Personal profile
ChipTech Expert keywords
- Sensors- and Actuators
- MEMS
- Equipment
- Fabrication and Production
- Process Design and Characterization
- Material Science
- High Tech Industry
Expertise related to UN Sustainable Development Goals
In 2015, UN member states agreed to 17 global Sustainable Development Goals (SDGs) to end poverty, protect the planet and ensure prosperity for all. This person’s work contributes towards the following SDG(s):
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SDG 9 Industry, Innovation, and Infrastructure
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Collaborations and top research areas from the last five years
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Active substrate support using piezoelectric thin films
Şimşek, E. (Corresponding Author), Jansen, B., Ackermann, M. & Bayraktar, M., 8 Apr 2026, In: Proceedings of SPIE-The International Society for Optical Engineering. 13981, 4 p.Research output: Contribution to journal › Conference article › Academic › peer-review
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Synchrotron calibration of transmission grating spectrometer for broadband EUV measurements
Chebykin, E., Gaballah, A. E. H., Van Der Horst, R., Ackermann, M., van de Kerkhof, M. & Bayraktar, M., 20 Jan 2026.Research output: Contribution to conference › Poster › Academic
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EUV spectrum of high power LPP source
van de Kerkhof, M., van der Horst, R., Bayraktar, M., van de Kruijs, R., Osorio, E. & Ackermann, M., 6 Nov 2025, International Conference on Extreme Ultraviolet Lithography 2025. Itani, T., Ronse, K. G., Naulleau, P. P. & Gargini, P. A. (eds.). Washington: SPIE, 8 p. 1368611. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 13686).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
Open AccessFile3 Downloads (Pure) -
Filter design for EUV-VUV laser produced plasma diagnostics
Chebykin, E., Van Der Horst, R., Osorio, E., van de Kerkhof, M., Ackermann, M. & Bayraktar, M., 21 Jan 2025.Research output: Contribution to conference › Poster › Academic
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Spectral unraveling of the EUV light source
van der Horst, R., van Kampen, M., Bayraktar, M. & Osorio, E., 2 Apr 2025, p. 61-61. 1 p.Research output: Contribution to conference › Abstract › Academic
Open AccessFile19 Downloads (Pure)
Prizes
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Bottom Electrode and Piezoelectric Thin Film Optimization for Active Wafer Support
Şimşek, E. (Speaker), Jansen, B. (Contributor), Ackermann, M. D. (Contributor) & Bayraktar, M. (Contributor)
15 May 2025Activity: Talk or presentation › Oral presentation
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Modelling Hysteresis and Loss in Piezoelectric Thin Films for High-Precision MEMS Applications
Bayraktar, M. (Speaker)
5 Nov 2025Activity: Talk or presentation › Oral presentation
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Flying Circus Program Update
Bayraktar, M. (Speaker)
23 Jun 2025Activity: Talk or presentation › Invited talk
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Active Substrate Support Using Piezoelectric Thin Films
Şimşek, E. (Speaker), Jansen, B. (Contributor), Ackermann, M. D. (Contributor) & Bayraktar, M. (Contributor)
4 Nov 2025Activity: Talk or presentation › Oral presentation
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Bottom Electrode and Piezoelectric Thin Film Optimization for Active Wafer Support
Şimşek, E. (Speaker), Jansen, B. (Contributor), Ackermann, M. D. (Contributor) & Bayraktar, M. (Contributor)
21 Jan 2025Activity: Talk or presentation › Oral presentation