Marko Sturm

dr.ir.

  • 476 Citations
  • 13 h-Index
20012020
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Research Output 2001 2020

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Other contribution
2016

Research in the Industrial Focus Group XUV Optics

Sturm, J. M. & Bijkerk, F., 26 May 2016, Delft

Research output: Other contributionOther research output

2011

Negating HIO-induced metal and carbide EUV surface contamination

Sturm, J. M., Gleeson, M., van de Kruijs, R. W. E., Lee, C. J., Kleyn, A. W. & Bijkerk, F., 2011

Research output: Other contributionOther research output

photolithography
ultraviolet radiation
carbides
contamination
projection