• 84 Citations
  • 6 h-Index
20092019
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Fingerprint Dive into the research topics where Muharrem Bayraktar is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

  • 1 Similar Profiles
mirrors Physics & Astronomy
wavelengths Physics & Astronomy
Holograms Engineering & Materials Science
Computer generated holography Engineering & Materials Science
ultraviolet radiation Physics & Astronomy
thin films Physics & Astronomy
light sources Physics & Astronomy
lithography Physics & Astronomy

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Research Output 2009 2019

10 Downloads (Pure)

Efficient Generation of Extreme Ultraviolet Light From Nd: YAG-Driven Microdroplet-Tin Plasma

Schupp, R., Torretti, F., Meijer, R., Bayraktar, M., Scheers, J., Kurilovich, D., Bayerle, A., Eikema, K. S. E., Witte, S., Ubachs, W., Hoekstra, R. & Versolato, O. O., 8 Jul 2019, In : Physical review applied. 12, 1, 014010.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
ultraviolet radiation
yttrium-aluminum garnet
tin
lasers
ion charge
6 Downloads (Pure)

Nanoscale piezoelectric surface modulation for adaptive extreme ultraviolet and soft x-ray optics

Nematollahi, M., Lucke, P., Bayraktar, M., Yakshin, A., Rijnders, A. J. H. M. & Bijkerk, F., 15 Oct 2019, In : Optics letters. 44, 20, p. 5104-5107 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
x ray optics
modulation
photolithography
wavelengths
actuators

Radiation transport and scaling of optical depth in Nd:YAG laser-produced microdroplet-tin plasma

Schupp, R., Torretti, F., Meijer, R. A., Bayraktar, M., Sheil, J., Scheers, J., Kurilovich, D., Bayerle, A., Schafgans, A. A., Purvis, M., Eikema, K. S. E., Witte, S., Ubachs, W., Hoekstra, R. & Versolato, O. O., 20 Sep 2019, In : Applied physics letters. 115, 12, 124101.

Research output: Contribution to journalArticleAcademicpeer-review

radiation transport
optical thickness
YAG lasers
tin
scaling

Broadband spectrometer development based on high-density free-standing transmission gratings

Bayraktar, M., Liu, F., Bastiaens, H. M. J., Bruineman, C., Vratzov, B. & Bijkerk, F., 31 Jan 2018.

Research output: Contribution to conferencePosterAcademic

Monitoring EUV and DUV spectral emission ratios of a high power EUVL source

Bayraktar, M., Liu, F., Bastiaens, H. M. J., Bruineman, C., Vratzov, B. & Bijkerk, F., 7 Nov 2018.

Research output: Contribution to conferencePosterAcademic

Open Access

Prizes

Activities 2011 2018

  • 11 Oral presentation
  • 1 Invited talk

Adaptive multilayer mirrors based on piezoelectric actuators for XUV lithography

Mohammadreza Nematollahi (Speaker), Philip Lucke (Contributor), Muharrem Bayraktar (Contributor), Kerstin Hild (Contributor), Toralf Gruner (Contributor), Andrey Yakshin (Contributor), A.J.H.M. Rijnders (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)
12 Dec 2018

Activity: Talk or presentationOral presentation

Piezoelectric actuators for adaptive multilayer mirrors in XUV lithography systems

Mohammadreza Nematollahi (Speaker), Philip Lucke (Contributor), Muharrem Bayraktar (Contributor), Kerstin Hild (Contributor), Toralf Gruner (Contributor), Andrey Yakshin (Contributor), A.J.H.M. Rijnders (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)
7 Nov 2018

Activity: Talk or presentationOral presentation

Unraveling extreme ultraviolet (EUV) light source spectra

Muharrem Bayraktar (Speaker), Caspar Bruineman (Contributor), Boris Vratzov (Contributor), Hubertus M.J. Bastiaens (Contributor), F. Bijkerk (Contributor)
24 Sep 2018

Activity: Talk or presentationOral presentation

Broadband spectral characterization of EUV light sources with a transmission grating spectrometer

Muharrem Bayraktar (Speaker), Fei Liu (Contributor), Hubertus M.J. Bastiaens (Contributor), Caspar Bruineman (Contributor), Frederik Bijkerk (Contributor)
6 Nov 20178 Nov 2017

Activity: Talk or presentationInvited talk

Broadband spectroscopy of EUV light sources using a transmission grating spectrometer

Muharrem Bayraktar (Speaker), Francesco Torretti (Contributor), Ruben Schupp (Contributor), Oscar Versolato (Contributor), Fei Liu (Contributor), Caspar Bruineman (Contributor), Boris Vratzov (Contributor), Hubertus M.J. Bastiaens (Contributor), F. Bijkerk (Contributor)
6 Nov 20178 Nov 2017

Activity: Talk or presentationOral presentation