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Research Output 1991 2019

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2019
18 Downloads (Pure)

How hot is the wire: Optical, electrical, and combined methods to determine filament temperature

Onnink, A. J., Schmitz, J. & Kovalgin, A. Y., 31 Mar 2019, In : Thin solid films. 674, p. 22-32 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Heat radiation
filaments
wire
Wire
optics
2 Downloads (Pure)

Recovery after hot-carrier injection: Slow versus fast traps

de Jong, M. J., Salm, C. & Schmitz, J., 23 Sep 2019, In : Microelectronics reliability. 100-101, 5 p., 113318.

Research output: Contribution to journalArticleAcademicpeer-review

Hot carriers
carrier injection
recovery
traps
Recovery
2018
2 Citations (Scopus)
135 Downloads (Pure)

Charge carrier transport and electroluminescence in atomic layer deposited poly-GaN/c-Si heterojunction diodes

Gupta, G., Banerjee, S., Dutta, S., Aarnink, A. A. I., Schmitz, J., Kovalgin, A. Y. & Hueting, R. J. E., 28 Aug 2018, In : Journal of applied physics. 124, 8, 8 p., 084503.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
electroluminescence
heterojunctions
charge carriers
diodes
traps
1 Citation (Scopus)
43 Downloads (Pure)

Inherently area-selective hot-wire assisted atomic layer deposition of tungsten films

Yang, M., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., 1 Mar 2018, In : Thin solid films. 649, p. 17-23 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Tungsten
Atomic layer deposition
atomic layer epitaxy
tungsten
wire
3 Citations (Scopus)
116 Downloads (Pure)

Low-resistivity α-phase tungsten films grown by hot-wire assisted atomic layer deposition in high-aspect-ratio structures

Yang, M., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., 31 Jan 2018, In : Thin solid films. 646, p. 199-208 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Tungsten
Atomic layer deposition
atomic layer epitaxy
high aspect ratio
Aspect ratio
9 Citations (Scopus)
122 Downloads (Pure)

Low temperature thin films for next-generation microelectronics (invited)

Schmitz, J., 15 Jun 2018, In : Surface and coatings technology. 343, p. 83-88 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
microelectronics
Microelectronics
Thin films
thin films
Temperature
1 Citation (Scopus)
28 Downloads (Pure)

Toward GHz Switching in SOI Light Emitting Diodes

Puliyankot, V., Piccolo, G., Hueting, R. J. E. & Schmitz, J., 10 Sep 2018, In : IEEE transactions on electron devices. 65, 10, p. 4413-4420 8 p., 8457503.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Light emitting diodes
Light emission
Silicon
Diodes
Geometry
1 Citation (Scopus)
52 Downloads (Pure)

Towards understanding recovery of hot-carrier induced degradation

de Jong, M. J., Salm, C. & Schmitz, J., 30 Sep 2018, In : Microelectronics reliability. 88-90, p. 147-151 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Hot carriers
recovery
degradation
Recovery
Degradation
2017
2 Citations (Scopus)
1 Downloads (Pure)
Tungsten
Fluorine
Atomic layer deposition
Hydrogen
Tungsten deposits
23 Citations (Scopus)
266 Downloads (Pure)

Material properties of LPCVD processed n-type polysilicon passivating contacts and its application in PERPoly industrial bifacial solar cells

Stodolny, M. K., Anker, J., Geerligs, B. L. J., Janssen, G. J. M., van de Loo, B. W. H., Melskens, J., Santbergen, R., Isabella, O., Schmitz, J., Lenes, M., Luchies, J. M., Kessels, W. M. M. & Romijn, I., 2017, In : Energy procedia. 124, p. 635-642 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Low pressure chemical vapor deposition
Polysilicon
Materials properties
Solar cells
Metallizing
14 Citations (Scopus)
73 Downloads (Pure)

Monolithic optical link in silicon-on-insulator CMOS technology

Dutta, S., Agarwal, V. V., Hueting, R. J. E., Schmitz, J. & Annema, A. J., 6 Mar 2017, In : Optics express. 25, 5, p. 5440-5456 17 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
CMOS
light emitting diodes
insulators
avalanches
photodiodes
4 Citations (Scopus)
2 Downloads (Pure)

Observations on the recovery of hot carrier degradation of hydrogen/deuterium passivated nMOSFETs

de Jong, M. J., Salm, C. & Schmitz, J., Sep 2017, In : Microelectronics reliability. 76-77, p. 136-140 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Hot carriers
Deuterium
deuterium
Hydrogen
recovery
3 Citations (Scopus)
4 Downloads (Pure)

Optical Power Efficiency Versus Breakdown Voltage of Avalanche-Mode Silicon LEDs in CMOS

Dutta, S., Wienk, G. J. M., Hueting, R. J. E., Schmitz, J. & Annema, A. J., 23 Jun 2017, In : IEEE electron device letters. 38, 7, p. 898-901 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

Silicon
Electric breakdown
Light emitting diodes
Electroluminescence
Spatial distribution
1 Citation (Scopus)
2 Downloads (Pure)

Process induced poling and plasma induced damage of thin films PZT

Wang, J., Houwman, E. P., Salm, C., Nguyen, D. M., Vergeer, K. & Schmitz, J., 17 Jan 2017, In : Microelectronic engineering. 177, p. 13-18 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

capacitors
Capacitors
damage
Plasmas
Thin films
16 Citations (Scopus)
301 Downloads (Pure)

Study of screen printed metallization for polysilicon based passivating contacts

Çiftpinar, H. E., Stodolny, M. K., Wu, Y., Janssen, G. J. M., Löffler, J., Schmitz, J., Lenes, M., Luchies, J. M. & Geerligs, B. L. J., 2017, In : Energy procedia. 124, p. 851-861 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Metallizing
Polysilicon
Low pressure chemical vapor deposition
High resolution electron microscopy
Contact resistance
9 Citations (Scopus)
49 Downloads (Pure)

The avalanche-mode superjunction LED

Dutta, S., Steeneken, P. G., Agarwal, V. V., Schmitz, J., Annema, A. J. & Hueting, R. J. E., Apr 2017, In : IEEE transactions on electron devices. 64, 4, p. 1612-1618 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Light emitting diodes
Silicon
Electric fields
Optical links
Photodiodes
2016
1 Citation (Scopus)

A nitride-based epitaxial surface layer formed by ammonia treatment of silicene-terminated ZrB2

Wiggers, F. B., Van Hao, B., Friedlein, R., Yamada-Takamura, Y., Schmitz, J., Kovalgin, A. Y. & de Jong, M. P., 5 Apr 2016, In : Journal of chemical physics. 144, 134703, p. 1-5 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

6 Citations (Scopus)
18 Downloads (Pure)
Open Access
File
cold walls
Tungsten
Atomic layer deposition
atomic layer epitaxy
Chemical vapor deposition
29 Downloads (Pure)

Editorial: Extended papers selected from ESSDERC 2015

Grasser, T., Schmitz, J. & Lemme, M. C., 1 Nov 2016, In : Solid-state electronics. 125, p. 1-1 1 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
1 Citation (Scopus)

Interface trap density estimation in FinFETs using the gm/ID Method in the subthreshold regime

Boksteen, B. K., Schmitz, J. & Hueting, R. J. E., May 2016, In : IEEE transactions on electron devices. 63, 5, p. 1814-1820 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

7 Downloads (Pure)

Meer More

Schmitz, J., Nauta, B. & Seijlhouwer, M., Aug 2016, In : Ingenieur. 128, 8, p. 30-33 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)
81 Downloads (Pure)

On the small-signal capacitance of RF MEMS switches at very low frequencies

Wang, J., Bielen, J., Salm, C., Krijnen, G. J. M. & Schmitz, J., 24 Aug 2016, In : Journal of the Electron Devices Society. 4, 6, p. 459-465 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Micro-Electrical-Mechanical Systems
Silicon
Transducers
Static Electricity
MEMS
2015
3 Citations (Scopus)

Electric field and interface charge extraction in field-plate assisted RESURF devices

Boksteen, B. K., Heringa, A., Ferrara, A., Steeneken, P. G., Schmitz, J. & Hueting, R. J. E., 1 Feb 2015, In : IEEE transactions on electron devices. 62, 2, p. 622-629 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)
10 Downloads (Pure)

Fabrication and properties of GeSi and SiON layers for above-IC integrated optics

Schmitz, J., Rangarajan, B. & Kovalgin, A. Y., Jun 2015, In : Solid-state electronics. 108, p. 8-12 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
Integrated optics
integrated optics
CMOS
oxynitrides
Fabrication
8 Citations (Scopus)

Hot-wire assisted ALD of tungsten films: In-situ study of the interplay between CVD, etching, and ALD modes

Yang, M., Aarnink, A. A. I., Kovalgin, A. Y., Wolters, R. A. M. & Schmitz, J., 25 May 2015, In : Physica status solidi A. 212, 7, p. 1607-1614 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

6 Citations (Scopus)

Ideal RESURF Geometries

Ferrara, A., Boksteen, B. K., Hueting, R. J. E., Heringa, A., Schmitz, J. & Steeneken, P. G., 1 Oct 2015, In : IEEE transactions on electron devices. 62, 10, p. 3341-3347 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

10 Citations (Scopus)
360 Downloads (Pure)

On device architectures, subthreshold swing, and power consumption of the piezoelectric field-effect transistor (π-FET)

Hueting, R. J. E., van Hemert, T., Kaleli, B., Wolters, R. A. M. & Schmitz, J., 22 Apr 2015, In : Journal of the Electron Devices Society. 3, 3, p. 149-157 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
21 Citations (Scopus)

Opto-electronic modeling of light emission from avalanche-mode silicon p+n junctions

Dutta, S., Hueting, R. J. E., Annema, A. J., Qi, L., Nanver, L. K. & Schmitz, J., 18 Sep 2015, In : Journal of applied physics. 118, p. 1-10 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

9 Citations (Scopus)
1 Downloads (Pure)

PEALD AlN: Controlling growth and film crystallinity

Banerjee, S., Aarnink, A. A. I., van de Kruijs, R. W. E., Kovalgin, A. Y. & Schmitz, J., 10 Jun 2015, In : Physica status solidi. C. 12, 7, p. 1036-1042 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Physics-based stability analysis of MOS transistors

Ferrara, A., Steeneken, P. G., Boksteen, B. K., Heringa, A., Scholten, A. J., Schmitz, J. & Hueting, R. J. E., 10 Jun 2015, In : Solid-state electronics. 113, p. 28-34 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Transistors
transistors
Physics
physics
failure analysis
6 Downloads (Pure)

Reliable cool-down of GridPix detectors for cryogenic applications

Schön, R., Schmitz, J., Smits, S. M., Bilevych, Y., Bilevych, Y. & Bakel, van, N., 21 Apr 2015, In : Nuclear instruments & methods in physics research. Section A : Accelerators, spectrometers, detectors and associated equipment. 780, p. 100-106 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
Thermal cycling
Cryogenics
cryogenics
grids
Detectors
2014
8 Citations (Scopus)

Analysis of thin-film PZT/LNO stacks on an encapsulated TiN electrode

Kaleli, B., Nguyen, D. M., Schmitz, J., Wolters, R. A. M. & Hueting, R. J. E., 1 May 2014, In : Microelectronic engineering. 119, p. 16-19 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

Titanium nitride
titanium nitrides
Leakage currents
Ferroelectric materials
Thin films
10 Citations (Scopus)

Sheet resistance under Ohmic contacts to AlGaN/GaN heterostructures

Hajlasz, M., Donkers, J. J. T. M., Sque, S. J., Heil, S. B. S., Gravesteijn, D. J., Rietveld, F. J. R. & Schmitz, J., 18 Jun 2014, In : Applied physics letters. 104, p. 242109 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

2013
9 Citations (Scopus)
1 Downloads (Pure)

Conduction and electric field effect in ultra-thin TiN films

Van Hao, B., Kovalgin, A. Y., Schmitz, J. & Wolters, R. A. M., 31 Jul 2013, In : Applied physics letters. 103, 5, p. 051904 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

Deep reactive ion etching of in situ boron doped LPCVD Ge0.7Si0.3 using SF6 and O2 plasma

Kazmi, S. N. R., Salm, C. & Schmitz, J., Oct 2013, In : Microelectronic engineering. 110, p. 311-314 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

Boron
Reactive ion etching
boron
etching
Plasmas
4 Citations (Scopus)

Deposition and properties of silicon oxynitride films with low propagation losses by inductively coupled PECVD at 150 °C

Rangarajan, B., Kovalgin, A. Y. & Schmitz, J., 15 Sep 2013, In : Surface and coatings technology. 230, p. 46-50 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

9 Citations (Scopus)

GridPix detectors: production and beam test results

Koppert, W. J. C., van Bakel, N., Bilevych, Y., Bilevych, Y., Colas, P., Desch, K., Fransen, M., van der Graaf, H., Hartjes, F., Hessey, N. P., Kaminski, J., Schmitz, J., Schön, R. & Zappon, F., Dec 2013, In : Nuclear instruments & methods in physics research. Section A : Accelerators, spectrometers, detectors and associated equipment. 732, p. 245-249 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

12 Citations (Scopus)

Low-temperature deposition of high-quality siliconoxynitride films for CMOS-integrated optics

Rangarajan, B., Kovalgin, A. Y., Worhoff, K. & Schmitz, J., 13 Mar 2013, In : Optics letters. 38, 6, p. 941-943 3 p.

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)

Strain and conduction-band offset in narrow n-type finFETs

van Hemert, T., Kaleli, B., Hueting, R. J. E., Esseni, D., van Dal, M. J. H. & Schmitz, J., 1 Mar 2013, In : IEEE transactions on electron devices. 60, 3, p. 1005-1010 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)

The gridpix detector: History and perspective

van der Graaf, H., Aarnink, A. A. I., Aarts, A., van Bakel, N., Berbee, E., Berkien, A., van Beuzekom, M., Bosma, M., Campbell, M., Chefdeville, M. A., Colas, P., Colijn, A. P., Fomaini, A., Fransen, M., Giganon, A., Giomataris, I., Gotink, W., de Groot, N., Hartjes, F., van der Heijden, B. & 18 others, Hessey, N., Jansweijer, P., Konig, A., Koppert, W., Llopart, X., de Nooij, L., van der Putten, S., Rövekamp, J., Salm, C., San Segundo Bello, D., Schmitz, J., Smits, S. M., Timmermans, J., Verkooijen, H., Visschers, J., Visser, J., Wijnen, T. & Wyrsch, N., 24 Apr 2013, In : Modern physics letters. A. 28, 28-13, p. 13400211-13400217 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

2012
6 Citations (Scopus)

Fast RF-CV characterization through High-Speed 1-port S-Parameter measurements

Herfst, R. W., Steeneken, P. G., Tiggelman, M. P. J., Stulemeijer, J. & Schmitz, J., 1 Aug 2012, In : IEEE transactions on semiconductor manufacturing. 25, 3, p. 310-316 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)
3 Citations (Scopus)

Laterally confined large-grained Poly-GeSi films: Crystallization and dopant activation using green laser

Rangarajan, B., Kovalgin, A. Y., Oesterlin, P., de Kloe, R., Brunets, I. & Schmitz, J., 1 Oct 2012, In : ECS journal of solid state science and technology. 1, 6, p. 263-268 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)

Low-Stress Highly-Conductive In-Situ Boron Doped Ge0.7Si0.3 Films by LPCVD

Kazmi, S. N. R., Kovalgin, A. Y., Aarnink, A. A. I., Salm, C. & Schmitz, J., 29 Aug 2012, In : ECS journal of solid state science and technology. 1, 5, p. P222-P226 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)
1 Downloads (Pure)

Nanoscale carrier injectors for high luminescence Si-based LEDs

Piccolo, G., Kovalgin, A. Y. & Schmitz, J., 27 Apr 2012, In : Solid-state electronics. 74, Special Issue, Selected Papers from the ESSDERC 2011 Conference, p. 43-48 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)

Novel test structures for dedicated temperature budget determination

Faber, E. J., Wolters, R. A. M. & Schmitz, J., 1 Aug 2012, In : IEEE transactions on semiconductor manufacturing. 25, 3, p. 339-345 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

2011
4 Citations (Scopus)
1 Downloads (Pure)
42 Citations (Scopus)
1 Downloads (Pure)

Growth Kinetics and Oxidation Mechanism of ALD TiN Thin Films Monitored by In Situ Spectroscopic Ellipsometry

Van Hao, B., Groenland, A. W., Aarnink, A. A. I., Wolters, R. A. M., Schmitz, J. & Kovalgin, A. Y., 3 Jan 2011, In : Journal of the Electrochemical Society. 158, 3, p. 214-220 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

14 Citations (Scopus)
7 Downloads (Pure)

Integration of Solar Cells on Top of CMOS Chips Part I: a-Si Solar Cells

Lu, J., Kovalgin, A. Y., van der Werf, K. H. M., Schropp, R. E. I. & Schmitz, J., 1 Jul 2011, In : IEEE transactions on electron devices. 58, 5, p. 2014-2021 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
Solar cells
Photovoltaic cells
Energy harvesting
Microsystems
Dust
7 Citations (Scopus)
11 Downloads (Pure)

Integration of Solar Cells on Top of CMOS Chips - Part II: CIGS Solar Cells

Lu, J., Liu, W., Kovalgin, A. Y., Sun, Y. & Schmitz, J., 1 Aug 2011, In : IEEE transactions on electron devices. 58, 8, p. 2620-2627 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
Solar cells
Gallium
Indium
Surface topography
Metal ions