Marko Sturm

dr.ir.

  • 476 Citations
  • 13 h-Index
20012020
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Research Output 2001 2020

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Poster
2019
4 Downloads (Pure)

Comparison of hydrogen transport through thin metal, Si and oxide layers

Soroka, O., Sturm, J. M. & Bijkerk, F., 21 Jan 2019.

Research output: Contribution to conferencePosterAcademic

Open Access
File
oxides
hydrogen
metals
yttrium
diffusivity
4 Downloads (Pure)

Comparison of Sputtering of Transition Metals by Reactive Ion Bombardment

Phadke, P., Sturm, J. M., van de Kruijs, R. W. E. & Bijkerk, F., 21 Jan 2019.

Research output: Contribution to conferencePosterAcademic

Open Access
File
bombardment
sputtering
transition metals
lithography
ions
2 Downloads (Pure)
Open Access
File
metal oxides
ion scattering
transition metals
matrices
energy
5 Downloads (Pure)
Open Access
File
ion scattering
metal oxides
transition metals
oxide films
oxygen
1 Downloads (Pure)

Room temperature isotope tracing in transition metal oxides probed by LEIS

Stilhano Vilas Boas, C. R., Sturm, J. M. & Bijkerk, F., 27 May 2019.

Research output: Contribution to conferencePosterAcademic

Open Access
File
ion scattering
tracing
metal oxides
isotopes
transition metals
2018

Formation of H2O on the surface of CO2 dosed Ru(0001) under Extreme Ultraviolet Light and H2

Mund, B. K., Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., Jan 2018.

Research output: Contribution to conferencePosterAcademic

Hydrogen diffusion measurements using Y thin film monitoring

Soroka, O., Sturm, J. M., Lee, C. J. & Bijkerk, F., Jan 2018.

Research output: Contribution to conferencePosterAcademic

3 Downloads (Pure)
34 Downloads (Pure)

Sputter damage by low energy charged particle irradiation

Phadke, P., Sturm, M., van de Kruijs, R. & Bijkerk, F., 18 Jun 2018.

Research output: Contribution to conferencePosterAcademic

Open Access
File
quartz crystals
microbalances
charged particles
damage
metal crystals

In-vacuo growth studies and thermal oxidation of ZrO2 thin films

Coloma Ribera, R., Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 17 Jan 2017.

Research output: Contribution to conferencePosterOther research output

Oxygen diffusion characterization by depth-resolved low energy ion spectroscopy

Stilhano Vilas Boas, C. R., Sturm, J. M. & Bijkerk, F., 11 May 2017.

Research output: Contribution to conferencePosterAcademic

2016

Elastic modulus of extreme ultraviolet exposed single layer graphene

Mund, B. K., Gao, A., Sturm, J. M., Lee, C. J. & Bijkerk, F., 19 Jan 2016, p. -.

Research output: Contribution to conferencePosterOther research output

modulus of elasticity
graphene
optics
membranes
photomasks

Growth kinetics of Ru on Si, SiN and SiO2 studied by in-vacuo low energy ion scattering (LEIS)

Coloma Ribera, R., van de Kruijs, R. W. E., Sturm, J. M., Yakshin, A. & Bijkerk, F., 19 Jan 2016, p. -.

Research output: Contribution to conferencePosterOther research output

ion scattering
kinetics
coatings
oxidation
optical coatings

In-vacuo growth studies and thermal oxidation of ZrO2 thin films

Coloma Ribera, R., Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 10 Nov 2016, p. -.

Research output: Contribution to conferencePosterOther research output

In-vacuo growth studies of ZrO2 thin films

Coloma Ribera, R., Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 1 Dec 2016, p. -.

Research output: Contribution to conferencePosterOther research output

thin films
sharpness
ion scattering
caps
mirrors

Low Energy Ion Scattering from La surfaces

Zameshin, A., Yakshin, A., Sturm, J. M., Brongersma, H. H. & Bijkerk, F., 19 Jan 2016, p. -.

Research output: Contribution to conferencePosterOther research output

ion scattering
energy
plotting
matrices
charge transfer
2015

Co-existence of 2D and 3D growth in thermally oxidized ruthenium thin films

Coloma Ribera, R., van de Kruijs, R. W. E., Sturm, J. M., Yakshin, A. & Bijkerk, F., 11 May 2015, p. -.

Research output: Contribution to conferencePosterOther research output

Controlling interface chemistry in 6.x nm La/B multilayer optics

Kuznetsov, D., Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A., Louis, E. & Bijkerk, F., 5 Oct 2015, p. -.

Research output: Contribution to conferencePosterOther research output

Elastic modulus of Extreme Ultraviolet exposed single-layer graphene

Mund, B. K., Gao, A., Sturm, J. M., Lee, C. J. & Bijkerk, F., 31 Aug 2015, p. -.

Research output: Contribution to conferencePosterOther research output

modulus of elasticity
graphene
reticles
protective coatings
beam splitters

Elastic modulus of Extreme Ultraviolet exposed single-layer graphene

Mund, B. K., Gao, A., Sturm, J. M., Lee, C. J. & Bijkerk, F., 28 Sep 2015, p. -.

Research output: Contribution to conferencePosterOther research output

modulus of elasticity
graphene
reticles
protective coatings
beam splitters

Elastic modulus of Extreme Ultraviolet exposed single-layer graphene

Mund, B. K., Gao, A., Sturm, J. M., Lee, C. J. & Bijkerk, F., 6 Sep 2015, p. -.

Research output: Contribution to conferencePosterOther research output

modulus of elasticity
graphene
reticles
protective coatings
beam splitters

Electonegativity-dependent cleaning of tin from different surface materials

Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., 20 Jan 2015, p. -.

Research output: Contribution to conferencePosterOther research output

Electronegativity-dependent removal of tin from different surface materials

Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., 31 Aug 2015, p. -.

Research output: Contribution to conferencePosterOther research output

Electronegativity-dependent removal of tin from different surface materials

Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., 6 Sep 2015, p. -.

Research output: Contribution to conferencePosterOther research output

Electronegativity-dependent removal of tin from different surfact materials

Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., 28 Sep 2015, p. -.

Research output: Contribution to conferencePosterOther research output

EUV induced secondary electron emission on HfO2, SnO2 and Ru thin films

Liu, F., Sturm, J. M., Darlatt, E., Kolbe, M., Bijkerk, F. & Lee, C. J., 5 Nov 2015, p. -.

Research output: Contribution to conferencePosterOther research output

EUV induced surface chemistry of water on clean and p(2x1) O covered Ru(0001): a RAIRS and TPD study

Liu, F., Sturm, J. M., Lee, C. J. & Bijkerk, F., 30 Mar 2015, p. -.

Research output: Contribution to conferencePosterOther research output

2014

Electronegativity-dependent cleaning of tin and tin hydride containing contamination of EUV optics

Pachecka, M., Lee, C. J., Sturm, J. M. & Bijkerk, F., 21 Jan 2014, p. -.

Research output: Contribution to conferencePosterOther research output

cleaning
hydrides
tin
contamination
optics

Electronegativity-dependent cleaning of tin from metal capping layers

Pachecka, M., Sturm, J. M., Lee, C. J. & Bijkerk, F., 27 Oct 2014, p. -.

Research output: Contribution to conferencePosterOther research output

13 Downloads (Pure)

Surface and sub-surface oxidation of thin films using Low Energy Ion Scattering

Coloma Ribera, R., van de Kruijs, R. W. E., Sturm, J. M., Yakshin, A. & Bijkerk, F., 22 May 2014, p. -.

Research output: Contribution to conferencePosterOther research output

File
Scattering
Ions
Thin films
Oxidation
Oxygen

Water dissociation on Ru(0001) by EUV A TOF, RAIRS and TPD study

Liu, F., Sturm, J. M., Lee, C. J. & Bijkerk, F., 31 Aug 2014, p. -.

Research output: Contribution to conferencePosterOther research output

XUV Optics: from deposition to application

Makhotkin, I. A., Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A., Kuznetsov, D. & Bijkerk, F., 1 Jan 2014, p. -.

Research output: Contribution to conferencePosterOther research output

2013

Deposition and Oxidation Studies by Low-Energy Ion Scattering (LEIS)

Coloma Ribera, R., Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 16 Sep 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Extreme Ultraviolet (EUV) induced surface chemistry on Ru(0001)

Liu, F., Sturm, J. M., Lee, C. J. & Bijkerk, F., 20 Jun 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Extreme Ultraviolet (EUV) induced surface chemistry on Ru(0001)

Liu, F., Sturm, J. M., Osorio, E., van Kampen, M., Lee, C. J. & Bijkerk, F., 22 Jan 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Metal Hydride assited contamination on Ru/Si surfaces

Pachecka, M., Lee, C. J., Sturm, J. M. & Bijkerk, F., 20 Jun 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Oxidation and metal contamination of EUV optics

Sturm, J. M., Liu, F., Pachecka, M., Lee, C. J. & Bijkerk, F., 9 Dec 2013, p. -.

Research output: Contribution to conferencePosterOther research output

The Industrial Focus Group XUV Optics

Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A., Lee, C. J., Louis, E. & Bijkerk, F., 16 Sep 2013, p. -.

Research output: Contribution to conferencePosterOther research output

2012

Ethanol decomposition on Ru(0001)

Sturm, J. M., Liu, F., Lee, C. J. & Bijkerk, F., 10 Dec 2012, p. -.

Research output: Contribution to conferencePosterOther research output

Extreme ultraviolet induced oxidation of Ru(0001)

Liu, F., Sturm, J. M., Lee, C. J. & Bijkerk, F., 10 Dec 2012, p. -.

Research output: Contribution to conferencePosterOther research output

Photo-induced chemistry of EUV multilayer mirror surfaces: experimental set up for in situ studeis

Liu, F., Sturm, J. M., Lee, C. J. & Bijkerk, F., 21 Jun 2012, p. -.

Research output: Contribution to conferencePosterOther research output

Reactions of ethanol on Ru(0001)

Sturm, J. M., Liu, F., Lee, C. J. & Bijkerk, F., 3 Sep 2012, p. -.

Research output: Contribution to conferencePosterOther research output

2006

Heterogeneous Oxidation of the Si(111) Surface Determined by Kelvin Probe Force Microscopy

Poelsema, B., Sturm, J. M., Croes, G. O. & Wormeester, H., 14 Nov 2006, p. -.

Research output: Contribution to conferencePosterOther research output

Substrate-inhibited ALD: interface formation and thin film properties

Sturm, J. M., Zinine, A., Wormeester, H., Poelsema, B., Bankras, R. G., Holleman, J. & Schmitz, J., 31 Mar 2006, p. -.

Research output: Contribution to conferencePosterOther research output

2005
1 Citation (Scopus)

Laterally resolved electrical characterisation of high-K oxides with non-contact Atomic Force Microscopy

Sturm, J. M., Zinine, A., Wormeester, H., Bankras, R. G., Holleman, J., Schmitz, J. & Poelsema, B., 1 Jun 2005, p. -.

Research output: Contribution to conferencePosterOther research output

Nucleation of atomic layer deposited Al2O3 on Si

Sturm, J. M., Zinine, A., Wormeester, H. & Poelsema, B., 29 Sep 2005, p. -.

Research output: Contribution to conferencePosterOther research output

Silicon oxide interface formation in ALD of Al2O3 studied by in-situ XPS

Zinine, A., Sturm, J. M., Wormeester, H. & Poelsema, B., 25 Sep 2005, p. -.

Research output: Contribution to conferencePosterOther research output