Research output per year
Research output per year
Personal profile
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Dive into the research topics where Kees van der Zouw is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
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Collaborations and top research areas from the last five years
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Chemisorption of H radical generated volatile Si hydrides on Ru films
Gaffarov, I., van der Zouw, K., Aarnink, T., Sturm, J. M., Makhotkin, I. A. & Ackermann, M., 1 Dec 2025, In: Surfaces and Interfaces. 78, 9 p., 107956.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile29 Downloads (Pure) -
Metallic molybdenum obtained by atomic layer deposition from Mo(CO)6
van der Zouw, K., van der Wel, B. Y., Sturm, J. M., Aarnink, A. A. I., Wolters, R. A. M., Gravesteijn, D. J. & Kovalgin, A. Y., 1 Mar 2025, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 43, 2, 022407.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile82 Downloads (Pure) -
Electrical behavior of ALD-molybdenum films in the thin-film limit
Van Der Zouw, K., Dulfer, S. D., Aarnink, A. A. I. & Kovalgin, A. Y., 10 May 2024, 2024 IEEE 36th International Conference on Microelectronic Test Structures, ICMTS 2024 - Proceedings. IEEE, (IEEE International Conference on Microelectronic Test Structures).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
Open AccessFile1 Citation (Scopus)383 Downloads (Pure) -
Area-Selective Low-Pressure Thermal Atomic Layer Deposition of Aluminum Nitride
van der Wel, B. Y., van der Zouw, K., Aarnink, A. A. I. & Kovalgin, A. Y., 17 Aug 2023, In: Journal of Physical Chemistry C. 127, 34, p. 17134-17145 12 p.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile4 Citations (Scopus)264 Downloads (Pure) -
Low-resistivity molybdenum obtained by atomic layer deposition
van der Zouw, K., van der Wel, B. Y., Aarnink, A. A. I., Wolters, R. A. M., Gravesteijn, D. J. & Kovalgin, A. Y., 1 Sept 2023, In: Journal of vacuum science & technology A: vacuum, surfaces, and films. 41, 5, 052402.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile14 Citations (Scopus)629 Downloads (Pure)
Prizes
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Best poster award
Steenge, C. (Recipient), Dawood, F. (Contributor), van der Zouw, K. (Contributor), Kooijman, L. J. (Contributor), Berenschot, E. J. W. (Contributor), Hueting, R. (Contributor) & Tas, N. R. (Contributor), 8 Jul 2025
Prize
File
Activities
- 2 Oral presentation
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Towards Deposition of Metallic Molybdenum Films from Molybdenum Hexacarbonyl in a Process Involving an Intermediate ALD Step and Subsequent Reduction
van der Zouw, K. (Speaker), Sturm, M. (Contributor), Aarnink, A. A. I. (Contributor) & Kovalgin, A. Y. (Contributor)
7 Aug 2024Activity: Talk or presentation › Oral presentation
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Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films
van der Zouw, K. (Speaker), Aarnink, A. A. I. (Contributor), Schmitz, J. (Contributor) & Kovalgin, A. Y. (Contributor)
19 Mar 2019Activity: Talk or presentation › Oral presentation