1991 …2020

Research output per year

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Research Output

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Conference contribution
2006

An integrated gaseous detector using microfabrication post-processing technology

Blanco Carballo, V. M., Salm, C., Smits, S. M., Schmitz, J., Chefdeville, M. A., van der Graaf, H., Timmermans, J., Timmermans, J. & Visschers, J. L., 23 Nov 2006, Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006. Utrecht, The Netherlands: STW, p. 369-372 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

An integrated single photon detector array using porous anodic alumina

Melai, J., Salm, C., Schmitz, J., Smits, S. & Visschers, J., 27 Nov 2006, Proceedings 9th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2006. Utrecht, The Netherlands: STW, p. 389-393 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Characterization of dielectric charging in RF MEMS capacitive switches

Herfst, R. W., Huizing, H. G. A., Steeneken, P. G. & Schmitz, J., 6 Mar 2006, Proceedings of the 2006 International Conference on Microelectronic Test Structures (ICMTS). Austin, USA: IEEE, p. 133-136 4 p. 10.1109/ICMTS.2006.1614290

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
63 Citations (Scopus)
325 Downloads (Pure)

Charge Pumping at radio Frequencies: Methodology, Trap Response and Application

Sasse, G. T. & Schmitz, J., 30 Mar 2006, 2006 IEEE International Reliability Physics Symposium proceedings: 44th annual : San Jose, California, March, 26-30, 2006. Piscataway, NJ: IEEE, p. 627-628 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

8 Citations (Scopus)

Cross-Bridge Kelvin Resistor (CBKR) structures for silicide-semiconductor junctions characterization

Stavitski, N., van Dal, M. J. H., Klootwijk, J. H., Wolters, R. A. M., Kovalgin, A. Y. & Schmitz, J., 23 Nov 2006, Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006. Utrecht, The Netherlands: STW, p. 436-438 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

2 Downloads (Pure)

C-V Test Structures for Metal Gate CMOS

Bankras, R. G., Tiggelman, M. P. J., Negara, M. A., Sasse, G. T. & Schmitz, J., 6 Mar 2006, Proceedings of the International Conference on Microelectronic Test Structures (ICMTS). Piscataway: IEEE EDS, p. 226-229 4 p. (Electron Devices Society).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
1 Citation (Scopus)
146 Downloads (Pure)

Discharge Protection and Ageing of Micromegas Pixel Detectors

Aarts, A. A., Blanco Carballo, V. M., Chefdeville, M. A., Colas, P., Dunand, S., Fransen, M., van der Graaf, H., Giomataris, Y., Hartjes, F., Koffeman, G., Melai, J., Peek, H., Riegler, W., Salm, C., Schmitz, J., Smits, S. M., Timmermans, J., Timmermans, J., Visschers, J. L. & Wyrsch, N., 29 Oct 2006, 2006 IEEE Nuclear Science Symposium Conference Record. San Diego, CA, USA: IEEE Nuclear & Plasma Sciences Society, p. 3865-3869 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Electrical characterization of thin film ferroelectric capacitors

Tiggelman, M. P. J., Reimann, K., Klee, M., Beelen, D., Keur, W., Schmitz, J. & Hueting, R. J. E., 23 Nov 2006, Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006. Utrecht, The Netherlands: STW, p. 439-443 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
239 Downloads (Pure)

Green laser crystallization of α-Si films using preformed α-Si Lines

Brunets, I., Holleman, J., Kovalgin, A. Y., Aarnink, A. A. I., Boogaard, A., Oesterlin, P. & Schmitz, J., 29 Oct 2006, Thin Film Transistor Technology 8. Kuo, Y. (ed.). The Electrochemical Society Inc., p. 185-191 7 p. (ECS Transactions 3, 8 (2006); vol. 3, no. 10).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)

Influence of interface recombination in light emission from lateral Si-based light emitting devices

Le Minh, P., Hoang, T., Holleman, J. & Schmitz, J., 2006, Science and Technology of Dielectrics for Active and Passive Photonic Devices. Masscher, P., Wörhoff, K. & Misra, D. (eds.). Pennington, NJ: The Electrochemical Society Inc., p. 9-16 8 p. (ECS transactions; vol. 3, no. 11).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)

Interface trap response to RF charge pumping measurements

Sasse, G. T. & Schmitz, J., 23 Nov 2006, Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006. Utrecht, The Netherlands: STW, p. 427-431 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Low-Frequency noise in hot-carrier degraded MOSFETs

Salm, C., Hoekstra, E., Kolhatkar, J. S., Hof, A. J., Wallinga, H. & Schmitz, J., 26 Jun 2006, 14th Workshop on Dielectrics in Microelectronics, WODIM 2006. Koninklijke Nederlandse Academie van Wetenschappen, p. 64-65 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Measurement of electron temperatures of Argon Plasmas in a High-Density Inductively-Coupled Remote Plasma System by Langmuir Probe and Optical-Emission Spectroscopy

Boogaard, A., Kovalgin, A. Y., Aarnink, A. A. I., Wolters, R. A. M., Holleman, J., Brunets, I. & Schmitz, J., 23 Nov 2006, Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006. Utrecht, The Netherlands: STW, p. 412-418 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
842 Downloads (Pure)

Memory devices with encapsulated Si nano-crystals: Realization and Characterization.

Brunets, I., van Hemert, T., Boogaard, A., Aarnink, A. A. I., Kovalgin, A. Y., Holleman, J. & Schmitz, J., 23 Nov 2006, Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006. Utrecht, The Netherlands: STW, p. 419-422 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

On the growth of native oxides on hydrogen-terminated silicon surfaces in dark and under illumination with light

Kovalgin, A. Y., Zinine, A., Bankras, R., Wormeester, H., Poelsema, B. & Schmitz, J., 29 Oct 2006, Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS 2: New Materials, Processes, and Equipment. Roozeboom, F., Kwong, D-L., Iwai, H., Öztürk, M. C., Timans, P. J. & Gusev, E. (eds.). Pennington, N.J.: The Electrochemical Society Inc., p. 191-202 12 p. (ECS Transactions; vol. 3, no. 2).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)

Specific Contact Resistance Measurements of Metal Semiconductor-Junctions

Stavitski, N., van Dal, M. J. H., Wolters, R. A. M., Kovalgin, A. Y. & Schmitz, J., 6 Mar 2006, Proceedings of the IEEE International Conference on Microelectronic Test Structures (ICMTS). Austin, TX, USA: IEEE, p. 13-17 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
9 Citations (Scopus)
3112 Downloads (Pure)
2005

A high-density inductively-coupled remote plasma system for the deposition of dielectrics and semiconductors

Aarnink, A. A. I., Boogaard, A., Brunets, I., Isai, I. G., Kovalgin, A. Y., Holleman, J., Wolters, R. A. M. & Schmitz, J., 17 Nov 2005, Proceedings of 8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2005. Veldhoven, The Netherlands: STW, p. 67-69 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
5 Downloads (Pure)

A high efficiency lateral light emitting device on SOI

Hoang, T., Le Minh, P., Holleman, J., Zieren, V., Goossens, M. J. & Schmitz, J., 4 Apr 2005, EDMO 2004: 12th IEEE International Symposium on Electron Devices for Microwave and Optoelectronic Applications. Piscataway, NJ: IEEE Computer Society, p. 87-91 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
27 Downloads (Pure)

An electron-multiplying 'Micromegas' grid made in silicon wafer post-processing technology

Chefdeville, M. A., Colas, P., Giomataris, Y., van der Graaf, H., Heijne, E. H. M., van der Putten, S., Salm, C., Schmitz, J., Smits, S. M., Timmermans, J. & Visschers, J. L., Nov 2005, Proceedings 8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2005. Veldhoven, The Netherlands: STW, p. 139-142 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
51 Downloads (Pure)

Characterization of dielectric charging in RF MEMS

Herfst, R. W., Huizing, H. G. A., Steeneken, P. G. & Schmitz, J., Nov 2005, 8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2005 (SAFE 2005). Utrecht, The Netherlands: STW, p. 11-14 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Charge pumping at radio frequencies: [MOSFET device interface state density measurement]

Sasse, G. T., de Vries, H. & Schmitz, J., Apr 2005, ICMTS 2005: proceedings of the 2005 International Conference on Microelectronic Test Structures, April 4-7, 2005, De Valk, Tiensestraat 41, Leuven, Belgium. Piscataway, NJ: IEEE, p. 229-233 5 p. (Proceedings International Conference on Microelectronic Test Structures; vol. 2005).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)
9 Downloads (Pure)

In-situ RHEED Analysis of Atomic Layer Deposition

Bankras, R. G., Holleman, J. & Schmitz, J., 17 Nov 2005, Proceedings of 8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2005. Veldhoven, The Netherlands: STW, p. 70-75 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

In-situ RHEED of atomic layer deposition

Bankras, R. G., Holleman, J. & Schmitz, J., 5 Sep 2005, EuroCVD-15 conference proceedings. Bochum, Germany, p. -

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)

Specific Contact Resistance Measurements of Metal-Semiconductor Junctions

Stavitski, N., van Dal, M. J. H., Wolters, R. A. M., Kovalgin, A. Y. & Schmitz, J., 17 Nov 2005, Proceedings of 8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2005. Veldhoven, The Netherlands: STW, p. 52-55 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

The Effect of an Electric Field on a Lateral Silicon Light-Emitting Diode

Le Minh, P., Hoang, T., Holleman, J. & Schmitz, J., 17 Nov 2005, Proceedings of 8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2005. Veldhoven, The Ntherlands: STW, p. 117-120 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

The effect of dislocation loops on the light emission of silicon LEDs

Hoang, T., Le Minh, P., Holleman, J. & Schmitz, J., 11 Sep 2005, Proceedings of 35th European Solid-State Device Research Conference, 2005. ESSDERC 2005. Grenoble, France: IEEE, p. 359-362 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

6 Citations (Scopus)
33 Downloads (Pure)

The RF Charge Pump Technique for Measuring the Interface State Density on Leaky Dielectrics

Sasse, G. T., de Vries, H. & Schmitz, J., 17 Nov 2005, 8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2005. Veldhoven, The Netherlands: STW, p. 47-51 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Three-dimensional IC's prolong the life of Moore's law

Brunets, I., Boogaard, A., Isai, I. G., Aarnink, A. A. I., Kovalgin, A. Y., Holleman, J. & Schmitz, J., 17 Nov 2005, Proceedings of 8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2005. Veldhoven, The Netherlands: STW, p. 76-78 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

2004

Gate-capacitance extraction from RF C-V measurements

Sasse, G. T., de Kort, R. & Schmitz, J., 15 Nov 2004, The 34th European Solid-State Device Research conference, 2004. Piscataway: IEEE, p. 113-116 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
3 Citations (Scopus)
73 Downloads (Pure)

Gate-Capacitance Extraction from RF C-V Measurements

Sasse, G. T., de Kort, R. & Schmitz, J., 25 Nov 2004, Proceedings of Semiconductor Advances for Future Electronics (SAFE). Veldhoven, The Netherlands: STW

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Gate oxide reliability and deuterated CMOS processing

Hof, A. J., Kovalgin, A., van Schaijk, R., Baks, W. M. & Schmitz, J., 25 Apr 2004, IEEE Integrated Reliability Workshop 2004. Piscataway, NJ: IEEE Computer Society, p. 7-10 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
1 Citation (Scopus)
58 Downloads (Pure)

GOSSIP: a vertex detector combining a thin gas layer as signal generator with a CMOS readout pixel array

van der Graaf, H., Campbell, M., Chefdeville, M. A., Colas, P., Colijn, A. P., Fornaini, A., Giomataris, Y., Heijne, E. H. M., Kluit, P., Llopart, X., Schmitz, J., Timmermans, J. & Visschers, J. L., 2004, Proceedings of Vertex 2004 conference. IEEE, p. -

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
9 Downloads (Pure)

Investigating Hot-Carrier Degradation in MOSFETs using Constant and Switched Biased Low-Frequency Noise measurements

Kolhatkar, J. S., Hoekstra, E., Hof, A. J., Salm, C., Wallinga, H. & Schmitz, J., 25 Nov 2004, Proceedings SAFE & ProRISC 2004. Utrecht: STW, p. 700-703 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
19 Downloads (Pure)

Leakage current correction in quasi-static C-V measurements

Schmitz, J., Weusthof, M. H. H. & Hof, A. J., 25 Feb 2004, International Conference of Microelectronic Test Structures ICMTS 2004. Piscataway: IEEE Electron Devices Society, p. 179-181 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
13 Citations (Scopus)
165 Downloads (Pure)

Modeling of RTS Noise in MOSFETs under Steady-State and Large-Signal Excitation

Kolhatkar, J. S., Hoekstra, E., Salm, C., van der Wel, A. P., Klumperink, E. A. M., Schmitz, J. & Wallinga, H., Dec 2004, IEEE International Electron Devices Meeting (IEDM 2004). Piscataway, NJ, USA: IEEE, p. 759-762 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
18 Citations (Scopus)
16 Downloads (Pure)

On Oxidation of Silicon in Ultra-Diluted H2O and D2O Ambient

Hof, A. J., Kovalgin, A. Y. & Schmitz, J., 27 Jun 2004, proceedings Wodim 2004. Cork, Ireland, p. -

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
6 Downloads (Pure)

The readout of gaseous detectors by means of a Micromegas-covered pixel-segmented CMOS anode

Fornaini, A., Campbell, M., Colas, P., Giomataris, Y., van der Graaf, H., Heijne, E. H. M., Kluit, P., Llopart, X., Schmitz, J., Timmermans, J. & Visschers, J. L., 2004, Proceedings of IWORID workshop 2004. Glasgow: IEEE, p. -

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

The Readout of Gaseous Detectors by Means of a Micromegas-Covered Pixel-Segmented CMOS Anode

Colas, P., Giomataris, Y., Colijn, A. P., Fornaini, A., van der Graaf, H., Kluit, P., Timmermans, J., Visschers, J. L., Schmitz, J., Campbell, M., Heijne, E. H. M. & Llopart, X., 2004, Proceedings of Nuclear Science Symposium. Rome: IEEE, p. -

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2003

High External Quantum Efficiency of the Lateral P-I-N Diodes Realized of Silicon On Insulator (SOI) Material

Hoang, T., Le Minh, P., Holleman, J., Schmitz, J. & Wallinga, H., 25 Nov 2003, Proceedings of Semiconductor Advances for Future Electronics SAFE 2003. p. 610-613 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

In-situ RHEED Analysis of Atomic Layer Deposition and Characterization of AL203 Gate Dielectrics

Bankras, R. G., Aarnink, A. A. I., Holleman, J. & Schmitz, J., 25 Nov 2003, Proceedings of Semiconductor Advances for Future Electronics SAFE 2003. p. -

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

On Oxidation Kinetics and Electrical Quality of Gate Oxide Grown in H2O or D2O Ambient

Hof, A. J., Kovalgin, A. Y., Woerlee, P. H. & Schmitz, J., 25 Nov 2003, Proceedings of Semiconductor Advances for Future Electronics SAFE 2003. p. 743-747 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Plasma nitridation optimization for sub-15 A gate dielectrics

Cubaynes, F. N., Schmitz, J., van der Marel, C., Snijders, J. H. M., Veloso, A., Rothschild, A., Olsen, C. & Date, L., 2003, Silicon Nitride and Silicon Dioxide Thin Insulating Films VII: Proceedings of the International Symposium. Sah, R. E. (ed.). Pennington, NJ: The Electrochemical Society Inc., Vol. 2. p. 595-604 10 p. (Electrochemical Society Proceedings; vol. 2003-02).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
46 Downloads (Pure)

Test structure design considerations for RF-CV measurements on leaky dielectrics

Schmitz, J., Cubaynes, F. N., Havens, R. J., de Kort, R., Scholten, A. J. & Tiemeijer, L. F., 7 May 2003, ICMTS 2003: Proceedings of the 2003 International Conference on Microelectronic Test Structures : March 17-20, 2003, Double Tree Hotel, Monterey, California. Piscataway, NJ: IEEE Computer Society, p. 181-185 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
8 Citations (Scopus)
15 Downloads (Pure)

Trends in CMOS device characterization

Schmitz, J. & Tiemeijer, L. F., 17 Jun 2003, Proceedings of the INFOS Conference 2003. Barcelona, Spain, p. -

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
4 Downloads (Pure)
2002

Gate dielectrics for high performance and low power CMOS SoC applications

Cubaynes, F., Dachs, C. J. J., Detcheverry, C., Zegers, A., Venezia, V. C., Schmitz, J., Stolk, P. A., Jurczak, M., Henson, K., Degraeve, R., Rothschild, A., Conard, T., Petry, J., Da Rold, M., Schaekers, M., Badenes, G., Date, L., Pique, D., Al-Shareef, H. N. & Murto, R. W., 1 Jan 2002, ESSDERC 2002: Proceedings of the 32nd European Solid-State Device Research Conference, Firenze, Italy, 24-26 September 2002. Gnani, E., Baccarani, G. & Rudan, M. (eds.). Piscataway, NJ: IEEE Computer Society, p. 427-430 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
1 Downloads (Pure)

Impact of source/drain implants on threshold voltage matching in deep sub-micron CMOS technologies

Dubois, J., Knol, J., Bolt, M., Tuinhout, H., Schmitz, J. & Stolk, P., 1 Jan 2002, ESSDERC 2002: Proceedings of the 32nd European Solid-State Device Research Conference, Firenze, Italy, 24-26 September 2002. Gnani, E., Baccarani, G. & Rudan, M. (eds.). Piscataway, NJ: IEEE Computer Society, p. 115-118 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
13 Citations (Scopus)
3 Downloads (Pure)
2001

A study of measurement system noise for sensitive soft breakdown triggering

Schmitz, J. & Tuinhout, H. P., 2001, ICMTS 2001: proceedings of the 2001 International Conference on Microelectronic Test Structures : March 19-22, 2001, Kobe, Japan. Piscataway, NJ: IEEE, p. 99-102 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
3 Citations (Scopus)

Soft breakdown triggers for large area capacitors under constant voltage stress

Schmitz, J., Kretschmann, H. J., Tuinhout, H. P. & Woerlee, P. H., 1 Jan 2001, 39th IEEE International Reliability Physics Symposium 2001: Orlando, Florida, April 30-May 3, 2001. IEEE, p. 393-398 6 p. 922932

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
4 Citations (Scopus)
4 Downloads (Pure)
2000

Impact of ion implantation statistics on VT fluctuations in MOSFETs: Comparison between decaborane and boron channel implants

Tuinhout, H., Widdershoven, F., Stolk, P., Schmitz, J., Dirks, B., van der Tak, K., Bancken, P. & Politiek, J., 2000, 2000 Symposium on VLSI Technology: digest of technical papers : June 13-15, 2000, Honolulu. Piscataway, NJ: IEEE, p. 134-135 2 p. (Symposium on VLSI Technology: Digest of Technical Papers; vol. 2000).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
9 Citations (Scopus)

Ultrashallow junction formation and gate activation in deep-submicron CMOS

Stolk, P. A., Cubaynes, F. N., Meyssen, V. M. H., Mannino, G., Cowern, N. E. B., Van Zijl, J. P., Roozeboom, F., Verhoeven, J. F. C., Van Berkum, J. G. M., van de Wijgert, W. M., Schmitz, J., Tuinhout, H. P. & Woerlee, P. H., 1 Dec 2000, Symposium B – Si Front End Processing - Physics & Technology..II. Materials Research Society, p. B3.1.1-B3.1.12 12 p. (Materials Research Society Symposium - Proceedings; vol. 610).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
1 Citation (Scopus)
1 Downloads (Pure)