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Data underlying the article: Crack barriers for thick SiN using dicing in Optics Express
Offerhaus, H. (Creator), Grootes, R. (Contributor), Dijkstra, M. (Contributor), Klaver, Y. (Contributor) & Marpaung, D. (Contributor), 4TU.Centre for Research Data, 14 Apr 2022
DOI: 10.4121/19572238.v1, https://data.4tu.nl/articles/dataset/Data_underlying_the_article_Crack_barriers_for_thick_SiN_using_dicing_in_Optics_Express/19572238/1 and 2 more links, https://data.4tu.nl/articles/_/19572238, https://data.4tu.nl/articles/_/19572238/1 (show fewer)
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