Mohammadreza Nematollahi

  • 109 Citations
  • 5 h-Index
20132020
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Fingerprint Dive into the research topics where Mohammadreza Nematollahi is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

  • 2 Similar Profiles
Molybdenum oxide Chemical Compounds
Pulsed laser deposition Engineering & Materials Science
Pulsed lasers Chemical Compounds
Energy gap Engineering & Materials Science
Solar cells Chemical Compounds
Thin films Chemical Compounds
molybdenum oxides Physics & Astronomy
x ray optics Physics & Astronomy

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Research Output 2013 2020

  • 109 Citations
  • 5 h-Index
  • 12 Article
  • 2 Poster
  • 1 Book editing
  • 1 Patent

Mirror for a microlithographic projection exposure system, and method for operating a deformable mirror

Lippert, J., Gruner, T., Hild, K., Lucke, P. & Nematollahi, M., 30 Jan 2020, IPC No. G03F 7/ 20 A I, Patent No. WO2020020550, Priority date 26 Jul 2018, Priority No. DE201810212508

Research output: Patent

deformable mirrors
projection
mirrors
inventions
electrodes

Adaptive piezoelectric optics for XUV wavelengths

Bayraktar, M., Lucke, P., Nematollahi, M., Yakshin, A., Louis, E., Rijnders, A. J. H. M. & Bijkerk, F., 13 Jun 2019.

Research output: Contribution to conferencePosterAcademic

Open Access
21 Downloads (Pure)

Nanoscale piezoelectric surface modulation for adaptive extreme ultraviolet and soft x-ray optics

Nematollahi, M., Lucke, P., Bayraktar, M., Yakshin, A., Rijnders, A. J. H. M. & Bijkerk, F., 15 Oct 2019, In : Optics letters. 44, 20, p. 5104-5107 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
x ray optics
modulation
photolithography
wavelengths
actuators
1 Citation (Scopus)

Tailoring properties of nanostructured MoO3−x thin films by aqueous solution deposition

Inzani, K., Nematollahi, M., Selbach, S. M., Grande, T., Waalekalv, M. L., Brakstad, T., Reenaas, T. W., Kildemo, M. & Vullum-Bruer, F., 30 Nov 2018, In : Applied surface science. 459, p. 822-829 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Thin films
Molybdenum oxide
Spectroscopic ellipsometry
Phase composition
Stoichiometry

Activities 2018 2018

  • 2 Oral presentation

Adaptive multilayer mirrors based on piezoelectric actuators for XUV lithography

Mohammadreza Nematollahi (Speaker), Philip Lucke (Contributor), Muharrem Bayraktar (Contributor), Kerstin Hild (Contributor), Toralf Gruner (Contributor), Andrey Yakshin (Contributor), A.J.H.M. Rijnders (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)
12 Dec 2018

Activity: Talk or presentationOral presentation

Piezoelectric actuators for adaptive multilayer mirrors in XUV lithography systems

Mohammadreza Nematollahi (Speaker), Philip Lucke (Contributor), Muharrem Bayraktar (Contributor), Kerstin Hild (Contributor), Toralf Gruner (Contributor), Andrey Yakshin (Contributor), A.J.H.M. Rijnders (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)
7 Nov 2018

Activity: Talk or presentationOral presentation