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Activities 2003 2019

  • 17 Oral presentation
  • 2 Invited talk
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Oral presentation

Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films

Kees van der Zouw (Speaker), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Alexey Y. Kovalgin (Contributor)
19 Mar 2019

Activity: Talk or presentationOral presentation

How hot is the wire: optical, electrical and combined methods of filament temperature determination

Arnoud Jonathan Onnink (Speaker), Alexey Y. Kovalgin (Contributor), Jurriaan Schmitz (Contributor)
3 Sep 20186 Sep 2018

Activity: Talk or presentationOral presentation

Purely Thermal Deposition of Polycrystalline Gallium Nitride Films at 400 °C

Sourish Banerjee (Speaker), Satadal Dutta (Contributor), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Dirk J Gravesteijn (Contributor), Alexey Y. Kovalgin (Contributor)
29 Jul 20181 Aug 2018

Activity: Talk or presentationOral presentation

Hot wire technique as a radical source for atomic layer deposition of metal and metal nitride films

Sourish Banerjee (Speaker), Ramazan Oguzhan Apaydin (Contributor), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Dirk J Gravesteijn (Contributor), Machiel Pieter de Jong (Contributor), Alexey Y. Kovalgin (Contributor)
11 Jun 201717 Jun 2017

Activity: Talk or presentationOral presentation

Material properties of LPCVD processed n-type poly-Si passivating contacts and application in PERPoly industrial bifacial solar cells

M.K. Stodolny (Speaker), L.J. Geerligs (Speaker), G.J.M. Janssen (Speaker), I. Romijn (Speaker), B.W.H. van de Loo (Speaker), J. Melskens (Speaker), W.M.M. Kessels (Speaker), R. Santbergen (Speaker), O. Isabella (Speaker), J. Schmitz (Contributor), M. Lenes (Speaker), J.R.M. Luchies (Speaker)
28 Sep 2017

Activity: Talk or presentationOral presentation

Effects of oxygen, nitrogen and fluorine sources on the formation of α- and β-phase Tungsten films by hot-wire assisted ALD

Mengdi Yang (Contributor), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Alexey Y. Kovalgin (Speaker)
11 Jun 201714 Jun 2017

Activity: Talk or presentationOral presentation

Deposition of thin layers containing Ga, C and N by sequential pulses of Trimethylgallium and Ammonia

Sourish Banerjee (Speaker), Antonius A.I. Aarnink (Contributor), Gerhardus A.M. Kip (Contributor), Dirk J Gravesteijn (Contributor), Jurriaan Schmitz (Contributor), Alexey Y. Kovalgin (Contributor)
24 Jul 201627 Jul 2016

Activity: Talk or presentationOral presentation

A comparison of tungsten films grown by CVD and hot-wire assisted ALD

Mengdi Yang (Speaker), Antonius A.I. Aarnink (Contributor), Alexey Y. Kovalgin (Contributor), Robertus A.M. Wolters (Contributor), Jurriaan Schmitz (Speaker)
28 Jun 20151 Jul 2015

Activity: Talk or presentationOral presentation

PEALD ALN: CONTROLLING GROWTH AND FILM CRYSTALLINITY

Sourish Banerjee (Speaker), Antonius A.I. Aarnink (Contributor), Alexey Y. Kovalgin (Contributor), Jurriaan Schmitz (Contributor)
13 Jul 201517 Jul 2015

Activity: Talk or presentationOral presentation

Hot-wire assisted ALD of tungsten films: In-Situ study of the interplay between ALD, CVD and etching modes

Mengdi Yang (Speaker), Antonius A.I. Aarnink (Contributor), Alexey Y. Kovalgin (Contributor), Robertus A.M. Wolters (Contributor), Jurriaan Schmitz (Contributor)
13 Jul 201517 Jul 2015

Activity: Talk or presentationOral presentation

Electrical properties of ultra-thin aluminum oxide layers on silicon

Jacobus Marinus Sturm (Speaker), A. Zinine (Speaker), Herbert Wormeester (Speaker), Bene Poelsema (Speaker), R.G. Bankras (Speaker), J. Holleman (Speaker), Jurriaan Schmitz (Speaker)
29 May 2006

Activity: Talk or presentationOral presentation

De microchip van de toekomst - Zonder kennis geen kunde - Stars uit wetenschap en industrie 2

Jurriaan Schmitz (Speaker)
10 Apr 2006

Activity: Talk or presentationOral presentation

Integrated high voltage electrodes on CMOS

Jurriaan Schmitz (Speaker)
5 Apr 2006

Activity: Talk or presentationOral presentation

Laterally resolved electrical characterization of ultrathin oxides

Herbert Wormeester (Speaker), Marko Sturm (Contributor), Andrey Zinine (Contributor), Radko Bankras (Contributor), Jisk Holleman (Contributor), Jurriaan Schmitz (Contributor), Bene Poelsema (Contributor)
7 Mar 2005

Activity: Talk or presentationOral presentation

Combined electrical and morphological characterization of Al2O3 films by non-contact AFM

Jacobus Marinus Sturm (Speaker), A. Zinine (Speaker), Herbert Wormeester (Speaker), R.G. Bankras (Speaker), J. Holleman (Speaker), Jurriaan Schmitz (Speaker), Bene Poelsema (Speaker)
30 Oct 2005

Activity: Talk or presentationOral presentation

Laterally resolved electrical characterization of ultrathin oxides

Herbert Wormeester (Speaker), Marko Sturm (Contributor), Andrey Zinine (Contributor), Radko Bankras (Contributor), Jisk Holleman (Contributor), Jurriaan Schmitz (Contributor), Bene Poelsema (Contributor)
4 Mar 2005

Activity: Talk or presentationOral presentation

Research without bonus targets

Jurriaan Schmitz (Speaker)
7 Oct 2003

Activity: Talk or presentationOral presentation