Research output per year
Research output per year
Search results
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2021
PELLICLE FOR EUV LITHOGRAPHY
Shavikof, A. (Inventor), Bijkerk, F. (Inventor), Schurink, B. (Inventor), Sturm, J. M. (Inventor) & van de Kruijs, R. W. E. (Inventor), 12 Nov 2021, IPC No. G03F 7/ 20 A I, Patent No. CN113646697, Priority date 23 Mar 2020, Priority No. WO2020EP57959Research output: Patent
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2020
Pellicle for EUV lithograpy
Shafikov, A. (Inventor), Bijkerk, F. (Inventor), Schurink, B. (Inventor), Sturm, M. (Inventor) & van de Kruijs, R. W. E. (Inventor), 15 Oct 2020, IPC No. G03F 7/ 20 A I, Patent No. NL2025186, Priority date 12 Apr 2019, Priority No. EP20190168871Research output: Patent