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Kees van der Zouw

  • 0 Citations
  • 0 h-Index
20192019
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Fingerprint Dive into the research topics where Kees van der Zouw is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

  • 5 Similar Profiles
Atomic layer deposition Engineering & Materials Science
Sheet resistance Engineering & Materials Science
Contact resistance Engineering & Materials Science
Tungsten Engineering & Materials Science
Electric lines Engineering & Materials Science
Wire Engineering & Materials Science
Temperature Engineering & Materials Science

Research Output 2019 2019

  • 1 Conference contribution
19 Downloads (Pure)

Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films

van der Zouw, K., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., 18 Mar 2019, 2019 IEEE 32nd International Conference on Microelectronic Test Structures, ICMTS 2019. IEEE, p. 48-53 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Atomic layer deposition
Sheet resistance
Contact resistance
Tungsten
Electric lines

Activities 2019 2019

  • 1 Oral presentation

Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films

Kees van der Zouw (Speaker), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Alexey Y. Kovalgin (Contributor)
19 Mar 2019

Activity: Talk or presentationOral presentation