Muharrem Bayraktar

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  • 37 Citations
  • 4 h-Index
20102018
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Research Output 2010 2018

Broadband spectrometer development based on high-density free-standing transmission gratings

Bayraktar, M., Liu, F., Bastiaens, H. M. J., Bruineman, C., Vratzov, B. & Bijkerk, F., 31 Jan 2018.

Research output: Contribution to conferencePosterAcademic

Monitoring EUV and DUV spectral emission ratios of a high power EUVL source

Bayraktar, M., Liu, F., Bastiaens, H. M. J., Bruineman, C., Vratzov, B. & Bijkerk, F., 7 Nov 2018.

Research output: Contribution to conferencePosterAcademic

Open Access

Source plasma emission spectrum under various operating conditions

Liu, F., Bayraktar, M., Goossens, T., Bijkerk, F., Quintana Ramirez, J. & Beenhakker, T., 21 Jun 2018.

Research output: Contribution to conferencePosterAcademic

Anomalous transmission filters for spectral monitoring in the extreme ultraviolet wavelength region

Barreaux, J. L. P., Kozhevnikov, I. V., Bayraktar, M., van de Kruijs, R. W. E., Bastiaens, H. M. J., Bijkerk, F. & Boller, K. J., 17 Jan 2017, p. -.

Research output: Contribution to conferencePosterOther research output

Broadband spectrometer development based on high-density free-standing transmission gratings

Bayraktar, M., Liu, F., Bastiaens, H. M. J., Bruineman, C., Vratzov, B. & Bijkerk, F., 19 Dec 2017.

Research output: Contribution to conferencePosterOther research output

Activities 2011 2018

  • 10 Oral presentation
  • 1 Invited talk

Piezoelectric actuators for adaptive multilayer mirrors in XUV lithography systems

Mohammadreza Nematollahi (Speaker), Philip Lucke (Contributor), Muharrem Bayraktar (Contributor), Kerstin Hild (Contributor), Toralf Gruner (Contributor), Andrey Yakshin (Contributor), A.J.H.M. Rijnders (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)
7 Nov 2018

Activity: Talk or presentationOral presentation

Unraveling extreme ultraviolet (EUV) light source spectra

Muharrem Bayraktar (Speaker), Caspar Bruineman (Contributor), Boris Vratzov (Contributor), Hubertus M.J. Bastiaens (Contributor), F. Bijkerk (Contributor)
24 Sep 2018

Activity: Talk or presentationOral presentation

Broadband spectroscopy of EUV light sources using a transmission grating spectrometer

Muharrem Bayraktar (Speaker), Francesco Torretti (Contributor), Ruben Schupp (Contributor), Oscar Versolato (Contributor), Fei Liu (Contributor), Caspar Bruineman (Contributor), Boris Vratzov (Contributor), Hubertus M.J. Bastiaens (Contributor), F. Bijkerk (Contributor)
6 Nov 20178 Nov 2017

Activity: Talk or presentationOral presentation

Broadband spectral characterization of EUV light sources with a transmission grating spectrometer

Muharrem Bayraktar (Speaker), Fei Liu (Contributor), Hubertus M.J. Bastiaens (Contributor), Caspar Bruineman (Contributor), Frederik Bijkerk (Contributor)
6 Nov 20178 Nov 2017

Activity: Talk or presentationInvited talk

Collector mirror design to separate the stray 10.6 μm CO2 laser light from the EUV light at the intermediate focus,

Muharrem Bayraktar (Speaker), F.A. van Goor (Speaker), Klaus J. Boller (Speaker), Frederik Bijkerk (Speaker)
6 Oct 2013

Activity: Talk or presentationOral presentation