Joost Conrad Lötters

prof.dr.ir.

19942019
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Research Output 1994 2019

2019

High power Si sidewall heaters for fluidic application fabricated by trench-assisted surface channel technology

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., Jan 2019, 2019 IEEE 32nd Conference on Micro Electro Mechanical Systems (MEMS). IEEE, Vol. 32. p. 648-651 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

fluidics
heaters
heating
silicon
thermal expansion
2018
1 Downloads (Pure)

Experimental analysis of thermomechanical noise in micro Coriolis mass flow sensors

Alveringh, D., Wiegerink, R. J., Groenesteijn, J., Sanders, R. G. P. & Lötters, J. C., 1 Mar 2018, In : Sensors and actuators. A: Physical. 271, p. 212-216 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

mass flow
sensors
Sensors
equipartition theorem
random vibration
205 Downloads (Pure)

Integrated throughflow mechanical microfluidic sensors

Alveringh, D., 6 Apr 2018, Enschede: University of Twente. 216 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

Open Access
File
Microfluidics
Fluids
Sensors
Viscosity
Medical applications
1 Citation (Scopus)
103 Downloads (Pure)

Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators

Zeng, Y., Groenesteijn, J., Alveringh, D., Steenwelle, R. J. A., Ma, K., Wiegerink, R. J. & Lötters, J. C., 21 Jan 2018.

Research output: Contribution to conferencePaperAcademicpeer-review

File
mass flow
actuators
actuation
sensors
thin films
2017
6 Citations (Scopus)
64 Downloads (Pure)

A versatile technology platform for microfluidic handling systems, part I: fabrication and functionalization

Groenesteijn, J., de Boer, M. J., Lötters, J. C. & Wiegerink, R. J., 1 Jul 2017, In : Microfluidics and nanofluidics. 21, 7, 127.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Silicon
Silicon nitride
Microfluidics
platforms
Metals
3 Citations (Scopus)
46 Downloads (Pure)

A versatile technology platform for microfluidic handling systems, part II: channel design and technology

Groenesteijn, J., de Boer, M. J., Lötters, J. C. & Wiegerink, R. J., 1 Jul 2017, In : Microfluidics and nanofluidics. 21, 7, 126.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Microfluidics
platforms
Fabrication
fabrication
slits
72 Downloads (Pure)

Coriolis mass flow and density sensor actuation using a phase-locked loop

Alveringh, D., Schut, T., Wiegerink, R. J. & Lötters, J. C., 4 Oct 2017, Proceedings of the 3rd Conference on MicroFluidic Handling Systems, MFHS 2017. p. 102-105 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
Phase locked loops
Sensors
Electric potential
Electronic equipment
Nitrogen
69 Downloads (Pure)

Design principles and fabrication method for a miniaturized fuel gas combustion reactor

Zhao, Y., Veltkamp, H-W., de Boer, M. J., Zeng, Y., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 14 Oct 2017, Conference Proceedings: The 3rd Conference on MicroFluidic Handling Systems. Enschede, Vol. 3. p. 37-40

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
Gas fuels
Combustors
Fabrication
MEMS
Mechanical stability
37 Downloads (Pure)

Extending the accredited low flow liquid calibration range

Platenkamp, T. & Lötters, J. C., 4 Oct 2017, p. 49-52. 4 p.

Research output: Contribution to conferencePaperAcademic

Open Access
File
liquid flow
metrology
coverings
67 Downloads (Pure)

Fabrication of large-volume rectangular channels using trench-sidewall technology and a SOI substrate

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 14 Oct 2017, Conference Proceedings: The 3rd Conference on MicroFluidic Handling Systems. Enschede, Vol. 3. p. 114-117

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
Microfluidics
Fabrication
Silicon
Substrates
Electronics industry
48 Downloads (Pure)

Fabrication process for a large volume silicon nitride micro-combustor

Zhao, Y., Veltkamp, H-W., de Boer, M. J., Zeng, Y., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 19 Sep 2017, p. 450.

Research output: Contribution to conferenceAbstractOther research output

Open Access
File
combustion chambers
silicon nitrides
flames
fabrication
chambers
2 Citations (Scopus)

Integrated pressure sensing using capacitive Coriolis mass flow sensors

Alveringh, D., Wiegerink, R. J. & Lötters, J. C., 2 Jun 2017, In : Journal of microelectromechanical systems. 26, 3, p. 653-661 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

Sensors
Flow measurement
Microchannels
Scalability
Fabrication
30 Downloads (Pure)

Micro Coriolis Gas Density Sensor

Sparreboom, W., Ratering, G., Kruijswijk, W., van der Wouden, E. J., Groenesteijn, J. & Lötters, J. C., 4 Oct 2017, p. 24-27. 4 p.

Research output: Contribution to conferencePaperAcademic

Open Access
File
Density of gases
Sensors
Gas fuel measurement
Gases
Temperature
64 Downloads (Pure)

Micro Coriolis mass flow sensor driven by external piezo ceramic

Zeng, Y., Groenesteijn, J., Alveringh, D., Wiegerink, R. J. & Lötters, J. C., 4 Oct 2017, p. 45-48.

Research output: Contribution to conferencePaperAcademicpeer-review

Open Access
File
mass flow
ceramics
sensors
vibration meters
chips

Micro Coriolis mass flow sensor with integrated resistive pressure sensors

Groenesteijn, J., Alveringh, D., Schut, T., Wiegerink, R. J., Sparreboom, W. & Lötters, J. C., 4 Oct 2017, p. 16-19. 4 p.

Research output: Contribution to conferencePaperAcademicpeer-review

Open Access
Pressure sensors
Sensors
Pressure drop
Viscosity
Fluids
1 Citation (Scopus)

Phase relation recovery for scanning laser Doppler vibrometry

Alveringh, D., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., 12 Jan 2017, In : Measurement science and technology. 28, 2, p. 025208 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Scanning
Recovery
Lasers
Doppler effect
Laser beams
1 Citation (Scopus)

Resistive pressure sensors integrated with a Coriolis mass flow sensor

Alveringh, D., Schut, T., Wiegerink, R. J., Sparreboom, W. & Lötters, J. C., 18 Jun 2017, TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. IEEE, p. 1167-1170 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Pressure sensors
Sensors
Pressure drop
Electronic equipment
Viscosity
65 Downloads (Pure)

Selective SiO2 etching in three dimensional structures using parylene-C as mask

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 19 Sep 2017, p. 380.

Research output: Contribution to conferenceAbstractOther research output

Open Access
File
Masks
Etching
Oxides
Packaging materials
Reactive ion etching
1 Citation (Scopus)

SU-8 micro Coriolis mass flow sensor

Monge, R., Groenesteijn, J., Alveringh, D., Wiegerink, R. J., Lötters, J. C. & Fernandez, L. J., 31 Mar 2017, In : Sensors and actuators. B: Chemical. 241, p. 744-749 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

isopropyl alcohol
2-Propanol
mass flow
Alcohols
Water
99 Downloads (Pure)

Universal modular fluidic and electronic interfacing platform for microfluidic devices

Alveringh, D., Sanders, R. G. P., Groenesteijn, J., Lammerink, T. S. J., Wiegerink, R. J. & Lötters, J. C., 4 Oct 2017, Proceedings of the 3rd Conference on MicroFluidic Handling Systems, MFHS 2017. p. 106-109 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
Fluidics
Microfluidics
Sensors
Pressure sensors
Resonators
2016
4 Citations (Scopus)

Coriolis mass-flow meter with integrated multi-DOF active vibration isolation

van de Ridder, B., Hakvoort, W., Brouwer, D. M., van Dijk, J., Lötters, J. C., Lotters, J. C. & de Boer, A., 2016, In : Mechatronics. 36, p. 167-179

Research output: Contribution to journalArticleAcademicpeer-review

13 Downloads (Pure)

Fluid flow device, comprising a valve unit, as well as method of manufacturing the same

Lötters, J. C., Groen, M., Wiegerink, R. J., Brouwer, D. M., Brookhuis, R. A. & Meutstege, E., 9 May 2016, (Submitted) Patent No. WO2016182437

Research output: PatentProfessional

File
2 Citations (Scopus)
57 Downloads (Pure)

Improved capacitive detection method for Coriolis mass flow sensors enabling range/sensitivity tuning

Alveringh, D., Tsoukalas, D. (ed.), Wiegerink, R. J. (ed.), Groenesteijn, J., Staufer, U. (ed.) & Lötters, J. C., 15 Jun 2016, In : Microelectronic engineering. 159, p. 1-5 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
113 Downloads (Pure)

Microfluidic platform for Coriolis-based sensor and actuator systems

Groenesteijn, J., 15 Jan 2016, Enschede: University of Twente. 241 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

File
1 Citation (Scopus)
1 Downloads (Pure)

Single-chip mass flow controller with integrated Coriolis flow sensor and proportional control valve

Groenesteijn, J., Alveringh, D., Groen, M., Wiegerink, R. J. & Lötters, J. C., 24 Jan 2016, 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016. USA: IEEE ROBOTICS AND AUTOMATION SOCIETY, p. 788-791 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

3 Citations (Scopus)
1 Downloads (Pure)

Towards nanogram per second Coriolis mass flow sensing

Groenesteijn, J., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., 24 Jan 2016, 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016. USA: IEEE ROBOTICS AND AUTOMATION SOCIETY, p. 193-196 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Downloads (Pure)

Vibration Isolation by an Actively Compliantly Mounted Sensor Applied to a Coriolis Mass-Flow Meter

van de Ridder, B., Hakvoort, W., van Dijk, J., Lötters, J. C. & de Boer, A., 2016, In : Journal of dynamic systems, measurement and control : transactions of the ASME. 138, 3, p. 1-8 8 p., 031005031005.

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)

Vortex generation and sensing in microfabricated surface channels

Alveringh, D., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., 24 Jan 2016, 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016. Shanghai: IEEE, p. 812-815 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

2015
12 Downloads (Pure)

A novel capacitive detection principle for Coriolis mass flow sensors enabling range/sensitivity tuning

Alveringh, D., Groenesteijn, J., Ma, K., Wiegerink, R. J. & Lötters, J. C., 21 Sep 2015, 41st International Conference on Micro- and Nano-Engineering, MNE 2015. The Hague: MNE 2015, p. - 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
mass flow
tuning
actuation
sensitivity
sensors
17 Downloads (Pure)

Coriolis flow sensor

Lötters, J. C., Lotters, J. C., Katerberg, M. R., Hakvoort, W., Kruijswijk, W. D. & van de Ridder, B., 28 May 2015, (Submitted) Patent No. PCT/NL2014/050799, Priority date 28 May 2015

Research output: PatentProfessional

File
3 Downloads (Pure)

Flow measurement system and method for determining at least one property of a medium

Lötters, J. C., 23 Jan 2015, (Submitted) Patent No. US2016334349

Research output: PatentProfessional

File
5 Citations (Scopus)

Fully integrated microfluidic measurement system for real-time determination of gas and liquid mixtures composition

Lötters, J. C., Groenesteijn, J., van der Wouden, E. J., Sparreboom, W., Lammerink, T. S. J. & Wiegerink, R. J., 21 Jun 2015, Proceedings of the18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. USA: IEEE ROBOTICS AND AUTOMATION SOCIETY, p. 1798-1801 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

19 Downloads (Pure)

In-line picogram-resolution microchannel resonator for protein adsorption measurements operating at atmospheric pressure

Groenesteijn, J., Steenwelle, R. J. A., Steenwelle, R. J. A., Lötters, J. C. & Wiegerink, R. J., 21 Sep 2015, 41st International Conference on Micro- and Nano-Engineering, MNE 2015. Enschede: University of Twente, p. 1 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
5 Citations (Scopus)

Inline pressure sensing mechanisms enabling scalable range and sensitivity

Alveringh, D., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 21 Jun 2015, 18th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2015. The Printing House, Inc., p. 1187-1190 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

11 Downloads (Pure)

Method and system for determining the fractions of a streaming gaseous medium

Lötters, J. C., Groenesteijn, J., Lammerink, T. S. J., Wiegerink, R. J., van der Wouden, E. J. & Sparreboom, W., 5 Oct 2015, (Submitted) Patent No. WO2016056902

Research output: PatentProfessional

File
86 Downloads (Pure)

Microvalves for precise dosing: proportional flow control on a chip

Groen, M., 26 Nov 2015, Enschede: University of Twente. 128 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

File
2 Citations (Scopus)
2 Downloads (Pure)

Miniature proportional control valve with top-mounted piezo bimorph actuator with millisecond response time

Groen, M., Brouwer, D. M., Lötters, J. C. & Wiegerink, R. J., 9 Sep 2015, In : Journal of micromechanics and microengineering. 25, p. 105008 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)
236 Downloads (Pure)

Multi parameter flow meter for on-line measurement of gas mixture composition

van der Wouden, E. J., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 10 Apr 2015, In : Micromachines. 6, 4, p. 452-461 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
3 Citations (Scopus)

Proportional control valves integrated in silicon nitride surface channel technology

Groen, M., Groenesteijn, J., Meutstege, E., Brookhuis, R. A., Brouwer, D. M., Lötters, J. C. & Wiegerink, R. J., 25 Jun 2015, In : Journal of microelectromechanical systems. 24, 6, p. 1759-1767 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

12 Downloads (Pure)

Readout circuit for capacitance ratio measurement

Lammerink, T. S. J., Groenesteijn, J., Lötters, J. C. & Wiegerink, R. J., 21 Sep 2015, 41st International Conference on Micro- and Nano-Engineering, MNE 2015. Enschede: Universiteit Twente, p. 1 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
2014
47 Downloads (Pure)

A compact micro Coriolis mass flow sensor with flow bypass for a monopropellant micro propulsion system

Groenesteijn, J., Dijkstra, M., Lammerink, T. S. J., Lötters, J. C. & Wiegerink, R. J., 8 Oct 2014, Proceedings of the Second International Conference on MicroFluidic Handling Systems, MFHS 2014. Freiburg im Breisgau, Germany: Albert-Ludwigs-Universität Freiburg, p. 21-24 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
8 Citations (Scopus)
1 Downloads (Pure)

Active vibration isolation feedback control for coriolis mass-flow meters

van de Ridder, B., Beijen, M. A., Beijen, M. A., Hakvoort, W., van Dijk, J., Lötters, J. C. & de Boer, A., 2014, In : Control engineering practice. 33, p. 76-83 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Vibration Isolation
Vibration control
Feedback Control
Feedback control
Vibration
3 Citations (Scopus)

A piezoelectric micro control valve with integrated capacitive sensing for ambulant blood pressure waveform monitoring

Groen, M., Wu, K., Brookhuis, R. A., van Houwelingen, M. J., Brouwer, D. M., Lötters, J. C. & Wiegerink, R. J., 26 Nov 2014, In : Journal of micromechanics and microengineering. 24, 12, p. 125020 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

9 Citations (Scopus)
15 Downloads (Pure)

Integrated multi-parameter flow measurement system

Lötters, J. C., van der Wouden, E. J., Groenesteijn, J., Sparreboom, W., Lammerink, T. S. J. & Wiegerink, R. J., 26 Jan 2014, 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014. USA: IEEE ROBOTICS AND AUTOMATION SOCIETY, p. 975-978 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
17 Downloads (Pure)

Low flow Coriolis flow controller with piezo operated control valve

Katerberg, M. R., Ratering, G. H. J. M., Platenkamp, T. H., van de Geest, J. W., Klein Hesselink, S. & Lötters, J. C., 8 Oct 2014, Proceedings of the Second International Conference on Microfluidic Handling Systems. Freiburg, Germany: University of Freiburg, p. 169-172 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
29 Downloads (Pure)

Low flow liquid calibration setup

Platenkamp, T. H., Sparreboom, W., Ratering, G. H. J. M., Katerberg, M. R. & Lötters, J. C., 8 Oct 2014, Proceedings of the Second International Conference on Microfluidic Handling Systems. Freiburg, Germany: University of Freiburg, p. 165-168 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
1 Citation (Scopus)

Miniaturised Prandtl tube with integrated pressure sensors for micro-thruster plume characterisation

Dijkstra, M., Ma, K., de Boer, M. J., Groenesteijn, J., Lötters, J. C. & Wiegerink, R. J., 26 Jan 2014, MIEEE 27th International Conference on Micro Electro Mechanical Systems, MEMS 2014. USA: IEEE, p. 999-1002 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

39 Downloads (Pure)

Modelling of a micro Coriolis mass flow sensor for sensitivity improvement

Groenesteijn, J., van de Ridder, B., Lötters, J. C. & Wiegerink, R. J., 4 Nov 2014, p. 954-957. 4 p.

Research output: Contribution to conferencePaperAcademicpeer-review

File
3 Citations (Scopus)

Modelling of a micro coriolis mass flow sensor for sensitivity improvements

Groenesteijn, J., van de Ridder, B., Lötters, J. C. & Wiegerink, R. J., 2 Nov 2014, Proceedings of the Thirteenth IEEE Sensors Conference 2014. Valencia, Spain, p. 954-957

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)

Parametric amplification in a micro Coriolis mass flow sensor

Groenesteijn, J., Droogendijk, H., Wiegerink, R. J., Lammerink, T. S. J., Lötters, J. C., Sanders, R. G. P. & Krijnen, G. J. M., 21 May 2014, In : Journal of applied physics. 115, 19, p. 194503 10 p.

Research output: Contribution to journalArticleAcademicpeer-review