Activities per year
- 27 results
Search results
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The interface is everything: down to 1nm X-ray multilayers
Ackermann, M. D. (Speaker)
16 Apr 2024Activity: Talk or presentation › Oral presentation
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Thin films for improving EUV optics Multilayer optimization and piezo corrective layers
Ackermann, M. D. (Speaker)
25 Oct 2024Activity: Talk or presentation › Invited talk
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Improving multilayers for maximum reflectivity
Ackermann, M. D. (Speaker)
19 Sept 2024Activity: Talk or presentation › Invited talk
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The incredible physics of EUV lithography
Ackermann, M. D. (Speaker)
27 Jun 2024Activity: Talk or presentation › Invited talk
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Infrared emissivity of MoxSiy thin films
Baskakov, A. (Speaker), van de Kruijs, R. W. E. (Contributor), Golsanamlou, Z. (Contributor), Bokdam, M. (Contributor), Sturm, M. (Contributor) & Ackermann, M. D. (Contributor)
24 Jan 2024Activity: Talk or presentation › Oral presentation
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Reaching record reflectivity for EUV optics
Ackermann, M. D. (Speaker)
19 Sept 2024Activity: Talk or presentation › Invited talk
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Improving multilayers for maximum reflectivity
Ackermann, M. D. (Speaker)
19 Aug 2024 → 22 Aug 2024Activity: Talk or presentation › Oral presentation
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Optimizing source-mirrors combinations for EUV lithography
Ackermann, M. D. (Speaker)
23 Oct 2024Activity: Talk or presentation › Invited talk
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Thin films – short wavelengths
Ackermann, M. D. (Speaker)
2 Jun 2024 → 6 Jun 2024Activity: Talk or presentation › Oral presentation
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Improving multilayers for maximum reflectivity
Ackermann, M. D. (Speaker)
6 Jun 2024Activity: Talk or presentation › Invited talk
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Multilayer optimization for improving EUV optics
Ackermann, M. D. (Speaker)
25 Oct 2024Activity: Talk or presentation › Invited talk
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Thin-film multilayers for short wavelength optics
Ackermann, M. D. (Speaker)
24 Oct 2024Activity: Talk or presentation › Invited talk
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What it takes to do advanced lithography : EUV optics
Ackermann, M. D. (Speaker)
5 Jun 2024Activity: Talk or presentation › Invited talk
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Research at XUV Optics Industry Focus Group
Ackermann, M. D. (Speaker)
6 May 2024Activity: Talk or presentation › Oral presentation
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Improving EUV and X-ray Multilayers for maximum reflectivity
Ackermann, M. D. (Speaker)
29 Oct 2024Activity: Talk or presentation › Invited talk
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Thermally stable MoNx/Si1-xNx multilayer as a substrate for XSW study of SMSI
Tiwari, A. (Speaker), Monai, M. (Contributor), Matveevskii, K. (Contributor), Yakunin, S. N. (Contributor), Ackermann, M. D. (Contributor), Mandemaker, L. D. B. (Contributor), Meirer, F. (Contributor) & Makhotkin, I. A. (Contributor)
12 Oct 2023Activity: Talk or presentation › Oral presentation
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Characterization of Strong Metal-Support Interaction (SMSI) Using X-ray Standing Wave
Tiwari, A. (Speaker), Monai, M. (Contributor), Matveevskii, K. (Contributor), Yakunin, S. N. (Contributor), Ackermann, M. D. (Contributor), Mandemaker, L. D. B. (Contributor), Meirer, F. (Contributor) & Makhotkin, I. A. (Contributor)
7 Sept 2023Activity: Talk or presentation › Oral presentation
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Probing thin film interfaces at the nanoscale by Low Energy Ion Scattering
Sturm, M. (Speaker), Chandrasekaran, A. (Contributor), Valpreda, A. (Contributor), Zameshin, A. (Contributor), van de Kruijs, R. W. E. (Contributor), Yakshin, A. (Contributor), Bijkerk, F. (Contributor) & Ackermann, M. D. (Contributor)
10 Nov 2023Activity: Talk or presentation › Invited talk
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The interface study of photoresist/underlayer using hybrid x-ray reflectivity and x-ray standing wave approach
Tiwari, A. (Speaker), Fallica, R. (Contributor), Ackermann, M. D. (Contributor) & Makhotkin, I. A. (Contributor)
15 Nov 2023Activity: Talk or presentation › Oral presentation
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Characterization of strong metal–support interaction (SMSI) using X-ray standing waves (XSW)
Tiwari, A. (Speaker), Monai, M. (Contributor), Matveevskii, K. (Contributor), Yakunin, S. N. (Contributor), Ackermann, M. D. (Contributor), Meirer, F. (Contributor) & Makhotkin, I. A. (Contributor)
3 Apr 2023 → 5 Apr 2023Activity: Talk or presentation › Oral presentation
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Thin films and nano-gratings study using X-ray standing waves excited by an in-lab X-ray source
Matveevskii , K. (Contributor), Nikolaev, K. (Contributor), Yakunin, S. N. (Contributor), Fallica, R. (Contributor), Ackermann, M. D. (Contributor) & Makhotkin, I. A. (Speaker)
4 Apr 2023 → 5 Apr 2023Activity: Talk or presentation › Invited talk
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Low Energy Ion Interactions with Transition Metal Films: ballistic and Diffusive Transport Processes
Phadke, P. (Speaker), Sturm, M. (Contributor), van de Kruijs, R. W. E. (Contributor), Bijkerk, F. (Contributor) & Ackermann, M. D. (Contributor)
11 Jul 2022Activity: Talk or presentation › Oral presentation
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LEIS characterization of Si/Transition Metal structures by simulation of LEIS tails
Valpreda, A. (Speaker), Sturm, M. (Contributor), Yakshin, A. (Contributor) & Ackermann, M. (Contributor)
19 May 2022Activity: Talk or presentation › Oral presentation
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Charge exchange between He ions and solid targets: the dependence on target electronic structure revisited
Sturm, M. (Speaker), Zameshin, A. (Contributor), Lokhorst, N. (Contributor) & Ackermann, M. D. (Contributor)
19 May 2022Activity: Talk or presentation › Oral presentation
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Thin films and nano-gratings study using X-ray standing waves excited by an in-lab X-ray source
Matveevskii, K. (Speaker), Nikolaev, K. (Contributor), Yakunin, S. N. (Contributor), Fallica, R. (Contributor), Ackermann, M. D. (Contributor) & Makhotkin, I. A. (Contributor)
19 Oct 2021Activity: Talk or presentation › Oral presentation
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Dynamics of ultrafast melting in laser-irradiated ruthenium thin films
Akhmetov, F. (Speaker), Milov, I. (Contributor), Medvedev, N. (Contributor), Semin, S. (Contributor), Formisano, F. (Contributor), Kimel, A. (Contributor), Makhotkin, I. A. (Contributor) & Ackermann, M. D. (Contributor)
4 Oct 2021Activity: Talk or presentation › Oral presentation
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EUV Multilayers mirrors - wider, thinner and deeper
Ackermann, M. D. (Speaker)
28 Oct 2021Activity: Talk or presentation › Invited talk