1991 …2020

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2020

On the Accuracy of the Cox-Strack Equation and Method for Contact Resistivity Determination

van Rijnbach, M., Hueting, R. J. E., Stodolny, M., Janssen, G., Melskens, J. & Schmitz, J., 10 Mar 2020, In : IEEE transactions on electron devices.

Research output: Contribution to journalArticleAcademicpeer-review

2019

How hot is the wire: Optical, electrical, and combined methods to determine filament temperature

Onnink, A. J., Schmitz, J. & Kovalgin, A. Y., 31 Mar 2019, In : Thin solid films. 674, p. 22-32 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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21 Downloads (Pure)

Recovery after hot-carrier injection: Slow versus fast traps

de Jong, M. J., Salm, C. & Schmitz, J., 23 Sep 2019, In : Microelectronics reliability. 100-101, 5 p., 113318.

Research output: Contribution to journalArticleAcademicpeer-review

2 Downloads (Pure)
2018

Charge carrier transport and electroluminescence in atomic layer deposited poly-GaN/c-Si heterojunction diodes

Gupta, G., Banerjee, S., Dutta, S., Aarnink, A. A. I., Schmitz, J., Kovalgin, A. Y. & Hueting, R. J. E., 28 Aug 2018, In : Journal of Applied Physics. 124, 8, 8 p., 084503.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
2 Citations (Scopus)
145 Downloads (Pure)

Inherently area-selective hot-wire assisted atomic layer deposition of tungsten films

Yang, M., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., 1 Mar 2018, In : Thin solid films. 649, p. 17-23 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
2 Citations (Scopus)
49 Downloads (Pure)

Low-resistivity α-phase tungsten films grown by hot-wire assisted atomic layer deposition in high-aspect-ratio structures

Yang, M., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., 31 Jan 2018, In : Thin solid films. 646, p. 199-208 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
4 Citations (Scopus)
151 Downloads (Pure)

Low temperature thin films for next-generation microelectronics (invited)

Schmitz, J., 15 Jun 2018, In : Surface and coatings technology. 343, p. 83-88 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
12 Citations (Scopus)
127 Downloads (Pure)

Toward GHz Switching in SOI Light Emitting Diodes

Puliyankot, V., Piccolo, G., Hueting, R. J. E. & Schmitz, J., 10 Sep 2018, In : IEEE transactions on electron devices. 65, 10, p. 4413-4420 8 p., 8457503.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
1 Citation (Scopus)
32 Downloads (Pure)

Towards understanding recovery of hot-carrier induced degradation

de Jong, M. J., Salm, C. & Schmitz, J., 30 Sep 2018, In : Microelectronics reliability. 88-90, p. 147-151 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
1 Citation (Scopus)
59 Downloads (Pure)
2017
2 Citations (Scopus)
1 Downloads (Pure)

Material properties of LPCVD processed n-type polysilicon passivating contacts and its application in PERPoly industrial bifacial solar cells

Stodolny, M. K., Anker, J., Geerligs, B. L. J., Janssen, G. J. M., van de Loo, B. W. H., Melskens, J., Santbergen, R., Isabella, O., Schmitz, J., Lenes, M., Luchies, J. M., Kessels, W. M. M. & Romijn, I., 2017, In : Energy procedia. 124, p. 635-642 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
26 Citations (Scopus)
299 Downloads (Pure)

Monolithic optical link in silicon-on-insulator CMOS technology

Dutta, S., Agarwal, V. V., Hueting, R. J. E., Schmitz, J. & Annema, A. J., 6 Mar 2017, In : Optics express. 25, 5, p. 5440-5456 17 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
14 Citations (Scopus)
74 Downloads (Pure)

Observations on the recovery of hot carrier degradation of hydrogen/deuterium passivated nMOSFETs

de Jong, M. J., Salm, C. & Schmitz, J., Sep 2017, In : Microelectronics reliability. 76-77, p. 136-140 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)
2 Downloads (Pure)

Optical Power Efficiency Versus Breakdown Voltage of Avalanche-Mode Silicon LEDs in CMOS

Dutta, S., Wienk, G. J. M., Hueting, R. J. E., Schmitz, J. & Annema, A-J., 23 Jun 2017, In : IEEE electron device letters. 38, 7, p. 898-901 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)
4 Downloads (Pure)

Process induced poling and plasma induced damage of thin films PZT

Wang, J., Houwman, E. P., Salm, C., Nguyen, D. M., Vergeer, K. & Schmitz, J., 17 Jan 2017, In : Microelectronic engineering. 177, p. 13-18 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)
2 Downloads (Pure)

Study of screen printed metallization for polysilicon based passivating contacts

Çiftpinar, H. E., Stodolny, M. K., Wu, Y., Janssen, G. J. M., Löffler, J., Schmitz, J., Lenes, M., Luchies, J. M. & Geerligs, B. L. J., 2017, In : Energy procedia. 124, p. 851-861 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
17 Citations (Scopus)
318 Downloads (Pure)

The avalanche-mode superjunction LED

Dutta, S., Steeneken, P. G., Agarwal, V. V., Schmitz, J., Annema, A. J. & Hueting, R. J. E., Apr 2017, In : IEEE transactions on electron devices. 64, 4, p. 1612-1618 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
9 Citations (Scopus)
50 Downloads (Pure)
2016

A nitride-based epitaxial surface layer formed by ammonia treatment of silicene-terminated ZrB2

Wiggers, F. B., Van Hao, B., Friedlein, R., Yamada-Takamura, Y., Schmitz, J., Kovalgin, A. Y. & de Jong, M. P., 5 Apr 2016, In : Journal of chemical physics. 144, 134703, p. 1-5 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)
Open Access
File
7 Citations (Scopus)
21 Downloads (Pure)

Editorial: Extended papers selected from ESSDERC 2015

Grasser, T., Schmitz, J. & Lemme, M. C., 1 Nov 2016, In : Solid-state electronics. 125, p. 1-1 1 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
30 Downloads (Pure)

Interface trap density estimation in FinFETs using the gm/ID Method in the subthreshold regime

Boksteen, B. K., Schmitz, J. & Hueting, R. J. E., May 2016, In : IEEE transactions on electron devices. 63, 5, p. 1814-1820 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)

Meer More

Schmitz, J., Nauta, B. & Seijlhouwer, M., Aug 2016, In : Ingenieur. 128, 8, p. 30-33 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

7 Downloads (Pure)

On the small-signal capacitance of RF MEMS switches at very low frequencies

Wang, J., Bielen, J., Salm, C., Krijnen, G. J. M. & Schmitz, J., 24 Aug 2016, In : Journal of the Electron Devices Society. 4, 6, p. 459-465 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
4 Citations (Scopus)
87 Downloads (Pure)
2015

Electric field and interface charge extraction in field-plate assisted RESURF devices

Boksteen, B. K., Heringa, A., Ferrara, A., Steeneken, P. G., Schmitz, J. & Hueting, R. J. E., 1 Feb 2015, In : IEEE transactions on electron devices. 62, 2, p. 622-629 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)

Fabrication and properties of GeSi and SiON layers for above-IC integrated optics

Schmitz, J., Rangarajan, B. & Kovalgin, A. Y., Jun 2015, In : Solid-state electronics. 108, p. 8-12 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
4 Citations (Scopus)
13 Downloads (Pure)

Hot-wire assisted ALD of tungsten films: In-situ study of the interplay between CVD, etching, and ALD modes

Yang, M., Aarnink, A. A. I., Kovalgin, A. Y., Wolters, R. A. M. & Schmitz, J., 25 May 2015, In : Physica status solidi A. 212, 7, p. 1607-1614 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

9 Citations (Scopus)

Ideal RESURF Geometries

Ferrara, A., Boksteen, B. K., Hueting, R. J. E., Heringa, A., Schmitz, J. & Steeneken, P. G., 1 Oct 2015, In : IEEE transactions on electron devices. 62, 10, p. 3341-3347 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

6 Citations (Scopus)

On device architectures, subthreshold swing, and power consumption of the piezoelectric field-effect transistor (π-FET)

Hueting, R. J. E., van Hemert, T., Kaleli, B., Wolters, R. A. M. & Schmitz, J., 22 Apr 2015, In : Journal of the Electron Devices Society. 3, 3, p. 149-157 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
11 Citations (Scopus)
387 Downloads (Pure)

Opto-electronic modeling of light emission from avalanche-mode silicon p+n junctions

Dutta, S., Hueting, R. J. E., Annema, A. J., Qi, L., Nanver, L. K. & Schmitz, J., 18 Sep 2015, In : Journal of Applied Physics. 118, p. 1-10 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

21 Citations (Scopus)

PEALD AlN: Controlling growth and film crystallinity

Banerjee, S., Aarnink, A. A. I., van de Kruijs, R. W. E., Kovalgin, A. Y. & Schmitz, J., 10 Jun 2015, In : Physica status solidi. C. 12, 7, p. 1036-1042 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

10 Citations (Scopus)
1 Downloads (Pure)

Physics-based stability analysis of MOS transistors

Ferrara, A., Steeneken, P. G., Boksteen, B. K., Heringa, A., Scholten, A. J., Schmitz, J. & Hueting, R. J. E., 10 Jun 2015, In : Solid-state electronics. 113, p. 28-34 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Reliable cool-down of GridPix detectors for cryogenic applications

Schön, R., Schmitz, J., Smits, S. M., Bilevych, Y., Bilevych, Y. & Bakel, van, N., 21 Apr 2015, In : Nuclear instruments & methods in physics research. Section A : Accelerators, spectrometers, detectors and associated equipment. 780, p. 100-106 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
8 Downloads (Pure)
2014

Analysis of thin-film PZT/LNO stacks on an encapsulated TiN electrode

Kaleli, B., Nguyen, D. M., Schmitz, J., Wolters, R. A. M. & Hueting, R. J. E., 1 May 2014, In : Microelectronic engineering. 119, p. 16-19 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

9 Citations (Scopus)

Sheet resistance under Ohmic contacts to AlGaN/GaN heterostructures

Hajlasz, M., Donkers, J. J. T. M., Sque, S. J., Heil, S. B. S., Gravesteijn, D. J., Rietveld, F. J. R. & Schmitz, J., 18 Jun 2014, In : Applied physics letters. 104, p. 242109 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

10 Citations (Scopus)
2013

Conduction and electric field effect in ultra-thin TiN films

Van Hao, B., Kovalgin, A. Y., Schmitz, J. & Wolters, R. A. M., 31 Jul 2013, In : Applied physics letters. 103, 5, p. 051904 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

9 Citations (Scopus)
1 Downloads (Pure)

Deep reactive ion etching of in situ boron doped LPCVD Ge0.7Si0.3 using SF6 and O2 plasma

Kazmi, S. N. R., Salm, C. & Schmitz, J., Oct 2013, In : Microelectronic engineering. 110, p. 311-314 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

Deposition and properties of silicon oxynitride films with low propagation losses by inductively coupled PECVD at 150 °C

Rangarajan, B., Kovalgin, A. Y. & Schmitz, J., 15 Sep 2013, In : Surface and coatings technology. 230, p. 46-50 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)

GridPix detectors: production and beam test results

Koppert, W. J. C., van Bakel, N., Bilevych, Y., Bilevych, Y., Colas, P., Desch, K., Fransen, M., van der Graaf, H., Hartjes, F., Hessey, N. P., Kaminski, J., Schmitz, J., Schön, R. & Zappon, F., Dec 2013, In : Nuclear instruments & methods in physics research. Section A : Accelerators, spectrometers, detectors and associated equipment. 732, p. 245-249 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

9 Citations (Scopus)

Low-temperature deposition of high-quality siliconoxynitride films for CMOS-integrated optics

Rangarajan, B., Kovalgin, A. Y., Worhoff, K. & Schmitz, J., 13 Mar 2013, In : Optics letters. 38, 6, p. 941-943 3 p.

Research output: Contribution to journalArticleAcademicpeer-review

13 Citations (Scopus)

Strain and conduction-band offset in narrow n-type finFETs

van Hemert, T., Kaleli, B., Hueting, R. J. E., Esseni, D., van Dal, M. J. H. & Schmitz, J., 1 Mar 2013, In : IEEE transactions on electron devices. 60, 3, p. 1005-1010 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)

The gridpix detector: History and perspective

van der Graaf, H., Aarnink, A. A. I., Aarts, A., van Bakel, N., Berbee, E., Berkien, A., van Beuzekom, M., Bosma, M., Campbell, M., Chefdeville, M. A., Colas, P., Colijn, A. P., Fomaini, A., Fransen, M., Giganon, A., Giomataris, I., Gotink, W., de Groot, N., Hartjes, F., van der Heijden, B. & 18 others, Hessey, N., Jansweijer, P., Konig, A., Koppert, W., Llopart, X., de Nooij, L., van der Putten, S., Rövekamp, J., Salm, C., San Segundo Bello, D., Schmitz, J., Smits, S. M., Timmermans, J., Verkooijen, H., Visschers, J., Visser, J., Wijnen, T. & Wyrsch, N., 24 Apr 2013, In : Modern physics letters. A. 28, 28-13, p. 13400211-13400217 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)
2012

Fast RF-CV characterization through High-Speed 1-port S-Parameter measurements

Herfst, R. W., Steeneken, P. G., Tiggelman, M. P. J., Stulemeijer, J. & Schmitz, J., 1 Aug 2012, In : IEEE transactions on semiconductor manufacturing. 25, 3, p. 310-316 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

7 Citations (Scopus)
1 Citation (Scopus)

Laterally confined large-grained Poly-GeSi films: Crystallization and dopant activation using green laser

Rangarajan, B., Kovalgin, A. Y., Oesterlin, P., de Kloe, R., Brunets, I. & Schmitz, J., 1 Oct 2012, In : ECS journal of solid state science and technology. 1, 6, p. 263-268 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)

Low-Stress Highly-Conductive In-Situ Boron Doped Ge0.7Si0.3 Films by LPCVD

Kazmi, S. N. R., Kovalgin, A. Y., Aarnink, A. A. I., Salm, C. & Schmitz, J., 29 Aug 2012, In : ECS journal of solid state science and technology. 1, 5, p. P222-P226 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)

Nanoscale carrier injectors for high luminescence Si-based LEDs

Piccolo, G., Kovalgin, A. Y. & Schmitz, J., 27 Apr 2012, In : Solid-state electronics. 74, Special Issue, Selected Papers from the ESSDERC 2011 Conference, p. 43-48 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)
1 Downloads (Pure)

Novel test structures for dedicated temperature budget determination

Faber, E. J., Wolters, R. A. M. & Schmitz, J., 1 Aug 2012, In : IEEE transactions on semiconductor manufacturing. 25, 3, p. 339-345 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)
2011
4 Citations (Scopus)
1 Downloads (Pure)

Growth Kinetics and Oxidation Mechanism of ALD TiN Thin Films Monitored by In Situ Spectroscopic Ellipsometry

Van Hao, B., Groenland, A. W., Aarnink, A. A. I., Wolters, R. A. M., Schmitz, J. & Kovalgin, A. Y., 3 Jan 2011, In : Journal of the Electrochemical Society. 158, 3, p. 214-220 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

43 Citations (Scopus)
1 Downloads (Pure)

Integration of Solar Cells on Top of CMOS Chips Part I: a-Si Solar Cells

Lu, J., Kovalgin, A. Y., van der Werf, K. H. M., Schropp, R. E. I. & Schmitz, J., 1 Jul 2011, In : IEEE transactions on electron devices. 58, 5, p. 2014-2021 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
14 Citations (Scopus)
11 Downloads (Pure)