• 100 Citations
  • 6 h-Index

Research output per year

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Fingerprint Dive into the research topics where Muharrem Bayraktar is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

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Research Output

Prominent radiative contributions from multiply-excited states in laser-produced tin plasma for nanolithography

Torretti, F., Sheil, J., Schupp, R., Basko, M. M., Bayraktar, M., Meijer, R., Witte, S., Ubachs, W., Hoekstra, R., Versolato, O., Neukirch, A. & Colgan, J., 11 May 2020, In : Nature communications. 11, 2334.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
  • Spectral purity performance of high-power EUV systems

    van de Kerkhof, M., Liu, F., Meeuwissen, M., Zhang, X., de Kruif, R., Davydova, N., Schiffelers, G., Wählish, F., van Setten, E., Varenkamp, W., Ricken, K., de Winter, L., McNamara, J. & Bayraktar, M., 23 Mar 2020, In : SPIE Conference Proceedings. 11323, 16 p., 1132321.

    Research output: Contribution to journalConference articleAcademicpeer-review

  • Adaptive piezoelectric optics for XUV wavelengths

    Bayraktar, M., Lucke, P., Nematollahi, M., Yakshin, A., Louis, E., Rijnders, A. J. H. M. & Bijkerk, F., 13 Jun 2019.

    Research output: Contribution to conferencePoster

    Open Access


    Best poster award

    Muharrem Bayraktar (Recipient), 31 Jan 2018


    Best poster award

    Muharrem Bayraktar (Recipient), 13 Jun 2019



    • 16 Oral presentation
    • 1 Invited talk

    Lithography machine in-line broadband spectrum metrology and feedback control system

    Fei Liu (Speaker), Dries Smeets (Contributor), Sjoerd Huang (Contributor), Andrei Yakunin (Contributor), Peter Havermans (Contributor), Rene Oesterholt (Contributor), Muharrem Bayraktar (Contributor), Fred Bijkerk (Contributor)
    10 Jun 201913 Jun 2019

    Activity: Talk or presentationOral presentation

    Research at the Industrial Focus Group XUV Optics

    Muharrem Bayraktar (Speaker)
    10 Apr 2019

    Activity: Talk or presentationOral presentation

    Active Piezoelectric Photonic Integrated Circuits (APPICs)

    Muharrem Bayraktar (Speaker)
    5 Jun 2019

    Activity: Talk or presentationOral presentation

    Unexpectedly Large Radiative Emission between Highly-excited States in Sn Laser-produced Plasma

    James Colgan (Invited speaker), Amanda Neukirch (Contributor), Francesco Torretti (Contributor), J. Sheil (Contributor), Ruben Schupp (Contributor), M M Basko (Contributor), Muharrem Bayraktar (Contributor), Randy Meijer (Contributor), S. Witte (Contributor), Wim Ubachs (Contributor), Ronnie Hoekstra (Contributor), Oscar Versolato (Contributor)
    4 Nov 2019

    Activity: Talk or presentationOral presentation

    Piezoelectric actuators for adaptive multilayer mirrors in XUV lithography systems

    Mohammadreza Nematollahi (Speaker), Philip Lucke (Contributor), Muharrem Bayraktar (Contributor), Kerstin Hild (Contributor), Toralf Gruner (Contributor), Andrey Yakshin (Contributor), A.J.H.M. Rijnders (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)
    7 Nov 2018

    Activity: Talk or presentationOral presentation