Mohammadreza Nematollahi

  • 120 Citations
  • 5 h-Index
20132020

Research output per year

If you made any changes in Pure these will be visible here soon.

Fingerprint Dive into the research topics where Mohammadreza Nematollahi is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

  • 1 Similar Profiles

Network Recent external collaboration on country level. Dive into details by clicking on the dots.

Research Output

  • 120 Citations
  • 5 h-Index
  • 12 Article
  • 2 Poster
  • 1 Book editing
  • 1 Patent

Mirror for a microlithographic projection exposure system, and method for operating a deformable mirror

Lippert, J., Gruner, T., Hild, K., Lucke, P. & Nematollahi, M., 30 Jan 2020, IPC No. G03F 7/ 20 A I, Patent No. WO2020020550, Priority date 26 Jul 2018, Priority No. DE201810212508

Research output: Patent

  • Open Access

    Nanoscale piezoelectric surface modulation for adaptive extreme ultraviolet and soft x-ray optics

    Nematollahi, M., Lucke, P., Bayraktar, M., Yakshin, A., Rijnders, A. J. H. M. & Bijkerk, F., 15 Oct 2019, In : Optics letters. 44, 20, p. 5104-5107 4 p.

    Research output: Contribution to journalArticleAcademicpeer-review

    File
  • 25 Downloads (Pure)

    Tailoring properties of nanostructured MoO3−x thin films by aqueous solution deposition

    Inzani, K., Nematollahi, M., Selbach, S. M., Grande, T., Waalekalv, M. L., Brakstad, T., Reenaas, T. W., Kildemo, M. & Vullum-Bruer, F., 30 Nov 2018, In : Applied surface science. 459, p. 822-829 8 p.

    Research output: Contribution to journalArticleAcademicpeer-review

  • 3 Citations (Scopus)

    Activities

    • 2 Oral presentation

    Adaptive multilayer mirrors based on piezoelectric actuators for XUV lithography

    Mohammadreza Nematollahi (Speaker), Philip Lucke (Contributor), Muharrem Bayraktar (Contributor), Kerstin Hild (Contributor), Toralf Gruner (Contributor), Andrey Yakshin (Contributor), A.J.H.M. Rijnders (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)
    12 Dec 2018

    Activity: Talk or presentationOral presentation

    Piezoelectric actuators for adaptive multilayer mirrors in XUV lithography systems

    Mohammadreza Nematollahi (Speaker), Philip Lucke (Contributor), Muharrem Bayraktar (Contributor), Kerstin Hild (Contributor), Toralf Gruner (Contributor), Andrey Yakshin (Contributor), A.J.H.M. Rijnders (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)
    7 Nov 2018

    Activity: Talk or presentationOral presentation