Marko Sturm

dr.ir.

  • 474 Citations
  • 13 h-Index
20012020
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Research Output 2001 2020

2019
2 Downloads (Pure)
Open Access
File
Graphite
Optical sensors
optical measuring instruments
Graphene
Etching
4 Downloads (Pure)

Comparison of hydrogen transport through thin metal, Si and oxide layers

Soroka, O., Sturm, J. M. & Bijkerk, F., 21 Jan 2019.

Research output: Contribution to conferencePosterAcademic

Open Access
File
oxides
hydrogen
metals
yttrium
diffusivity
3 Downloads (Pure)

Comparison of Sputtering of Transition Metals by Reactive Ion Bombardment

Phadke, P., Sturm, J. M., van de Kruijs, R. W. E. & Bijkerk, F., 21 Jan 2019.

Research output: Contribution to conferencePosterAcademic

Open Access
File
bombardment
sputtering
transition metals
lithography
ions
3 Downloads (Pure)

Etching processes of transferred and non-transferred multi-layer graphene in the presence of extreme UV, H2O and H2

Mund, B. K., Sturm, J. M., van den Beld, W. T. E., Lee, C. J. & Bijkerk, F., 29 Oct 2019, In : Applied surface science. 504, 144485.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Graphite
Graphene
Etching
graphene
etching
46 Downloads (Pure)

Extreme UV secondary electron yield measurements of Ru, Sn, and Hf oxide thin films

Sturm, J. M., Liu, F., Darlatt, E., Kolbe, M., Aarnink, A. A. I., Lee, C. J. & Bijkerk, F., 1 Jul 2019, In : Journal of Micro/ Nanolithography, MEMS, and MOEMS. 18, 3, 033501.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Oxide films
Thin films
oxides
Electrons
thin films
13 Downloads (Pure)

Grazing-Incidence La/B-Based Multilayer Mirrors for 6.x nm Wavelength

Kuznetsov, D., Yakshin, A., Sturm, J. M. & Bijkerk, F., 1 Jan 2019, In : Journal of nanoscience and nanotechnology. 19, 1, p. 585-592 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
grazing incidence
Multilayers
Mirrors
mirrors
Wavelength

Hydrogenation dynamics of Ru capped y thin films

Soroka, O., Sturm, J. M., Van De Kruijs, R. W. E., Makhotkin, I. A., Nikolaev, K., Yakunin, S. N., Lee, C. J. & Bijkerk, F., 8 Oct 2019, In : Journal of applied physics. 126, 14, 145301.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
hydrogenation
thin films
ellipsometry
hydrogen
surface plasmon resonance
2 Downloads (Pure)
Open Access
File
metal oxides
ion scattering
transition metals
matrices
energy
11 Downloads (Pure)

Nanoscale Transition Metal Thin Films: Growth Characteristics and Scaling Law for Interlayer Formation

Chandrasekaran, A., van de Kruijs, R. W. E., Sturm, J. M., Zameshin, A. & Bijkerk, F., 11 Dec 2019, In : ACS applied materials & interfaces. 11, 49, p. 46311−46326 16 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Scaling laws
Film growth
Transition metals
Thin films
Interfacial energy
1 Citation (Scopus)
109 Downloads (Pure)
Open Access
File
nitrogen ions
Ion bombardment
Ruthenium
ruthenium
bombardment
16 Downloads (Pure)

Oxidation of metal thin films by atomic oxygen: A low energy ion scattering study

Stilhano Vilas Boas, C. R., Sturm, J. M. & Bijkerk, F., 21 Oct 2019, In : Journal of applied physics. 126, 15, 7 p., 155301.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
ion scattering
oxidation
oxygen
thin films
metals
5 Downloads (Pure)
Open Access
File
ion scattering
metal oxides
transition metals
oxide films
oxygen
1 Downloads (Pure)

Room temperature isotope tracing in transition metal oxides probed by LEIS

Stilhano Vilas Boas, C. R., Sturm, J. M. & Bijkerk, F., 27 May 2019.

Research output: Contribution to conferencePosterAcademic

Open Access
File
ion scattering
tracing
metal oxides
isotopes
transition metals
1 Downloads (Pure)

Sputtering and nitridation of transition metal surfaces under low energy, steady state nitrogen ion bombardment

Phadke, P., Sturm, J. M., van de Kruijs, R. W. E. & Bijkerk, F., 26 Nov 2019, (Accepted/In press) In : Applied surface science. 505, 144529.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Nitridation
nitrogen ions
Ion bombardment
metal surfaces
Transition metals
2018
2 Citations (Scopus)
13 Downloads (Pure)

Aromatic structure degradation of single layer graphene on an amorphous silicon substrate in the presence of water, hydrogen and Extreme Ultraviolet light

Mund, B. K., Sturm, J. M., Lee, C. J. & Bijkerk, F., 1 Jan 2018, In : Applied surface science. 427, Part B, p. 1033-1040 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Graphite
Amorphous silicon
Graphene
Hydrogen
Degradation
2 Citations (Scopus)
13 Downloads (Pure)

Control of YH3 formation and stability via hydrogen surface adsorption and desorption

Soroka, O., Sturm, J. M., van de Kruijs, R. W. E., Lee, C. J. & Bijkerk, F., 15 Oct 2018, In : Applied surface science. 455, p. 70-74 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Hydrogen
Desorption
Adsorption
Yttrium
Thin films
2 Citations (Scopus)
65 Downloads (Pure)

Damage accumulation in thin ruthenium films induced by repetitive exposure to femtosecond XUV pulses below the single-shot ablation threshold

Makhotkin, I. A., Milov, I., Chalupský, J., Tiedtke, K., Enkisch, H., de Vries, G., Scholze, F., Siewert, F., Sturm, J. M., Nikolaev, K. V., van de Kruijs, R. W. E., Smithers, M. A., Van Wolferen, H. A. G. M., Keim, E. G., Louis, E., Jacyna, I., Jurek, M., Klinger, D., Pelka, J. B., Juha, L. & 15 others, Hájková, V., Vozda, V., Sburian, T., Saksl, K., Faatz, B., Keitel, B., Plönjes, E., Schreiber, S., Toleikis, S., Loch, R., Hermann, M., Strobel, S., Donker, R., Mey, T. & Sobierajski, R., 1 Nov 2018, In : Journal of the Optical Society of America B: Optical Physics. 35, 11, p. 2799-2805 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
free electron lasers
ruthenium
ablation
shot
damage
3 Citations (Scopus)
17 Downloads (Pure)

Double matrix effect in Low Energy Ion Scattering from La surfaces

Zameshin, A. A., Yakshin, A. E., Sturm, J. M., Brongerma, H. H. & Bijkerk, F., 15 May 2018, In : Applied surface science. 440, p. 570-579 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Scattering
Ions
Charge transfer
Lanthanum
Conduction bands
1 Citation (Scopus)
18 Downloads (Pure)

Formation of H2O on a CO2 dosed Ru(0 0 0 1) surface under Extreme Ultraviolet Light and H2

Mund, B. K., Sturm, J. M., Lee, C. J. & Bijkerk, F., 31 Oct 2018, In : Applied surface science. 456, p. 538-544 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Amorphous carbon
Temperature programmed desorption
Absorption spectroscopy
Reaction products
Carbon Dioxide

Formation of H2O on the surface of CO2 dosed Ru(0001) under Extreme Ultraviolet Light and H2

Mund, B. K., Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., Jan 2018.

Research output: Contribution to conferencePosterAcademic

Hydrogen diffusion measurements using Y thin film monitoring

Soroka, O., Sturm, J. M., Lee, C. J. & Bijkerk, F., Jan 2018.

Research output: Contribution to conferencePosterAcademic

5 Citations (Scopus)
34 Downloads (Pure)

Mechanism of single-shot damage of Ru thin films irradiated by femtosecond extreme UV free-electron laser

Milov, I., Makhotkin, I. A., Sobierajski, R., Medvedev, N., lipp, V., Chalupsky, J., Sturm, J. M., Tiedtke, K., de Vries, G., Störmer, M., Siewert, F., van de Kruijs, R., Louis, E., Jacyna, I., Jurek, M., Juha, L., Hájková, V., Vozda, V., Burian, T., Saksl, K. & 13 others, Faatz, B., Keitel, B., Plönjes, E., Schreiber, S., Toleikis, S., Loch, R., Hermann, M., Strobel, S., Nienhuys, H. K., Gwalt, G., Mey, T., Enkisch, H. & Bijkerk, F., 23 Jul 2018, In : Optics express. 26, 15, p. 19665-19685 21 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
ultraviolet lasers
free electron lasers
shot
damage
thin films
3 Downloads (Pure)
34 Downloads (Pure)

Sputter damage by low energy charged particle irradiation

Phadke, P., Sturm, M., van de Kruijs, R. & Bijkerk, F., 18 Jun 2018.

Research output: Contribution to conferencePosterAcademic

Open Access
File
quartz crystals
microbalances
charged particles
damage
metal crystals
2017
7 Citations (Scopus)
52 Downloads (Pure)

Adsorption and Dissociation of CO2 on Ru (0001)

Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., 30 Mar 2017, In : Journal of physical chemistry. p. 6729-6735 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Carbon Monoxide
Temperature programmed desorption
Infrared spectroscopy
desorption
infrared spectroscopy
4 Citations (Scopus)
36 Downloads (Pure)

Characterization of self-assembled monolayers on a ruthenium surface

Shaheen, A., Sturm, J. M., Ricciardi, R., Huskens, J., Lee, C. J. & Bijkerk, F., 6 Jun 2017, In : Langmuir. 33, 25, p. 6419-6429 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Ruthenium
Self assembled monolayers
ruthenium
Monolayers
sulfur
2 Citations (Scopus)
1 Downloads (Pure)

Coexistence of ice clusters and liquid-like water clusters on the Ru(0001) surface

Liu, F., Sturm, J. M., Lee, C. J. & Bijkerk, F., 2017, In : Physical chemistry chemical physics. 19, 12, p. 8288-8299 12 p.

Research output: Contribution to journalArticleAcademicpeer-review

Ice
ice
Water
Liquids
liquids
4 Citations (Scopus)
302 Downloads (Pure)
Open Access
File
magnetron sputtering
oxidation
thin films
oxygen
photoelectron spectroscopy

In-vacuo growth studies and thermal oxidation of ZrO2 thin films

Coloma Ribera, R., Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 17 Jan 2017.

Research output: Contribution to conferenceAbstractOther research output

oxidation
thin films
photoelectron spectroscopy
sharpness
ion scattering

In-vacuo growth studies and thermal oxidation of ZrO2 thin films

Coloma Ribera, R., Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 17 Jan 2017.

Research output: Contribution to conferencePosterOther research output

In vacuo low-energy ions scattering studies of ZrO2 growth by magnetron sputtering

Sturm, J. M., Coloma Ribera, R., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 3 Nov 2017, In vacuo low-energy ions scattering studies of ZrO2 growth by magnetron sputtering.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

ion scattering
magnetron sputtering
passivity
energy
silicates
2 Citations (Scopus)
110 Downloads (Pure)

Metal diffusion properties of ultra-thin high-k Sc2O3 films

Pachecka, M., Lee, C. J., Sturm, J. M. & Bijkerk, F., 1 Oct 2017, In : AIP advances. 7, 10, 21 p., 105324.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
metals
tin
etching
ruthenium
adhesion

Oxygen diffusion characterization by depth-resolved low energy ion spectroscopy

Stilhano Vilas Boas, C. R., Sturm, J. M. & Bijkerk, F., 11 May 2017.

Research output: Contribution to conferencePosterAcademic

1 Downloads (Pure)

Thermal stability of high-reflectance La/B-based multilayers for 6.x nm wavelength

Kuznetsov, D. S., Yakshin, A. E., Sturm, J. M. & Bijkerk, F., 28 Sep 2017, In : Journal of applied physics. 122, 12, 125302.

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)
140 Downloads (Pure)

Tin etching from metallic and oxidized scandium thin films

Pachecka, M., Lee, C. J., Sturm, J. M. & Bijkerk, F., Aug 2017, In : AIP advances. 7, 8, 8 p., 085107.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
scandium
tin
etching
oxides
thin films
2016

Elastic modulus of extreme ultraviolet exposed single layer graphene

Mund, B. K., Gao, A., Sturm, J. M., Lee, C. J. & Bijkerk, F., 19 Jan 2016, p. -.

Research output: Contribution to conferencePosterOther research output

modulus of elasticity
graphene
optics
membranes
photomasks
7 Citations (Scopus)
45 Downloads (Pure)

Electronegativity-dependent tin etching from thin films

Pachecka, M., Sturm, J. M., van de Kruijs, R. W. E., Lee, C. J. & Bijkerk, F., 29 Jul 2016, In : AIP advances. 6, 7, 9 p., 075222.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
tin
etching
thin films
hydrogen
availability
4 Citations (Scopus)
73 Downloads (Pure)

Exploiting the P L2,3 absorption edge for optics: spectroscopic and structural characterization of cubic boron phosphide thin films

Huber, S., Medvedev, V., Meyer-Ilse, J., Gullikson, E., Padavala, B., Edgar, J. H., Sturm, J. M., van de Kruijs, R. W. E., Prendergast, D. & Bijkerk, F., 2016, In : Optical materials express. 6, 12, p. 3946-3959 12.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Boron
Optics
Thin films
X ray absorption
Spectroscopy
9 Citations (Scopus)

Extreme UV induced dissociation of amorphous solid water and crystalline water bilayers on Ru(0001)

Liu, F., Sturm, J. M., Lee, C. J. & Bijkerk, F., 2016, In : Surface science. 646, p. 101-107 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

dissociation
water
desorption
cross sections
water loss

Growth kinetics of Ru on Si, SiN and SiO2 studied by in-vacuo low energy ion scattering (LEIS)

Coloma Ribera, R., van de Kruijs, R. W. E., Sturm, J. M., Yakshin, A. & Bijkerk, F., 19 Jan 2016, p. -.

Research output: Contribution to conferencePosterOther research output

ion scattering
kinetics
coatings
oxidation
optical coatings
20 Citations (Scopus)
210 Downloads (Pure)

Highly efficient blazed grating with multilayer coating for tender X-ray energies

Senf, F., Bijkerk, F., Eggenstein, F., Gwalt, G., Huang, Q., van de Kruijs, R. W. E., Kutz, O., Lemke, S., Louis, E., Mertin, M., Packe, I., Rudolph, I., Schafers, F., Siewert, F., Sokolov, A., Sturm, J. M., Waberski, C., Wang, Z., Wolf, J., Zeschke, T. & 1 others, Erko, A., 2016, In : Optics express. 24, 12, p. 13220-13230 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
gratings
coatings
x rays
retarding
energy

Influence of the surface oxide content of a boron capping layer on UV photodetector performance

Mohammadi, V., Van De Kruijs, R. W. E., Rao, P. R., Sturm, J. M. & Nihtianov, S., 21 Mar 2016, 2015 9th International Conference on Sensing Technology, ICST 2015. IEEE Computer Society, Vol. 2016-March. p. 656-660 5 p. 7438479

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Photodetectors
Boron
Chemical vapor deposition
Oxides
Physical vapor deposition

In-vacuo growth studies and thermal oxidation of ZrO2 thin films

Coloma Ribera, R., Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 10 Nov 2016, p. -.

Research output: Contribution to conferencePosterOther research output

5 Citations (Scopus)
176 Downloads (Pure)

In vacuo growth studies of Ru thin films on Si, SiN, and SiO2 by high-sensitivity low energy ion scattering

Coloma Ribera, R., van de Kruijs, R. W. E., Sturm, J. M., Yakshin, A. & Bijkerk, F., 2016, In : Journal of applied physics. 120, 6, p. 065303- 13 p., 065303.

Research output: Contribution to journalArticleAcademicpeer-review

File
ion scattering
sensitivity
thin films
energy
oxygen

In-vacuo growth studies of ZrO2 thin films

Coloma Ribera, R., Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 1 Dec 2016, p. -.

Research output: Contribution to conferencePosterOther research output

thin films
sharpness
ion scattering
caps
mirrors

Low Energy Ion Scattering from La surfaces

Zameshin, A., Yakshin, A., Sturm, J. M., Brongersma, H. H. & Bijkerk, F., 19 Jan 2016, p. -.

Research output: Contribution to conferencePosterOther research output

ion scattering
energy
plotting
matrices
charge transfer

Research in the Industrial Focus Group XUV Optics

Sturm, J. M. & Bijkerk, F., 26 May 2016, Delft

Research output: Other contributionOther research output