND AUTOMATION SOCIETY, p. 788-791 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)
1 Downloads (Pure)

Towards nanogram per second Coriolis mass flow sensing

Groenesteijn, J., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., 24 Jan 2016, 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016. USA: IEEE ROBOTICS AND AUTOMATION SOCIETY, p. 193-196 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

6 Citations (Scopus)
1 Downloads (Pure)

Vibration Isolation by an Actively Compliantly Mounted Sensor Applied to a Coriolis Mass-Flow Meter

van de Ridder, B., Hakvoort, W., van Dijk, J., Lötters, J. C. & de Boer, A., 2016, In : Journal of dynamic systems, measurement and control : transactions of the ASME. 138, 3, p. 1-8 8 p., 031005031005.

Research output: Contribution to journalArticleAcademicpeer-review

2 Downloads (Pure)

Vortex generation and sensing in microfabricated surface channels

Alveringh, D., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., 24 Jan 2016, 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016. Shanghai: IEEE, p. 812-815 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

1 Citation (Scopus)
2015

A novel capacitive detection principle for Coriolis mass flow sensors enabling range/sensitivity tuning

Alveringh, D., Groenesteijn, J., Ma, K., Wiegerink, R. J. & Lötters, J. C., 21 Sep 2015, 41st International Conference on Micro- and Nano-Engineering, MNE 2015. The Hague: MNE 2015, p. - 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
14 Downloads (Pure)

Coriolis flow sensor

Lötters, J. C., Lotters, J. C., Katerberg, M. R., Hakvoort, W., Kruijswijk, W. D. & van de Ridder, B., 28 May 2015, (Submitted) Patent No. PCT/NL2014/050799, Priority date 28 May 2015

Research output: Patent

File
23 Downloads (Pure)

Flow measurement system and method for determining at least one property of a medium

Lötters, J. C., 23 Jan 2015, (Submitted) Patent No. US2016334349

Research output: Patent

File
5 Downloads (Pure)

Fully integrated microfluidic measurement system for real-time determination of gas and liquid mixtures composition

Lötters, J. C., Groenesteijn, J., van der Wouden, E. J., Sparreboom, W., Lammerink, T. S. J. & Wiegerink, R. J., 21 Jun 2015, Proceedings of the18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. USA: IEEE ROBOTICS AND AUTOMATION SOCIETY, p. 1798-1801 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

5 Citations (Scopus)

In-line picogram-resolution microchannel resonator for protein adsorption measurements operating at atmospheric pressure

Groenesteijn, J., Steenwelle, R. J. A., Steenwelle, R. J. A., Lötters, J. C. & Wiegerink, R. J., 21 Sep 2015, 41st International Conference on Micro- and Nano-Engineering, MNE 2015. Enschede: University of Twente, p. 1 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
22 Downloads (Pure)

Inline pressure sensing mechanisms enabling scalable range and sensitivity

Alveringh, D., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 21 Jun 2015, 18th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2015. The Printing House, Inc., p. 1187-1190 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

6 Citations (Scopus)

Method and system for determining the fractions of a streaming gaseous medium

Lötters, J. C., Groenesteijn, J., Lammerink, T. S. J., Wiegerink, R. J., van der Wouden, E. J. & Sparreboom, W., 5 Oct 2015, (Submitted) Patent No. WO2016056902

Research output: Patent

File
13 Downloads (Pure)

Miniature proportional control valve with top-mounted piezo bimorph actuator with millisecond response time

Groen, M., Brouwer, D. M., Lötters, J. C. & Wiegerink, R. J., 9 Sep 2015, In : Journal of micromechanics and microengineering. 25, p. 105008 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)
2 Downloads (Pure)

Multi parameter flow meter for on-line measurement of gas mixture composition

van der Wouden, E. J., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 10 Apr 2015, In : Micromachines. 6, 4, p. 452-461 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
3 Citations (Scopus)
325 Downloads (Pure)

Proportional control valves integrated in silicon nitride surface channel technology

Groen, M., Groenesteijn, J., Meutstege, E., Brookhuis, R. A., Brouwer, D. M., Lötters, J. C. & Wiegerink, R. J., 25 Jun 2015, In : Journal of microelectromechanical systems. 24, 6, p. 1759-1767 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)

Readout circuit for capacitance ratio measurement

Lammerink, T. S. J., Groenesteijn, J., Lötters, J. C. & Wiegerink, R. J., 21 Sep 2015, 41st International Conference on Micro- and Nano-Engineering, MNE 2015. Enschede: Universiteit Twente, p. 1 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
15 Downloads (Pure)
2014

A compact micro Coriolis mass flow sensor with flow bypass for a monopropellant micro propulsion system

Groenesteijn, J., Dijkstra, M., Lammerink, T. S. J., Lötters, J. C. & Wiegerink, R. J., 8 Oct 2014, Proceedings of the Second International Conference on MicroFluidic Handling Systems, MFHS 2014. Freiburg im Breisgau, Germany: Albert-Ludwigs-Universität Freiburg, p. 21-24 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
58 Downloads (Pure)

Active vibration isolation feedback control for coriolis mass-flow meters

van de Ridder, B., Beijen, M. A., Beijen, M. A., Hakvoort, W., van Dijk, J., Lötters, J. C. & de Boer, A., 2014, In : Control engineering practice. 33, p. 76-83 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

9 Citations (Scopus)
1 Downloads (Pure)