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Michael Curt Elwenspoek


  • 11421 Citations
  • 56 h-Index
1977 …2019
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Fingerprint Dive into the research topics where Michael Curt Elwenspoek is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

  • 7 Similar Profiles
Silicon Chemical Compounds
Self assembly Engineering & Materials Science
Fluidics Engineering & Materials Science
lithography Physics & Astronomy
Lithography Engineering & Materials Science
Thin films Engineering & Materials Science
vibration meters Physics & Astronomy
oxygen Physics & Astronomy

Network Recent external collaboration on country level. Dive into details by clicking on the dots.

Research Output 1977 2019

A Thermodynamic Description of Turbulence as a Source of Stochastic Kinetic Energy for 3D Self-Assembly

Löthman, P. A., Hageman, T. A. G., Elwenspoek, M. C., Krijnen, G. J. M., Mastrangeli, M., Manz, A. & Abelmann, L., 18 Jul 2019, In : Advanced materials interfaces. 11 p., 1900963.

Research output: Contribution to journalArticleAcademicpeer-review

Kinetic energy
Self assembly
Turbulent flow
3 Citations (Scopus)
55 Downloads (Pure)

Macroscopic equivalence for microscopic motion in a turbulence driven three-dimensional self-assembly reactor

Hageman, T. A. G., Löthman, P. A., Dirnberger, M., Elwenspoek, M. C., Manz, A. & Abelmann, L., 8 Jan 2018, In : Journal of applied physics. 123, 2, 024901.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
self assembly
trajectory analysis
119 Downloads (Pure)

3D Nanofabrication of fluidic components by corner lithography

Burouni, N., 12 Nov 2014, Enschede: Ipskamp Printing. 118 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

23 Downloads (Pure)

A UHF 4th-order band-pass filter based on contour-mode PZT-on-silicon resonators

Yagubizade, H., Darvishi, M., Elwenspoek, M. C. & Tas, N. R., 26 Jan 2014, The 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2014). USA: IEEE, p. 1237-1240 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

11 Citations (Scopus)
149 Downloads (Pure)

Compositional dependence of the Young's modulus and piezoelectric coefficient of (110)-oriented pulsed laser deposited PZT thin films

Nazeer, H., Nguyen, D. M., Rijnders, A. J. H. M., Sardan Sukas, Ö., Abelmann, L. & Elwenspoek, M. C., 30 May 2014, In : Journal of microelectromechanical systems. 24, 1, p. 166-173 8 p.

Research output: Contribution to journalArticleAcademicpeer-review



Activities 1991 2003

  • 12 Oral presentation

Wet anisotropic etching for fluidic 1D nanochannels

J. Haneveld (Speaker), Henricus V. Jansen (Speaker), Johan W. Berenschot (Speaker), Niels Roelof Tas (Speaker), Michael Curt Elwenspoek (Speaker)

Activity: Talk or presentationOral presentation

Fabrication of functional structures on thin silicon nitride membranes

P. Ekkels (Speaker), R.W. Tjerkstra (Speaker), Gijsbertus J.M. Krijnen (Speaker), Johan W. Berenschot (Speaker), J.P. Brugger (Speaker), Michael Curt Elwenspoek (Speaker)
16 Sep 2002

Activity: Talk or presentationOral presentation

Fabrication of microstructures by powder blasting

H. Wensink (Speaker), J. Haneveld (Speaker), Hendricus A.G.M. van Wolferen (Speaker), Michael Curt Elwenspoek (Speaker)
24 Oct 2002

Activity: Talk or presentationOral presentation

Etching Technology

J.G.E. Gardeniers (Keynote speaker), M.C. Elwenspoek (Keynote speaker)
15 Mar 1999

Activity: Talk or presentationOral presentation

The micro-flown, a novel device measuring acoustical flows

H.E. de Bree (Keynote speaker), P.J. Leussink (Keynote speaker), T. Korthorst (Keynote speaker), Henricus V. Jansen (Keynote speaker), Theodorus S.J. Lammerink (Keynote speaker), Michael Curt Elwenspoek (Keynote speaker)
25 Jun 1995

Activity: Talk or presentationOral presentation