Mohammadreza Nematollahi

  • 97 Citations
  • 5 h-Index
20132019
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Activities 2018 2018

  • 2 Oral presentation

Adaptive multilayer mirrors based on piezoelectric actuators for XUV lithography

Mohammadreza Nematollahi (Speaker), Philip Lucke (Contributor), Muharrem Bayraktar (Contributor), Kerstin Hild (Contributor), Toralf Gruner (Contributor), Andrey Yakshin (Contributor), A.J.H.M. Rijnders (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)
12 Dec 2018

Activity: Talk or presentationOral presentation

Piezoelectric actuators for adaptive multilayer mirrors in XUV lithography systems

Mohammadreza Nematollahi (Speaker), Philip Lucke (Contributor), Muharrem Bayraktar (Contributor), Kerstin Hild (Contributor), Toralf Gruner (Contributor), Andrey Yakshin (Contributor), A.J.H.M. Rijnders (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)
7 Nov 2018

Activity: Talk or presentationOral presentation