Activities per year
- 13 results
Search results
-
Thin films for improving EUV optics Multilayer optimization and piezo corrective layers
Ackermann, M. D. (Speaker)
25 Oct 2024Activity: Talk or presentation › Invited talk
-
Improving multilayers for maximum reflectivity
Ackermann, M. D. (Speaker)
19 Sept 2024Activity: Talk or presentation › Invited talk
-
The incredible physics of EUV lithography
Ackermann, M. D. (Speaker)
27 Jun 2024Activity: Talk or presentation › Invited talk
-
Reaching record reflectivity for EUV optics
Ackermann, M. D. (Speaker)
19 Sept 2024Activity: Talk or presentation › Invited talk
-
Optimizing source-mirrors combinations for EUV lithography
Ackermann, M. D. (Speaker)
23 Oct 2024Activity: Talk or presentation › Invited talk
-
Improving multilayers for maximum reflectivity
Ackermann, M. D. (Speaker)
6 Jun 2024Activity: Talk or presentation › Invited talk
-
Multilayer optimization for improving EUV optics
Ackermann, M. D. (Speaker)
25 Oct 2024Activity: Talk or presentation › Invited talk
-
Thin-film multilayers for short wavelength optics
Ackermann, M. D. (Speaker)
24 Oct 2024Activity: Talk or presentation › Invited talk
-
What it takes to do advanced lithography : EUV optics
Ackermann, M. D. (Speaker)
5 Jun 2024Activity: Talk or presentation › Invited talk
-
Improving EUV and X-ray Multilayers for maximum reflectivity
Ackermann, M. D. (Speaker)
29 Oct 2024Activity: Talk or presentation › Invited talk
-
Probing thin film interfaces at the nanoscale by Low Energy Ion Scattering
Sturm, M. (Speaker), Chandrasekaran, A. (Contributor), Valpreda, A. (Contributor), Zameshin, A. (Contributor), van de Kruijs, R. W. E. (Contributor), Yakshin, A. (Contributor), Bijkerk, F. (Contributor) & Ackermann, M. D. (Contributor)
10 Nov 2023Activity: Talk or presentation › Invited talk
-
Thin films and nano-gratings study using X-ray standing waves excited by an in-lab X-ray source
Matveevskii , K. (Contributor), Nikolaev, K. (Contributor), Yakunin, S. N. (Contributor), Fallica, R. (Contributor), Ackermann, M. D. (Contributor) & Makhotkin, I. A. (Speaker)
4 Apr 2023 → 5 Apr 2023Activity: Talk or presentation › Invited talk
-
EUV Multilayers mirrors - wider, thinner and deeper
Ackermann, M. D. (Speaker)
28 Oct 2021Activity: Talk or presentation › Invited talk