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Research Output 1991 2019

2019
29 Downloads (Pure)

Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films

van der Zouw, K., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., 18 Mar 2019, 2019 IEEE 32nd International Conference on Microelectronic Test Structures, ICMTS 2019. IEEE, p. 48-53 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
Atomic layer deposition
Sheet resistance
Contact resistance
Tungsten
Electric lines
18 Downloads (Pure)

How hot is the wire: Optical, electrical, and combined methods to determine filament temperature

Onnink, A. J., Schmitz, J. & Kovalgin, A. Y., 31 Mar 2019, In : Thin solid films. 674, p. 22-32 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Heat radiation
filaments
wire
Wire
optics
2 Downloads (Pure)

Recovery after hot-carrier injection: Slow versus fast traps

de Jong, M. J., Salm, C. & Schmitz, J., 23 Sep 2019, In : Microelectronics reliability. 100-101, 5 p., 113318.

Research output: Contribution to journalArticleAcademicpeer-review

Hot carriers
carrier injection
recovery
traps
Recovery
2018
2 Citations (Scopus)
134 Downloads (Pure)

Charge carrier transport and electroluminescence in atomic layer deposited poly-GaN/c-Si heterojunction diodes

Gupta, G., Banerjee, S., Dutta, S., Aarnink, A. A. I., Schmitz, J., Kovalgin, A. Y. & Hueting, R. J. E., 28 Aug 2018, In : Journal of applied physics. 124, 8, 8 p., 084503.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
electroluminescence
heterojunctions
charge carriers
diodes
traps
1 Citation (Scopus)
42 Downloads (Pure)

Inherently area-selective hot-wire assisted atomic layer deposition of tungsten films

Yang, M., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., 1 Mar 2018, In : Thin solid films. 649, p. 17-23 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Tungsten
Atomic layer deposition
atomic layer epitaxy
tungsten
wire
3 Citations (Scopus)
114 Downloads (Pure)

Low-resistivity α-phase tungsten films grown by hot-wire assisted atomic layer deposition in high-aspect-ratio structures

Yang, M., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., 31 Jan 2018, In : Thin solid films. 646, p. 199-208 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Tungsten
Atomic layer deposition
atomic layer epitaxy
high aspect ratio
Aspect ratio
9 Citations (Scopus)
121 Downloads (Pure)

Low temperature thin films for next-generation microelectronics (invited)

Schmitz, J., 15 Jun 2018, In : Surface and coatings technology. 343, p. 83-88 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
microelectronics
Microelectronics
Thin films
thin films
Temperature
2 Citations (Scopus)
55 Downloads (Pure)

Optocoupling in CMOS

Agarwal, V., Dutta, S., Annema, A. J., Hueting, R. J. E., Schmitz, J., Lee, M-J., Charbon, E. & Nauta, B., 2 Dec 2018, 2018 IEEE International Electron Devices Meeting (IEDM). San Francisco, USA: IEEE

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
CMOS
light emitting diodes
avalanches
quantum efficiency
communication
1 Citation (Scopus)
28 Downloads (Pure)

Toward GHz Switching in SOI Light Emitting Diodes

Puliyankot, V., Piccolo, G., Hueting, R. J. E. & Schmitz, J., 10 Sep 2018, In : IEEE transactions on electron devices. 65, 10, p. 4413-4420 8 p., 8457503.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Light emitting diodes
Light emission
Silicon
Diodes
Geometry
1 Citation (Scopus)
51 Downloads (Pure)

Towards understanding recovery of hot-carrier induced degradation

de Jong, M. J., Salm, C. & Schmitz, J., 30 Sep 2018, In : Microelectronics reliability. 88-90, p. 147-151 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Hot carriers
recovery
degradation
Recovery
Degradation
2017
2 Citations (Scopus)
1 Downloads (Pure)
Tungsten
Fluorine
Atomic layer deposition
Hydrogen
Tungsten deposits

Electrical test structures for verifying continuity of ultra-thin insulating and conducting films

Banerjee, S., van der Velde, F. J., Yang, M., Schmitz, J. & Kovalgin, A. Y., 28 Mar 2017, Electrical test structures for verifying continuity of ultra-thin insulating and conducting films. New York: IEEE, p. 1-6 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

continuity
conduction
aluminum nitrides
closures
ellipsometry

Low temperature thin films for next-generation microelectronics

Schmitz, J., 22 May 2017. 1 p.

Research output: Contribution to conferencePoster

23 Citations (Scopus)
266 Downloads (Pure)

Material properties of LPCVD processed n-type polysilicon passivating contacts and its application in PERPoly industrial bifacial solar cells

Stodolny, M. K., Anker, J., Geerligs, B. L. J., Janssen, G. J. M., van de Loo, B. W. H., Melskens, J., Santbergen, R., Isabella, O., Schmitz, J., Lenes, M., Luchies, J. M., Kessels, W. M. M. & Romijn, I., 2017, In : Energy procedia. 124, p. 635-642 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Low pressure chemical vapor deposition
Polysilicon
Materials properties
Solar cells
Metallizing
14 Citations (Scopus)
73 Downloads (Pure)

Monolithic optical link in silicon-on-insulator CMOS technology

Dutta, S., Agarwal, V. V., Hueting, R. J. E., Schmitz, J. & Annema, A. J., 6 Mar 2017, In : Optics express. 25, 5, p. 5440-5456 17 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
CMOS
light emitting diodes
insulators
avalanches
photodiodes
4 Citations (Scopus)
2 Downloads (Pure)

Observations on the recovery of hot carrier degradation of hydrogen/deuterium passivated nMOSFETs

de Jong, M. J., Salm, C. & Schmitz, J., Sep 2017, In : Microelectronics reliability. 76-77, p. 136-140 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Hot carriers
Deuterium
deuterium
Hydrogen
recovery
3 Citations (Scopus)
4 Downloads (Pure)

Optical Power Efficiency Versus Breakdown Voltage of Avalanche-Mode Silicon LEDs in CMOS

Dutta, S., Wienk, G. J. M., Hueting, R. J. E., Schmitz, J. & Annema, A. J., 23 Jun 2017, In : IEEE electron device letters. 38, 7, p. 898-901 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

Silicon
Electric breakdown
Light emitting diodes
Electroluminescence
Spatial distribution
1 Citation (Scopus)
2 Downloads (Pure)

Process induced poling and plasma induced damage of thin films PZT

Wang, J., Houwman, E. P., Salm, C., Nguyen, D. M., Vergeer, K. & Schmitz, J., 17 Jan 2017, In : Microelectronic engineering. 177, p. 13-18 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

capacitors
Capacitors
damage
Plasmas
Thin films
7 Downloads (Pure)

Prospects of efficient band-to-band emission in silicon LEDs

Schmitz, J., 3 Feb 2017, Fourth Conference on Sensors, MEMS, and Electro-Optic Systems: 18–20 September 2016, Skukuza, Kruger National Park, South Africa. du Plessis, M. (ed.). SPIE, p. 2-7 6 p. (Proceedings of SPIE; vol. 10036).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
light emission
quantum efficiency
light emitting diodes
diodes
structural design
16 Citations (Scopus)
300 Downloads (Pure)

Study of screen printed metallization for polysilicon based passivating contacts

Çiftpinar, H. E., Stodolny, M. K., Wu, Y., Janssen, G. J. M., Löffler, J., Schmitz, J., Lenes, M., Luchies, J. M. & Geerligs, B. L. J., 2017, In : Energy procedia. 124, p. 851-861 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Metallizing
Polysilicon
Low pressure chemical vapor deposition
High resolution electron microscopy
Contact resistance

TCAD analysis of wide-spectrum waveguide in high-voltage SOI CMOS

Dutta, S., Orbe, L. & Schmitz, J., 15 Aug 2017. 2 p.

Research output: Contribution to conferencePaperAcademicpeer-review

high voltages
CMOS
insulators
waveguides
transmission efficiency
9 Citations (Scopus)
49 Downloads (Pure)

The avalanche-mode superjunction LED

Dutta, S., Steeneken, P. G., Agarwal, V. V., Schmitz, J., Annema, A. J. & Hueting, R. J. E., Apr 2017, In : IEEE transactions on electron devices. 64, 4, p. 1612-1618 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Light emitting diodes
Silicon
Electric fields
Optical links
Photodiodes
2016
1 Citation (Scopus)

A nitride-based epitaxial surface layer formed by ammonia treatment of silicene-terminated ZrB2

Wiggers, F. B., Van Hao, B., Friedlein, R., Yamada-Takamura, Y., Schmitz, J., Kovalgin, A. Y. & de Jong, M. P., 5 Apr 2016, In : Journal of chemical physics. 144, 134703, p. 1-5 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

6 Citations (Scopus)
18 Downloads (Pure)
Open Access
File
cold walls
Tungsten
Atomic layer deposition
atomic layer epitaxy
Chemical vapor deposition
114 Downloads (Pure)
Open Access
File
gallium nitrides
gallium
ammonia
pulses
carbon
29 Downloads (Pure)

Editorial: Extended papers selected from ESSDERC 2015

Grasser, T., Schmitz, J. & Lemme, M. C., 1 Nov 2016, In : Solid-state electronics. 125, p. 1-1 1 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
53 Downloads (Pure)

Humidity and polarity influence on MIM PZT capacitor degradation and breakdown

Wang, J., Salm, C., Houwman, E., Schmitz, J. & Nguyen, M., 9 Oct 2016, 2016 IEEE International Integrated Reliability Workshop (IIRW). IEEE, p. 65-68 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
MIM (semiconductors)
humidity
polarity
capacitors
breakdown
1 Citation (Scopus)
6 Downloads (Pure)

Interface trap density estimation in FinFETs from the subthreshold current

Schmitz, J., Kaleli, B., Kuipers, P., van den Berg, N., Smits, S. M. & Hueting, R. J. E., 28 Mar 2016, 2016 International Conference on Microelectronic Test Structures (ICMTS). Piscataway, NJ: IEEE, p. 164-167 4 p. (Proceedings International Conference on Microelectronic Test Structures (ICMTS); vol. 2016).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
traps
transconductance
wafers
electric potential
temperature
1 Citation (Scopus)

Interface trap density estimation in FinFETs using the gm/ID Method in the subthreshold regime

Boksteen, B. K., Schmitz, J. & Hueting, R. J. E., May 2016, In : IEEE transactions on electron devices. 63, 5, p. 1814-1820 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

7 Downloads (Pure)

Meer More

Schmitz, J., Nauta, B. & Seijlhouwer, M., Aug 2016, In : Ingenieur. 128, 8, p. 30-33 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)
81 Downloads (Pure)

On the small-signal capacitance of RF MEMS switches at very low frequencies

Wang, J., Bielen, J., Salm, C., Krijnen, G. J. M. & Schmitz, J., 24 Aug 2016, In : Journal of the Electron Devices Society. 4, 6, p. 459-465 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Micro-Electrical-Mechanical Systems
Silicon
Transducers
Static Electricity
MEMS
5 Downloads (Pure)

Spring-constant measurement methods for RF-MEMS capacitive switches

Wang, J., Bielen, J., Salm, C. & Schmitz, J., 28 Mar 2016, 2016 International Conference on Microelectronic Test Structures (ICMTS). USA: IEEE, p. 10-14 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
MEMS
Switches
Electric potential
Capacitance
Finite element method
2015
1 Citation (Scopus)

Characterization of recessed Ohmic contacts to AlGaN/GaN

Hajlasz, M., Donkers, J. J. T. M., Sque, S. J., Heil, S. B. S., Gravesteijn, D. J., Rietveld, F. J. R. & Schmitz, J., 23 Mar 2015, Proceedings of the International Conference on Microelectronic Test Structures, ICMTS 2015. USA: IEEE Solid-State Circuits Society, p. 158-162 5 p. (Proceedings of the IEEE International Conference on Microelectronic Test Structures).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

3 Citations (Scopus)

Electric field and interface charge extraction in field-plate assisted RESURF devices

Boksteen, B. K., Heringa, A., Ferrara, A., Steeneken, P. G., Schmitz, J. & Hueting, R. J. E., 1 Feb 2015, In : IEEE transactions on electron devices. 62, 2, p. 622-629 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)
9 Downloads (Pure)

Fabrication and properties of GeSi and SiON layers for above-IC integrated optics

Schmitz, J., Rangarajan, B. & Kovalgin, A. Y., Jun 2015, In : Solid-state electronics. 108, p. 8-12 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
Integrated optics
integrated optics
CMOS
oxynitrides
Fabrication
8 Citations (Scopus)

Hot-wire assisted ALD of tungsten films: In-situ study of the interplay between CVD, etching, and ALD modes

Yang, M., Aarnink, A. A. I., Kovalgin, A. Y., Wolters, R. A. M. & Schmitz, J., 25 May 2015, In : Physica status solidi A. 212, 7, p. 1607-1614 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

6 Citations (Scopus)

Ideal RESURF Geometries

Ferrara, A., Boksteen, B. K., Hueting, R. J. E., Heringa, A., Schmitz, J. & Steeneken, P. G., 1 Oct 2015, In : IEEE transactions on electron devices. 62, 10, p. 3341-3347 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

10 Citations (Scopus)
354 Downloads (Pure)

On device architectures, subthreshold swing, and power consumption of the piezoelectric field-effect transistor (π-FET)

Hueting, R. J. E., van Hemert, T., Kaleli, B., Wolters, R. A. M. & Schmitz, J., 22 Apr 2015, In : Journal of the Electron Devices Society. 3, 3, p. 149-157 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
21 Citations (Scopus)

Opto-electronic modeling of light emission from avalanche-mode silicon p+n junctions

Dutta, S., Hueting, R. J. E., Annema, A. J., Qi, L., Nanver, L. K. & Schmitz, J., 18 Sep 2015, In : Journal of applied physics. 118, p. 1-10 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

9 Citations (Scopus)
1 Downloads (Pure)

PEALD AlN: Controlling growth and film crystallinity

Banerjee, S., Aarnink, A. A. I., van de Kruijs, R. W. E., Kovalgin, A. Y. & Schmitz, J., 10 Jun 2015, In : Physica status solidi. C. 12, 7, p. 1036-1042 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Physics-based stability analysis of MOS transistors

Ferrara, A., Steeneken, P. G., Boksteen, B. K., Heringa, A., Scholten, A. J., Schmitz, J. & Hueting, R. J. E., 10 Jun 2015, In : Solid-state electronics. 113, p. 28-34 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Transistors
transistors
Physics
physics
failure analysis
6 Downloads (Pure)

Reliable cool-down of GridPix detectors for cryogenic applications

Schön, R., Schmitz, J., Smits, S. M., Bilevych, Y., Bilevych, Y. & Bakel, van, N., 21 Apr 2015, In : Nuclear instruments & methods in physics research. Section A : Accelerators, spectrometers, detectors and associated equipment. 780, p. 100-106 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
Thermal cycling
Cryogenics
cryogenics
grids
Detectors
2 Citations (Scopus)

The boost transistor: a field plate controlled LDMOST

Ferrara, A., Schmitz, J., Boksteen, B. K., Hueting, R. J. E., Steeneken, P. G., Heringa, A., Claes, J. & van der Wel, A. P., 10 May 2015, 2015 IEEE 27th International Symposium on Power Semiconductor Devices & IC's (ISPSD). USA: IEEE, p. 165-168 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Transistors
Electrodes
Electric breakdown
Networks (circuits)
Electric potential
2014
8 Citations (Scopus)

Analysis of thin-film PZT/LNO stacks on an encapsulated TiN electrode

Kaleli, B., Nguyen, D. M., Schmitz, J., Wolters, R. A. M. & Hueting, R. J. E., 1 May 2014, In : Microelectronic engineering. 119, p. 16-19 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

Titanium nitride
titanium nitrides
Leakage currents
Ferroelectric materials
Thin films

CMOS post-processing for monolithic microsystems

Schmitz, J., 11 Mar 2014, Nano and Giga Challenges in Electronics, Photonics and Renewable Energy, Nano & Giga 2014. Tempe, Arizona, USA: Arizona State University, p. - 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

16 Downloads (Pure)

Growth and properties of subnanometer thin titanium nitride films

Kovalgin, A. Y., Van Hao, B., Schmitz, J. & Wolters, R. A. M., 10 Mar 2014, p. 1.

Research output: Contribution to conferenceAbstractOther research output

File
titanium nitrides
atomic layer epitaxy
metal nitrides
microelectronics
encounters
1 Citation (Scopus)

Identifying failure mechanisms in LDMOS transistors by analytical stability analysis

Ferrara, A., Steeneken, P. G., Boksteen, B. K., Heringa, A., Scholten, A. J., Schmitz, J. & Hueting, R. J. E., 22 Sep 2014, Proceedings of the 44th European Solid State Device Research Conference, ESSDERC 2014. USA: IEEE Circuits & Systems Society, p. 321-324 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Materials and integration schemes for above-IC integrated optics

Schmitz, J., Rangarajan, B. & Kovalgin, A. Y., 7 Apr 2014, 15th International Conference on Ultimate Integration on Silicon, ULIS 2014. USA: IEEE Circuits & Systems Society, p. 153-156 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

10 Citations (Scopus)

Sheet resistance under Ohmic contacts to AlGaN/GaN heterostructures

Hajlasz, M., Donkers, J. J. T. M., Sque, S. J., Heil, S. B. S., Gravesteijn, D. J., Rietveld, F. J. R. & Schmitz, J., 18 Jun 2014, In : Applied physics letters. 104, p. 242109 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

12 Citations (Scopus)

Silicon LEDs in FinFET technology

Piccolo, G., Kuindersma, P. I., Ragnarsson, L-A., Hueting, R. J. E., Collaert, N. & Schmitz, J., 26 Sep 2014, Proceeding ofthe 44th European Solid State Device Research Conference (ESSDERC). USA: IEEE Circuits & Systems Society, p. 274-277 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review