Kees van der Zouw

  • 0 Citations
  • 0 h-Index
20192019

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Research Output

  • 1 Conference contribution

Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films

van der Zouw, K., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A. Y., 18 Mar 2019, 2019 IEEE 32nd International Conference on Microelectronic Test Structures, ICMTS 2019. IEEE, p. 48-53 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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    Activities

    • 1 Oral presentation

    Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films

    Kees van der Zouw (Speaker), Antonius A.I. Aarnink (Contributor), Jurriaan Schmitz (Contributor), Alexey Y. Kovalgin (Contributor)
    19 Mar 2019

    Activity: Talk or presentationOral presentation