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Michael Curt Elwenspoek


  • 11231 Citations
  • 55 h-Index
1977 …2018
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Fingerprint Dive into the research topics where Michael Curt Elwenspoek is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

  • 8 Similar Profiles
Silicon Chemical Compounds
Fluidics Engineering & Materials Science
lithography Physics & Astronomy
Lithography Engineering & Materials Science
Thin films Engineering & Materials Science
vibration meters Physics & Astronomy
oxygen Physics & Astronomy
hydrogen Physics & Astronomy

Network Recent external collaboration on country level. Dive into details by clicking on the dots.

Research Output 1977 2018

2 Citations (Scopus)
41 Downloads (Pure)

Macroscopic equivalence for microscopic motion in a turbulence driven three-dimensional self-assembly reactor

Hageman, T. A. G., Löthman, P. A., Dirnberger, M., Elwenspoek, M. C., Manz, A. & Abelmann, L., 8 Jan 2018, In : Journal of applied physics. 123, 2, 024901.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
self assembly
trajectory analysis
90 Downloads (Pure)

3D Nanofabrication of fluidic components by corner lithography

Burouni, N., 12 Nov 2014, Enschede: Ipskamp Printing. 118 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

22 Downloads (Pure)

A UHF 4th-order band-pass filter based on contour-mode PZT-on-silicon resonators

Yagubizade, H., Darvishi, M., Elwenspoek, M. C. & Tas, N. R., 26 Jan 2014, The 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2014). USA: IEEE, p. 1237-1240 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

11 Citations (Scopus)
128 Downloads (Pure)

Compositional dependence of the Young's modulus and piezoelectric coefficient of (110)-oriented pulsed laser deposited PZT thin films

Nazeer, H., Nguyen, D. M., Rijnders, A. J. H. M., Sardan Sukas, Ö., Abelmann, L. & Elwenspoek, M. C., 30 May 2014, In : Journal of microelectromechanical systems. 24, 1, p. 166-173 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

19 Citations (Scopus)
32 Downloads (Pure)

New type of microengine using internal combustion of hydrogen and oxygen

Svetovoy, V., Sanders, R. G. P., Ma, K. & Elwenspoek, M. C., 6 Mar 2014, In : Scientific reports. 4, 5 p., 4296.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
internal combustion engines


Activities 1993 2002

  • 8 Oral presentation

Fabrication of functional structures on thin silicon nitride membranes

P. Ekkels (Speaker), R.W. Tjerkstra (Speaker), Gijsbertus J.M. Krijnen (Speaker), Johan W. Berenschot (Speaker), J.P. Brugger (Speaker), Michael Curt Elwenspoek (Speaker)
16 Sep 2002

Activity: Talk or presentationOral presentation

Etching Technology

J.G.E. Gardeniers (Keynote speaker), M.C. Elwenspoek (Keynote speaker)
15 Mar 1999

Activity: Talk or presentationOral presentation

Etching technology

Michael Curt Elwenspoek (Keynote speaker)
25 Apr 1995

Activity: Talk or presentationOral presentation

Sacrificial wafer bonding: an addition to the micromachining techniques

V.L. Spiering (Keynote speaker), Johan W. Berenschot (Keynote speaker), Michael Curt Elwenspoek (Keynote speaker), J.H.J. Fluitman (Keynote speaker)
24 May 1995

Activity: Talk or presentationOral presentation

An electrostatic axial gap wobble motor

R. Legtenberg (Speaker), J.W. Berenschot (Speaker), T.S.J. Lammerink (Speaker), M.C. Elwenspoek (Speaker)
29 Jun 1995

Activity: Talk or presentationOral presentation