Jos Benschop

prof.dr.ir.

  • 102 Citations
  • 5 h-Index
20082019
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Extreme ultraviolet lithography Engineering & Materials Science
blisters Physics & Astronomy
Lithography Engineering & Materials Science
lithography Physics & Astronomy
scanners Physics & Astronomy
manufacturing Physics & Astronomy
Hydrogen Chemical Compounds
hydrogen ions Physics & Astronomy

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Research Output 2008 2019

EUV Lithography at Threshold of High-Volume Manufacturing∗

Yen, A., Meiling, H. & Benschop, J., 16 Jan 2019, 2018 IEEE International Electron Devices Meeting, IEDM 2018. IEEE, p. 11.6.1-11.6.4 8614502. (Technical Digest - International Electron Devices Meeting, IEDM; vol. 2018-December).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Extreme ultraviolet lithography
lithography
manufacturing
Throughput
thresholds
86 Downloads (Pure)

Hydrogen induced blister formation in Mo/Si multilayer structures

van den Bos, R. A. J. M., 2 May 2018, Enschede: University of Twente. 113 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

Open Access
File
blisters
laminates
hydrogen
particle telescopes
electromagnetic spectra
1 Citation (Scopus)
4 Downloads (Pure)

Influence of internal stress and layer thickness on the formation of hydrogen induced thin film blisters in Mo/Si multilayers

van den Bos, R. A. J. M., Reinink, J., Lopaev, D. V., Lee, C. J., Benschop, J. P. H. & Bijkerk, F., 22 Feb 2018, In : Journal of physics D: applied physics. 51, 11, 11 p., 115302.

Research output: Contribution to journalArticleAcademicpeer-review

blisters
residual stress
Hydrogen
Residual stresses
Multilayers

A model for hydrogen induced blister growth in Mo/Si multilayer mirror structures

van den Bos, R., Benschop, J., Bijkerk, F. & Lee, C. J., 17 Jan 2017.

Research output: Contribution to conferencePosterOther research output

6 Citations (Scopus)
2 Downloads (Pure)

Blister formation in Mo/Si multilayered structures induced by hydrogen ions

Van Den Bos, R. A. J. M., Lee, C. J., Benschop, J. P. H. & Bijkerk, F., 9 Jun 2017, In : Journal of physics D: applied physics. 50, 26, 265302.

Research output: Contribution to journalArticleAcademicpeer-review

blisters
hydrogen ions
Protons
Ions
Fluxes