Muharrem Bayraktar

Activities

Activities per year 2011 2011 2018 2019 2020 2021 2023

• 21 Oral presentation
• 4 Invited talk

Activities per year

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• Simultaneous spectroscopy and imaging of an EUV plasma using zone-plates dispersion matched to transmission gratings

  Bayraktar, M. (Speaker)

  23 Oct 2023 → 25 Oct 2023

  Activity: Talk or presentation › Invited talk

• Full spectrum [ranging 5-265nm] of a tin microdroplet laser-produced plasma light source

  Bouza, Z. (Speaker), Scheers, J. (Contributor), Schupp, R. (Contributor), Behnke, L. (Contributor), Mostafa, Y. (Contributor), Mazzotta, Z. (Contributor), Sheil, J. (Contributor), Byers, J. (Contributor), Ubachs, W. (Contributor), Hoekstra, R. (Contributor), Bayraktar, M. (Contributor) & Versolato, O. (Contributor)

  26 Jan 2022

  Activity: Talk or presentation › Oral presentation

• Broadband Metrology of EUV Light Sources

  Bayraktar, M. (Speaker)

  28 Oct 2021

  Activity: Talk or presentation › Invited talk

• Fully-calibrated Sn LPP EUV Source Spectrum from 5.5 nm – 265 nm

  Byers, J. (Speaker), Bayraktar, M. (Contributor), Bouza, Z. (Speaker), Scheers, J. (Speaker), Schupp, R. (Speaker), Mostafa, Y. (Speaker), Behnke, L. (Speaker), Mazzotta, Z. (Speaker), Sheil, J. (Speaker), Ubachs, W. (Speaker), Hoekstra, R. (Speaker) & Versolato, O. (Speaker)

  25 Oct 2021

  Activity: Talk or presentation › Oral presentation

• Extreme ultraviolet light from tin plasma driven by 2-μm-wavelength laser light

  Behnke, L. (Speaker), Schupp, R. (Contributor), Lassise, A. (Contributor), Bouza, Z. (Contributor), Mazzotta, Z. (Contributor), Sheil, J. (Contributor), Bayraktar, M. (Contributor), Hoekstra, R. (Contributor), Ubachs, W. (Contributor) & Versolato, O. (Contributor)

  20 Jan 2021

  Activity: Talk or presentation › Oral presentation

• Characterization of Tin Plasma Driven by High Energy, 2-μm-wavelength Light

  Behnke, L. (Speaker), Schupp, R. (Contributor), Lassise, A. (Contributor), Bouza, Z. (Contributor), Sheil, J. (Contributor), Bayraktar, M. (Contributor), Hoekstra, R. (Contributor), Ubachs, W. (Contributor) & Versolato, O. (Contributor)

  5 Nov 2020

  Activity: Talk or presentation › Oral presentation

• Adaptive piezoelectric actuators for XUV wavelengths and scaling of hysteresis

  Lucke, P. (Speaker), Bayraktar, M. (Contributor), Nematollahi, M. (Contributor), Houwman, E. (Contributor), Birkhölzer, Y. A. (Contributor), Yakshin, A. (Contributor), Rijnders, G. (Contributor) & Bijkerk, F. (Contributor)

  22 Jan 2020

  Activity: Talk or presentation › Oral presentation

• Transmission Grating Spectrometer for Broadband Spectroscopy of Sources

  Bayraktar, M. (Speaker)

  15 Sept 2020

  Activity: Talk or presentation › Invited talk

• Lithography machine in-line broadband spectrum metrology and feedback control system

  Liu, F. (Speaker), Smeets, D. (Contributor), Huang, S. (Contributor), Yakunin, A. (Contributor), Havermans, P. (Contributor), Oesterholt, R. (Contributor), Bayraktar, M. (Contributor) & Bijkerk, F. (Contributor)

  10 Jun 2019 → 13 Jun 2019

  Activity: Talk or presentation › Oral presentation

• Active Piezoelectric Photonic Integrated Circuits (APPICs)

  Bayraktar, M. (Speaker)

  5 Jun 2019

  Activity: Talk or presentation › Oral presentation

• Research at the Industrial Focus Group XUV Optics

  Bayraktar, M. (Speaker)

  10 Apr 2019

  Activity: Talk or presentation › Oral presentation

• Unexpectedly Large Radiative Emission between Highly-excited States in Sn Laser-produced Plasma

  Colgan, J. (Invited speaker), Neukirch, A. (Contributor), Torretti, F. (Contributor), Sheil, J. (Contributor), Schupp, R. (Contributor), Basko, M. M. (Contributor), Bayraktar, M. (Contributor), Meijer, R. (Contributor), Witte, S. (Contributor), Ubachs, W. (Contributor), Hoekstra, R. (Contributor) & Versolato, O. (Contributor)

  4 Nov 2019

  Activity: Talk or presentation › Oral presentation

• Piezoelectric actuators for adaptive multilayer mirrors in XUV lithography systems

  Nematollahi, M. (Speaker), Lucke, P. (Contributor), Bayraktar, M. (Contributor), Hild, K. (Contributor), Gruner, T. (Contributor), Yakshin, A. (Contributor), Rijnders, A. J. H. M. (Contributor), Louis, E. (Contributor) & Bijkerk, F. (Contributor)

  7 Nov 2018

  Activity: Talk or presentation › Oral presentation

• Unraveling extreme ultraviolet (EUV) light source spectra

  Bayraktar, M. (Speaker), Bruineman, C. (Contributor), Vratzov, B. (Contributor), Bastiaens, H. M. J. (Contributor) & Bijkerk, F. (Contributor)

  24 Sept 2018

  Activity: Talk or presentation › Oral presentation

• Adaptive multilayer mirrors based on piezoelectric actuators for XUV lithography

  Nematollahi, M. (Speaker), Lucke, P. (Contributor), Bayraktar, M. (Contributor), Hild, K. (Contributor), Gruner, T. (Contributor), Yakshin, A. (Contributor), Rijnders, A. J. H. M. (Contributor), Louis, E. (Contributor) & Bijkerk, F. (Contributor)

  12 Dec 2018

  Activity: Talk or presentation › Oral presentation

• Broadband spectral characterization of EUV light sources with a transmission grating spectrometer

  Bayraktar, M. (Speaker), Liu, F. (Contributor), Bastiaens, H. M. J. (Contributor), Bruineman, C. (Contributor) & Bijkerk, F. (Contributor)

  6 Nov 2017 → 8 Nov 2017

  Activity: Talk or presentation › Invited talk

• Broadband spectroscopy of EUV light sources using a transmission grating spectrometer

  Bayraktar, M. (Speaker), Torretti, F. (Contributor), Schupp, R. (Contributor), Versolato, O. (Contributor), Liu, F. (Contributor), Bruineman, C. (Contributor), Vratzov, B. (Contributor), Bastiaens, H. M. J. (Contributor) & Bijkerk, F. (Contributor)

  6 Nov 2017 → 8 Nov 2017

  Activity: Talk or presentation › Oral presentation

• XUV Spectrometer for broadband spectral measurements

  Bayraktar, M. (Speaker), Bruineman, C. (Speaker), Vratzov, B. (Speaker), Bastiaens, H. M. J. (Speaker) & Bijkerk, F. (Speaker)

  4 May 2016

  Activity: Talk or presentation › Oral presentation

• Collector mirror design to separate the stray 10.6 μm CO2 laser light from the EUV light at the intermediate focus,

  Bayraktar, M. (Speaker), van Goor, F. A. (Speaker), Boller, K. J. (Speaker) & Bijkerk, F. (Speaker)

  6 Oct 2013

  Activity: Talk or presentation › Oral presentation

• IR refocusing: collector mirror design

  Bayraktar, M. (Speaker), van Goor, F. A. (Speaker), Louis, E. (Speaker), Boller, K. J. (Speaker) & Bijkerk, F. (Speaker)

  7 Oct 2013

  Activity: Talk or presentation › Oral presentation

• SMILE - Smart Multilayer Interactive Optics for Lithography at EUV Wavelengths

  Bayraktar, M. (Speaker)

  31 May 2011

  Activity: Talk or presentation › Oral presentation

• SMILE - Smart Multilayer Interactive Optics for Lithography at EUV Wavelengths

  Bayraktar, M. (Speaker)

  4 Apr 2011

  Activity: Talk or presentation › Oral presentation

• Reflectance Tuning at Extreme Ultraviolet Wavelengths with Active Multilayer Mirrors

  Bayraktar, M. (Speaker)

  8 Nov 2011

  Activity: Talk or presentation › Oral presentation

• Reflectance tuning at extreme ultraviolet wavelengths with active multilayer mirrors

  Bayraktar, M. (Speaker), Lee, C. J. (Speaker), van Goor, F. A. (Speaker), Koster, G. (Speaker), Rijnders, A. J. H. M. (Speaker) & Bijkerk, F. (Speaker)

  15 Nov 2011

  Activity: Talk or presentation › Oral presentation

• SMILE: Smart Multilayer Interactive Optics for Lithography at Extreme Ultraviolet Wavelengths

  Bayraktar, M. (Speaker)

  12 Sept 2011

  Activity: Talk or presentation › Oral presentation