Muharrem Bayraktar

Research output

Research output per year 2009 2011 2016 2017 2019 2020 2021 2023

• 38 Poster
• 26 Article
• 9 Conference contribution
• 3 Patent
• 5 More
  • 2 Other contribution
  • 1 Chapter
  • 1 Abstract
  • 1 PhD Thesis - Research UT, graduation UT

Research output per year

Research output per year

Search results

• 2023

  EUV Source Metrology

  Bayraktar, M., Liu, F., Versolato, O. & Bijkerk, F., 22 Sept 2023, Photon Sources for Lithography and Metrology. Bakshi, V. (ed.). p. 509-535

  Research output: Chapter in Book/Report/Conference proceeding › Chapter › Academic › peer-review

  Open Access

  File

  • Metrology 100%
  • Spectrometer 100%
  • Density 100%
  • Spectroscopy 66%
  • Energy 33%
  92 Downloads (Pure)